摘要
在航空航天以及核电领域中,准确测量高温部件的应变、疲劳等结构参数十分重要,对满足高温应用环境的高温应变计需求非常迫切。在镍基合金基底上研制了Pd Cr薄膜电阻应变计,依次在基片上沉积Ni Cr Al Y作为过渡层来增强附着性,沉积YSZ/Al2O3作为复合绝缘层满足绝缘性需求,溅射Pd Cr合金作为应变敏感层,并采用金属掩模对Pd Cr敏感层进行图形化,最后沉积Al2O3薄膜层作为高温保护层,并对Pd Cr薄膜应变计的应变敏感系数(GF)以及高温环境下的表观应变、漂移应变等性能进行了表征。结果表明,不同温度下Pd Cr薄膜应变计的电阻值随应变呈良好的线性关系;在常温下,其应变敏感系数为1.40;在800℃时,应变计的表观应变系数127με/℃。应变计的电阻值随时间线性减小,导致的漂移应变约为1 800με/hr,应变敏感系数为1.41。同时,对制备的Pd Cr薄膜应变计进行了可靠性评估和寿命评估。结果表明,其重复性测量误差约为5.71%,工作寿命超过10 h。
For aerospace and nuclear fields at high temperatures,strain gauge that can be used in various hot sections is in urgent need to provide accurate measurement of strain,fatigue and other structural parameters.Pd Cr thin film resistive strain gauges were fabricated on the nickel-based superalloy substrate.NiC rA lY alloy as a buffer layer was first deposited to enhance the adhesion of the following layers,YSZ/Al2O3as a composite insulating layer was then prepared to obtain the required electric insulation,then Pd Cr thin film as the sensing material was sputtered,and patterned using the metal mask,finally Al2O3thin film layer as a high temperature protective overcoat was deposited.The gauge factor,apparent strain and drift strain of Pd Cr thin film strain gauge at different temperatures were investigated.The results indicated that resistance value of Pd Cr thin film strain gauge showed an excellent linear relationship with strain at different temperatures.Gauge factor(GF)of Pd Cr thin film strain was measured to be 1.40 at room temperature;At 800℃,apparent strain sensitivity is 127με/℃,and the resistance value of the strain gauge insignificantly decreased with time and the drift strain was about 1 800με/hr.Gauge factor at 800℃was 1.41,almost the same as that of room temperature.The reproducibility and lifetime of Pd Cr thin film strain gauge were also evaluated.It showed that the repeatable measurement error was 5.71%,and lifetime was over 10 hours.
引文
[1]Williams W D,Lei J F,Reardon L F,et al.High-Temperature Strain Sensor and Mounting Development,TM-1186[R].United States:NASP-TM-1186,1996.
[2]Ganziy D,Rose B,Bang O.Performance of Low-Cost Few-Mode Fiber Bragg Grating Sensor Systems:Polarization Sensitivity and Linearity of Temperature and Strain Response[J].Appl Opt,2016,55(23):6156-6161.
[3]任小芳,贾栋,赵辉,等.基于光纤Bragg光栅的古建筑结构健康监测技术研究?[J].传感技术学报,2015,28(1):34-38.
[4]Spathis G,Kontou E.An Experimental and Analytical Study of the Large Strain Response of Glassy Polymers with a Noncontact Laser Extensometer[J].Journal of Applied Polymer Science,1999,71(12):2007-2015.
[5]王豪,郑德智,邢维巍.基于光电检测的振弦式应变传感器的设计与实现[J].传感技术学报,2014,27(12):1601-1605.
[6]Fen L J,Martin L C,Will A H.Advances in Thin Film Sensor Technologies for engine Applications,TM-107418[R].United States:NASA-TM-107418,1997.
[7]Ren Shuai,Jiang Shuwen,Liu Hao,et al.Investigation of Strain Gauges Based on Interdigitated Ba0.5Sr0.5Ti O3Thin Film Capacitors[J].Sensors and Actuators a:Physical,2015,236:159-163.
[8]Kalpana H M,Prasad V S.Development of the Invar36 Thin Film Strain Gauge Sensor for Strain Measurement[J].Measurement Science and Technology,2014,25(6):065102.
[9]Sohgawa M,Fujimoto T,Takada K,et al.Detection of Interaction Between Biological Proteins and Immobilized Liposomes by a MicroCantilever with Ni Cr Thin Film Strain Gauge[C]//SENSORS,2013IEEE,2013:1-4.
[10]Lei J F.The Apparent Strain Stability and Repeatability of a BCL3Resistance Strain Gage,CR-187056[R].United States:NASACR-187056,1991.
[11]周勇,李超,宋阳,等.Pd-Cr薄膜应变计的研制[J].仪表技术与传感器,2014(10):105-107.
[12]Hobart F H.Evaluation Results of the 700℃Chinese Strain Gages,TM-86973[R].United States:NASA-TM-86973,1985.
[13]Fen L J.A Resistance Strain GAGE with Repeatable and Cancellable Apparent Strain for Use to 800℃CR-185256[R].United States:NASA-CR-185256,1990.
[14]Hulse O C,Bailey S R,Grant P H,et al.High Temperature Static Strain GAGE Development Contract,CR-180811[R].United States:NASA-CR-180811,1987.