基于双相延迟模型的飞秒激光烧蚀金属模型
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摘要
为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.
Femtosecond laser ablation possesses a variety of applications due to its better control, high power density,smaller heat-affected zone, minimal collateral material damage, lower ablation thresholds, and excellent mechanical properties. The non-Fourier effect in heat conduction becomes significant when the heating time becomes extremely small. In order to analyze the femtosecond laser ablation process, a hyperbolic heat conduction model is established based on the dual-phase-lag model. Taken into account in the model are the effect of heat source, laser heating of the target, the evaporation and phase explosion of the target material, the formation and expansion of the plasma plume, and interaction of the plasma plume with the incoming laser.Temperature-dependent optical and thermophysical properties are also considered in the model due to the fact that the properties of the target will change over a wide range in the femtosecond laser ablation process. The effects of the plasma shielding, the ratio of the two delay times, and laser fluence are discussed and the effectiveness of the model is verified by comparing the simulation results with the experimental results. The results show that the plasma shielding has a great influence on the femtosecond laser ablation process, especially when the laser fluence is high. The ratio between the two delay times(the ratio B) has a great influence on the temperature characteristic and ablation characteristic in the femtosecond laser ablation process. The augment of the ratio B will increase the degree of thermal diffusion, which will lower down the surface temperature and accelerate the ablation rate after the ablation has begun. The ablation mechanism of femtosecond laser ablation is dominated by phase explosion. The heat affected zone of femtosecond laser ablation is small, and the heat affected zone is less affected by laser fluence. The comparison between the simulation results and the experimental results in the literature shows that the model based on the dual-phase-lag model can effectively simulate the femtosecond laser ablation process.
Femtosecond laser ablation possesses a variety of applications due to its better control, high power density,smaller heat-affected zone, minimal collateral material damage, lower ablation thresholds, and excellent mechanical properties. The non-Fourier effect in heat conduction becomes significant when the heating time becomes extremely small. In order to analyze the femtosecond laser ablation process, a hyperbolic heat conduction model is established based on the dual-phase-lag model. Taken into account in the model are the effect of heat source, laser heating of the target, the evaporation and phase explosion of the target material, the formation and expansion of the plasma plume, and interaction of the plasma plume with the incoming laser.Temperature-dependent optical and thermophysical properties are also considered in the model due to the fact that the properties of the target will change over a wide range in the femtosecond laser ablation process. The effects of the plasma shielding, the ratio of the two delay times, and laser fluence are discussed and the effectiveness of the model is verified by comparing the simulation results with the experimental results. The results show that the plasma shielding has a great influence on the femtosecond laser ablation process, especially when the laser fluence is high. The ratio between the two delay times(the ratio B) has a great influence on the temperature characteristic and ablation characteristic in the femtosecond laser ablation process. The augment of the ratio B will increase the degree of thermal diffusion, which will lower down the surface temperature and accelerate the ablation rate after the ablation has begun. The ablation mechanism of femtosecond laser ablation is dominated by phase explosion. The heat affected zone of femtosecond laser ablation is small, and the heat affected zone is less affected by laser fluence. The comparison between the simulation results and the experimental results in the literature shows that the model based on the dual-phase-lag model can effectively simulate the femtosecond laser ablation process.
引文
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[21]Wang W T,Zhang N,Wang M W,He Y H,Yang J J,Zhu XN 2013 Acta Phys.Sin.62 210601(in Chinese)[王文亭,张楠,王明伟,何远航,杨建军,朱晓农2013物理学报62 210601]
[22]Wu B,Shin Y C 2007 Appl.Surf.Sci.253 4079
[23]Wu B,Shin Y C 2009 Appl.Surf.Sci.255 4996
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[25]Tzou D Y,Chen J K,Beraun J E 2005 J.Therm.Stress.28563
[26]Singh N 2010 Int.J.Mod.Phys.B 24 1141
[27]Qiu T Q,Tien C L 1993 J.Heat Tranf.115 835
[28]Chen J K,Beraun J E 2001 Numer.Heat Transf.Part A:Appl.40 1
[29]Jiang L,Tsai H L 2005 J.Heat Transf.127 1167
[30]Chen J K,Tzou D Y,Beraun J E 2006 Int.J.Heat Mass Transf.49 307
[31]Carpene E 2006 Phys.Rev.B 74 024301
[32]Fang R,Wei H,Li Z,Zhang D 2012 Solid State Commun.152108
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[38]Zhao X,Shin Y C 2012 J.Phys.D:Appl.Phys.45 105201
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[44]Christensen B H,Vestentoft K,Balling P 2007 Appl.Surf.Sci.253 6347
[45]Abdelmalek A,Bedrane Z,Amara E 2018 J.Phys.Conf.Ser.987 012012
[46]Qi H T,Xu H Y,Guo X W 2013 Comput.Math.Appl.66 824
[47]Rahideh H,Malekzadeh P,Haghighi M R G 2011 ISRNMech.Eng.321605
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[49]Vernotte P 1958 Compte Rendus 246 3154
[50]Vick B,Ozisik M N 1983 J.Heat Transf.105 902
[51]Jiang F,Liu D,Zhou J 2002 Microsc.Thermophys.Eng.6331
[52]Bag S,Sahu P K 2013 Proceeding of the 22th National and11th International ISHMT-ASME Heat and Mass Transfer Conference IIT Kharagpur,India,December 28-31,2013
[53]Zhang L,Shang X 2015 Int.J.Heat Mass Transf.85 772
[54]Singh S,Kumar S 2014 Int.J.Therm.Sci.86 12
[55]Li J,Wang B 2018 Mech.Adv.Mat.Struct.(online)
[56]Tzou D Y 1995 J.Heat Transf.117 8
[57]Zhou F,Li S 2006 J.Lanzhou Univ.42 55(in Chinese)[周凤玺,李世荣2006兰州大学学报42 55]
[58]Tzou D Y 1995 J.Thermophys.Heat Transf.9 686
[59]Ho J R,Kuo C P,Jiaung W S 2003 Int.J.Heat Mass Transf.46 55
[60]Ghazanfarian J,Abbassi A 2009 Int.J.Heat Mass Transf.523706
[61]Ghazanfarian J,Shomali Z 2012 Int.J.Heat Mass Transf.556231
[62]Askarizadeh H,Ahmadikia H 2014 Heat Mass Transf.501673
[63]Liu K C,Chen Y S 2016 Int.J.Therm.Sci.103 1
[64]Zhang Y,Chen B,Li D 2017 Int.J.Heat Mass Transf.1081428
[65]Vadasz P 2005 Int.J.Heat Mass Transf.48 2822
[66]Tzou D Y 2015 Macro-to Microscale Heat Transfer:the Lagging Behavior(2nd Ed.)(West Sussex:Wiley)pp201-592
[67]Tzou D Y,Chiu K S 2001 Int.J.Heat Mass Transf.44 1725
[68]Lee Y M,Tsai T W 2007 Int.Commun.Heat Mass Transf.34 45
[69]Ramadan K,Tyfour W R,Al-Nimr M A 2009 J.Heat Transf.131 111301
[70]Kumar S,Bag S,Baruah M 2016 J.Laser Appl.28 032008
[71]Kumar D,Rai K N 2017 J.Therm.Biol.67 49
[72]Ji C,Dai W,Sun Z 2018 J.Sci.Comput.75 1307
[73]Marla D,Bhandarkar U V,Joshi S S 2011 J.Appl.Phys.109021101
[74]Tan X Y,Zhang D M,Li Z H,Guan L,Li L 2005 Acta Phys.Sin.54 3915(in Chinese)[谭新玉,张端明,李智华,关丽,李莉2005物理学报54 3915]
[75]Peterlongo A,Miotello A,Kelly R 1994 Phys.Rev.E 50 4716
[76]Gragossian A,Tavassoli S H,Shokri B 2009 J.Appl.Phys.105 103304
[77]Marla D,Bhandarkar U V,Joshi S S 2014 Appl.Phys.A 116273
[78]Singh R K,Narayan J 1990 Phys.Rev.B 41 8843
[79]Chen F F 1985 Introduction to Plasma Physics and Controlled Fusion(Volume 1:Plasma Physics)(2nd Ed.)(New York:Plenum Press)p1
[80]Garrelie F,Aubreton J,Catherinot A 1998 J.Appl.Phys.835075
[81]Ho C Y,Powell R W,Liley P E 1972 J.Phys.Chem.Ref.Data 1 279
[82]Brandt R,Neuer G 2007 Int.J.Thermophys.28 1429
[83]Lide D R,Haynes W M 2010 CRC Handbook of Chemistry and Physics(90th Ed.)(Florida:CRC Press)pp764-2169
[84]Clair G,L’Hermite D 2011 J.Appl.Phys.110 083307
[85]Singh K S,Sharma A K 2016 J.Appl.Phys.119 183301
[86]Tao W Q 2001 Numerical Heat Transfer(2st Ed.)(Xi’an:Xi’an Jiaotong University Press)p63(in Chinese)[陶文铨2001数值传热学(第二版)(西安:西安交通大学出版社)第63页]
[87]Zhang D X 2014 Ph.D.Dissertation(Changsha:National University of Defense Technology)(in Chinese)[张代贤2014博士学位论文(长沙:国防科技大学)]
[88]Jiang F M,Liu D Y 2001 J.Univ.Shanghai Sci.Tech.23 197(in Chinese)[蒋方明,刘登瀛2001上海理工大学学报23 197]
[89]Valette S,Harzic R Le,Huot N,Audouard E,Fortunier R2005 Appl.Surf.Sci.247 238
[90]Davydov R V,Antonov V I 2016 J.Phys.Conf.Ser.769012060
[91]Hashida M,Semerok A,Gobert O,Petite G,Wagner J F2001 Proceedings of SPIE St.Petersburg,Russian Federation,June 26,2001 p178
[2]Mao Y D,Xu M T 2015 Sci.China:Technol.Sci.58 638
[3]Amoruso S,Ausanio G,Bruzzese R,Vitiello M,Wang X 2005Phys.Rev.B 71 033406
[4]Tsakiris N,Anoop K K,Ausanio G,Gill-Comeau M,Bruzzese R,Amoruso S,Lewis L J 2014 J.Appl.Phys.115 243301
[5]Wang W T,Hu B,Wang M W 2013 Acta Phys.Sin.62060601(in Chinese)[王文亭,胡冰,王明伟2013物理学报62060601]
[6]Liebig C M,Srisungsitthisunti P,Weiner A M,Xu X 2010Appl.Phys.A 101 487
[7]Herman P R,Oettl A,Chen K P,Marjoribanks R S 1999Proceedings of SPIE-The International Society for Optical Engineering California,USA,January 4,1999 p148
[8]Derrien T J,Krüger J,Itina T E,H?hm S,Rosenfeld A,Bonse J 2014 Opt.Express 117 77
[9]Tan S,Wu J J,Zhang Y,Cheng Y Q,Li J,Ou Y 2018 J.Propuls.Technol.39 2415(in Chinese)[谭胜,吴建军,张宇,程玉强,李健,欧阳2018推进技术39 2415]
[10]Pi?on V,Fotakis C,Nicolas G,Anglos D 2008 Spectrochim.Acta Part B 63 1006
[11]Miyamoto I,Horn A,Gottmann J,Wortmann D,Yoshino F2007 J.Laser Micro/Nanoeng.2 57
[12]Zhang Y,Tzou D Y,Chen J K 2009 High-Power and Femtosecond Lasers:Properties,Materials and Applications(1st Ed.)(New York:Nova Science Publisher)pp1-11
[13]Eidmann K,Meyer-ter-Vehn J,Schlegel T,Hüller S 2000Phys.Rev.E 62 1202
[14]Vidal F,Johnstion T W,Laville S,Barthélemy,Chaker M,Drogoff B L,Margot J,Sabsabi M 2001 Phys.Rev.Lett.862573
[15]Ding P J,Hu B T,Li Y H 2011 NDT E Int.29 53
[16]Perez D,Lewis L J 2003 Phys.Rev.B 67 184102
[17]Nedialkov N N,Imamova S E,Atanasov P A,Berger P,Dausinger F 2005 Appl.Surf.Sci.247 243
[18]Liu X,Zhou W,Chen C,Zhao L,Zhang Y 2008 J.Mat.Proc.Technol.203 202
[19]Chichkov B N,Momma C,Nolte S,von Alvensleben F,Tünnermann A 1996 Appl.Phys.A 63 109
[20]Hu W,Shin Y C,King G 2010 Appl.Phys.A 98 407
[21]Wang W T,Zhang N,Wang M W,He Y H,Yang J J,Zhu XN 2013 Acta Phys.Sin.62 210601(in Chinese)[王文亭,张楠,王明伟,何远航,杨建军,朱晓农2013物理学报62 210601]
[22]Wu B,Shin Y C 2007 Appl.Surf.Sci.253 4079
[23]Wu B,Shin Y C 2009 Appl.Surf.Sci.255 4996
[24]Qiu T Q,Tien C L 1994 Int.J.Heat Mass Transf.37 2789
[25]Tzou D Y,Chen J K,Beraun J E 2005 J.Therm.Stress.28563
[26]Singh N 2010 Int.J.Mod.Phys.B 24 1141
[27]Qiu T Q,Tien C L 1993 J.Heat Tranf.115 835
[28]Chen J K,Beraun J E 2001 Numer.Heat Transf.Part A:Appl.40 1
[29]Jiang L,Tsai H L 2005 J.Heat Transf.127 1167
[30]Chen J K,Tzou D Y,Beraun J E 2006 Int.J.Heat Mass Transf.49 307
[31]Carpene E 2006 Phys.Rev.B 74 024301
[32]Fang R,Wei H,Li Z,Zhang D 2012 Solid State Commun.152108
[33]Zhang J,Chen Y,Hu M,Chen X 2015 J.Appl.Phys.117063104
[34]Shin T,Teitelbaum S W,Wolfson J,Kandyla M,Nelson K A2015 J.Chem.Phys.143 194705
[35]Sonntag S,Roth J,Gaehler F,Trebin H R 2009 Appl.Surf.Sci.255 9742
[36]Ji P,Zhang Y 2017 Appl.Phys.A 123 671
[37]Colombier J P,Combis P,Bonneau F,Le Harzic R,Audouard E 2005 Phys.Rev.B 71 165406
[38]Zhao X,Shin Y C 2012 J.Phys.D:Appl.Phys.45 105201
[39]Taylor L L,Scott R E,Qiao J 2018 Opt.Mater.Express 8648
[40]Fann W S,Storz R,Tom H W K,Bokor J 1992 Phys.Rev.Lett.68 2834
[41]Groeneveld R H M,Sprik R,Lagendijk A 1995 Phys.Rev.B51 11433
[42]Schmidt V,Husinsky W,Betz G 2002 Appl.Surf.Sci.197145
[43]Byskov-Nielsen J,Savolainen J M,Christensen M S,Balling P 2011 Appl.Phys.A 103 447
[44]Christensen B H,Vestentoft K,Balling P 2007 Appl.Surf.Sci.253 6347
[45]Abdelmalek A,Bedrane Z,Amara E 2018 J.Phys.Conf.Ser.987 012012
[46]Qi H T,Xu H Y,Guo X W 2013 Comput.Math.Appl.66 824
[47]Rahideh H,Malekzadeh P,Haghighi M R G 2011 ISRNMech.Eng.321605
[48]Catteneo C 1958 Compte Rendus 247 431
[49]Vernotte P 1958 Compte Rendus 246 3154
[50]Vick B,Ozisik M N 1983 J.Heat Transf.105 902
[51]Jiang F,Liu D,Zhou J 2002 Microsc.Thermophys.Eng.6331
[52]Bag S,Sahu P K 2013 Proceeding of the 22th National and11th International ISHMT-ASME Heat and Mass Transfer Conference IIT Kharagpur,India,December 28-31,2013
[53]Zhang L,Shang X 2015 Int.J.Heat Mass Transf.85 772
[54]Singh S,Kumar S 2014 Int.J.Therm.Sci.86 12
[55]Li J,Wang B 2018 Mech.Adv.Mat.Struct.(online)
[56]Tzou D Y 1995 J.Heat Transf.117 8
[57]Zhou F,Li S 2006 J.Lanzhou Univ.42 55(in Chinese)[周凤玺,李世荣2006兰州大学学报42 55]
[58]Tzou D Y 1995 J.Thermophys.Heat Transf.9 686
[59]Ho J R,Kuo C P,Jiaung W S 2003 Int.J.Heat Mass Transf.46 55
[60]Ghazanfarian J,Abbassi A 2009 Int.J.Heat Mass Transf.523706
[61]Ghazanfarian J,Shomali Z 2012 Int.J.Heat Mass Transf.556231
[62]Askarizadeh H,Ahmadikia H 2014 Heat Mass Transf.501673
[63]Liu K C,Chen Y S 2016 Int.J.Therm.Sci.103 1
[64]Zhang Y,Chen B,Li D 2017 Int.J.Heat Mass Transf.1081428
[65]Vadasz P 2005 Int.J.Heat Mass Transf.48 2822
[66]Tzou D Y 2015 Macro-to Microscale Heat Transfer:the Lagging Behavior(2nd Ed.)(West Sussex:Wiley)pp201-592
[67]Tzou D Y,Chiu K S 2001 Int.J.Heat Mass Transf.44 1725
[68]Lee Y M,Tsai T W 2007 Int.Commun.Heat Mass Transf.34 45
[69]Ramadan K,Tyfour W R,Al-Nimr M A 2009 J.Heat Transf.131 111301
[70]Kumar S,Bag S,Baruah M 2016 J.Laser Appl.28 032008
[71]Kumar D,Rai K N 2017 J.Therm.Biol.67 49
[72]Ji C,Dai W,Sun Z 2018 J.Sci.Comput.75 1307
[73]Marla D,Bhandarkar U V,Joshi S S 2011 J.Appl.Phys.109021101
[74]Tan X Y,Zhang D M,Li Z H,Guan L,Li L 2005 Acta Phys.Sin.54 3915(in Chinese)[谭新玉,张端明,李智华,关丽,李莉2005物理学报54 3915]
[75]Peterlongo A,Miotello A,Kelly R 1994 Phys.Rev.E 50 4716
[76]Gragossian A,Tavassoli S H,Shokri B 2009 J.Appl.Phys.105 103304
[77]Marla D,Bhandarkar U V,Joshi S S 2014 Appl.Phys.A 116273
[78]Singh R K,Narayan J 1990 Phys.Rev.B 41 8843
[79]Chen F F 1985 Introduction to Plasma Physics and Controlled Fusion(Volume 1:Plasma Physics)(2nd Ed.)(New York:Plenum Press)p1
[80]Garrelie F,Aubreton J,Catherinot A 1998 J.Appl.Phys.835075
[81]Ho C Y,Powell R W,Liley P E 1972 J.Phys.Chem.Ref.Data 1 279
[82]Brandt R,Neuer G 2007 Int.J.Thermophys.28 1429
[83]Lide D R,Haynes W M 2010 CRC Handbook of Chemistry and Physics(90th Ed.)(Florida:CRC Press)pp764-2169
[84]Clair G,L’Hermite D 2011 J.Appl.Phys.110 083307
[85]Singh K S,Sharma A K 2016 J.Appl.Phys.119 183301
[86]Tao W Q 2001 Numerical Heat Transfer(2st Ed.)(Xi’an:Xi’an Jiaotong University Press)p63(in Chinese)[陶文铨2001数值传热学(第二版)(西安:西安交通大学出版社)第63页]
[87]Zhang D X 2014 Ph.D.Dissertation(Changsha:National University of Defense Technology)(in Chinese)[张代贤2014博士学位论文(长沙:国防科技大学)]
[88]Jiang F M,Liu D Y 2001 J.Univ.Shanghai Sci.Tech.23 197(in Chinese)[蒋方明,刘登瀛2001上海理工大学学报23 197]
[89]Valette S,Harzic R Le,Huot N,Audouard E,Fortunier R2005 Appl.Surf.Sci.247 238
[90]Davydov R V,Antonov V I 2016 J.Phys.Conf.Ser.769012060
[91]Hashida M,Semerok A,Gobert O,Petite G,Wagner J F2001 Proceedings of SPIE St.Petersburg,Russian Federation,June 26,2001 p178