四叶片微陀螺结构设计与加工工艺研究
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摘要
振动式微陀螺是利用哥氏效应工作的测角传感器,以其外形尺寸小、质量轻、功耗低、启动快、成本低、可靠性高和易于数字化等优点已逐步在军用和民用市场得到广泛的应用。四叶片微陀螺是一种具有完全对称的驱动模态和检测模态的微陀螺,它的性能与结构设计、加工工艺密切相关。本文针对四叶片微陀螺结构设计与加工工艺,开展了以下研究:
1.四叶片微陀螺基本原理分析。根据四叶片微陀螺基本结构,建立了四叶片微陀螺的动力学模型,推导了微陀螺关键运动参数的表达式,并在此基础上分析了微陀螺的灵敏度,得出影响灵敏度的关键因素。分析了四叶片微陀螺的空气阻尼形式,提出了减小空气阻尼的措施。
2.四叶片微陀螺结构分析与设计。分析了四种形式的微陀螺支撑结构:平端支撑结构、开孔支撑结构、凸台支撑结构和凹槽支撑结构,对比了四种支撑结构的差别,综合考虑模态频率分离、支撑能量损耗和目前加工工艺等因素,确定采用平端支撑结构。设计了四叶片微陀螺主要结构参数。分析了主要结构参数对模态频率的影响,并分析了不同参数误差对模态频差的影响程度,为微陀螺加工工艺设计提供了指导依据。
3.四叶片微陀螺加工工艺研究。包括硅结构的预埋掩模湿法腐蚀工艺、玻璃基板加工工艺、惯性质量棒和支撑底座的加工工艺。基于以上加工工艺,对微陀螺的装配进行了分析,得出主要装配误差形式,并提出了改进措施。
4.四叶片微陀螺性能测试,包括微陀螺静态电容测试、微陀螺模态测试和哥氏力测试。微陀螺样机的静态电容为3.289pF,与理论值误差小于5%;大气环境下,驱动模态频率和检测模态频率分别为2.676KHz和2.699KHz,品质因数分别为10.5和17.4;真空封装条件下,驱动模态频率和检测模态频率分别为2.689KHz和2.721KHz,品质因数分别为432和672.3。
The vibrating microgyroscope is an angle measurement sensor based on the Coriolis Effect. For the advantages of small size, low weight, low power, fast startup, low cost, high reliability, being easy to be digital and et al, the microgyroscope is becoming more and more popular in the applications of military and civil fields. The quatrefoil microgyroscope is a totally symmetrical structure, the performance of which is closely connected with the structural design, fabrication process. This dissertation focuses on the structural design and fabrication process. Subsequent research contents are included in this dissertation.
1. The basic structure of the quatrefoil microgyroscope is designed. The dynamic model of the microgyroscope is established. The expressions of the key kinematical parameters are deduced based on the dynamic model. The sensitivity is analyzed, and the crucial factors affecting the sensitivity are also found. The air damping of the quatrefoil gyroscope is analyzed and simulated. According to the special structure of the quatrefoil gyroscope, some measures to decrease the squeeze air damping are put forward.
2. The structural analysis and design of the quatrefoil microgyroscope is studied. Four kinds of support structure for the quatrefoil microgyroscope are analyzed. According to some factors, including mode separating, support energy loss and the current fabrication process, the flat support structure is chosen for the structural design of the quatrefoil microgyroscope. The main structural parameters of the quatrefoil microgyroscope are designed. The influence of structural parameters on the mode frequency is studied. The influence of the errors of the structural parameters is analyzed. It provides guidance for the fabrication process designed for the quatrefoil microgyroscope.
3. The fabrication process is deeply studied, including the pre-embedded mask wet etching of the silicon structure, the wet etching of the Pyrex glass, the fabrication process of the inertial mass pole and support pedestal. Based on the fabrication process above, the assembly process of the microgyroscope is analyzed, the assembly errors are obtained and some steps for improving the assembly process are taken consideration.
4. A fabricated quatrefoil microgyroscope is characterized, including static capacitance test, mode test and Coriolis force test. The static capacitance is 3.289pF,and the error between the capacitance test result and the theoretic value is less than 5%;The drive frequency and sense frequency are 2.676 KHz and 2.699 KHz at atmosphere pressure, and the Q-factor values are 10.5 and 17.4, respectively; after being packaged in the vacuum, the drive frequency and sense frequency are 2.689 KHz and 2.6721 KHz, and the Q-factor values are 432 and 672.3, respectively.
1.四叶片微陀螺基本原理分析。根据四叶片微陀螺基本结构,建立了四叶片微陀螺的动力学模型,推导了微陀螺关键运动参数的表达式,并在此基础上分析了微陀螺的灵敏度,得出影响灵敏度的关键因素。分析了四叶片微陀螺的空气阻尼形式,提出了减小空气阻尼的措施。
2.四叶片微陀螺结构分析与设计。分析了四种形式的微陀螺支撑结构:平端支撑结构、开孔支撑结构、凸台支撑结构和凹槽支撑结构,对比了四种支撑结构的差别,综合考虑模态频率分离、支撑能量损耗和目前加工工艺等因素,确定采用平端支撑结构。设计了四叶片微陀螺主要结构参数。分析了主要结构参数对模态频率的影响,并分析了不同参数误差对模态频差的影响程度,为微陀螺加工工艺设计提供了指导依据。
3.四叶片微陀螺加工工艺研究。包括硅结构的预埋掩模湿法腐蚀工艺、玻璃基板加工工艺、惯性质量棒和支撑底座的加工工艺。基于以上加工工艺,对微陀螺的装配进行了分析,得出主要装配误差形式,并提出了改进措施。
4.四叶片微陀螺性能测试,包括微陀螺静态电容测试、微陀螺模态测试和哥氏力测试。微陀螺样机的静态电容为3.289pF,与理论值误差小于5%;大气环境下,驱动模态频率和检测模态频率分别为2.676KHz和2.699KHz,品质因数分别为10.5和17.4;真空封装条件下,驱动模态频率和检测模态频率分别为2.689KHz和2.721KHz,品质因数分别为432和672.3。
The vibrating microgyroscope is an angle measurement sensor based on the Coriolis Effect. For the advantages of small size, low weight, low power, fast startup, low cost, high reliability, being easy to be digital and et al, the microgyroscope is becoming more and more popular in the applications of military and civil fields. The quatrefoil microgyroscope is a totally symmetrical structure, the performance of which is closely connected with the structural design, fabrication process. This dissertation focuses on the structural design and fabrication process. Subsequent research contents are included in this dissertation.
1. The basic structure of the quatrefoil microgyroscope is designed. The dynamic model of the microgyroscope is established. The expressions of the key kinematical parameters are deduced based on the dynamic model. The sensitivity is analyzed, and the crucial factors affecting the sensitivity are also found. The air damping of the quatrefoil gyroscope is analyzed and simulated. According to the special structure of the quatrefoil gyroscope, some measures to decrease the squeeze air damping are put forward.
2. The structural analysis and design of the quatrefoil microgyroscope is studied. Four kinds of support structure for the quatrefoil microgyroscope are analyzed. According to some factors, including mode separating, support energy loss and the current fabrication process, the flat support structure is chosen for the structural design of the quatrefoil microgyroscope. The main structural parameters of the quatrefoil microgyroscope are designed. The influence of structural parameters on the mode frequency is studied. The influence of the errors of the structural parameters is analyzed. It provides guidance for the fabrication process designed for the quatrefoil microgyroscope.
3. The fabrication process is deeply studied, including the pre-embedded mask wet etching of the silicon structure, the wet etching of the Pyrex glass, the fabrication process of the inertial mass pole and support pedestal. Based on the fabrication process above, the assembly process of the microgyroscope is analyzed, the assembly errors are obtained and some steps for improving the assembly process are taken consideration.
4. A fabricated quatrefoil microgyroscope is characterized, including static capacitance test, mode test and Coriolis force test. The static capacitance is 3.289pF,and the error between the capacitance test result and the theoretic value is less than 5%;The drive frequency and sense frequency are 2.676 KHz and 2.699 KHz at atmosphere pressure, and the Q-factor values are 10.5 and 17.4, respectively; after being packaged in the vacuum, the drive frequency and sense frequency are 2.689 KHz and 2.6721 KHz, and the Q-factor values are 432 and 672.3, respectively.
引文
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