微机械电容式加速度计自动标定及性能参数测试系统的研究
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摘要
近年来,随着微机电系统技术的迅速发展,使得传感器的微型化得到了长足进步，以微机械惯性传感器为代表的微加速度计应用更加广泛，如何对微机械加速度计进行标定和性能测试也是该方面研究的重点内容之一。本文给出一种基于虚拟仪器、数据采集模块和图形化编程语言LabVIEW的微机械电容式加速度计性能测试方案，并提出了自动标定与参数测试的相关算法。系统由计算机、分度台和温箱以及数据采集模块等硬件组成，微加速度计的相关数据经输出电路和数据采集模块传送到计算机，最后利用LabVIEW工具软件进行数据的分析处理、显示、存储以及报表打印，从而最终达到微机械加速度计自动标定及性能测试的目的。
本论文主要工作如下：
（1）实现了数据采集模块与信号调理模块之间的通信。通过LabVIEW的SDW功能，利用数据采集模块的数字I/O端口模拟SPI协议，实现与信号调理模块的EEPROM通信，从而实现了对信号调理模块的可编程控制和输出信号的采集。
（2）针对电容式加速度计的偏置电压和标度因数标定，介绍了一种自动标定方法：三点静态标定法。在用户预设完偏置电压和标度因数后，采用三点静态标定法编写的LabVIEW应用软件，实现偏置电压和标度因数的自动标定。结果表明：通过多次自动标定，电容式加速度计标度因数的相对误差达0.79%。
（3）参考加速度计相关测试标准，制定了电容式加速度计性能测试方法，建立了测试平台。根据该测试方案，对电容式加速度计性能进行了测试。测试结果表明：加速度计的标度因数为-66.489mv/g，零偏稳定性为1.536732mg，标度因数重复性为450ppm，零偏不稳定性为0.361mg，非线性度为0.2945%。
In recent years, with the rapid development of micro-mechanical systems technology,the miniaturization of sensor has been improved, represented by micro-mechanical inertialsensors of the micro accelerometer application more widely, how to calibrate themicro-mechanical accelerometer and the performance test is also one of the importantcontent of the research. This paper presents a set of micro-mechanical capacitiveacceleration sensor performance test system based on virtual instrumentation, dataacquisition module and a graphical programming language LabVIEW, and put forward therelevant algorithm of automatic calibration and parameter test. The system consists ofhardware such as computers, indexing table and oven, as well as data acquisition module,Micro-accelerometer data is transmitted to the computer through the output circuit and thedata acquisition module, finally using the LabVIEW toolkit, data processing module forthe analysis of the data processing, display, store, and report forms printing, so as toultimately achieve micro-mechanical accelerometer automatic calibration and performancetesting purposes.
The main works of this paper are as follows:
(1)Make the communication between data acquisition module and signalconditioning module. Through LabVIEW SDW function, make the digital I/O ports of thedata acquisition module, so as to simulate SPI protocol, to realize the communication withthe EEPROM of signal conditioning module. In order to achieve the programmable controlsignal conditioning modules and output signal acquisition.
(2)For capacitive accelerometer bias voltage and scale factor calibration, introducesa kind of automatic calibration method: three-point static calibration method. After the userpreset bias voltage and scale factor, LabVIEW software applications written by three staticcalibration methods, realizes the automatic calibration of the bias voltage and scale factor.Experimental results show that: through the multiple automatic scaling, sensor scale factorrelative error is0.79%.
(3)Reference accelerometer test standard, develop the capacitive accelerometer performance test method, test platform is established. According to the test plan, thecapacitive accelerometer performance was tested. The test results are as follows: the scalefactor of the accelerometer is-66.489mv/g, zero bias stability is1.536732mg, scale factorrepeatability is450PPM, zero bias instability is0.361mg，nonlinearity is0.2945%.
本论文主要工作如下：
（1）实现了数据采集模块与信号调理模块之间的通信。通过LabVIEW的SDW功能，利用数据采集模块的数字I/O端口模拟SPI协议，实现与信号调理模块的EEPROM通信，从而实现了对信号调理模块的可编程控制和输出信号的采集。
（2）针对电容式加速度计的偏置电压和标度因数标定，介绍了一种自动标定方法：三点静态标定法。在用户预设完偏置电压和标度因数后，采用三点静态标定法编写的LabVIEW应用软件，实现偏置电压和标度因数的自动标定。结果表明：通过多次自动标定，电容式加速度计标度因数的相对误差达0.79%。
（3）参考加速度计相关测试标准，制定了电容式加速度计性能测试方法，建立了测试平台。根据该测试方案，对电容式加速度计性能进行了测试。测试结果表明：加速度计的标度因数为-66.489mv/g，零偏稳定性为1.536732mg，标度因数重复性为450ppm，零偏不稳定性为0.361mg，非线性度为0.2945%。
In recent years, with the rapid development of micro-mechanical systems technology,the miniaturization of sensor has been improved, represented by micro-mechanical inertialsensors of the micro accelerometer application more widely, how to calibrate themicro-mechanical accelerometer and the performance test is also one of the importantcontent of the research. This paper presents a set of micro-mechanical capacitiveacceleration sensor performance test system based on virtual instrumentation, dataacquisition module and a graphical programming language LabVIEW, and put forward therelevant algorithm of automatic calibration and parameter test. The system consists ofhardware such as computers, indexing table and oven, as well as data acquisition module,Micro-accelerometer data is transmitted to the computer through the output circuit and thedata acquisition module, finally using the LabVIEW toolkit, data processing module forthe analysis of the data processing, display, store, and report forms printing, so as toultimately achieve micro-mechanical accelerometer automatic calibration and performancetesting purposes.
The main works of this paper are as follows:
(1)Make the communication between data acquisition module and signalconditioning module. Through LabVIEW SDW function, make the digital I/O ports of thedata acquisition module, so as to simulate SPI protocol, to realize the communication withthe EEPROM of signal conditioning module. In order to achieve the programmable controlsignal conditioning modules and output signal acquisition.
(2)For capacitive accelerometer bias voltage and scale factor calibration, introducesa kind of automatic calibration method: three-point static calibration method. After the userpreset bias voltage and scale factor, LabVIEW software applications written by three staticcalibration methods, realizes the automatic calibration of the bias voltage and scale factor.Experimental results show that: through the multiple automatic scaling, sensor scale factorrelative error is0.79%.
(3)Reference accelerometer test standard, develop the capacitive accelerometer performance test method, test platform is established. According to the test plan, thecapacitive accelerometer performance was tested. The test results are as follows: the scalefactor of the accelerometer is-66.489mv/g, zero bias stability is1.536732mg, scale factorrepeatability is450PPM, zero bias instability is0.361mg，nonlinearity is0.2945%.
引文
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[2]Williams,J.E.D.From Sails to Satellites:The origin and development of navigationalscience.New York:Oxford University Press,1994.
[3] Man,P.F.and C.H.Mastrangelo.Surface micro-machined shock sensor for impactTeeh.Digest of IEEE Solid-State Sensor and Actuator Workshop(HiltonHead.94),1994:156-159.
[4]Reilly,J.J.,et al.Field Comparison of Accelerometry and Heart Rate Monitoring forAssessment of Activity in Young Children. Medical&Science in Sports&Exercise,1999,31(5):232.
[5]Masson,C.and R.Rieu.Time一frequency analysis of the noise Produced by the closingof artificial heart valves: an in vitro study. Medical Engineering&Physics,1998,20(6):418-431.
[6]Kuehnel,W.and5.Sherman.A surface micro-machined silicon accelerometer with on chipdetection circuitry.Sensor and actuators A,1994,45:7-16.
[7]Pottenger,M.D.Design of Micro-machined Inertial Sensors.Doctoral dissertation,University of California,Los Angeles,2001.
[8]Walter P L.Trends in accelerometer design for military and aerospace applications[J].Sensors,1999,16(3):44-51.
[9]Doscher,J.and C.Kitchin.Monitoring machine vibration with micro-machined. sensors,1997,14(5):33-34.
[10]Li G,Li Z and Wang C,“Design and simulation of a novel highly symmetricalpiezoelectric triaxial accelerometer”, San Diego CA:Proc of the Modeling andSimulation of Micro-systems Conference,2000.
[11]Soderkvist J.Micro-machined gyroscopes[J].Sensors and Actuators,1994,A43:65-71.
[12]Andrew RA,Robert SO and Kevin TK,“Simulation,Fabrication and Testing of BulkMicro-machined SIC HIGH g Piezoresistive Accelerometer”,Sensors and Actuators,2003,104:11-18.
[13]Huang S H S, L l X X and Wang Y L,“A piezoresistive accelerometer with axiallyStressed tiny beams for both much increased sensitivity and much broadenedfrequency bandwidth”, The12thInternational Conference on Solid State Sensors,Act.Proc.Transducers,2003:91-94.
[14]Voss R,Bauer K,Ficker W,et al.Silicon angular rate sensor for automotive Applicationswith piezoelectric drive and piezoresistive aread-out.Tech.Dig.9th Int.Conf.Solid StateSensors and Actuators(Transducers.97),Chicago,IL,June1997:879一882.
[15]Yeh C and Najafi K,“Alow-voltage tunneling-based silicon micro-accelerometer,IEEETransactions on Electron Devices,1997:1875一1882.
[16]Scheeper P R, Reynold J K and Kenny T W,“Development of a modal analysisAccelerometer based on a tunneling displacement transducer”, InternationalConference on Solid State Sensors and Actuators,Chicago,1997:867一871.
[17]Geiger W, Folkmer B, Sobe U,et al.New design of micro-machined vibrating Rategyroscope with decoupled oscillation modes[J]. Sensors and Actuators,1998,A66:118一124.
[18]Bernstein J, Cho S,King A T,rt al.A micro-machined comb-drive tuning fork gyroscopefor commercial applications[C].Proc.Sensor Expo,Clever land,OH,1994:187一193.
[19]Bernhard E. Boser and Roger T.Howe, Fellow, IEEE,“Surface micro-machinedAccelerometers”, IEEE JOURNAL OF SOLID-STATECIRCUITS,V0L.31,NO.3,MARCH1996:366-375.
[20]刘晓为,王超,谭晓吻,董长春.体硅电容式双轴微加速度计的信号检测新方法传感技术学报.2008年3月,第21卷第3期:490一493.
[21]Chae J, Kulah H and Najafi K.An in-Plane high-sensitivity,low-noise micro-g siliconaccelerometer with CMOS readout circuitry [J].Journal of Micro-electromechanicalSystems,2004,13(4):628-635.
[22]Takao H, Fukumoto Hand Ishida M.A CMOS integrated three-axis accelerometer withcommercial sub micro-meter COS technology and bulk-micro-machining[J].IEEETransactions on Eleetron48:1961-1968.
[23]M.Lemkln,M.Ortiz,N.Wongkomet,B.E.Boser and J.H.Smith,"A3-axis surfacemicro-machined sigma-delta accelerometer "0ISSCC Dig.Tech.Papers,Feb.1997:202-203.
[24]董景新.微惯性仪表.微机械加速度计[M].北京:清华大学出版社.2003.
[25]朱鸣.新结构SOI材料与器件物理研究.[博士学位论文].上海,中国科学院上海微系统与信息技术研究所，2005，71-90.
[26]陈宇晓.电容式微机械静电伺服加速度计系统分析.电子科技大学.硕士学位论文.2003.
[27]李宝清，陆德仁，王渭源.变面积结构微机械电容式加速度传感器[J].中国工程科学,2000,2(2):36-39.
[28]任杰,樊尚春.一种双轴电容式微机械加速度传感器[J].传感技术学报.2006.19(5):2174-2176.
[29]Tar-Ran Hsu著,王晓浩等译.MEMS和微系统设计与制造.机械工业出版社,2004.
[30]罗斯建.电容式微机械加速度计检测电路研究.[硕士学位论文],浙江,浙江大学,2007:8一28.
[31]郑旭东,曹学成,郑阳明等一种电容式微机械加速度计的设计.传感技术学报,2008,21[2]:226一229.
[32]Hou Hai ying. Modeling inertial sensor errors using Allan variance[D]. Canada:University of Calgary at Albert a,2004.
[33]赵君辙,潘卫红.悬丝支撑加速度计标度因数温度系数补偿方法研究[J].计测技术.2007,8，27(6):26-28.
[34]彭承明，曾占魁，舒嵘，张一坚.静电加速度计标度因数和零偏误差标定[J].中国惯性技术学报.2009.10,17(5):583-584.
[35]杨常松，徐晓苏.捷联惯导系统加速度计标度因数和安装误差的试验标定[J].测控技术.2005,24(12):57-59.
[36]马博禹，董雪明，何懿才，张大鹏.SNJ一1型石英加速度计标度因数温度漂移曲线[J].工业技术，2010（14）:97-98.
[37]Hou H. Modeling Inertial Sensors Errors Using Allan Variance. Dissertation for theMaster Degree. Calgary: University of Calgary,2004.
[38]IEEE Standard Specification Format Guide and Test Procedure for Single-AxisInterferometric Fiber Optic Gyros. IEEE,1997.
[39]El-Sheimy N, Hou H, Niu X. Analysis and modeling of inertial sensors using Allanvariance. IEEE Trans Instrum Meas,2008,57:140—149.
[40]Allan D W. Statistics of atomic frequency standards. Proc IEEE,1966,54:221—230.
[41]Hou H, El-Sheimy N. Inertial sensors errors modeling using Allan variance. In:Proceedings of ION GPS/GNSS2003. Portland: The US Institute of Navigation, ION,2003.2860-2867.
[42]孙以材，刘新福，孟庆浩.传感器非线性信号的智能处理与融合[M].冶金工业出版社，2010.
[43]陈萍，陈蓉蓉.一种压力传感器温度补偿新方法[J].计算技术与自动化，2009.12,28(4):49-52.
[44]李国玉，孙以材，潘国锋，等.基于BP网络的压力传感器信息融合[J].哈尔滨理工大学学报，2005，26（2）：168-171.
[45]赵海兵，王学德.基于小波神经网络的压力传感器温度补偿方法[J].仪表技术，2007,12:45-47.
[46]徐平，张勇，侯占强，等.基于MS3110的差分电容检测方法研究及其电磁兼容性设计[J].仪表技术与传感器，2008(5)：60-62.
[47]刘伟玲，耿世钧，赵海文，等.虚拟测试系统G语言编程的设计与实现.河北工业大学学报，1999，28(6).
[48]LabVIEW User Manual. National Instrument Corporation,2003.
[49]National Instruments LabVIEW测量与自动化的专业软件，2001，7.
[50]张春梅.一个程序用LabVIEW等语言的分别实现.电脑知识与技术，2007(6)：1060-1061.
[51]高璐.基于LabVIEW的飞控系统传感器性能补偿与信号处理平台设计，[硕士学位论文].南京：南京航空航天大学，2006.
[52]李景广,王哨军,董坤，王增宏. LabVIEW与其他应用程序的接口设计[J].电子测量与仪器学报.2007，增刊：491-494.
[2]Williams,J.E.D.From Sails to Satellites:The origin and development of navigationalscience.New York:Oxford University Press,1994.
[3] Man,P.F.and C.H.Mastrangelo.Surface micro-machined shock sensor for impactTeeh.Digest of IEEE Solid-State Sensor and Actuator Workshop(HiltonHead.94),1994:156-159.
[4]Reilly,J.J.,et al.Field Comparison of Accelerometry and Heart Rate Monitoring forAssessment of Activity in Young Children. Medical&Science in Sports&Exercise,1999,31(5):232.
[5]Masson,C.and R.Rieu.Time一frequency analysis of the noise Produced by the closingof artificial heart valves: an in vitro study. Medical Engineering&Physics,1998,20(6):418-431.
[6]Kuehnel,W.and5.Sherman.A surface micro-machined silicon accelerometer with on chipdetection circuitry.Sensor and actuators A,1994,45:7-16.
[7]Pottenger,M.D.Design of Micro-machined Inertial Sensors.Doctoral dissertation,University of California,Los Angeles,2001.
[8]Walter P L.Trends in accelerometer design for military and aerospace applications[J].Sensors,1999,16(3):44-51.
[9]Doscher,J.and C.Kitchin.Monitoring machine vibration with micro-machined. sensors,1997,14(5):33-34.
[10]Li G,Li Z and Wang C,“Design and simulation of a novel highly symmetricalpiezoelectric triaxial accelerometer”, San Diego CA:Proc of the Modeling andSimulation of Micro-systems Conference,2000.
[11]Soderkvist J.Micro-machined gyroscopes[J].Sensors and Actuators,1994,A43:65-71.
[12]Andrew RA,Robert SO and Kevin TK,“Simulation,Fabrication and Testing of BulkMicro-machined SIC HIGH g Piezoresistive Accelerometer”,Sensors and Actuators,2003,104:11-18.
[13]Huang S H S, L l X X and Wang Y L,“A piezoresistive accelerometer with axiallyStressed tiny beams for both much increased sensitivity and much broadenedfrequency bandwidth”, The12thInternational Conference on Solid State Sensors,Act.Proc.Transducers,2003:91-94.
[14]Voss R,Bauer K,Ficker W,et al.Silicon angular rate sensor for automotive Applicationswith piezoelectric drive and piezoresistive aread-out.Tech.Dig.9th Int.Conf.Solid StateSensors and Actuators(Transducers.97),Chicago,IL,June1997:879一882.
[15]Yeh C and Najafi K,“Alow-voltage tunneling-based silicon micro-accelerometer,IEEETransactions on Electron Devices,1997:1875一1882.
[16]Scheeper P R, Reynold J K and Kenny T W,“Development of a modal analysisAccelerometer based on a tunneling displacement transducer”, InternationalConference on Solid State Sensors and Actuators,Chicago,1997:867一871.
[17]Geiger W, Folkmer B, Sobe U,et al.New design of micro-machined vibrating Rategyroscope with decoupled oscillation modes[J]. Sensors and Actuators,1998,A66:118一124.
[18]Bernstein J, Cho S,King A T,rt al.A micro-machined comb-drive tuning fork gyroscopefor commercial applications[C].Proc.Sensor Expo,Clever land,OH,1994:187一193.
[19]Bernhard E. Boser and Roger T.Howe, Fellow, IEEE,“Surface micro-machinedAccelerometers”, IEEE JOURNAL OF SOLID-STATECIRCUITS,V0L.31,NO.3,MARCH1996:366-375.
[20]刘晓为,王超,谭晓吻,董长春.体硅电容式双轴微加速度计的信号检测新方法传感技术学报.2008年3月,第21卷第3期:490一493.
[21]Chae J, Kulah H and Najafi K.An in-Plane high-sensitivity,low-noise micro-g siliconaccelerometer with CMOS readout circuitry [J].Journal of Micro-electromechanicalSystems,2004,13(4):628-635.
[22]Takao H, Fukumoto Hand Ishida M.A CMOS integrated three-axis accelerometer withcommercial sub micro-meter COS technology and bulk-micro-machining[J].IEEETransactions on Eleetron48:1961-1968.
[23]M.Lemkln,M.Ortiz,N.Wongkomet,B.E.Boser and J.H.Smith,"A3-axis surfacemicro-machined sigma-delta accelerometer "0ISSCC Dig.Tech.Papers,Feb.1997:202-203.
[24]董景新.微惯性仪表.微机械加速度计[M].北京:清华大学出版社.2003.
[25]朱鸣.新结构SOI材料与器件物理研究.[博士学位论文].上海,中国科学院上海微系统与信息技术研究所，2005，71-90.
[26]陈宇晓.电容式微机械静电伺服加速度计系统分析.电子科技大学.硕士学位论文.2003.
[27]李宝清，陆德仁，王渭源.变面积结构微机械电容式加速度传感器[J].中国工程科学,2000,2(2):36-39.
[28]任杰,樊尚春.一种双轴电容式微机械加速度传感器[J].传感技术学报.2006.19(5):2174-2176.
[29]Tar-Ran Hsu著,王晓浩等译.MEMS和微系统设计与制造.机械工业出版社,2004.
[30]罗斯建.电容式微机械加速度计检测电路研究.[硕士学位论文],浙江,浙江大学,2007:8一28.
[31]郑旭东,曹学成,郑阳明等一种电容式微机械加速度计的设计.传感技术学报,2008,21[2]:226一229.
[32]Hou Hai ying. Modeling inertial sensor errors using Allan variance[D]. Canada:University of Calgary at Albert a,2004.
[33]赵君辙,潘卫红.悬丝支撑加速度计标度因数温度系数补偿方法研究[J].计测技术.2007,8，27(6):26-28.
[34]彭承明，曾占魁，舒嵘，张一坚.静电加速度计标度因数和零偏误差标定[J].中国惯性技术学报.2009.10,17(5):583-584.
[35]杨常松，徐晓苏.捷联惯导系统加速度计标度因数和安装误差的试验标定[J].测控技术.2005,24(12):57-59.
[36]马博禹，董雪明，何懿才，张大鹏.SNJ一1型石英加速度计标度因数温度漂移曲线[J].工业技术，2010（14）:97-98.
[37]Hou H. Modeling Inertial Sensors Errors Using Allan Variance. Dissertation for theMaster Degree. Calgary: University of Calgary,2004.
[38]IEEE Standard Specification Format Guide and Test Procedure for Single-AxisInterferometric Fiber Optic Gyros. IEEE,1997.
[39]El-Sheimy N, Hou H, Niu X. Analysis and modeling of inertial sensors using Allanvariance. IEEE Trans Instrum Meas,2008,57:140—149.
[40]Allan D W. Statistics of atomic frequency standards. Proc IEEE,1966,54:221—230.
[41]Hou H, El-Sheimy N. Inertial sensors errors modeling using Allan variance. In:Proceedings of ION GPS/GNSS2003. Portland: The US Institute of Navigation, ION,2003.2860-2867.
[42]孙以材，刘新福，孟庆浩.传感器非线性信号的智能处理与融合[M].冶金工业出版社，2010.
[43]陈萍，陈蓉蓉.一种压力传感器温度补偿新方法[J].计算技术与自动化，2009.12,28(4):49-52.
[44]李国玉，孙以材，潘国锋，等.基于BP网络的压力传感器信息融合[J].哈尔滨理工大学学报，2005，26（2）：168-171.
[45]赵海兵，王学德.基于小波神经网络的压力传感器温度补偿方法[J].仪表技术，2007,12:45-47.
[46]徐平，张勇，侯占强，等.基于MS3110的差分电容检测方法研究及其电磁兼容性设计[J].仪表技术与传感器，2008(5)：60-62.
[47]刘伟玲，耿世钧，赵海文，等.虚拟测试系统G语言编程的设计与实现.河北工业大学学报，1999，28(6).
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