飞秒激光烧蚀氟化钙晶体表面特性
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摘要
采用飞秒激光对氟化钙晶体表面进行加工。通过调控激光参数,采用静止聚焦和动态扫描两种方式在晶体表面加工出一系列微结构(烧蚀孔和烧蚀线)。分别对两种加工方式烧蚀后的氟化钙晶体表面微结构进行系统研究,包括参数依赖关系、材料表面烧蚀阈值等。计算结果表明:在静止聚焦情况下,累积因子为0.0033;在动态扫描情况下,当扫描方向与激光偏振方向垂直或平行时,累积因子分别为0.0043和0.0052。飞秒激光加工过程中的脉冲累积效应能够对晶体的烧蚀产生重要影响。
Femtosecond laser is used to ablate a CaF2 crystal surface. By varying the laser parameters, we produce the microstructures(including ablation holes and lines) using stationary focusing ablation and dynamic scanning. The laser-induced microstructures on CaF_2 crystal surface under both processing modes are investigated to obtain the parameter dependence and ablation threshold. The calculation results reveal that the incubation factor is 0. 0033 in the stationary focusing case; whereas, in the case of dynamic scanning, the incubation factor is 0. 0043 or 0. 0052 when the scanning direction is perpendicular or parallel to the laser polarization, respectively. The results reveal that the incubation effect plays an important role in the process of femtosecond laser ablation on crystal surface.
Femtosecond laser is used to ablate a CaF2 crystal surface. By varying the laser parameters, we produce the microstructures(including ablation holes and lines) using stationary focusing ablation and dynamic scanning. The laser-induced microstructures on CaF_2 crystal surface under both processing modes are investigated to obtain the parameter dependence and ablation threshold. The calculation results reveal that the incubation factor is 0. 0033 in the stationary focusing case; whereas, in the case of dynamic scanning, the incubation factor is 0. 0043 or 0. 0052 when the scanning direction is perpendicular or parallel to the laser polarization, respectively. The results reveal that the incubation effect plays an important role in the process of femtosecond laser ablation on crystal surface.
引文
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[2] Burghoff J, Grebing C, Nolte S, et al. Efficientfrequency doubling in femtosecond laser-written waveguides in lithium niobate[J]. Applied Physics Letters, 2006, 89(8):081108.
[3] Schaffer C B, Jamison A O, Mazur E. Morphology of femtosecond laser-induced structural changes in bulk transparent materials[J]. Applied Physics Letters, 2004, 84(9):1441-1443.
[4] Li H Y, Ki H. Effect of ionization on femtosecond laser pulse interaction with silicon[J]. Journal of Applied Physics, 2006, 100(10):104907.
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[6] Xu S Z, Qiu J R, Jia T Q, et al. Femtosecond laser ablation of crystals SiO2 and YAG[J]. Optics Communications, 2007, 274(1):163-166.
[7] Ashkenasi D, Rosenfeld A, Varel H, et al. Laser processing of sapphire with picosecond and subpicosecond pulses[J]. Applied Surface Science,1997, 120(1/2):65-80.
[8] Qi L T, Nishii K, Yasui M, et al. Femtosecond laser ablation of sapphire on different crystallographic facet planes by single and multiple laser pulses irradiation[J]. Optics and Lasers in Engineering,2010, 48(10):1000-1007.
[9] Li X X, Jia T Q, Feng D H, et al. Ablation induced by femtosecond laser in sapphire[J]. Applied Surface Science, 2004, 225(1/2/3/4):339-346.
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[11] Shimotsuma Y, Hirao K, Qiu J R, et al.Nanofabrication in transparent materials with a femtosecond pulse laser[J]. Journal of NonCrystalline Solids, 2006, 352(6/7):646-656.
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[15] Lao H, Zhu H, Chen X. Surface ablation of congruent and Mg-doped lithium niobate byfemtosecond laser[J]. Laser Physics, 2010, 20(1):245-249.
[16] Ren Y Y, Zhang L M, Romero C, et al.Femtosecond laser irradiation on Nd:YAG crystal:surface ablation and high-spatial-frequency nanograting[J]. Applied Surface Science, 2018, 441:372-380.
[17] Dressler L, Rauch R, Reimann R. On the inhomogeneity of refractive index of CaF2 crystals for high performance optics[J]. Crystal Research and Technology, 1992, 27(3):413-420.
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[20] Su L B, Xu J. Calcium fluoride crystal and its applications[M]. Beijing:Science Press, 2006:152-158.苏良碧,徐军.氟化钙晶体材料及其应用[M].北京:科学出版社,2006:152-158.
[21] Varlamova O, Costache F, Reif J, et al. Selforganized pattern formation upon femtosecond laser ablation by circularly polarized light[J]. Applied Surface Science, 2006, 252(13):4702-4706.
[22] Qian B, Song J, Dong G P,et al. Formation and partial recovery of optically induced local dislocations inside CaF2 single crystal[J]. Optics Express, 2009,17(10):8552-8557.
[23] Hu X, Dai Y, Yang L Y, et al. Self-formation of quasiperiodic void structure in CaF2 induced by femtosecond laser irradiation[J]. Journal of Applied Physics, 2007, 101(2):023112.
[24] Rafique M S, Bashir S, Husinsky W, et al. Surface analysis correlated with the Raman measurements of a femtosecond laser irradiated CaF2[J]. Applied Surface Science, 2012, 258(7):3178-3183.
[25] Choi H W, Farson D F, Bovatsek J, et al. Directwrite patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation[J]. Applied Optics, 2007, 46(23):5792-5799.
[26] Mannion P T, Magee J, Coyne E, et al. The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J].Applied Surface Science, 2004, 233(1/2/3/4):275-287.
[2] Burghoff J, Grebing C, Nolte S, et al. Efficientfrequency doubling in femtosecond laser-written waveguides in lithium niobate[J]. Applied Physics Letters, 2006, 89(8):081108.
[3] Schaffer C B, Jamison A O, Mazur E. Morphology of femtosecond laser-induced structural changes in bulk transparent materials[J]. Applied Physics Letters, 2004, 84(9):1441-1443.
[4] Li H Y, Ki H. Effect of ionization on femtosecond laser pulse interaction with silicon[J]. Journal of Applied Physics, 2006, 100(10):104907.
[5] Tan D Z, Sharafudeen K N, Yue Y Z, et al.Femtosecond laser induced phenomena in transparent solid materials:fundamentals and applications[J].Progress in Materials Science, 2016, 76:154-228.
[6] Xu S Z, Qiu J R, Jia T Q, et al. Femtosecond laser ablation of crystals SiO2 and YAG[J]. Optics Communications, 2007, 274(1):163-166.
[7] Ashkenasi D, Rosenfeld A, Varel H, et al. Laser processing of sapphire with picosecond and subpicosecond pulses[J]. Applied Surface Science,1997, 120(1/2):65-80.
[8] Qi L T, Nishii K, Yasui M, et al. Femtosecond laser ablation of sapphire on different crystallographic facet planes by single and multiple laser pulses irradiation[J]. Optics and Lasers in Engineering,2010, 48(10):1000-1007.
[9] Li X X, Jia T Q, Feng D H, et al. Ablation induced by femtosecond laser in sapphire[J]. Applied Surface Science, 2004, 225(1/2/3/4):339-346.
[10] Samad R E, Vieira N D, Jr. Geometrical method for determining the surface damage threshold for femtosecond laser pulses[J]. Laser Physics, 2006,16(2):336-339.
[11] Shimotsuma Y, Hirao K, Qiu J R, et al.Nanofabrication in transparent materials with a femtosecond pulse laser[J]. Journal of NonCrystalline Solids, 2006, 352(6/7):646-656.
[12] Sanner N, Uteza O, Bussiere B, et al. Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics[J]. Applied Physics A,2009, 94(4):889-897.
[13] Ferndndez-Pradas J M, Comas D, Morenza J L,et al. Irradiation of glass with infrared femtosecond laser pulses[J]. Applied Physics A, 2013, 112(1):203-207.
[14] Lorenz M, Stoian R, Ashkenasi D, et al. Surface damage threshold and structuring of brittle dielectrics with ultra-short laser pulses[C]. Conference on Lasers and Electro-Optics, 1999:383-384.
[15] Lao H, Zhu H, Chen X. Surface ablation of congruent and Mg-doped lithium niobate byfemtosecond laser[J]. Laser Physics, 2010, 20(1):245-249.
[16] Ren Y Y, Zhang L M, Romero C, et al.Femtosecond laser irradiation on Nd:YAG crystal:surface ablation and high-spatial-frequency nanograting[J]. Applied Surface Science, 2018, 441:372-380.
[17] Dressler L, Rauch R, Reimann R. On the inhomogeneity of refractive index of CaF2 crystals for high performance optics[J]. Crystal Research and Technology, 1992, 27(3):413-420.
[18] Su L B, Dong Y J, Yang W Q, et al. CaFz crystal growth and optical properties of calcium fluoride[J].Journal of Synthetic Crystals, 2004, 33(1):88-91.苏良碧,董永军,杨卫桥,等.CaF_2晶体的生长与光学性能[J].人工晶体学报,2004, 33(1):88-91.
[19] Duan A F, Fan Y, Liu J H, et al. Studies on CaF2single crystals and its processing technique[J].Journal of Changchun University of Science and Technology, 2007, 30(2):97-99.段安锋,范翊,刘景和,等.CaF2晶体及加工技术研究[J].长春理工大学学报(自然科学版),2007, 30(2):97-99.
[20] Su L B, Xu J. Calcium fluoride crystal and its applications[M]. Beijing:Science Press, 2006:152-158.苏良碧,徐军.氟化钙晶体材料及其应用[M].北京:科学出版社,2006:152-158.
[21] Varlamova O, Costache F, Reif J, et al. Selforganized pattern formation upon femtosecond laser ablation by circularly polarized light[J]. Applied Surface Science, 2006, 252(13):4702-4706.
[22] Qian B, Song J, Dong G P,et al. Formation and partial recovery of optically induced local dislocations inside CaF2 single crystal[J]. Optics Express, 2009,17(10):8552-8557.
[23] Hu X, Dai Y, Yang L Y, et al. Self-formation of quasiperiodic void structure in CaF2 induced by femtosecond laser irradiation[J]. Journal of Applied Physics, 2007, 101(2):023112.
[24] Rafique M S, Bashir S, Husinsky W, et al. Surface analysis correlated with the Raman measurements of a femtosecond laser irradiated CaF2[J]. Applied Surface Science, 2012, 258(7):3178-3183.
[25] Choi H W, Farson D F, Bovatsek J, et al. Directwrite patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation[J]. Applied Optics, 2007, 46(23):5792-5799.
[26] Mannion P T, Magee J, Coyne E, et al. The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J].Applied Surface Science, 2004, 233(1/2/3/4):275-287.