基于主瓶颈设备利用率的并行半导体生产线投料控制策略

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• 英文论文题名：Primary bottleneck workstation utility based release control policy of parallel semiconductor production lines
• 论文作者：李莉 ; 向楠
• 英文论文作者：Li Li ; Nan Xiang ; School of Electronics and Information Engineering ; Tongji University
• 年：2017
• 作者机构：同济大学电子信息与工程学院;
• 论文关键词：主瓶颈设备 ; 设备利用率 ; 并行半导体生产线
• 英文论文关键词：primary bottleneck workstation ; workstation utility ; parallel semiconductor production lines
• 会议召开时间：2017-07-26
• 会议录名称：第36届中国控制会议论文集（B）
• 英文会议录名称：Proceedings of the 36th Chinese Control Conference（B）
• 语种：中文
• 分类号：TN305
• 学会代码：KZLL
• 会议名称：第36届中国控制会议
• 会议地点：中国辽宁大连
• 主办单位：中国自动化学会控制理论专业委员会
• 学会名称：中国自动化学会控制理论专业委员会
• 页数：6
• 文件大小：458k
• 原文格式：D
• 会议级别：全国

摘要

半导体生产线投料控制策略在半导体制造系统调度中处于非常重要的地位。考虑并行半导体生产线投料控制特点,提出基于主瓶颈设备利用率的并行半导体生产线投料控制策略。该方法与固定在制品(Constant Work In Process,CONWIP)方法相比,可以充分利用每条生产线的主瓶颈设备,提高产出与工件的准时交货率。仿真结果表明,该方法在出片量、加工周期、准时交货率、紧急工件准时交货率这四项性能指标与CONWIP相比最大能提高17.46%、32.90%、85.84%、53.65%。
Release control plays an important role on the manufacturing performance of semiconductor production lines. Considering their characteristics, a release control policy based on the multiple bottleneck workstation utility of parallel semiconductor manufacture lines(abbreviated as Rel_M2) is proposed. Comparing to common release control strategy CONWIP(Constant Work in Process), Rel_M2 can make full use of the primary bottleneck equipment of each line, increase the throughput, and improve the on-time delivery rate. The simulation results demonstrate that the throughput, on-time delivery rate and that of hot job are increased by 17.46%, 85.84% and 53.65%, respectively. Moreover, the mean cycle time is decreased by 32.90%.

引文

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