光纤束三维成像系统设计和实验
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摘要
光纤探针作为三维形貌测量技术的传感器,具有非接触、高精度等优点。本文提出的由七根单模光纤组成的光纤束作为物体表面三维形貌的探测传感器,是对单根单模光纤作为探头的改进。这七根光纤将被测物体表面的发射光分成两部分:中心光纤的信号光和周围光纤的参考光。这两路光信号的强度是被测物体表面的三维轮廓对照射激光强度调制的结果,而光强又与光纤的耦合效率有关,因此本论文还涉及光纤耦合效率的讨论。本论文还设计实现了基于单片机控制TA8435步进电机驱动芯片的三维平移台,它可在三个方向上调节微位移。全文分为五章,具体如下:
第一章绪论,说明了开展本论文研究工作的背景,主要分析比较了目前已经存在的三维表面轮廓测量技术,以及本文的研究目标和主要工作等。
第二章光纤探针的理论基础和光纤束探头的工作原理,主要从光纤束探头接收物体表面的反射光的耦合效率来理论分析,该部分包括中心信号光纤和周围参考光纤;然后介绍了关于步进电机的一些基础知识。
第三章基于单片机控制步进电机的三维平移台,本章详细介绍了基于单片机和步进电机驱动芯片的平移台的驱动电路部分。主要内容包括:整体电路设计、硬件设计、上位机软件设计和下位机软件设计。
第四章光纤束探头的光信号探测实验,本章对光纤束探头的理论分析进行实验性的验证,利用光纤束探头进行光信号的探测,并对实验结果进行分析。
第五章为总结和展望。总结本文的主要工作,找出目前存在的问题,并探讨今后进一步深入研究和需要完善的方向。
As a method of acquisition sensor,optical fiber probe has many advantages, such as noncontact ,high accuracy.This thesis focuses on improving the optical fiber probe,the improved one is an optical fiber bundle which is composed of 7 single model fibers,and the fibers of the bundle can be divided into two parts:signal fiber and reference fibers.The signal fiber is the center one of the fiber bundle,the others are the reference fibers encircling the signal fiber.Both signal and reference are result of intensity modulation of the reflex by the sample,the intensity modulation is related to the coupling efficiency of optical fiber.This thesis discusses the coupling efficiency of both signal fiber and reference fiebr.This thesis also designs a three-dimensional control platform which is based on three TA8435 controlled by a MCU—P89C52. The thesis is composed of five chapters as follows:
Chapter 1: The background of carrying out this thesis. The main methods of 3-D profile measurement and their comparison are summarized. And the major objective and works are outlined.
Chapter 2: The fundamental theoretics of optical fiber probe. Theoretically analyze the coupling efficiency of both signal fiber and reference fiber. And the introduction of stepmotor.
Chapter 3:the three-dimensional control platform based on stepmotor drive chip controlled by MCU, this chapter introduces the design of drive circuit, including circuit design, hardware design, software of PC and MCU.
Chapter 4: the experiment of detecting the lingt signal using the fiber bundle probe. This chapter introduces the establish the experiment system to detect the light signal of the high reflective coefficient sample using fiber bundle probe; And the analysis of the experiment result.
Chapter 5: summarize the main work of the paper; find the current difficulties and discuss the further improvement in the future.
第一章绪论,说明了开展本论文研究工作的背景,主要分析比较了目前已经存在的三维表面轮廓测量技术,以及本文的研究目标和主要工作等。
第二章光纤探针的理论基础和光纤束探头的工作原理,主要从光纤束探头接收物体表面的反射光的耦合效率来理论分析,该部分包括中心信号光纤和周围参考光纤;然后介绍了关于步进电机的一些基础知识。
第三章基于单片机控制步进电机的三维平移台,本章详细介绍了基于单片机和步进电机驱动芯片的平移台的驱动电路部分。主要内容包括:整体电路设计、硬件设计、上位机软件设计和下位机软件设计。
第四章光纤束探头的光信号探测实验,本章对光纤束探头的理论分析进行实验性的验证,利用光纤束探头进行光信号的探测,并对实验结果进行分析。
第五章为总结和展望。总结本文的主要工作,找出目前存在的问题,并探讨今后进一步深入研究和需要完善的方向。
As a method of acquisition sensor,optical fiber probe has many advantages, such as noncontact ,high accuracy.This thesis focuses on improving the optical fiber probe,the improved one is an optical fiber bundle which is composed of 7 single model fibers,and the fibers of the bundle can be divided into two parts:signal fiber and reference fibers.The signal fiber is the center one of the fiber bundle,the others are the reference fibers encircling the signal fiber.Both signal and reference are result of intensity modulation of the reflex by the sample,the intensity modulation is related to the coupling efficiency of optical fiber.This thesis discusses the coupling efficiency of both signal fiber and reference fiebr.This thesis also designs a three-dimensional control platform which is based on three TA8435 controlled by a MCU—P89C52. The thesis is composed of five chapters as follows:
Chapter 1: The background of carrying out this thesis. The main methods of 3-D profile measurement and their comparison are summarized. And the major objective and works are outlined.
Chapter 2: The fundamental theoretics of optical fiber probe. Theoretically analyze the coupling efficiency of both signal fiber and reference fiber. And the introduction of stepmotor.
Chapter 3:the three-dimensional control platform based on stepmotor drive chip controlled by MCU, this chapter introduces the design of drive circuit, including circuit design, hardware design, software of PC and MCU.
Chapter 4: the experiment of detecting the lingt signal using the fiber bundle probe. This chapter introduces the establish the experiment system to detect the light signal of the high reflective coefficient sample using fiber bundle probe; And the analysis of the experiment result.
Chapter 5: summarize the main work of the paper; find the current difficulties and discuss the further improvement in the future.
引文
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[1]Djafar K.Mynbaev,Lowell L.Ssheiner,Fiber-Optic Communications Technology,科学出版社,2003年.
[2]田兴华,亚微米光纤探针制备及其对光信号的探测,浙江大学硕士论文,2006.
[3]马养武,乇静环,包成芳,鲍超,光电子学,浙江杭州:浙江大学出版社,2002。
[2]陈家璧,李继陶.《光学信息技术原理及应用》.高等教育出版社.2002
[3]Frank Chen,Gordon M.Brown,Mumin Song.Overview of three-dimensional shape measurement using optical methods.Optical Engineering,20000,39(1):10-22
[4]陈晓荣,蔡萍.光学非接触三维形貌测量技术新进展.光学精密工程,2002,10(5):528-532
[5]马玉真,陶立英,王新华.计算机视觉技术的应用.实验技术与实验机.2006,3:60-65
[6]T.Akuta,etc,Development of an automatic 3-D shape measuring system using a new auto-focusing method,Measurement,9(3),(1991),95-103.
[7]吴晓峰,激光自动聚焦三维形状测量系统的研究,仪器仪表学报,第17卷,第2期,(1996),129-13.
[8]Chih-Liang Chu,Kuang-Chao Fan,and Yejing Chen,Design of a Digital Controller for Long-Stroke Submicron positioning Stage,proceedings of the 1~(st)International Conference on Positioning Technology Act-city,Hamamatsu,Japan;June 9-11,2004,176-181.
[9]Robert Windecker,Matthias Fleischer,Hans J.Tiziani,Three-dimensional topometry with stereomicroscopes,Opt.Eng,36,1997,3372-3377.
[10]Peisen s.Huang,Qingying Hu,Feng Jin,Fu-Pen Chiang,Color-encode digital fringe projection technique for high-speed three-dimensional surface contouring,Opt.Eng,38(6),(1999),1065-1071.
[11]ChengPing Zhang,Peisen S.Huang and Fu-Pen Chiang,High-Speed Phase Shitting Profilometry,Proc.SPIE,4189,(2000),122-128.
[12]F.Bitte,GDussler.3D micro-inspection goes DMD,Optics and Lasers in Engineering,36,(2001),155-167.
[13]王永红,余晓芬等,基于差动共焦的并行三维形貌检测系统的研究,中国科学技术大学学报,第23卷,第4期,(2003),415-420.
[14]Timothy L.Pennington,Hai Xiao,Russell May,Miniaturized 3-D surface Profilometer using a fiber optic coupler,Optics and Laser Technology,33,(2001),313-320.
[15]Thomas Kreis,Petra Aswendt,Roland Hofling,Hologram reconstruction using a digital micromirrordevice,Opt.Eng,40,(2001),926-933.
[16]范光照,李瑞君,宋欣明,一种新型光纤传像微三维测量系统,纳米技术精密工程,Vol.2No.4Dec.2004.
[17]德国公司技术讲座资料,北京,1988年11月.
[18]许传祥,石青云,程民德.立体视觉新进展,科学通报,第40卷,第17期,(1995),1544-1547。
[19]范光照,章明等,《逆向工程技术及应用》(第二版),高立图书有限公司,(2003),31-34。
[20]郝煌栋,赵洋等,光学投影式三维轮廓测量技术综述,光学技术,第5期,(1998),57-64。
[21]李奇,冯华君,徐之海,计算机立体视觉技术综述,光学技术,第5期,(1999),71-73。
[22]M.Stedman and Keven Lindsey,Limits of surface measurement by stylus instruments,Proc.SPIE.,1988,Vol.1009,56-61.
[23]J.M.Bennett and J.H.Dancy,"Stylus profiling instrument for measuring statistical properties of smooth optical surfaces",Appl.Opt.,1981,20(10):1785-1802.
[24]J.F.Song and T.V.Vorburger,"Stylus profiling at high resolution and low force",Appl.Opt.,1991,30:42-50.
[25]R.J.Whitefield,"Noncontact optical profilometer",Appl.Opt.,1975,14(10):2480-485.
[26]M.Stedman,"Limits of surface measurement by optical probes",Proc SPIE.,1988,1009:62-67.
[27]J.M.Bennett,J.Jahanmir,J.C.Podelesny,T.L.Balter and D.T.Hobbs,"Scanning Force Microscope as a tool for studing optical surface",Appl.Opt.,1995,34(1):213-230.
[28]GBinning,H.Rohrer,C.Gerber and E.Weibei,"Surface studies by scanning tunneling microscope",Phys.ReV.Lett.,1982,49(1):57-61.
[29]G.Binning,C.F.Quate and C.Gerber,"Atomic force microscopy",Phys.ReV.Lett.,1986,56(9):930-933.
[30]翟绪圣.表面粗糙度测量.中国计量出版社,1989:101-130
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