Cymbal压电换能器的有限元仿真研究
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摘要
应用有限元方法,通过ANSYS仿真分析,研究结构参数对Cymbal压电换能器谐振频率和输出电压的影响规律。研究表明,Cymbal压电换能器的谐振频率随金属帽厚度、压电片厚度和空腔高度的增加而增大,随着压电片直径、空腔顶径和空腔底径增加而减小;输出电压随压电片直径、压电片厚度、空腔顶径和空腔底径的增加而增大,随金属帽厚度增加而减小,随空腔高度增加,输出电压先增大后减小。
The influence of structural parameters on resonant frequency and output voltage of Cymbal piezoelectric transducer is studied by means of ANSYS. It shows that the resonance frequency of Cymbal increases with the increase of the metal cap thickness,piezoelectric thickness and cavity height,and reduces with the increase of piezoelectric diameter,top diameter of the cavity and bottom diameter of the cavity. The output voltage of Cymbal increases with the increase of piezoelectric diameter,piezoelectric thickness,top diameter of the cavity and bottom diameter of the cavity,and reduces with the increase of the metal cap thickness.With the increase of cavity height,output voltage increases first and then.
The influence of structural parameters on resonant frequency and output voltage of Cymbal piezoelectric transducer is studied by means of ANSYS. It shows that the resonance frequency of Cymbal increases with the increase of the metal cap thickness,piezoelectric thickness and cavity height,and reduces with the increase of piezoelectric diameter,top diameter of the cavity and bottom diameter of the cavity. The output voltage of Cymbal increases with the increase of piezoelectric diameter,piezoelectric thickness,top diameter of the cavity and bottom diameter of the cavity,and reduces with the increase of the metal cap thickness.With the increase of cavity height,output voltage increases first and then.
引文
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[8]卢义刚. Cymbal压电发电换能器有限元分析[J].振动与冲击2013,32(6):157-162.
[9]许晓飞,李邓飞. MEMS钹式压电复合换能器的设计与仿真[J].北京机械工业学院学报,2008,23(1):27-30.
[10]祝效华,余志祥. ANSYS高级工程有限元分析—范例精选[M].北京:电子工业出版社,2004:192-200.
[11]王光灿,王丽坤,李光. Cymbal换能器的材料常数与机电性能关系研究[J].电子元件与材料,2004,23(10):33-35.
[12]高全芹. Cymbal型压电换能器电压-位移特性建模与分析[J].传感技术学报,2012,25(4):492-495.
[2]Dogan A.New Piezoelectric Composite Actuator Designs for Displacement Amplification[J]. Ultrasonics,1995,33(4):87-90.
[3]贾美娟,李邓化.新型振动加速度传感器电压灵敏度研究[J].仪器仪表学报,2006,27(6):1605-1607.
[4]林书玉,许龙.一种新型cymbal换能器的研究[J].声学学报,2011,36(1):27-36.
[5]秦宇. ANSYS11.0基础与实例教程[M].北京:化学工业出版社,2009:2-3.
[6]莫喜平. ANSYS软件在模拟分析声学换能器中的应用[J].声学技术,2007,26(6):12-14.
[7]莫喜平,朱厚卿,刘建国. Terfenol-D超磁致伸缩换能器的有限元模拟[J].应用声学,2000,19(4):5-8.
[8]卢义刚. Cymbal压电发电换能器有限元分析[J].振动与冲击2013,32(6):157-162.
[9]许晓飞,李邓飞. MEMS钹式压电复合换能器的设计与仿真[J].北京机械工业学院学报,2008,23(1):27-30.
[10]祝效华,余志祥. ANSYS高级工程有限元分析—范例精选[M].北京:电子工业出版社,2004:192-200.
[11]王光灿,王丽坤,李光. Cymbal换能器的材料常数与机电性能关系研究[J].电子元件与材料,2004,23(10):33-35.
[12]高全芹. Cymbal型压电换能器电压-位移特性建模与分析[J].传感技术学报,2012,25(4):492-495.