基于氟化镁波导的乐甫波器件特性研究
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摘要
乐甫波传感器是声表面波传感器中的一种,它的灵敏度最高并可在液相环境中应用,使得它具有广阔的应用前景。波导层材料的性质对乐甫波传感器的各项性能指标都有很大的影响。理论与实验已证明,波导层材料除了需具备低的剪切速度和密度外,还需具有良好的弹性和低的声吸收。本文探索了一种低密度无机材料——MgF_2来作为乐甫波器件的波导材料。
本论文采用真空蒸发法在石英基底上沉积了MgF_2薄膜,对薄膜的制备工艺参数诸如基片温度、蒸发电流以及热处理温度等进行了系统的研究。对不同工艺制备的薄膜样品进行X射线衍射和扫描电镜表征分析,结果表明,当蒸发电流为100A,基片温度为300℃时,能获得表面平整度高、晶粒大小均匀和晶粒取向单一的MgF_2薄膜,再通过300℃退火一小时后,薄膜的晶粒略有增大,表面粗糙度和致密度没有明显的变化,而且薄膜(110)峰增强的同时,出现了(220)和(211)峰。通过用QCM测量薄膜质量,用SEM断面获得薄膜厚度,根据一般计算体材料密度的方法计算得到MgF_2薄膜密度为2.9g/cm~3。
用网络分析仪对不同厚度MgF_2波导层的乐甫波器件进行测试,得到了器件频率、插损、Q值和质量灵敏度与波导厚度的关系。结果表明,当波导层厚度为2.5μm左右时,器件的插损最小(-23.93dB),Q值最大(2193.8)。当波导层厚度为6.5μm左右时,器件获得了最大质量灵敏度416.7cm~2g~(-1)。对相同波导厚度的乐甫波器件在不同温度下进行退火处理,发现器件的Q值、质量灵敏度随退火温度的升高而增大,插损随退火温度的升高而减小。最后研究了基于PMMA/MgF_2复合波导的乐甫波器件。实验结果表明,当MgF_2层的厚度一定时,器件的质量灵敏度和插损都随着PMMA层厚度的增加而增大。我们还发现,对于相同厚度的波导,PMMA/MgF_2复合波导的乐甫波器件比MgF_2单层波导的乐甫波器件具有更高的质量灵敏度。
Love wave sensor is a kind of surface acoustic wave sensor.Due to its highest mass sensitivity and application in liquid media,love wave sensor has a promising application in the future.Properties of guiding layer materials have an important influence on the performance of love wave sensors.Both theory and experiment have shown that guiding layer materials could have a good flexibility and low sound absorption,in addition to having low shear velocity and density.A new material MgF_2 used for love wave device guiding layer material is extensively discussed in this thesis.
In this thesis,MgF_2 thin films were prepared on quartz substrates by thermal evaporation.The deposition parameters such as substrate temperature,evaporation current,and heat treatment temperature were systematically studied.The films prepared with different parameters were characterized by X-ray diffraction(XRD) and scanning electron microscope(SEM).MgF_2 thin films with low surface roughness,uniform crystal grain,and unique crystalline orientation were obtained when the evaporation current was 100A and the substrate temperature was 300℃.After heat treatment at 300℃for one hour,film grain sizes increased slightly,but surface roughness and tightness concentration did not change obviously.In addition,MgF_2(110) peak was enhanced,while(220) peak and(211) peaks appeared simultaneously.The mass and thickness of MgF_2 films were measured by QCM and SEM respectively.As a result,the film density of MgF_2 film was 2.9g/cm~3 deduced.
Love wave devices with different thickness of guiding layer were tested by network analyzer,and the relationship of gttiding layer thickness with frequency, insertion loss,Q value and mass sensitivity were discussed.The results showed that minimum insertion loss of-23.93dB and maximum Q value of 2193.8 were achieved with 2.5μm thick guiding layer,and the maximum sensitivity up to 416.7cm~2g~(-1) of guiding layer with thickness was 6.5μm.love wave devices were annealed at different temperature,the results showed that the Q value and mass sensitivity of the devices increased with increasing annealing temperature,but reverse tendency was observed for insertion loss.At last,a novel multilayer structure,consisting of PMMA/MgF_2/quartz, were evaluated for love wave device.The results indicated that for a certain thickness of MgF_2 layer,mass sensitivity and insertion loss of the device increased with increasing thickness of PMMA layer.For a certain thickness of guiding layer,Love wave device with PMMA/MgF_2 guiding layer has a higher mass sensitivity than that with MgF_2 guiding layer.
本论文采用真空蒸发法在石英基底上沉积了MgF_2薄膜,对薄膜的制备工艺参数诸如基片温度、蒸发电流以及热处理温度等进行了系统的研究。对不同工艺制备的薄膜样品进行X射线衍射和扫描电镜表征分析,结果表明,当蒸发电流为100A,基片温度为300℃时,能获得表面平整度高、晶粒大小均匀和晶粒取向单一的MgF_2薄膜,再通过300℃退火一小时后,薄膜的晶粒略有增大,表面粗糙度和致密度没有明显的变化,而且薄膜(110)峰增强的同时,出现了(220)和(211)峰。通过用QCM测量薄膜质量,用SEM断面获得薄膜厚度,根据一般计算体材料密度的方法计算得到MgF_2薄膜密度为2.9g/cm~3。
用网络分析仪对不同厚度MgF_2波导层的乐甫波器件进行测试,得到了器件频率、插损、Q值和质量灵敏度与波导厚度的关系。结果表明,当波导层厚度为2.5μm左右时,器件的插损最小(-23.93dB),Q值最大(2193.8)。当波导层厚度为6.5μm左右时,器件获得了最大质量灵敏度416.7cm~2g~(-1)。对相同波导厚度的乐甫波器件在不同温度下进行退火处理,发现器件的Q值、质量灵敏度随退火温度的升高而增大,插损随退火温度的升高而减小。最后研究了基于PMMA/MgF_2复合波导的乐甫波器件。实验结果表明,当MgF_2层的厚度一定时,器件的质量灵敏度和插损都随着PMMA层厚度的增加而增大。我们还发现,对于相同厚度的波导,PMMA/MgF_2复合波导的乐甫波器件比MgF_2单层波导的乐甫波器件具有更高的质量灵敏度。
Love wave sensor is a kind of surface acoustic wave sensor.Due to its highest mass sensitivity and application in liquid media,love wave sensor has a promising application in the future.Properties of guiding layer materials have an important influence on the performance of love wave sensors.Both theory and experiment have shown that guiding layer materials could have a good flexibility and low sound absorption,in addition to having low shear velocity and density.A new material MgF_2 used for love wave device guiding layer material is extensively discussed in this thesis.
In this thesis,MgF_2 thin films were prepared on quartz substrates by thermal evaporation.The deposition parameters such as substrate temperature,evaporation current,and heat treatment temperature were systematically studied.The films prepared with different parameters were characterized by X-ray diffraction(XRD) and scanning electron microscope(SEM).MgF_2 thin films with low surface roughness,uniform crystal grain,and unique crystalline orientation were obtained when the evaporation current was 100A and the substrate temperature was 300℃.After heat treatment at 300℃for one hour,film grain sizes increased slightly,but surface roughness and tightness concentration did not change obviously.In addition,MgF_2(110) peak was enhanced,while(220) peak and(211) peaks appeared simultaneously.The mass and thickness of MgF_2 films were measured by QCM and SEM respectively.As a result,the film density of MgF_2 film was 2.9g/cm~3 deduced.
Love wave devices with different thickness of guiding layer were tested by network analyzer,and the relationship of gttiding layer thickness with frequency, insertion loss,Q value and mass sensitivity were discussed.The results showed that minimum insertion loss of-23.93dB and maximum Q value of 2193.8 were achieved with 2.5μm thick guiding layer,and the maximum sensitivity up to 416.7cm~2g~(-1) of guiding layer with thickness was 6.5μm.love wave devices were annealed at different temperature,the results showed that the Q value and mass sensitivity of the devices increased with increasing annealing temperature,but reverse tendency was observed for insertion loss.At last,a novel multilayer structure,consisting of PMMA/MgF_2/quartz, were evaluated for love wave device.The results indicated that for a certain thickness of MgF_2 layer,mass sensitivity and insertion loss of the device increased with increasing thickness of PMMA layer.For a certain thickness of guiding layer,Love wave device with PMMA/MgF_2 guiding layer has a higher mass sensitivity than that with MgF_2 guiding layer.
引文
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[26]McHale G,Newton M I,Martin F.Resonant conditions for love wave guiding layer thickness [J].Appl Phys Lett,2001,79(21):3542-3543
[27]Turton A,Bhattacharyya D and Wood D.Liquid density analysis of sucrose and alcoholic beverages using polyimide guided love mode acoustic wave sensors[J].Meas Sci Technol,2006,17:257-263
[28]Rasmusson A,Gizeli E.Comparison of Poly(methylmethacrylate) and Novolak waveguide coatings for an acoustic biosensor[J].J Appl Phys,2001,90(12):5911-5914
[29]Kovacs G,Lubking G W,Vellekoop M J,et al.Love wave for(bio) chemical sensing in liquids [J].IEEE Ultrasonic Symp,1992:281-285
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[37] Moreira Felicidade, Hakiki Mohamed El, et al. Numerical Development of ZnO/Quartz Love Wave Structure for Gas Contamination Detection [J]. IEEE Sensors Journal, 2007, 7(3): 336-341
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[2]David P.Morgan.Surface wave devices for signal processing,USA:Elsevier Science,1992
[3]Curie and P.Curie,Bull.Soc.Min.France,1880,3,90
[4]White.R.M and Voltmer.F.W.Direct piezoelectric coupling to surface elastic wave[J].Applide Physics Letters,1965,7(12):314-316
[5]Raleigh.L.Electrical vibrations on a thin anchor-ring,Proc.R.Soc.A,Math Phys.Sci,1885,17:4-11
[6]潘海峰,朱惠忠,冯冠平.适合于液相检测的乐甫波传感器[J].仪表技术与传感器,2003,3:10-12.
[7]Sweyer.M,J.Andle,D.McAllister,L.French,and J.Vetelino.An acoustic plate mode sensor for aqueous mercury[J].Proc.Ultrason.Symp.1996,1:355-358
[8]Teston F,Feuillard G,Lethiecq M.Propagation of Lamb waves in 1-3 piezocomposite bordered by liquids[J],proceedings of the Annual IEEE International Frequency control Symposium,1999,2:1066-1069
[9]Jia.H,Duhamel.R,et al.Improvement of Lamb waves sensors:Temperature sensitivity Compensation[J].Sensors and Actuators A.2005,121:321-326
[10]Andra.Hsien I.Meng,Biological Applications of Micro machined Ultrasonic Flexural Plate Wave Technology[D].Berkeley,1999.
[11]C.Wold et al.Temperature measurement using surface skimming bulk waves[J].Proc Ultrason.Symp.1999,1:441-444
[12]胡友旺,史建亮,贾宏光,吴一辉.Love波传感器及其质量灵敏度测试[J].传感技术学报,2006,19(5):2126-2129
[13]史建亮,胡友旺,贾宏光,张平.液相检测的Love波传感器的制作与研究[J].压电与声光.2007.29(5):533-536
[14]潘海峰,朱惠忠,冯冠平.乐甫波传感器及其应用进展[J].传感器技术.2003.22(12):1-4
[15]刘虹,王源升,刘清山,朱金华.Love波免疫传感器在免疫分析中的研究[J].分析化学.2006.34(1):129-134
[16]刘虹,高志贤,王源升,刘清山,朱惠忠.检测B型葡萄球菌肠毒素的Love波免疫传感器研究[J].传感器与微系统.2006.25(3):28-31
[17]武以立,邓盛刚,王永德.声表面波原理及其在电子技术中的应用.北京:国防工业出版社,1983,212-213
[18]Wang.Z and J.N.Cheeke.Sensitivity analysis for Love mode acoustic gravimetric sensors[J].Appl.Phys.Lett.1994,64(22) 2940-2942
[19]Mchale.G,M.I.Newton,and F.Martin.Layer guided shear horizontally polarized acoustic plate modes[J].Journal of Applied Physics.2002,91(9) 5735-5744
[20]Mchale.G,M.I.Newton,and F.Martin.Theoretical mass sensitivity of Love wave and layer guided acoustic plate mode sensors[J].Journal of Applied Physics.2002,91(12):9701-9710
[21]Gizeli E,Stevenson A C,Goddard N J,and Lowe C R.A Novel Love-plate Acoustic sensor Utilizing polymer Overlayers[J].IEEE Trans UFFC 1992,39(5):657-659
[22]Josse F,Bender F,Cernosek RW.Guided Shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids[J].Anal Chem 2001,73(24):5937-5944
[23]Bade N,Rapp M.Discrimination of aliphatic homologues and isomers uding trap and GC enhanced Saw based electronic noses[J].Sensors 2004 Proceedings of IEEE,2004.3:1183-1186
[24]Avramov I D,Rapp M,Voigt A,et al.Comparative studies on polymer coated SAW and STW resonators for chemical gas sensor applications[C].IEEE/EIA Inter Freq Control Syrup.and Exhibition,2000:58-65
[25]L(a|¨)nge K,Grimm S,Rapp M.Chemical modification of parylene coating for SAW biosensors [J].Sensor Actuat B,2007,125(2):441-446
[26]McHale G,Newton M I,Martin F.Resonant conditions for love wave guiding layer thickness [J].Appl Phys Lett,2001,79(21):3542-3543
[27]Turton A,Bhattacharyya D and Wood D.Liquid density analysis of sucrose and alcoholic beverages using polyimide guided love mode acoustic wave sensors[J].Meas Sci Technol,2006,17:257-263
[28]Rasmusson A,Gizeli E.Comparison of Poly(methylmethacrylate) and Novolak waveguide coatings for an acoustic biosensor[J].J Appl Phys,2001,90(12):5911-5914
[29]Kovacs G,Lubking G W,Vellekoop M J,et al.Love wave for(bio) chemical sensing in liquids [J].IEEE Ultrasonic Symp,1992:281-285
[30] Du J, Harding G L, Ogilvy JA, et al. A study of Love-wave acoustic sensors [J]. Sensor Actuat A, 1996, 56: 211-219
[31] Harding G L and Du J. Design and properties of quartz-based love wave axoustic sensors incorporating silicon dioxide and PMMA guiding layers [J]. Smart Mater Struct, 1997, 6: 716-720
[32] Jakoby B and Vellekoop M J. Properties of love waves: applications in sensors [J]. Smart Mater Struct, 1997, 6: 668-679
[33] Soluch. W. Love wave synchronous resonator on quartz with SiO_2 layer [J]. Electronics Letters. 2006, 42(8) 495-497
[34] Kalantar-Zadeh K, Trinchi A, Wlodarshi W, et al. A novel love-mode device based on a ZnO/ST-cut quartz crystal structure for sensing applications [J]. Sensor Actuat A, 2002, 100: 135-143
[35] Chu S Y, Water W, Liaw J T. An investigation of the dependence of ZnO film on the sensitivity of love mode sensor in ZnO/quartz structure [J]. Ultrasonics, 2003, 41:133-139
[36] Water W, Yang Y S. The influence of calcium doped ZnO films on Love wave sensor characteristics [J]. Sensor and Actuators A, 2006,127: 360-365
[37] Moreira Felicidade, Hakiki Mohamed El, et al. Numerical Development of ZnO/Quartz Love Wave Structure for Gas Contamination Detection [J]. IEEE Sensors Journal, 2007, 7(3): 336-341
[38] Geoffrey L. Harding. Mass sensitivity of Love-mode acoustic sensors incorporating silicon dioxide and silicon-oxy-fluoride guiding layers [J]. Sensors and Actuators A, 2001,88:20-28
[39] Jia Du, Geoffrey L. Harding. A multilayer structrure for Love-mode acoustic sensors [J]. Sensors and Actuators A, 1998,65:152-159
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