CO_2激光多程平移法制备高质量梯形PMMA微通道
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摘要
由于非金属材料对长波红外激光有较强的吸收,CO_2激光常被用于制备PMMA微通道。激光光强呈高斯分布,导致常规激光静态多程刻蚀法制备的微通道截面为三角形,无法满足微流体芯片中的实际应用需求。提出了一种激光多程平移刻蚀法,以首次刻蚀形成的热影响区(HAZ)为界限多程横向重叠平移刻蚀,可以快速制备出理想梯形截面的高质量微通道。通过与CO_2激光静态多程刻蚀法在横截面、热影响区、表面粗糙度等方面的对比,结果表明,CO_2激光多程平移刻蚀法制备的PMMA微通道热影响区更小、表面更光滑、横截面更实用。
As non-metallic materials have strong absorption of long-wave infrared laser, the CO_2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity,the cross-section of the micro-channels prepared by the conventional method is triangular. This can ′ t meet the practical application requirements in the microfluidic chip. In this paper, a CO_2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multipass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness.
As non-metallic materials have strong absorption of long-wave infrared laser, the CO_2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity,the cross-section of the micro-channels prepared by the conventional method is triangular. This can ′ t meet the practical application requirements in the microfluidic chip. In this paper, a CO_2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multipass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness.
引文
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[12]Samant A N,Dahotre N B.Physical effects of multipas two-dimensional laser machining of structural ceramics[J]Adv Eng Mater,2009,11(7):579-85.
[2]Li S F,Fozdar D Y,Ali M F,et al.A continuous-flow polymerase chain reaction microchip with regional velocity control[J].Microelectromesh Syst,2006,15(1):223-236.
[3]Fernández-Pradas J M,Florian,Caballero-Lucas F,et al.Femtosecond laser ablation of polymethyl-methacrylate with high focusing control[J].Applied Surface Science,2013,278:185-189.
[4]Zhang Sijie,Shin Y C.Effective methods for fabricating trapezoidal shape micro-channel of arbitrary dimensions on polymethyl methacrylate(PMMA)substrate by a CO2laser[J].Int J Adv Manuf Technol,2017,6(3):442-447.
[5]Mironov V,Trusk T,Kasyanov V,et al.Biofabrication:a21st century manufacturing paradigm[J].Biofabrication,2009,1(2):022001.
[6]Shashi Prakash,Subrata Kumar.Experimental investigations and analytical modeling of multi-pass CO2laser processing on PMMA[J].Precision Engineering,2017,49:220-234.
[7]Muhammad Imran,Rosly Rahman.Fabrication of microchannels on PMMA using a low power CO2laser[J].Laser Phys,2016,26:096101.
[8]Shashi Prakash,Subrata Kumar.Fabrication of microchannel on transparent PMMA using CO2laser(10.6μm)fo microfluidic applications:an experimental investigation[J]International Journal of Precision Engine&Manu,201516(2):361-366.
[9]Jensen M F,Noerholm M,Christensen L.Micro-structure fabrication with a CO2laser system:characterization and fabrication of cavities produced by raster scanning of th laser beam[J].Lab Chip,2003,3:302-307.
[10]Kurnia J,Sasmito A,Birgersson E.Evaluation of mas transport performance in heterogeneous gaseous in-plan spiral reactors with various cross-section geometries at fixed cross-section area[J].Chem Eng Process:Process Intensif2014,82:101-111.
[11]Shashi Prakash,Nitish Kumar,Subrata Kumar.Monte-carlo based uncertainty analysis for CO2laser microchanneling model[J].Materials Science&Engineering,2016,149012125.
[12]Samant A N,Dahotre N B.Physical effects of multipas two-dimensional laser machining of structural ceramics[J]Adv Eng Mater,2009,11(7):579-85.