一种仿侧线神经丘的MEMS矢量水听器设计
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摘要
基于仿生学原理,设计了一种仿侧线神经丘的微电子机械系统(MEMS)矢量水听器。该水听器采用环形纤毛模拟鱼类侧线神经丘中的纤毛束与胶质顶,通过4个十字梁与集成在梁上的压敏电阻将声信号转换为电阻变化量,由电阻构成Wheatstone电桥将电阻变化量转换为电压信号。使用ANSYS软件对水听器结构进行了仿真,得到环形纤毛的结构参数。制作了水听器样机,通过比较校准法进行测试。测试结果表明该水听器带宽为20～1 000 Hz,灵敏度达到了-179.81 dB@1 kHz,在带宽内较单个十字梁与纤毛结构的纤毛式矢量水听器平均提高了15.55 dB,测试结果与仿真结论基本一致。
A micro-electromechanical system(MEMS)vector hydrophone imitating neuromast of lateral line was designed based on the principles of bionics.An anulus-shaped ciliary was used in the hydrophone to simulate the hair bundle and gelatinous cupula of fish lateral line neuromast.The acoustic signals were converted to resistance changes through four cross beams and piezoresistors integrated on the cross beams.And resistance changes were converted to voltage signals by Wheatstone bridge consisted of resistors.The structure of the hydrophone was simulated by ANSYS software,and structure parameters of the anulus-shaped ciliary were obtained.The hydrophone prototype was fabricated and tested by comparison calibration method.The test results show that the bandwidth of the hydrophone is 20-1 000 Hz,and the sensitivity is-179.81 dB@1 kHz,which is15.55 dB higher than that of the cilia vector hydrophone with a single cross beam and cilia structure in the bandwidth.The test results are basically consistent with the simulation results.
A micro-electromechanical system(MEMS)vector hydrophone imitating neuromast of lateral line was designed based on the principles of bionics.An anulus-shaped ciliary was used in the hydrophone to simulate the hair bundle and gelatinous cupula of fish lateral line neuromast.The acoustic signals were converted to resistance changes through four cross beams and piezoresistors integrated on the cross beams.And resistance changes were converted to voltage signals by Wheatstone bridge consisted of resistors.The structure of the hydrophone was simulated by ANSYS software,and structure parameters of the anulus-shaped ciliary were obtained.The hydrophone prototype was fabricated and tested by comparison calibration method.The test results show that the bandwidth of the hydrophone is 20-1 000 Hz,and the sensitivity is-179.81 dB@1 kHz,which is15.55 dB higher than that of the cilia vector hydrophone with a single cross beam and cilia structure in the bandwidth.The test results are basically consistent with the simulation results.
引文
[1] KRIJNEN G J M,DIJKSTRA M,van BAAR J J,et al.MEMS based hair flow-sensors as model systems for acoustic perception studies[J].Nanotechnology,2006,17(4):84-89.
[2] XUE C Y,CHEN S,ZHANG W D,et al.Design,fabrication and preliminary characterization of a novel MEMS bionic vector hydrophone[J]. Microelectronics Journal,2007,38(10/11):1021-1026.
[3] LIU Y,WANG R X,ZHANG G J,et al.“Lollipop-shaped”high-sensitivity microelectromechanical systems vector hydrophone based on parylene encapsulation[J].Journal of Applied Physics,2015,118(4):044501-1-044501-7.
[4] XU W,LIU Y,ZHANG G J,et al.Development of cupshaped micro-electromechanical systems-based vector hydrophone[J].Journal of Applied Physics, 2016, 120(12):124502-1-124502-8.
[5]丁俊文,张国军,杨晟辉,等.高灵敏度宽频带一维MEMS矢量水听器[J].微纳电子技术,2017,54(10):677-683.
[6] YANG Y C,NGUYEN N,CHEN N N,et al.Artifcial lateral line with biomimetic neuromasts to emulate fish sensing[J].Bioinspiration&Biomimetics,2010,5(1):016001-1-016001-9.
[7] McCONNEY M E,CHEN N,LU D,et al.Biologically inspired design of hydrogel-capped hair sensors for enhanced underwater flow detection[J].Soft Matter,2009,5(2):292-295.
[8] QUALTIERI A,RIZZI F,TODARO M T,et al.Stress-driven AlN cantilever-based flow sensor for fish lateral line system[J]. Microelectronic Engineering,2011,88(8):2376-2378.
[9] BLECKMANN H.Peripheral and central processing of lateral line information[J].Journal of Comparative Physiology,2008,194(2):145-148.
[10] ABDULSADDA A T,TAN X B.Underwater tracking of a moving dipole source using an artificial lateral line:algorithm and experimental validation with ionic polymer-metal composite flow sensors[J].Smart Materials and Structures,2013,22(4):045010-1-045010-10.
[11] ASADNIA M,KOTTAPALLI A G P,MIAO J M,et al.Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena[J].Journal of the Royal Society Interface,2015,12(111):20150322-1-20150322-14.
[12] HOROWIT P,HILL W.The art of electronics[M].New York:Cambridge University Press,2015:473.
[2] XUE C Y,CHEN S,ZHANG W D,et al.Design,fabrication and preliminary characterization of a novel MEMS bionic vector hydrophone[J]. Microelectronics Journal,2007,38(10/11):1021-1026.
[3] LIU Y,WANG R X,ZHANG G J,et al.“Lollipop-shaped”high-sensitivity microelectromechanical systems vector hydrophone based on parylene encapsulation[J].Journal of Applied Physics,2015,118(4):044501-1-044501-7.
[4] XU W,LIU Y,ZHANG G J,et al.Development of cupshaped micro-electromechanical systems-based vector hydrophone[J].Journal of Applied Physics, 2016, 120(12):124502-1-124502-8.
[5]丁俊文,张国军,杨晟辉,等.高灵敏度宽频带一维MEMS矢量水听器[J].微纳电子技术,2017,54(10):677-683.
[6] YANG Y C,NGUYEN N,CHEN N N,et al.Artifcial lateral line with biomimetic neuromasts to emulate fish sensing[J].Bioinspiration&Biomimetics,2010,5(1):016001-1-016001-9.
[7] McCONNEY M E,CHEN N,LU D,et al.Biologically inspired design of hydrogel-capped hair sensors for enhanced underwater flow detection[J].Soft Matter,2009,5(2):292-295.
[8] QUALTIERI A,RIZZI F,TODARO M T,et al.Stress-driven AlN cantilever-based flow sensor for fish lateral line system[J]. Microelectronic Engineering,2011,88(8):2376-2378.
[9] BLECKMANN H.Peripheral and central processing of lateral line information[J].Journal of Comparative Physiology,2008,194(2):145-148.
[10] ABDULSADDA A T,TAN X B.Underwater tracking of a moving dipole source using an artificial lateral line:algorithm and experimental validation with ionic polymer-metal composite flow sensors[J].Smart Materials and Structures,2013,22(4):045010-1-045010-10.
[11] ASADNIA M,KOTTAPALLI A G P,MIAO J M,et al.Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena[J].Journal of the Royal Society Interface,2015,12(111):20150322-1-20150322-14.
[12] HOROWIT P,HILL W.The art of electronics[M].New York:Cambridge University Press,2015:473.