球型惯性元件配合间隙差动共焦精密测量方法
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摘要
配合间隙是决定球型惯性器件精度和可靠性的关键参数之一,针对球型惯性器球面元件表面有缺口且未完全抛光导致曲率半径难以精确测量,进而难以准确控制球碗、球冠配合间隙瓶颈问题,提出了一种球面惯性元件配合间隙激光差动共焦高精度方法。该方法利用抗散射的激光差动共焦曲率半径测量方法分别对球碗、球冠的曲率半径进行测量,然后利用差动共焦曲率半径测量系统测得的球碗和球冠的半径差来控制球型惯性器球面的配合间隙。理论分析与实验验证表明:该方法测量球冠和球碗配合间隙的相对扩展不确定度优于20×10~(-6),其为惯性器件球冠和球碗配合间隙的高精度测量与控制提供了一种全新的技术手段。
Matching clearance is one of the key parameters to determine the accuracy and reliability of spherical inertia element. It is difficult to accurately measure the radius of the spherical inertia element due to the clearance and rough surface,which further lead to hardly control the matching clearance of ball bowl and ball. A laser differential confocal( LDC)-based high-precision measurement method for spherical inertial element matching clearance is proposed in this work. Firstly,the anti-scattering laser differential confocal radius measurement method is used to measure the radius of the bowl and the spherical crown,respectively. Then,the differential confocal radius measurement systems are utilized to measure the radius difference between the bowl and the crown. Finally,the matching clearance of the spherical inertia sphere is controlled by using the radius difference. Theoretical analysis and experimental results show that the method can measure the relative expansion uncertainty of matching clearance of the spherical crown and the ball bowl with the precision better than 20 × 10~(-6). It provides a new technology for the high-precision measurement and control of the spherical inertia element matching clearance.
Matching clearance is one of the key parameters to determine the accuracy and reliability of spherical inertia element. It is difficult to accurately measure the radius of the spherical inertia element due to the clearance and rough surface,which further lead to hardly control the matching clearance of ball bowl and ball. A laser differential confocal( LDC)-based high-precision measurement method for spherical inertial element matching clearance is proposed in this work. Firstly,the anti-scattering laser differential confocal radius measurement method is used to measure the radius of the bowl and the spherical crown,respectively. Then,the differential confocal radius measurement systems are utilized to measure the radius difference between the bowl and the crown. Finally,the matching clearance of the spherical inertia sphere is controlled by using the radius difference. Theoretical analysis and experimental results show that the method can measure the relative expansion uncertainty of matching clearance of the spherical crown and the ball bowl with the precision better than 20 × 10~(-6). It provides a new technology for the high-precision measurement and control of the spherical inertia element matching clearance.
引文
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[18]刘超,王允,赵维谦,等.高分辨力分光瞳差动共聚焦传感技术研究[J].仪器仪表学报,2017,38(9):2225-2231.LIU CH,WANG Y,ZHAO W Q,et al. High-resolution divided-aperture differential confocal sensing technique[J]. Chinese Journal of Scientific Instrument2017,38(9):2225-2231.
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[2]李岩,段富海.半球型动压气浮轴承陀螺仪的静态误差模型[J].北京航空航天大学学报,2018,44(8):1705-1711.LI Y,DUAN F H. Static error model of a gyroscope with gas-dynamic hemispherical bearings[J]. Journal of Beijing University of Aeronautics and Astronautics,2018,44(8):1705-1711.
[3] ZOTOV S A,TRUSOV A A,SHKEL A M. Threedimensional spherical shell resonator gyroscope fabricated using wafer-scale glassblowing[J]. Journal of Microelectromechanical Systems, 2012, 21(3):509-510.
[4] CUI D P,YAO Y X,QIN D L. Study on the dynamic characteristics of a new type externally pressurized spherical gas bearing with slot-orifice double restrictors[J]. Tribology International,2010,43(4):822-830.
[5]王晓瑜,曹清,李建春.研具对半球型动压气浮轴承球面成型精度的影响[J].导航与控制,2010,9(1):63-65.WANG X Y,CAO Q,LI J CH. The influence of abrasive tool on sphericity of semi-sphere for dynamic gas-bearing with sphere forming[J]. Navigation and Control,2010,9(1):63-65.
[6] LI Q, LIU X, LEI Z, et al. A vertical scanning positioning system with large range and nanometer resolution for optical profiler[C]. Proceedings of SPIE,2015,9446:94463C.
[7] ZHENG Y,LIU X,LEI Z,et al. Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height[C]. Proceedings of SPIE,2015:94463.
[8] XU R,ZHAO J S,YUE Q,et al. Measurement of curvature radius of large diameter aperture infrared optical lens based on CMM[J]. Infrared Technology,2018,40(4):338-345.
[9] FRANASZEK M,CHEOK G S,SAIDI K S. Gauging the repeatability of 3-D imaging systems by sphere fitting[J]. IEEE Transactions on Instrumentation and Measurement,2011,60(2):567-576.
[10] CUCHE E, MARQUET P, DEPEURSINGE C.Simultaneous amplitude-contrast and quantitative phasecontrast microscopy by numerical reconstruction of Fresnel off-axis holograms[J]. Applied Optics,1999,38(34):6994-7001.
[11] CHARRIERE F, KHN J, COLOMB T, et al.Characterization of microlenses by digital holographic microscopy[J]. Applied Optics, 2006, 45(5):829-835.
[12] WANG F, XIAO W, PAN F, et al. Curvature measurement of optical surface using digital holography[J]. Optics and Lasers in Engineering,2011,49(7):903-906
[13] DIVAKAR R K,UDUPA D V,PRATHAP C,et al.Optical coherence tomography for shape and radius of curvature measurements of deeply curved machined metallic surfaces:A comparison with two-beam laser interferometry[J]. Optics and Lasers in Engineering,2015(66):204-209.
[14]俞晓峰,丁志华,陈宇恒,等.光纤型光学相干层析成像系统的研制[J].光学学报,2006,26(2):235-238.YU X F,DING ZH H,CHEN Y H,et al. Development of fiber based optical coherence tomographic imaging system[J]. Acta Optica Sinica,2006,26(2):235-238.
[15] STIFTER D. Beyond biomedicine:A review of alternative applications and developments for optical coherence tomography[J]. Applied Physics B,2007,88(3):337-357.
[16] ZHAO W Q,QIU L R,et al. Laser differential confocal interference multi-parameter comprehensive measurement method and its system for spherical lens[J]. Optics Express,2016,24(20):22813-22829.
[17]马仙仙,赵维谦,李少白,等.激光聚变靶丸球度测量与评定[J].仪器仪表学报, 2017, 38(11):2675-2681.MA X X,ZHAO W Q,LI SH B,et al. Sphericity measurement and evaluation for laser fusion target[J].Chinese Journal of Scientific Instrument,2017,38(11):2675-2681.
[18]刘超,王允,赵维谦,等.高分辨力分光瞳差动共聚焦传感技术研究[J].仪器仪表学报,2017,38(9):2225-2231.LIU CH,WANG Y,ZHAO W Q,et al. High-resolution divided-aperture differential confocal sensing technique[J]. Chinese Journal of Scientific Instrument2017,38(9):2225-2231.
[19] QIU L R,WANG X,ZHAO W Q,et al. High-precision radius measurement of ball indenter[J]. Measurement,2016(93):3752-378.
[20]田来科,刘芳,高昕,等.光学表面散射模型探索[J].激光杂志,1996(3):154-156.TIAN L K,LIU F,GAO X,et al. Investigation on scattering model of optical surface[J]. Laser Journal,1996(3):154-156.
[21] BORN M,WOLF E. Principles of Optics[M]. London:Cambridge University Press,1999:517-554.
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