基于共面波导缺陷结构的RF MEMS滤波器理论研究与优化设计
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摘要
RF MEMS滤波器由于其高集成性、低损耗、小体积、优良线性度及可以实现频率调节等特性,近年来成为国内外研究热点。本文首先研究并联电容式RF MEMS开关基础理论和设计方法,包括对称载荷与非对称载荷MEMS开关的结构模型建立,设计了三种无“吸合效应”的MEMS开关结构模型,利用微带特性阻抗法实现了MEMS电容的提取,提出了高隔离低驱动电压的MEMS开关模型。共面波导传输线由于信号线与地在一个平面上,被广泛的用于RF MEMS滤波器以减少寄生效应等。本文基于保角变换研究了共面波导缺陷结构等效电容值、特性阻抗及对应的等效电路,包括共面波导缺陷地结构与信号线缺陷结构对应的电容值、特性阻抗及对应的等效电路。基于共面波导缺陷地结构设计了三种带阻滤波器结构模型,并提出了一种基于缺陷地特性阻抗的带阻滤波器设计方法,研究了相应的等效电路。在此基础上设计了基于共面波导缺陷地结构的MEMS可调带阻滤波器结构模型,详细分析了该滤波器谐振单元射频响应特性及MEMS开关结构,研究了MEMS开关在可调滤波器中的等效电路和可调原理,分析了MEMS可调滤波器加工、测试及误差,提出了误差修正方法等。
本文研究了基于共面波导信号线缺陷结构的MEMS滤波器,包括可调带通滤波器、可调带阻滤波器及可调低通滤波器等。分析了基于单个MEMS开关的双阶可调滤波器结构模型,研究了非对称载荷的MEMS开关在滤波器中的等效电路及可调方式。通过对信号线凹槽结构的优化实现滤波器带宽和中心频点的调整,并通过对信号线凹槽的结构调节实现带通与带阻滤波器的转换。同时利用信号线凹槽结构与MEMS开关实现了可调低通滤波器的设计。研究了凹槽结构、数量对该类型可调低通滤波器的影响,基于保角变换实现了基于共而波导结构的低通滤波器等效电路提取。
本文同时分析了滤波器工艺加工及测试方法,包括非可调滤波器及MEMS可调滤波器的加工和测试。分析了MEMS开关的工艺加工流程,设计了具体的工艺流程单和对应的掩模板,并实现了加工测试。与此同时文中对MEMS开关失效进行分析,提出了相应的解决方案。
本文主要创新点：
1.设计了三种无“吸合”效应和一种高隔离度低驱动电压的MEMS开关结构模型,利用微带特性阻抗法实现了MEMS开关等效电容提取；提出了共面波导缺陷结构等效电容和特性阻抗计算方法,实现了CPW地和信号线缺陷结构等效电容和特性阻抗的计算,为基于CPW凹槽结构设计微波器件提供支持。(第二、三章)
2.基于CPW缺陷地结构特性阻抗,提出了一种CPW带阻滤波器的设计方法,实现了从集总参数带阻滤波器向分布式CPW结构带阻滤波器的转换,提供了一种基于CPW带阻滤波器的设计途径。(第四章)
3.设计了一种基于CPW缺陷地和MEMS开关的混合谐振器,该谐振器可以有效减小体积。建立了MEMS开关高度变化与谐振频率点之间非线性关系的数学模型.用于分析开关驱动电压、开关高度和对应的谐振频率点之间的关系。(第四章)
4.提出了基于单个MEMS开关的二阶可调带通滤波器结构模型,该模型有效的减小了滤波器体积,提高了滤波器稳定性和开关同步性,可调范围达30%。(第五章)
Because the features of RF MEMS filter, such as the highly integrated, low loss, small size, excellent linearity and frequency adjustment, RF MEMS filter become the research focus in the world. The paper studied the basic knowledge and design methods of shunt capacitive RF MEMS switch first, including symmetry load and asymmetry load structures of MEMS switch model. It designed three kinds of "no pull-down" MEMS switch, achieved the extraction of MEMS capacitance using the micro-strip characteristic impedance method, and proposed a MEMS structure model with high isolation and low drive voltage. The coplanar waveguide transmission line was widely used in RF MEMS filter to reduce the parasitic effect of parameters, since the signal line and ground in a planar. The paper studied the equivalent capacitance and characteristic impedance of CPW defect structures based on conformal transformation, including the defect structure in CPW ground and CPW signal line. It designed three kinds structure model of band-stop filter, proposed a design method of band-stop filter based on characteristic impedance of defect CPW structure, studied the equivalent circuit of the filter, on this basis, It designed the tunable band-stop MEMS filter model using defect ground in CPW structure, analyzed frequency feature and MEMS switch structure of filter unit, studied the equivalent circuit and adjustable principle of MEMS switch in the tunable filter, and then analyzed the fabrication, test and test error of MEMS switch, proposed the method of error correction and so on.
The paper studied the MEMS filter using defect structure in signal line of CPW, including tunable band-pass filter, tunable band-stop filter and tunable low-pass filter. The paper also analyzed the single MEMS switch for achieving two stage tunable filter model, the equivalent circuit and adjustable method of symmetry load MEMS switch in the filter was analyzed and studied. It achieved the adjustment of filter band, center frequency and the conversion with pass and band-stop filter by revising the slots in signal line. It used the signal line slot and MEMS switch to design the tunable low-pass filter. The slot structure of this kind filter was studied, and the filter equivalent circuit was extracted by using conformal transformation.
The fabrication and test of filter in this paper were analyzed and studied, including non-tunable filter and tunable MEMS filter. It analyzed the process of fabrication, designed the filter MASKs, and complete the filter test. The paper also analyzed the fall of MEMS switch, and proposed the related solution.
The main innovation in this paper:
1. Design three kinds "no-pull down" MEMS switch and a kind High isolation low drive voltage MEMS switch. It used micro-strip characteristic impedance method to achieve the equivalent capacitance extraction of the MEMS switch and applied a double integral to obtain the elasticity coefficient extraction of asymmetric loading MEMS switch. Proposed the calculate method of capacitance and characteristic impedance of defect CPW structure, achieved the method support of designing the filter using such characteristic impedance.(Chapter two and three)
2. Proposed a method to design band-stop filter using defect CPW ground based on the CPW characteristic impedance. The method achieve the conversion of band-stop filters from lumped parameter to the distributed CPW band-stop filter, which provide away to design the CPW filter.(Chapter four)
3. Design a hybrid resonator based on defect CPW ground and MEMS switch, the resonator can usefully reduce the unit volume. It also establish the mathematical model of the nonlinear relationship between the height variation of MEMS switches and the resonant frequency, which is used to analyze the relationship among the drive voltage, height, and resonator frequency of MEMS switch.(Chapter four)
4. Design the band pass tunable filter structure model based on a single MEMS switch, which can reduce the filter size, the stability and synchronous, adjustable range of up to30%.(Chapter five)
本文研究了基于共面波导信号线缺陷结构的MEMS滤波器,包括可调带通滤波器、可调带阻滤波器及可调低通滤波器等。分析了基于单个MEMS开关的双阶可调滤波器结构模型,研究了非对称载荷的MEMS开关在滤波器中的等效电路及可调方式。通过对信号线凹槽结构的优化实现滤波器带宽和中心频点的调整,并通过对信号线凹槽的结构调节实现带通与带阻滤波器的转换。同时利用信号线凹槽结构与MEMS开关实现了可调低通滤波器的设计。研究了凹槽结构、数量对该类型可调低通滤波器的影响,基于保角变换实现了基于共而波导结构的低通滤波器等效电路提取。
本文同时分析了滤波器工艺加工及测试方法,包括非可调滤波器及MEMS可调滤波器的加工和测试。分析了MEMS开关的工艺加工流程,设计了具体的工艺流程单和对应的掩模板,并实现了加工测试。与此同时文中对MEMS开关失效进行分析,提出了相应的解决方案。
本文主要创新点：
1.设计了三种无“吸合”效应和一种高隔离度低驱动电压的MEMS开关结构模型,利用微带特性阻抗法实现了MEMS开关等效电容提取；提出了共面波导缺陷结构等效电容和特性阻抗计算方法,实现了CPW地和信号线缺陷结构等效电容和特性阻抗的计算,为基于CPW凹槽结构设计微波器件提供支持。(第二、三章)
2.基于CPW缺陷地结构特性阻抗,提出了一种CPW带阻滤波器的设计方法,实现了从集总参数带阻滤波器向分布式CPW结构带阻滤波器的转换,提供了一种基于CPW带阻滤波器的设计途径。(第四章)
3.设计了一种基于CPW缺陷地和MEMS开关的混合谐振器,该谐振器可以有效减小体积。建立了MEMS开关高度变化与谐振频率点之间非线性关系的数学模型.用于分析开关驱动电压、开关高度和对应的谐振频率点之间的关系。(第四章)
4.提出了基于单个MEMS开关的二阶可调带通滤波器结构模型,该模型有效的减小了滤波器体积,提高了滤波器稳定性和开关同步性,可调范围达30%。(第五章)
Because the features of RF MEMS filter, such as the highly integrated, low loss, small size, excellent linearity and frequency adjustment, RF MEMS filter become the research focus in the world. The paper studied the basic knowledge and design methods of shunt capacitive RF MEMS switch first, including symmetry load and asymmetry load structures of MEMS switch model. It designed three kinds of "no pull-down" MEMS switch, achieved the extraction of MEMS capacitance using the micro-strip characteristic impedance method, and proposed a MEMS structure model with high isolation and low drive voltage. The coplanar waveguide transmission line was widely used in RF MEMS filter to reduce the parasitic effect of parameters, since the signal line and ground in a planar. The paper studied the equivalent capacitance and characteristic impedance of CPW defect structures based on conformal transformation, including the defect structure in CPW ground and CPW signal line. It designed three kinds structure model of band-stop filter, proposed a design method of band-stop filter based on characteristic impedance of defect CPW structure, studied the equivalent circuit of the filter, on this basis, It designed the tunable band-stop MEMS filter model using defect ground in CPW structure, analyzed frequency feature and MEMS switch structure of filter unit, studied the equivalent circuit and adjustable principle of MEMS switch in the tunable filter, and then analyzed the fabrication, test and test error of MEMS switch, proposed the method of error correction and so on.
The paper studied the MEMS filter using defect structure in signal line of CPW, including tunable band-pass filter, tunable band-stop filter and tunable low-pass filter. The paper also analyzed the single MEMS switch for achieving two stage tunable filter model, the equivalent circuit and adjustable method of symmetry load MEMS switch in the filter was analyzed and studied. It achieved the adjustment of filter band, center frequency and the conversion with pass and band-stop filter by revising the slots in signal line. It used the signal line slot and MEMS switch to design the tunable low-pass filter. The slot structure of this kind filter was studied, and the filter equivalent circuit was extracted by using conformal transformation.
The fabrication and test of filter in this paper were analyzed and studied, including non-tunable filter and tunable MEMS filter. It analyzed the process of fabrication, designed the filter MASKs, and complete the filter test. The paper also analyzed the fall of MEMS switch, and proposed the related solution.
The main innovation in this paper:
1. Design three kinds "no-pull down" MEMS switch and a kind High isolation low drive voltage MEMS switch. It used micro-strip characteristic impedance method to achieve the equivalent capacitance extraction of the MEMS switch and applied a double integral to obtain the elasticity coefficient extraction of asymmetric loading MEMS switch. Proposed the calculate method of capacitance and characteristic impedance of defect CPW structure, achieved the method support of designing the filter using such characteristic impedance.(Chapter two and three)
2. Proposed a method to design band-stop filter using defect CPW ground based on the CPW characteristic impedance. The method achieve the conversion of band-stop filters from lumped parameter to the distributed CPW band-stop filter, which provide away to design the CPW filter.(Chapter four)
3. Design a hybrid resonator based on defect CPW ground and MEMS switch, the resonator can usefully reduce the unit volume. It also establish the mathematical model of the nonlinear relationship between the height variation of MEMS switches and the resonant frequency, which is used to analyze the relationship among the drive voltage, height, and resonator frequency of MEMS switch.(Chapter four)
4. Design the band pass tunable filter structure model based on a single MEMS switch, which can reduce the filter size, the stability and synchronous, adjustable range of up to30%.(Chapter five)
引文
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