超声振动微铣削系统的建立及铣削力和残余应力的研究
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摘要
微机械系统在高技术领域如航空航天、小卫星以及现代医学中得到广泛应用,其性能和使用寿命受到微机械零件的制造工艺影响较大。在微机械加工领域内,传统的制造方法是采用大型超精密机床铣削微小零件,但是存在成本较高、机械爬行难以控制、资源和能源浪费较大等问题。随着小机床的出现和不断改进,微小零件的加工主要由小机床进行。与传统铣削相比,微铣削工艺也存在工件表面粗糙度较大、工件表面有微小翻边和毛刺、工件表面残余拉应力等,这些因素不利于提高产品的精度和使用寿命,所以改善微铣削加工势在必行。已经有学者提出采用超声振动和微切削结合的方法可以有效提高微切削工件质量,这方面主要有超声振动微钻削、超声振动微刨削及超声振动微车削,而在超声振动微铣削方面的报道还比较少。加入超声振动可以解决在微铣削过程中出现的表面粗糙度值较大、加工表面微小翻边和毛刺等问题,同时改善微铣削工件表面残余应力状态,提高微铣削工件的精度、表面质量、耐腐蚀特性和使用寿命。
本文为解决微铣削加工金属和脆性材料过程中出现的问题和提高加工精度以及提高表面质量而提出了在微铣削的基础上加入超声振动的方法。本文论述主要由以下几方面进行。
首先根据超声换能器及变幅杆理论进行超声振子设计。同时设计了扭转振动工作台。由于本课题的超声振动铣削系统应用于铣削硬质合金,铣削力较大且超声振子的振幅要求较大,反向弹簧确保扭转工作台和超声振子同频率振动,通过理论设计的一级锥形变幅杆不能满足实验需要应进一步放大,因此在一级变幅杆末端加入一个阶梯型变幅杆。通过这种方法设计出的振子理论上可以满足实验需要,但是实际中由于振子的负载在一定范围内变化,负载变化直接导致振子在激励频率不变时固有频率偏移,那么在一些情况下振子难以正常工作。由于振子的工作带宽直接取决于振子的尺寸,为了增加带宽和确保振子正常工作,本文采用有限元软件ANSYS进行了振子尺寸和固有频率的优化,最后设计出适合本课题的超声振子。
对微铣削以及超声振动微铣削加工硬质钢进行了切削力数学理论方面的研究。本文将切削过程适当简化,将铣刀刀尖与工件的接触点复坐标化。以相邻两个周期的切削点的坐标相减得到微铣削过程中切削厚度方程,以切削厚度与实验中测定的切削系数的乘积作为微铣削力。同样方法推导出超声振动微铣削力的方程。应用动态断裂力学理论解释超声振动微铣削工件材料裂纹的扩展对切削力的影响,从裂纹扩展机理方面解释了超声振动微铣削切削力减小的原因。在建立了超声振动微铣削理论模型之后,建立了超声振动微铣削力有限元模型,通过模拟得出加入超声振动后微铣削力降低的结论,表明仿真果与理论分析结果趋势一致。
建立了超声振动微铣削工件表面残余应力的仿真模型,适当简化铣刀和工件。工件材料选择Johnson-Cook本构方程来描述。切屑形成过程采用Johnson-Cook断裂法则描述。经过显式计算得到去除工件约束后表面残余应力分布图。再分别提取同一个参考点在S11方向和S22方向的残余应力。然后通过模拟得到超声振动微铣削工件表面残余应力随着刀具几何参数变化、切削参数变化和振动参数变化的规律。
在五轴小机床上加入超声振子、超声振动扭转工作台、超声波发生器以及测力仪、CCD相机,建立了超声振动微铣削系统。通过该系统进行了4340钢和玻璃的铣槽实验。通过铣槽实验验证了超声振动微铣削力降低的结论。通过激光共聚焦显微镜观察加工后的工件表面形貌得出超声振动微铣削工件表面质量改善,同时得到铣刀变形改善、工件抗腐蚀性能改善的规律。通过X射线法测量工件表面的残余应力得到超声振动微铣削工件表面的残余应力降低的结论。通过对玻璃的铣槽实验验证了加入超声振动后脆性材料的切削力明显降低,脆性材料的工件在加入超声振动后的切削过程中切屑的崩裂减少,玻璃的铣削得到改善的结论。
本文通过加入超声振动来改善微铣削加工工件的质量为今后微机械零件的制造提供了依据。
With the development of science and technology, the micro mechanics system has been extensively applied in high technology fields such as aerospace, minisatellite, and modern medicine. The performance and the service life of the micro mechanics parts are affected greatly by the manufacturing process. In micro mechanics machining field, the traditional manufacturing approach of micro mechanical parts is to use large precision machine tool to mill. But the cost and the mechanical creep are difficult to control, and the wasted resources and energy are too large. With the emergence and continuous improvement of small machine tools, the micro mechanical parts are machined mainly by small machine tools. Compared with traditional manufacturing approach, there exist the problems that the surface roughness in the milling process is big, there are flanging and micro burrs on the surface, and there also exists surface residual tensile stress. These factors are unfavorable to improve the precision of the product and their service life, so it is necessary to improve the machining process. In this respect, some scholars have proposed that the combination of ultrasonic vibration and the micro-cutting can effectively improve the milling quality of workpiece. This method is mainly applied in the ultrasonic vibration micro drilling, ultrasonic vibration micro planing and the ultrasonic vibration micro turning. But there are few reports on ultrasonic vibration micro milling by now. The ultrasonic vibration can reduce the value of surface roughness and surface micro flanging and burr appeared in micro milling process. At the same time, it can improve the state of the surface residual stress, and improve the accuracy and surface quality, corrosion resistant properties and the service life of the workpiece.
The purpose of this paper is to solve problems appeared in the micromilling process of the metal and brittle materials to improve the machining accuracy and surface quality, and put forward the method of the combination of ultrasonic vibration and micro milling in this paper. This paper is mainly developed from the following aspects.
Firstly, the ultrasonic vibrator is designed based on the ultrasonic vibration theory and the ultrasonic amplitude transformer theory. And then the torsional vibration table is designed. Because the ultrasonic vibration micro milling system in this project is used in milling hard alloy, the milling force and ultrasonic vibration amplitude has to be big. The reverse spring ensures that the vibration frequency of the torsional work table is as same as the ultrasonic vibrator. The ultrasonic amplitude transformer designed based on the ultrasonic wave theory can not meet the experiment need, so the amplitude of vibration has to be further amplified.So the end of the vibrator should be added the second level amplification transformer. The step-style ultrasonic amplitude transformer is adopted. The vibrator designed through this method can satisfy the requirement of the experiment in theory. But in practice, because the vibrator load changes in a certain range, the load changes makes directly the natural frequency of the vibrator offset, and the incentive frequency of the vibrator remains unchanged, so in some cases the vibrator is difficult to work properly. Since the vibrator frequency bandwidth depends directly on the size of the vibrator, in order to increase the bandwidth and ensure the normal work of the vibrator, the finite element software ANSYS is adopted in this paper to optimize the vibrator size and its natural frequency, and then a proper size of the ultrasonic vibrator is finally got.
The research is based on cutting force mathematical theory of the micro milling and ultrasonic vibration micro milling carbide steel. Simplifing the cutting process properly, the plural coordinates of the milling cutter contact point is got. The cutting point coordinate of the later period minus that of the fronter is the cutting thickness in micro milling process. Multiplying the cutting thickness and the cutting coefficient measured in the experiment is the milling force. Similarly the ultrasonic vibration micro milling force equation is obtained. The dynamic fracture mechanics theory is applicated in explaining the crack extension of workpiece materials how to influent the cutting force, then the cause of ultrasonic vibration micro milling force decrease by the crack propagation mechanism is explained in this paper.After constructing the theory model of the ultrasonic vibration micro milling, the finite element model of the ultrasonic vibration micro milling force is carried on in this paper. It is concluded that ultrasonic vibration micro milling force reduces in finite element simulation results. It is shown that the results of the simulation analysis and the theoretical analysis are in good agreement.
The simulation model of the surface residual stress in ultrasonic vibration micro milling is created. And the milling cutter and the workpiece are simplified properly. The Johnson-Cook constitutive equation is choosed to describe the workpiece material performance. The Johnson-Cook damage law is adopted as a chips-forming rule. The distribution nephogram of the residual stress after removing the workpiece constraint is obtained by means of explicit calculation. The residual stress of the same reference point in the direction of the S22 and S11 is extracted respectively. Then the regularity that the surface residual stress changes with the micromilling cutter geometrical parameters, the milling parameters and the vibration parameters in the ultrasonic vibration micro milling is gained by simulation.
The ultrasonic vibration micro milling experiment system is established by assembling the ultrasonic vibrator, the ultrasonic vibration work table, the ultrasonic generator, the dynamometer, and a CCD camera in the 5-axis small machine tool. The slotting experiment on 4340 steel and glass is performed in this experiment system. The slotting experiment verifies the conclusion that micro milling force reduces after adding ultrasonic vibration. The regularity that the milling surface roughness, the milling cutter deformation, and the corrosion resistance are improved after adding ultrasonic vibration is obtained by observing the surface topography of the workpiece under the laser confocal microscopy. The conclusion that the surface residual stress reduces after adding ultrasonic vibration is obtained after measuring the surface residual stress by using the X-ray diffraction equipment. The glass slotting experiment verifies the conclusion that the micro milling force of the brittle material reduces significantly, the edge breakage of the brittle material reduces and the milling process of glass is improved after adding ultrasonic vibration.
A basis for manufacturing micro mechanical parts in future is provided in this paper to improve the quality of the workpiece machined by adding ultrasonic vibration.
本文为解决微铣削加工金属和脆性材料过程中出现的问题和提高加工精度以及提高表面质量而提出了在微铣削的基础上加入超声振动的方法。本文论述主要由以下几方面进行。
首先根据超声换能器及变幅杆理论进行超声振子设计。同时设计了扭转振动工作台。由于本课题的超声振动铣削系统应用于铣削硬质合金,铣削力较大且超声振子的振幅要求较大,反向弹簧确保扭转工作台和超声振子同频率振动,通过理论设计的一级锥形变幅杆不能满足实验需要应进一步放大,因此在一级变幅杆末端加入一个阶梯型变幅杆。通过这种方法设计出的振子理论上可以满足实验需要,但是实际中由于振子的负载在一定范围内变化,负载变化直接导致振子在激励频率不变时固有频率偏移,那么在一些情况下振子难以正常工作。由于振子的工作带宽直接取决于振子的尺寸,为了增加带宽和确保振子正常工作,本文采用有限元软件ANSYS进行了振子尺寸和固有频率的优化,最后设计出适合本课题的超声振子。
对微铣削以及超声振动微铣削加工硬质钢进行了切削力数学理论方面的研究。本文将切削过程适当简化,将铣刀刀尖与工件的接触点复坐标化。以相邻两个周期的切削点的坐标相减得到微铣削过程中切削厚度方程,以切削厚度与实验中测定的切削系数的乘积作为微铣削力。同样方法推导出超声振动微铣削力的方程。应用动态断裂力学理论解释超声振动微铣削工件材料裂纹的扩展对切削力的影响,从裂纹扩展机理方面解释了超声振动微铣削切削力减小的原因。在建立了超声振动微铣削理论模型之后,建立了超声振动微铣削力有限元模型,通过模拟得出加入超声振动后微铣削力降低的结论,表明仿真果与理论分析结果趋势一致。
建立了超声振动微铣削工件表面残余应力的仿真模型,适当简化铣刀和工件。工件材料选择Johnson-Cook本构方程来描述。切屑形成过程采用Johnson-Cook断裂法则描述。经过显式计算得到去除工件约束后表面残余应力分布图。再分别提取同一个参考点在S11方向和S22方向的残余应力。然后通过模拟得到超声振动微铣削工件表面残余应力随着刀具几何参数变化、切削参数变化和振动参数变化的规律。
在五轴小机床上加入超声振子、超声振动扭转工作台、超声波发生器以及测力仪、CCD相机,建立了超声振动微铣削系统。通过该系统进行了4340钢和玻璃的铣槽实验。通过铣槽实验验证了超声振动微铣削力降低的结论。通过激光共聚焦显微镜观察加工后的工件表面形貌得出超声振动微铣削工件表面质量改善,同时得到铣刀变形改善、工件抗腐蚀性能改善的规律。通过X射线法测量工件表面的残余应力得到超声振动微铣削工件表面的残余应力降低的结论。通过对玻璃的铣槽实验验证了加入超声振动后脆性材料的切削力明显降低,脆性材料的工件在加入超声振动后的切削过程中切屑的崩裂减少,玻璃的铣削得到改善的结论。
本文通过加入超声振动来改善微铣削加工工件的质量为今后微机械零件的制造提供了依据。
With the development of science and technology, the micro mechanics system has been extensively applied in high technology fields such as aerospace, minisatellite, and modern medicine. The performance and the service life of the micro mechanics parts are affected greatly by the manufacturing process. In micro mechanics machining field, the traditional manufacturing approach of micro mechanical parts is to use large precision machine tool to mill. But the cost and the mechanical creep are difficult to control, and the wasted resources and energy are too large. With the emergence and continuous improvement of small machine tools, the micro mechanical parts are machined mainly by small machine tools. Compared with traditional manufacturing approach, there exist the problems that the surface roughness in the milling process is big, there are flanging and micro burrs on the surface, and there also exists surface residual tensile stress. These factors are unfavorable to improve the precision of the product and their service life, so it is necessary to improve the machining process. In this respect, some scholars have proposed that the combination of ultrasonic vibration and the micro-cutting can effectively improve the milling quality of workpiece. This method is mainly applied in the ultrasonic vibration micro drilling, ultrasonic vibration micro planing and the ultrasonic vibration micro turning. But there are few reports on ultrasonic vibration micro milling by now. The ultrasonic vibration can reduce the value of surface roughness and surface micro flanging and burr appeared in micro milling process. At the same time, it can improve the state of the surface residual stress, and improve the accuracy and surface quality, corrosion resistant properties and the service life of the workpiece.
The purpose of this paper is to solve problems appeared in the micromilling process of the metal and brittle materials to improve the machining accuracy and surface quality, and put forward the method of the combination of ultrasonic vibration and micro milling in this paper. This paper is mainly developed from the following aspects.
Firstly, the ultrasonic vibrator is designed based on the ultrasonic vibration theory and the ultrasonic amplitude transformer theory. And then the torsional vibration table is designed. Because the ultrasonic vibration micro milling system in this project is used in milling hard alloy, the milling force and ultrasonic vibration amplitude has to be big. The reverse spring ensures that the vibration frequency of the torsional work table is as same as the ultrasonic vibrator. The ultrasonic amplitude transformer designed based on the ultrasonic wave theory can not meet the experiment need, so the amplitude of vibration has to be further amplified.So the end of the vibrator should be added the second level amplification transformer. The step-style ultrasonic amplitude transformer is adopted. The vibrator designed through this method can satisfy the requirement of the experiment in theory. But in practice, because the vibrator load changes in a certain range, the load changes makes directly the natural frequency of the vibrator offset, and the incentive frequency of the vibrator remains unchanged, so in some cases the vibrator is difficult to work properly. Since the vibrator frequency bandwidth depends directly on the size of the vibrator, in order to increase the bandwidth and ensure the normal work of the vibrator, the finite element software ANSYS is adopted in this paper to optimize the vibrator size and its natural frequency, and then a proper size of the ultrasonic vibrator is finally got.
The research is based on cutting force mathematical theory of the micro milling and ultrasonic vibration micro milling carbide steel. Simplifing the cutting process properly, the plural coordinates of the milling cutter contact point is got. The cutting point coordinate of the later period minus that of the fronter is the cutting thickness in micro milling process. Multiplying the cutting thickness and the cutting coefficient measured in the experiment is the milling force. Similarly the ultrasonic vibration micro milling force equation is obtained. The dynamic fracture mechanics theory is applicated in explaining the crack extension of workpiece materials how to influent the cutting force, then the cause of ultrasonic vibration micro milling force decrease by the crack propagation mechanism is explained in this paper.After constructing the theory model of the ultrasonic vibration micro milling, the finite element model of the ultrasonic vibration micro milling force is carried on in this paper. It is concluded that ultrasonic vibration micro milling force reduces in finite element simulation results. It is shown that the results of the simulation analysis and the theoretical analysis are in good agreement.
The simulation model of the surface residual stress in ultrasonic vibration micro milling is created. And the milling cutter and the workpiece are simplified properly. The Johnson-Cook constitutive equation is choosed to describe the workpiece material performance. The Johnson-Cook damage law is adopted as a chips-forming rule. The distribution nephogram of the residual stress after removing the workpiece constraint is obtained by means of explicit calculation. The residual stress of the same reference point in the direction of the S22 and S11 is extracted respectively. Then the regularity that the surface residual stress changes with the micromilling cutter geometrical parameters, the milling parameters and the vibration parameters in the ultrasonic vibration micro milling is gained by simulation.
The ultrasonic vibration micro milling experiment system is established by assembling the ultrasonic vibrator, the ultrasonic vibration work table, the ultrasonic generator, the dynamometer, and a CCD camera in the 5-axis small machine tool. The slotting experiment on 4340 steel and glass is performed in this experiment system. The slotting experiment verifies the conclusion that micro milling force reduces after adding ultrasonic vibration. The regularity that the milling surface roughness, the milling cutter deformation, and the corrosion resistance are improved after adding ultrasonic vibration is obtained by observing the surface topography of the workpiece under the laser confocal microscopy. The conclusion that the surface residual stress reduces after adding ultrasonic vibration is obtained after measuring the surface residual stress by using the X-ray diffraction equipment. The glass slotting experiment verifies the conclusion that the micro milling force of the brittle material reduces significantly, the edge breakage of the brittle material reduces and the milling process of glass is improved after adding ultrasonic vibration.
A basis for manufacturing micro mechanical parts in future is provided in this paper to improve the quality of the workpiece machined by adding ultrasonic vibration.
引文
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