低温磨料气射流加工装置的研制与实验验证
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摘要
针对磨料气射流加工技术在常温下无法加工聚二甲基硅氧(Polydimethylsiloxane,PDMS)等聚合物材料的问题,提出了低温磨料气射流加工PDMS等聚合物材料的设想。设计了一套低温磨料气射流加工装置,通过改变浸没在液氮中的蛇形管长度,可以得到不同温度的低温磨料气射流。建立了蛇形管长度计算的数学模型,通过实验验证了该模型的可行性,为以后对低温磨料气射流加工进行更深入的研究奠定了基础。用不同温度的磨料气射流加工PDMS,发现常温下磨料气射流无法加工PDMS,而低温下可以进行加工。低温下加工PDMS可以提高孔的横截面质量,材料去除机理为塑性去除和脆性去除的结合。
Aiming at the problem that polydimethylsiloxane(PDMS)and other polymer materials cannot be machined by abrasive air jet at normal temperature,an idea of machining PDMS and other polymer materials by cryogenic abrasive air jet is put forward.A cryogenic abrasive air jet machining device is designed.Cryogenic abrasive air jet at different temperatures can be obtained by changing the length of serpentine tube immersed in liquid nitrogen.A mathematical model for calculating the length of serpentine tube is established,and the feasibility of the model is verified through experiments,which provides a solid foundation for further research on cryogenic abrasive air jet machining.PDMS are machined by abrasive air jet at different temperatures and it is found that abrasive air jet machining for PDMS targets is impossible at room temperature while cryogenic abrasive air jet machining allows the drilling of holes.The cross section qualities of holes machined at low temperature can be improved.The material removal mechanism of cryogenic abrasive air jet machining of PDMS is the combination of ductile erosive and brittle erosive systems.
Aiming at the problem that polydimethylsiloxane(PDMS)and other polymer materials cannot be machined by abrasive air jet at normal temperature,an idea of machining PDMS and other polymer materials by cryogenic abrasive air jet is put forward.A cryogenic abrasive air jet machining device is designed.Cryogenic abrasive air jet at different temperatures can be obtained by changing the length of serpentine tube immersed in liquid nitrogen.A mathematical model for calculating the length of serpentine tube is established,and the feasibility of the model is verified through experiments,which provides a solid foundation for further research on cryogenic abrasive air jet machining.PDMS are machined by abrasive air jet at different temperatures and it is found that abrasive air jet machining for PDMS targets is impossible at room temperature while cryogenic abrasive air jet machining allows the drilling of holes.The cross section qualities of holes machined at low temperature can be improved.The material removal mechanism of cryogenic abrasive air jet machining of PDMS is the combination of ductile erosive and brittle erosive systems.
引文
[1] KOWSARI K,NOUHI A,HADAVI V,et al.Prediction of the erosive footprint in the abrasive jet micro-machining of flat and curved glass[J].Tribology International,2017,106:101-108.
[2] MILLS C A,MARTINEZ E,BESSUEILLE F,et al.Production of structures for microfluidics using polymer imprint techniques[J].Microelectronic Engineering,2005,78:695-700.
[3] BECKER H,LOCASCIO L E.Polymer microfluidic devices[J].Talanta,2002,56(2):267-287.
[4]余明芬,曾洪梅,张桦,等.微流控芯片技术研究概况及其应用进展[J].植物保护,2014,40(4):1-8.YU Mingfen,ZENG Hongmei,ZHANG Hua,et al.Research progress in microfluidics and its applications[J].Plant Protection,2014,40(4):1-8.
[5]李全来,李长林,陶春生.微磨料气射流成形加工表面波纹度研究[J].现代制造工程,2017(6):114-120.LI Quanlai,LI Changlin,TAO Chunsheng.Surface waviness analysis on micro abrasive air jet machining technology[J].Modern Manufacturing Engineering,2017(6):114-120.
[6]樊晶明,王成勇,王军,等.微磨料空气射流加工特性研究[J].中国机械工程,2008,19(5):584-589.FAN Jingming,WANG Chengyong,WANG Jun,et al.Study on the machining performance of micro abrasive jet machining[J].China Mechanical Engineering,2008,19(5):584-589.
[7] KUMAR A,HIREMATH S S.Improvement of geometrical accuracy of micro holes machined through micro abrasive jet machining[J].Procedia Cirp,2016,46:47-50.
[8] LARI M R S,PAPINI M.Inverse methods to gradient etch three-dimensional features with prescribed topographies using abrasive jet micro-machining:Part I—Modeling[J].Precision Engineering,2016,45:272-284.
[9] BARANITHARAN P,ZEELAN B N.Design and analysis of eliptical nozzle in AJM process using computational fluid dynamics[J].Science Technology&Arts Research Journal,2015,4(1):171.
[10]李全来.微磨料气射流切割单晶硅冲蚀率及切割质量研究[D].济南:山东大学,2009.LI Quanlai.Study on erosion rate and cutting quality of monocrystalline silicon cut by micro abrasive air jet[D].Jinan:Shandong University,2009.
[11]李全来,黄传真,王军,等.微磨料气射流切割深度建模[J].制造技术与机床,2009(8):88-91.LI Quanlai,HUANG Chuanzhen,WANG Jun,et al.Cutting depth model for micro abrasive air jet machining[J].Manufacturing Technology&Machine Tool,2009(8):88-91.
[12]侯永振.精密磨料气射流抛光技术研究[D].济南:山东大学,2009.HOU Yongzhen.A study on precision abrasive air jet polishing technology[D].Jinan:Shandong University,2009.
[13]BEARDMORE P,RABINOWITZ S.Low temperature crazing in amorphous polymers[J].Journal of Materials Science,1971,6(1):80-86.
[14]GETU H,SPELT J K,PAPINI M.Cryogenically assisted abrasive jet micromachining of polymers[J].Journal of Micromechanics&Microengineering,2008,18(11):115010.
[15]LARI M R S,GHAZAVI A,PAPINI M.A rotating mask system for sculpting of three-dimensional features using abrasive jet micro-machining[J].Journal of Materials Processing Technology,2017,243:62-74.
[16]ABE A,BLOCH D R.Polymer handbook[M].New York:Wiley,1989.
[17]张靖周.高等传热学[M].北京:科学出版社,2009.ZHANG Jingzhou.Advanced heat transfer[M].Beijing:Science Press,2009.
[18]STONE H A,STROOCK A D,AJDARI A.Engineering flows in small devices:Microfluidics toward a lab-on-a-chip[J].Annu Rev Fluid Mech,2004,36:381-411.
[2] MILLS C A,MARTINEZ E,BESSUEILLE F,et al.Production of structures for microfluidics using polymer imprint techniques[J].Microelectronic Engineering,2005,78:695-700.
[3] BECKER H,LOCASCIO L E.Polymer microfluidic devices[J].Talanta,2002,56(2):267-287.
[4]余明芬,曾洪梅,张桦,等.微流控芯片技术研究概况及其应用进展[J].植物保护,2014,40(4):1-8.YU Mingfen,ZENG Hongmei,ZHANG Hua,et al.Research progress in microfluidics and its applications[J].Plant Protection,2014,40(4):1-8.
[5]李全来,李长林,陶春生.微磨料气射流成形加工表面波纹度研究[J].现代制造工程,2017(6):114-120.LI Quanlai,LI Changlin,TAO Chunsheng.Surface waviness analysis on micro abrasive air jet machining technology[J].Modern Manufacturing Engineering,2017(6):114-120.
[6]樊晶明,王成勇,王军,等.微磨料空气射流加工特性研究[J].中国机械工程,2008,19(5):584-589.FAN Jingming,WANG Chengyong,WANG Jun,et al.Study on the machining performance of micro abrasive jet machining[J].China Mechanical Engineering,2008,19(5):584-589.
[7] KUMAR A,HIREMATH S S.Improvement of geometrical accuracy of micro holes machined through micro abrasive jet machining[J].Procedia Cirp,2016,46:47-50.
[8] LARI M R S,PAPINI M.Inverse methods to gradient etch three-dimensional features with prescribed topographies using abrasive jet micro-machining:Part I—Modeling[J].Precision Engineering,2016,45:272-284.
[9] BARANITHARAN P,ZEELAN B N.Design and analysis of eliptical nozzle in AJM process using computational fluid dynamics[J].Science Technology&Arts Research Journal,2015,4(1):171.
[10]李全来.微磨料气射流切割单晶硅冲蚀率及切割质量研究[D].济南:山东大学,2009.LI Quanlai.Study on erosion rate and cutting quality of monocrystalline silicon cut by micro abrasive air jet[D].Jinan:Shandong University,2009.
[11]李全来,黄传真,王军,等.微磨料气射流切割深度建模[J].制造技术与机床,2009(8):88-91.LI Quanlai,HUANG Chuanzhen,WANG Jun,et al.Cutting depth model for micro abrasive air jet machining[J].Manufacturing Technology&Machine Tool,2009(8):88-91.
[12]侯永振.精密磨料气射流抛光技术研究[D].济南:山东大学,2009.HOU Yongzhen.A study on precision abrasive air jet polishing technology[D].Jinan:Shandong University,2009.
[13]BEARDMORE P,RABINOWITZ S.Low temperature crazing in amorphous polymers[J].Journal of Materials Science,1971,6(1):80-86.
[14]GETU H,SPELT J K,PAPINI M.Cryogenically assisted abrasive jet micromachining of polymers[J].Journal of Micromechanics&Microengineering,2008,18(11):115010.
[15]LARI M R S,GHAZAVI A,PAPINI M.A rotating mask system for sculpting of three-dimensional features using abrasive jet micro-machining[J].Journal of Materials Processing Technology,2017,243:62-74.
[16]ABE A,BLOCH D R.Polymer handbook[M].New York:Wiley,1989.
[17]张靖周.高等传热学[M].北京:科学出版社,2009.ZHANG Jingzhou.Advanced heat transfer[M].Beijing:Science Press,2009.
[18]STONE H A,STROOCK A D,AJDARI A.Engineering flows in small devices:Microfluidics toward a lab-on-a-chip[J].Annu Rev Fluid Mech,2004,36:381-411.