1064 nm MOPA激光器非晶硅薄膜太阳能电池清边工艺研究

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英文篇名：Edge Cleaning Processing of a-Si∶H Thin Film Solar Cell with 1 064 nm MOPA Laser 作者：李勇 ; 秦应雄 英文作者：Li Yong;Qin Yingxiong;Wuhan Vocational College of Software and Engineering;National Engineering Research Center for Laser Processing, Huazhong University of Science and Technology; 关键词：非晶硅薄膜太阳能电池 ; 激光清边 ; 工艺参数 英文关键词：a-Si∶H thin film solar cell;;laser edge cleaning;;processing parameters 中文刊名：YYJG 英文刊名：Applied Laser 机构：武汉软件工程职业学院;华中科技大学激光加工国家工程研究中心; 出版日期：2019-04-15 出版单位：应用激光 年：2019 期：v.39 语种：中文; 页：YYJG201902015 页数：4 CN：02 ISSN：31-1375/T 分类号：89-92

摘要

利用1 064 nm MOPA光纤激光器对非晶硅薄膜太阳能电池制备工序中的激光清边工序进行了实验研究,探讨了激光器脉冲宽度、填充线间距、扫描速度等工艺参数对加工效果的影响。在脉冲宽度100 ns,重复频率80 kHz,填充线间距35μm,输出功率比100%,扫描速度3 500 mm/s,光斑交叠比w_x=0.83,w_y=0.88的参数下,获得了清边区表面理想,电阻值>1 000 MΩ的良好清边效果。
        The laser edge cleaning process in the preparation process of a-Si∶H thin film solar cell was experimentally studied by using a 1 064 nm MOPA fiber laser. The effects of process parameters such as laser pulse width, filling line spacing, scanning speed and others on the processing results were discussed. Under the parameters of pulse width 100 ns, repetition frequency 80 kHz, filling line spacing 35 μm, output power ratio 100%, scanning speed 3 500 mm/s, spot overlap ratio w_x=0.83, w_y=0.88, a good edge cleaning effect was obtained on the surface of the clear-edged area with a resistance >1 000 MΩ.

引文

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