基于CuO/CNT气敏膜的无线丙酮气体传感器
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摘要
将碳纳米管(CNT)粉末以及氧化铜(CuO)粉末掺杂作为传感器的气敏材料,并通过旋涂的方式涂覆于敏感线圈。设计并简化了传感器的结构,通过丝网印刷工艺在基底上制备线圈。利用线圈的寄生电容与线圈电感形成LCR回路,分析了传感器LC无线耦合的原理以及混合气敏膜吸附丙酮气体的原理,将性质稳定的Al2O3陶瓷作为传感器的基底。在常温下对丙酮气体的体积分数进行检测,谐振频率的改变反映丙酮气体体积分数的变化。结果表明,所制得的传感器具有良好的响应和线性度及优良的稳定性,传感器的最低检测极限为5×10-5。
Carbon nanotubes(CNTs)and copper oxide(CuO)powders were doped as gas sensing materials for sensors and coated on the sensitive coils by the spin coating method.The structure of the sensor was designed and simplified,and the coil was prepared on the substrate by the screen printing process.The parasitic capacitance of the coil and the coil inductance were used to form the LCR circuit,the principle of LC wireless coupling of the sensor and the principle of adsorbing the acetone gas by the mixed gas sensitive film were analyzed.Al2 O3 ceramics with stable properties were used as the substrate of the sensor.The volume fraction of the acetone gas was measured at room temperature.And the change of the resonance frequency indicates the variation of the volume fraction of the acetone gas.The results show that the prepared sensor has good response and linearity and excellent stability.The minimum detection limit of the sensor is 5×10-5.
Carbon nanotubes(CNTs)and copper oxide(CuO)powders were doped as gas sensing materials for sensors and coated on the sensitive coils by the spin coating method.The structure of the sensor was designed and simplified,and the coil was prepared on the substrate by the screen printing process.The parasitic capacitance of the coil and the coil inductance were used to form the LCR circuit,the principle of LC wireless coupling of the sensor and the principle of adsorbing the acetone gas by the mixed gas sensitive film were analyzed.Al2 O3 ceramics with stable properties were used as the substrate of the sensor.The volume fraction of the acetone gas was measured at room temperature.And the change of the resonance frequency indicates the variation of the volume fraction of the acetone gas.The results show that the prepared sensor has good response and linearity and excellent stability.The minimum detection limit of the sensor is 5×10-5.
引文
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[4]CHIU S W,STURM D R,MOSER J D,et al.Application of finite inverse gas chromatography in hypromellose acetate succinate-water-acetone systems[J].Journal of Chromatography:A,2016,1466:166-172.
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[6]JR L J,BLOOM W L.The use of furfural for the determination of acetone bodies in biological fluids[J].Canadian Journal of Biochemistry&Physiology,1958,36(10):1047-1056.
[7]RYDOSZ A,MACIAK E,WINCZA K,et al.Microwavebased sensors with phthalocyanine films for acetone,ethanol and methanol detection[J].Sensors and Actuators:B,2016,237:876-886.
[8]TOMER V K,SINGH K,KAUR H,et al.Rapid acetone detection using indium loaded WO3/SnO2 nanohybrid sensor[J].Sensors and Actuators:B,2017,253:703-713.
[9]CHEN J,PAN X,BOUSSAID F,et al.A hierarchical ZnO nanostructure gas sensor for human breath-level acetone detection[C]//Proceedings of the IEEE International Symposium on Circuits&Systems.Montreal,Canada,2016:1866-1869.
[10]MIRZAEI A,PARK S,SUN G J,et al.CO gas sensing properties of In4Sn3O12and TeO2composite nanoparticle sensors[J].Journal of Hazardous Materials,2016,305:130-138.
[11]郭晓威,谭秋林,郭彦杰,等.LC无源无线气体传感器的制备及对NH3气敏特性的研究[J].传感技术学报,2017,30(11):1643-1646.
[12]郭晓威,周天浩,谭秋林,等.无线无源气体传感器的制备和测试[J].微纳电子技术,2018,55(3):189-193.
[13]SHENDAG S S,PATIL V L,VANALAKAR S A,et al.Sensitive and selective NO2gas sensor based on WO3nanoplates[J].Sensors and Actuators:B,2017,240:426-433.
[14]ENGLISH J M,ALLEN M G.Wireless micromachined ceramic pressure sensors[C]//Proceedings of the 12th IEEEInternational Conference on Micro Electro Mechanical Systems.Orlando,USA,1999:511-516.
[15]BARSAN N,WEIMAR U.Conduction model of metal oxide gas sensors[J].Journal of Electroceramics,2001,7(3):143-167.
[16]LIN Y,BAGGETT D W,KIM J W,et al.Instantaneous formation of metal and metal oxide nanoparticles on carbon nanotubes and graphene via solvent-free microwave heating[J].ACSApplied Materials&Interfaces,2011,3(5):1652-1664.
[17]KONG J,FRANKLIN N R,ZHOU C,et al.Nanotube molecular wires as chemical sensors[J].Science,2000,287(5453):622-625.
[18]COLLINS P G.Extreme oxygen sensitivity of electronic properties of carbon nanotubes[J].Science,2000,287(5459):1801-1804.