基于磁致伸缩效应的声表面波电流传感器实验研究
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- 英文论文题名：Experiments of SAW current sensor based on the magnetostrictive effect
- 论文作者：贾雅娜 ; 王文 ; 刘鑫璐 ; 梁勇
- 英文论文作者：JIA Ya-na ; WANG Wen ; LIU Xin-lu ; LIANG Yong ; Key Laboratory of Fundamental Science for National Defense-Advanced Design Technology of Flight vehicle ; State Key Laboratory of Acoustics ; Institute of Acoustics ; Chinese Academy of Sciences
- 年：2016
- 作者机构：中国科学院声学研究所;
- 论文关键词：声表面波 ; 电流传感器 ; 磁致伸缩效应 ; FeCo薄膜 ; 128oYX-LiNbO3
- 英文论文关键词：SAW ; current sensor ; magnetomechanics effect ; FeCo film ; 128oYX-LiNbO3
- 会议召开时间：2016-10-28
- 会议录名称：2016年全国声学学术会议论文集
- 语种：中文
- 分类号：TP212
- 学会代码：OGSM
- 会议名称：2016年全国声学学术会议
- 会议地点：中国湖北武汉
- 主办单位：中国声学学会
- 学会名称：中国声学学会
- 页数：4
- 文件大小：528k
- 原文格式：D
- 会议级别：全国
摘要
本文结合磁致伸缩铁钴合金(FeCo)薄膜,设计制作了基于磁致伸缩效应的声表面波(SAW)电流传感器,并对其特性进行实验研究。设计制作了150 MHz声表面波延迟线器件,压电基片采用128oYX-Li Nb O3,在其表面覆盖与其温度系数极性相反的SiO_2薄膜来改善器件温度稳定性,并溅射磁致伸缩FeCo薄膜以监测电流量。在电流产生磁场作用下,FeCo薄膜发生磁致伸缩应变,进而引起声表面波相速度的改变。本文对镀有不同厚度、不同长宽比FeCo薄膜的声表面波器件进行实验,得到最优化的薄膜厚度和长宽比,分别为500 nm和1.5:1,此时声表面波电流传感器的灵敏度为8.375KHz/A。
In this paper, a novel SAW current sensor based on the magnetostrictive effect was designed and manufactured, and its characteristics was experimented. This SAW current sensor used 150 Mhz SAW delay lines, and 128oYX-Li NbO_3 as piezoelectric substrate, and Si O2 thin layer whose temperature coefficient polarity is opposite to improve the temperature stability, and one of the SAW delay lines was sputtered with rare-earth giant magnetostrictive Fe Co film to detect current. The magnetic field of the desired current induces the Fe Co film's magnetostrictive strain, changes the SAW phase velocity. SAW current sensors with different thickness and different aspect ratio of Fe Co film were tested in the experiments, and the optimized Fe Co film thickness and aspect ratio were get, they were 500 nm and 1.5:1, respectivety, then the sensitivity of SAW current sensor was 8.375KHz/A.
In this paper, a novel SAW current sensor based on the magnetostrictive effect was designed and manufactured, and its characteristics was experimented. This SAW current sensor used 150 Mhz SAW delay lines, and 128oYX-Li NbO_3 as piezoelectric substrate, and Si O2 thin layer whose temperature coefficient polarity is opposite to improve the temperature stability, and one of the SAW delay lines was sputtered with rare-earth giant magnetostrictive Fe Co film to detect current. The magnetic field of the desired current induces the Fe Co film's magnetostrictive strain, changes the SAW phase velocity. SAW current sensors with different thickness and different aspect ratio of Fe Co film were tested in the experiments, and the optimized Fe Co film thickness and aspect ratio were get, they were 500 nm and 1.5:1, respectivety, then the sensitivity of SAW current sensor was 8.375KHz/A.
引文
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[2]吕英俊,李静.电力系统中电子式互感器的研究[J].煤矿机械,2005,(10):34-36
[3]Leonhard Reindl,Gerd Scholl,Thomas Ostertag,Holger Scherr,Ulrich Wolff,and Frank Schmidt,“Theory and Application of Passive SAW Radio Transponders as Sensors”,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,VOL.45,NO.5,SEPTEMBER 1998,PP:1281-1292
[4]R.Steindl,C.Hausleimer,H.Hauser,W.Bulst“Wireless mag netic field sensor employing SAW-transponder”Applications of Ferroelectrics,2000.ISAF 2000.Proceedings of the 2000 12th IEEE International Symposium on(Volume:2)PP:855-858 vol.2
[5]Leonhard Reindl,“Wireless Passive SAW Identification Marks and Sensors”2nd Int.Symp.Acoustic Wave Devices for Future Mobile Communication Systems,Chiba Univ.3rd-5th March,2004
[6]Vendik O G.Dielectric nonlinearity of the displacive ferroelectrics at UHF[J].Ferroelectrics,1976,12(1-4):85-90.
[7]Tomar M.,Gupta V,Mansingh A.Temperature stability of c-axis oriented Li Nb O3/Si O2/Si thin film layered structures.J.Phys.D:Appl.Phys.34,2001,pp:2267-2273
[8]韩献堂.FeCo基纳米晶合金有效磁各向异性与磁致伸缩研究[D].天津大学,2007.1.