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化学气相沉积制备Co-Re合金涂层的热力学分析
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  • 英文篇名:Thermodynamic analysis of chemical vapor deposition process for Co-Re alloy coating
  • 作者:敬瑀 ; 龚伟 ; 王恩泽
  • 英文作者:JING Yu;GONG Wei;WANG Enze;Shool of Materials Science and Engineering, Southwest University of Science and Technology;Shool of Manufacturing Science and Engineering, Southwest University of Science and Technology;
  • 关键词:Co-Re合金涂层 ; 化学气相沉积 ; 热力学 ; 模拟计算
  • 英文关键词:Co-Re alloy coating;;chemical vapor deposition;;thermodynamic;;simulate computation
  • 中文刊名:GNCL
  • 英文刊名:Journal of Functional Materials
  • 机构:西南科技大学材料科学与工程学院;西南科技大学制造科学与工程学院;
  • 出版日期:2019-03-31
  • 出版单位:功能材料
  • 年:2019
  • 期:v.50;No.426
  • 基金:四川省应用基础重点资助项目(2017JY0084);; 四川省教育厅科研创新团队资助项目(7TD0042)
  • 语种:中文;
  • 页:GNCL201903029
  • 页数:5
  • CN:03
  • ISSN:50-1099/TH
  • 分类号:176-179+184
摘要
Co-Re合金涂层是一极具潜力的抗高温烧蚀材料。利用HSC Chemistry 6.0软件对化学气相沉积Co-Re合金涂层进行模拟计算。分析结果表明,选择H_2-Re_2(CO)_(10)和H_2-Co(acac)_2为反应体系,在0~1 000℃的温度范围内ΔG均小于零;反应产物Re和Co含量随沉积温度的升高而增加,但沉积过程中会有C单质产生;制备Co-Re合金涂层的最佳反应温度区间为400~600℃。
        Co-Re alloy coating is a potential high temperature ablative material. In this paper, HSC Chemistry 6.0 software was used to simulate the chemical vapor deposition of Co-Re alloy coating. The results show that within the temperature range of 0-1 000 ℃, the ΔG was less than zero when selected H_2-Re_2(CO)_(10) and H_2-Co(acac)_2 as reaction system. And, the content of Re and Co increased with the increase of deposition temperature. However, during the deposition process, C simple would produce. The optimum reaction temperature range for the preparation of Co-Re alloy coatings was 400-600 ℃.
引文
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