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KPFM测试参数对表面电势测量的影响
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  • 英文篇名:Influence of KPFM Measurement Parameters on the Surface Potential Measurement
  • 作者:冯凯 ; 白刚 ; 王美玲 ; 菅傲群
  • 英文作者:Feng Kai;Bai Gang;Wang Meiling;Jian Aoqun;Micronano System Research Center,Taiyuan University of Technology;Key Laboratory of Advanced Transducers and Intelligent Control System of Shanxi Province and Ministry of Education,Taiyuan University of Technology;
  • 关键词:开尔文探针力显微镜(KPFM) ; 高定向热解石墨(HOPG) ; 滤波器阶数 ; 灵敏度 ; 驱动值
  • 英文关键词:Kelvin probe force microscope(KPFM);;highly oriented pyrolytic graphite(HOPG);;filter order;;sensitivity;;driving value
  • 中文刊名:BDTQ
  • 英文刊名:Micronanoelectronic Technology
  • 机构:太原理工大学微纳系统研究中心;太原理工大学新型传感器与智能控制教育部和山西省重点实验室;
  • 出版日期:2018-11-12
  • 出版单位:微纳电子技术
  • 年:2018
  • 期:v.55;No.499
  • 基金:国家自然科学基金资助项目(61501316,61471255,61474079,51505324,51622507);; 国家高技术研究发展计划(863计划)资助项目(2015AA042601);; 山西省优秀人才科技创新项目(201605D211027);山西省优秀人才科技创新项目(201605D211023);; 山西省回国留学人员资助项目(2015-047)
  • 语种:中文;
  • 页:BDTQ201812011
  • 页数:5
  • CN:12
  • ISSN:13-1314/TN
  • 分类号:69-73
摘要
开尔文探针力显微镜(KPFM)是一种可以对材料表面电势进行纳米级成像的工具,是研究纳米材料表面特性的一种重要手段。高定向热解石墨(HOPG)具有表面光滑、导电性好的特点,在原子力显微镜(AFM)的KPFM模式下,向HOPG表面施加不同电压,测量HOPG的表面电势,以结果作为参照,采用控制变量法分别对比了滤波器阶数、灵敏度和驱动值三种参数对表面电势测量的影响。实验结果表明:滤波器阶数、灵敏度和驱动值均对表面电势的测量有不同程度的影响,不同程度增加滤波器阶数、灵敏度和驱动值都可以起到提升信噪比的作用,其中灵敏度的提升对信号的影响最为显著。
        The Kelvin probe force microscopy(KPFM)is a nanometer-scale imaging tool of the surface potential on the materials,and is an important method to research the surface characteristics of nanomaterials.The highly oriented pyrolytic graphite(HOPG)has the characteristics of the smooth surface and good conductivity.In the KPFM mode of the atomic force microscope(AFM),the surface potential of the HOPG was measured by applying different voltages to the HOPG surface.With the results as the reference,the influences of three parameters,i.e.the filter order,sensitivity and driving value on the measurement of the surface potential were compared by using the control variable method.The experiment results show that the filter order,sensitivity and driving value affect the measurement of the surface potential differently.And the signal-to-noise ratio can be improved by increasing the filter order,sensitivity and driving value in varying degrees,among which the enhancement of the sensitivity has the most significant effect on the signal.
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