薄铝板微群孔的纳秒激光制备工艺与吸声应用
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- 英文论文题名：Nanosecond Laser Processing of Microhole Group Aluminum Thin Sheet and Application in Acoustical Absorption
- 论文作者：娄德元 ; 廖加劲 ; 熊厚 ; 韩毅 ; 王浩 ; 曹剑锋 ; 陶青 ; 戚得众 ; 杨奇彪 ; 郑重 ; 翟中生 ; Peter Bennett ; 刘顿
- 英文论文作者：LOU Deyuan ; LIAO Jiajin ; XIONG Hou ; HAN Yi ; WANG Hao ; CAO Jianfeng ; TAO Qing ; QI Dezhong ; YANG Qibiao ; ZHENG Zhong ; ZAI Zhongsheng ; Peter Bennett ; LIU Dun ; Laser Group ; School of Mechanical Engineering ; Hubei University of Technology ; State Key Laboratory of Rolling and Automation of Northeastern University ; R&D Center ; China Tobacco Yunan Industrial Co.Ltd
- 年：2016
- 作者机构：湖北工业大学机械工程学院激光加工中心;东北大学轧制技术及连轧自动化国家重点实验室;云南中烟工业有限责任公司技术中心;
- 论文关键词：纳秒激光 ; 薄铝板 ; 微群孔 ; 打孔工艺 ; 阵列 ; 吸声
- 英文论文关键词：nanosecond laser ; thin aluminum sheet ; microhole group ; drill processing ; array ; acoustic noise reduction
- 会议召开时间：2016-11-18
- 会议录名称：第一届先进材料前沿学术会议论文集（《材料导报》2016年第30卷第Z1期）
- 语种：中文
- 分类号：TN249
- 学会代码：CLDB
- 会议名称：第一届先进材料前沿学术会议
- 会议地点：中国陕西西安
- 主办单位：《材料导报》杂志社
- 学会名称：材料导报编辑部
- 页数：6
- 文件大小：1763k
- 原文格式：O
- 会议级别：全国
摘要
微群孔金属板可用作吸声体,应用于吸声降噪的场合。但薄铝板在激光打孔过程中易变性,熔融物喷溅较多,且孔锥度和一致性不易控制。利用1 064 m纳秒激光打孔系统在0.1 mm厚薄铝板上制备了30 000个100μm孔径的微群孔,借助显微镜和表面轮廓仪研究了工艺参数对纳秒激光打孔质量的影响规律。设计了跳变阵列加工方法,有效避免了铝板在密集微群孔加工时的变形问题,获得的微群孔一致性好,锥度为0.07,圆度误差为0.05。实测微群孔铝板吸声体的吸声系数为0.79,可以有效吸声降噪。
Metal sheet with microhole group can be used as a sound absorption to meet the application of acoustic noise reduction.However,laser drilled thin aluminum sheet is easy to deform and to splash,as well as hole taper and consistency is difficult to be controlled.In the present work,30 000 microholes with 100 μm diameter were fabricated on a 0.1 mm thick aluminum sheet using a 1 064 nm nanosecond laser drilling system.The effects of process parameters on the quality of drilled microholes were studied by means of microscope and surface profiler.The jump array processing method designed in this work effectively avoided the aluminum sheet deformation problem in dense microhole drilling.Furthermore,the microhole group is of good consistency,with the hole taper0.07 and roundness error 0.05.The measured acoustical absorption coefficient of microhole group aluminum sheet is 0.79,which is effective for acoustic noise reduction.
Metal sheet with microhole group can be used as a sound absorption to meet the application of acoustic noise reduction.However,laser drilled thin aluminum sheet is easy to deform and to splash,as well as hole taper and consistency is difficult to be controlled.In the present work,30 000 microholes with 100 μm diameter were fabricated on a 0.1 mm thick aluminum sheet using a 1 064 nm nanosecond laser drilling system.The effects of process parameters on the quality of drilled microholes were studied by means of microscope and surface profiler.The jump array processing method designed in this work effectively avoided the aluminum sheet deformation problem in dense microhole drilling.Furthermore,the microhole group is of good consistency,with the hole taper0.07 and roundness error 0.05.The measured acoustical absorption coefficient of microhole group aluminum sheet is 0.79,which is effective for acoustic noise reduction.
引文
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2马大猷.现代声学理论基础[M].北京:科学出版社,2004.
3 Li Xiaogyou,Zeng Xiaoyan,Huang Weiling.Status and prospect of precision laser machinning[J].Laser J,2000,21(5):Kin Chinese).李祥友,曾晓雁.激光精密加工技术的现状和展望[J].激光杂志,2000,21(5):1.
4 Shui Jincheng,Cheng Wujun.Study on laser drilling the microhole of the order of um[J].Appl Laser,1994,14(3),124(in Chinese).水金城,陈武军.微米级微孔激光打孔的研究[J].应用激光,1994,14(3):124.
5 Rong Lierun.The laser microhole processing technology and its applications[J].Mechatronics,2003(6):8(in Chinese).荣烈润.激光微细孔加工技术及其应用[J].机电一体化,2003(6):8.
6 Huang Kai.Interacting process and microstructure machining on metal materials by nanosecond laser ablation[D].Harbin:Harbin Institute of Technology,2007:3(in Chinese).黄楷.纳秒激光与金属材料相互作用过程及微结构加工研究[D].哈尔滨:哈尔滨工业大学,2012:3.
7 Otani T,Herbst L,Heglin M,et al.Microdrilling and micromachining with diode-pumped solid-state lasers[J].Appl Phys A,2004,79(4-6):1335.
8 Pan C T,Yang H,Wei M K.248 nm excimer laser drilling PI film for nozzle sheet application[J].Int J Adv Manuf Technol,2007,34(34):889.
9 Chen K H,Wu W,Chu B H,et al.UV excimer laser drilled high aspect ratio submicron via hole[J].Appl Surf Sci,2009,256(1):183.
10左铁钏.高强铝合金的激光加工[M].北京:国防工业出版社,2008.
11 Wang X D,Michalowski A,Walter D.Laser drilling of stainless steel with nanosecond double pulse[J].Optics Laser Technol,2009,41:148.
12 He Donglin,Guo Zhangcheng,Liao Hongqiang,et al.Research progress and development trend of porous absorption materials[J].Mater Rev,2012,26(sl):303(in Chinese).何冬林,郭占成,廖洪强,等.多孔吸声材料的研究进展及发展趋势[J].材料导报,2012,26(s1):303.
13 Fan Wei,Gao Fei,Xie Jijiang.Study on laser fine cutting process of stainless steel coronary stent[J].Mater Rev:Res,2012,26(22):29(in Chinese).范伟,高飞,谢冀江.不锈钢冠脉支架的激光切割工艺研究[J].材料导报:研究篇,2012,26(22):29.
14 Yang Jihong.Action mechanism and technics study of using laser drilling microhole[D].Tianjin:Tianjin University,2008:45(in Chinese).杨继宏.激光打微孔作用机理及工艺研究[D].天津:天津大学,2008:45.
15 Wang Dai.Laser on the carbon steel microporous mechanism and process research[D].Changchun:Changchun University of Science and Technology,2006:64(in Chinese).王丹.碳钢激光打微孔作用机理及工艺研究[D].长春:长春理工大学,2006:64.
16 Wang Zhiyong,Chen Kai,Zuo Tiechuan,et al.Study on the influence of assisted gas on laser drilling[J].Laser J,2000,21(6):44(in Chinese).王智勇,陈铠,左铁钏,等.辅助气体对激光打孔的影响[J].激光杂志,2000,21(6):44.
17 Sun Mengzi,Yue Chong.Sound absorpion performance on micro perforated sbsorber[J].J Hubei University of Technology,2015(5):48(in Chinese).孙梦子,岳翀.微穿孔板吸声体吸声性能的研究[J].湖北工业大学学报,2015(5):48.
2马大猷.现代声学理论基础[M].北京:科学出版社,2004.
3 Li Xiaogyou,Zeng Xiaoyan,Huang Weiling.Status and prospect of precision laser machinning[J].Laser J,2000,21(5):Kin Chinese).李祥友,曾晓雁.激光精密加工技术的现状和展望[J].激光杂志,2000,21(5):1.
4 Shui Jincheng,Cheng Wujun.Study on laser drilling the microhole of the order of um[J].Appl Laser,1994,14(3),124(in Chinese).水金城,陈武军.微米级微孔激光打孔的研究[J].应用激光,1994,14(3):124.
5 Rong Lierun.The laser microhole processing technology and its applications[J].Mechatronics,2003(6):8(in Chinese).荣烈润.激光微细孔加工技术及其应用[J].机电一体化,2003(6):8.
6 Huang Kai.Interacting process and microstructure machining on metal materials by nanosecond laser ablation[D].Harbin:Harbin Institute of Technology,2007:3(in Chinese).黄楷.纳秒激光与金属材料相互作用过程及微结构加工研究[D].哈尔滨:哈尔滨工业大学,2012:3.
7 Otani T,Herbst L,Heglin M,et al.Microdrilling and micromachining with diode-pumped solid-state lasers[J].Appl Phys A,2004,79(4-6):1335.
8 Pan C T,Yang H,Wei M K.248 nm excimer laser drilling PI film for nozzle sheet application[J].Int J Adv Manuf Technol,2007,34(34):889.
9 Chen K H,Wu W,Chu B H,et al.UV excimer laser drilled high aspect ratio submicron via hole[J].Appl Surf Sci,2009,256(1):183.
10左铁钏.高强铝合金的激光加工[M].北京:国防工业出版社,2008.
11 Wang X D,Michalowski A,Walter D.Laser drilling of stainless steel with nanosecond double pulse[J].Optics Laser Technol,2009,41:148.
12 He Donglin,Guo Zhangcheng,Liao Hongqiang,et al.Research progress and development trend of porous absorption materials[J].Mater Rev,2012,26(sl):303(in Chinese).何冬林,郭占成,廖洪强,等.多孔吸声材料的研究进展及发展趋势[J].材料导报,2012,26(s1):303.
13 Fan Wei,Gao Fei,Xie Jijiang.Study on laser fine cutting process of stainless steel coronary stent[J].Mater Rev:Res,2012,26(22):29(in Chinese).范伟,高飞,谢冀江.不锈钢冠脉支架的激光切割工艺研究[J].材料导报:研究篇,2012,26(22):29.
14 Yang Jihong.Action mechanism and technics study of using laser drilling microhole[D].Tianjin:Tianjin University,2008:45(in Chinese).杨继宏.激光打微孔作用机理及工艺研究[D].天津:天津大学,2008:45.
15 Wang Dai.Laser on the carbon steel microporous mechanism and process research[D].Changchun:Changchun University of Science and Technology,2006:64(in Chinese).王丹.碳钢激光打微孔作用机理及工艺研究[D].长春:长春理工大学,2006:64.
16 Wang Zhiyong,Chen Kai,Zuo Tiechuan,et al.Study on the influence of assisted gas on laser drilling[J].Laser J,2000,21(6):44(in Chinese).王智勇,陈铠,左铁钏,等.辅助气体对激光打孔的影响[J].激光杂志,2000,21(6):44.
17 Sun Mengzi,Yue Chong.Sound absorpion performance on micro perforated sbsorber[J].J Hubei University of Technology,2015(5):48(in Chinese).孙梦子,岳翀.微穿孔板吸声体吸声性能的研究[J].湖北工业大学学报,2015(5):48.