等腰梯形压电黏滑直线驱动器设计与试验研究
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摘要
提出了一种等腰梯形压电黏滑直线驱动器,通过粘贴在等腰梯形柔性机构柔性斜梁两侧的4片矩形压电陶瓷片使驱动足驱动滑块,以达到基于黏滑运动的高分辨率和大行程线性运动。调整等腰梯形柔顺机构斜梁的角度,可使驱动足产生横向运动,基于有限元方法,获得了柔性梁的适当角度。通过等腰梯形柔性铰链驱动足的横向运动,可增加使滑块前进的静摩擦力,减少回退动摩擦力。搭建了试验测试系统并进行了一系列试验,结果表明,该样机在4 N锁定力下最大输出速度为601.803μm/s,最大输出力为2.8 N,最小步进距离为0.026μm。采用压电陶瓷片作驱动源,易于小型化,拓宽了压电陶瓷片的应用领域。
An isosceles trapezoid-type stick-slip piezoelectric linear actuator is proposed. Four rectangular piezoelectric ceramic plates bonded on both sides of the flexible skew beam of the isosceles trapezoid flexible mechanism are utilized to generate a bending mode and make the driving foot drive slide to achieve high-resolution and large-stroke linear motion. With finite element method, the angle adjustment of the flexible beam is determined for producing lateral motion of the driving foot of the isosceles trapezoid flexible mechanism. According to the finite element analysis, the isosceles trapezoid flexible mechanism can increase static friction force in slider forward movement stage and reduce kinetic friction force in backward movement stage by lateral motion of the driving foot. An experimental system is constructed, on which a series of experiments are carried out. The results indicate that the maximum output velocity is 601.803 μm/s, the maximum output force is 2.8 N, and the minimum stepping displacement is 0.026 μm for locking force of 4 N. The stick-slip actuator driven by the piezoelectric ceramic plates is easy to miniaturize to widen its application ranges.
An isosceles trapezoid-type stick-slip piezoelectric linear actuator is proposed. Four rectangular piezoelectric ceramic plates bonded on both sides of the flexible skew beam of the isosceles trapezoid flexible mechanism are utilized to generate a bending mode and make the driving foot drive slide to achieve high-resolution and large-stroke linear motion. With finite element method, the angle adjustment of the flexible beam is determined for producing lateral motion of the driving foot of the isosceles trapezoid flexible mechanism. According to the finite element analysis, the isosceles trapezoid flexible mechanism can increase static friction force in slider forward movement stage and reduce kinetic friction force in backward movement stage by lateral motion of the driving foot. An experimental system is constructed, on which a series of experiments are carried out. The results indicate that the maximum output velocity is 601.803 μm/s, the maximum output force is 2.8 N, and the minimum stepping displacement is 0.026 μm for locking force of 4 N. The stick-slip actuator driven by the piezoelectric ceramic plates is easy to miniaturize to widen its application ranges.
引文
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[2]董景石,程光明,沈传亮,等.压电驱动型胰岛素泵的研究[J].西安交通大学学报,2007,41(5):602-605.DONG Jingshi,CHENG Guangming,SHEN Chuanliang,et al.Piezoelectric insulin pump[J].Journal of Xi’an Jiaotong University,2007,41(5):602-605.
[3]UCHINO K.Piezoelectric actuator renaissance[J].Energy Harvesting&Systems,2015,88(3):342-355.
[4]GUO J,CHEE S K,YANO T,et al.Micro-vibration stage using piezo actuators[J].Sensors&Actuators:A Physical,2013,194(5):119-127.
[5]ZHANG Y,TAN K K,HUANG S.Vision-servo system for automated cell injection[J].IEEE Transactions on Industrial Electronics,2009,56(1):231-238.
[6]YONG Y K,MOHEIMANI S O,KENTON B J,et al.High-speed flexure-guided nanopositioning:mechanical design and control issues[J].Review of Scientific Instruments,2012,83(12):802-843.
[7]POLIT S,DONG Jingyan.Development of a highbandwidth XY nanopositioning stage for high-rate micro-nanomanufacturing[J].IEEE/ASME Transactions on Mechatronics,2011,16(4):724-733.
[8]YONG Y K,MOHEIMANI S O R.Design of an inertially counterbalanced Z-nanopositioner for high-speed atomic force microscopy[J].IEEE Transactions on Nanotechnology,2013,12(2):137-145.
[9]LIU Y,YANG X,CHEN W,et al.A bonded-type piezoelectric actuator using the first and second bending vibration modes[J].IEEE Transactions on Industrial Electronics,2016,63(3):1676-1683.
[10]LIU Y,CHEN W,YANG X,et al.A rotary piezoelectric actuator using the third and fourth bending vibration modes[J].IEEE Transactions on Industrial E-lectronics,2014,61(8):4366-4373.
[11]赵宏伟,吴博达,杨志刚,等.尺蠖型压电旋转驱动器钳位特性分析[J].西安交通大学学报,2007,41(9):1022-1025.ZHAO Hongwei,WU Boda,YANG Zhigang,et al.Clamping performance for inchworm-type piezoelectric rotary actuator[J].Journal of Xi’an Jiaotong University,2007,41(9):1022-1025.
[12]SHAO S,SONG S,CHEN N,et al.Structure and control strategy for a piezoelectric inchworm actuator equipped with MEMS ridges[J].Sensors&Actuators:A Physical,2017,264:40-50.
[13]SALISBURY S P,WAECHTER D F.Design considerations for complementary inchworm actuators[J].IEEE/ASME Transactions on Mechatronics,2006,11(3):265-272.
[14]TORII A,ITATSU Y.An inchworm using levitation caused by vertical vibration[J].IEEJ Transactions on Electronics Information&Systems,2015,190(4):19-25.
[15]PARK M H,CHONG H H,LEE B H,et al.Study on the new type of piezoelectric actuator utilizing smooth impact drive mechanism[J].Ferroelectrics,2016,500(1):218-228.
[16]曾平,孙淑杰,李立安,等.双向旋转非对称惯性压电驱动器理论与试验研究[J].西安交通大学学报,2013,47(12):90-94.ZENG Ping,SUN Shujie,LI Li’an,et al.Theoretical and experimental analysis on bidirectional rotary asymmetric piezoelectric actuator[J].Journal of Xi’an Jiaotong University,2013,47(12):90-94.
[17]EDELER C.Measurements and potential applications of force-control method for stick-slip-driven nanohandling robots[J].Key Engineering Materials,2011,467/468/469:1556-1561.
[18]CHENG T,HE M,LI H,et al.A novel trapezoidtype stick-slip piezoelectric linear actuator using right circular flexure hinge mechanism[J].IEEE Transactions on Industrial Electronics,2017,PP(99):1.
[19]CHU C L,FAN S H.A novel long-travel piezoelectric-driven linear nanopositioning stage[J].Precision Engineering,2006,30(1):85-95.
[20]HOLUB O,SPILLER M,HURAK Z.Stick-slip based micropositioning STage for transmission electron microscope[C]∥IEEE International Workshop on Advanced Motion Control.Piscataway,NJ,USA:IEEE,2006:484-487.
[21]LI J,ZHOU X,ZHAO H,et al.Design and experimental performances of a piezoelectric linear actuator by means of lateral motion[J].Smart Materials and Structures,2015,24(6):065007.
[22]LI J,ZHOU X,ZHAO H,et al.Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion[J].Review of Scientific Instruments,2015,86(4):045002.
[23]WANG S,RONG W,WANG L,et al.Design,analysis and experimental performance of a novel stick-slip type piezoelectric rotary actuator based on variable force couple driving[J].Smart Material and Structures,2017,26(5):055005.