摘要
为克服检测大量程直线光栅尺的困难,介绍一种大行程直线光栅尺自动检测系统。该系统利用12m滚珠丝杠副提供位移驱动,利用三轴激光干涉仪作精密位置测量,利用PMAC卡作交流电机的闭环控制,实现了对10m长度的直线光栅尺进行自动检测的功能。在滚珠丝杠中间增加4个辅助支撑,介绍支撑结构,解决其过长而带来的塔腰问题。
In order to overcome the difficulty of detecting large range linear grating, a kind of automatic detection system of large stroke linear scale is introduced. The system uses 12 m ball screw to provide displacement drive, the use of three-axis laser interferometer for precision position measurement, the use of PMAC card for AC motor closed-loop control, to achieve the 10 m length of the linear scale for automatic detection function. In the middle of the ball screw to increase the four auxiliary support, introduced support structure, to solve its bending problem.
引文
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