266nm紫外激光器研究
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摘要
266nm紫外激光由于在材料加工、光刻及微刻、医疗及科研等领域具有广泛的应用前景而成为现在一个新的研究方向。本文从理论和实验两方面对用于指纹检测的266nm Nd:YAG四倍频紫外激光器进行研究。内容主要包括以下几部分:
首先对近十年来国内外紫外激光器的发展状况作出较为全面的综合评述。较为详尽地分析了各种产生紫外激光的方案并给出了相应的性能指标。在此基础上本文提出了采用氙灯泵浦、Cr~(4+):YAG被动调Q Nd:YAG激光器,经腔外KTP二倍频和BBO四倍频获得266nm紫外激光的方案。
其次,对Cr~(4+):YAG被动调Q的原理进行研究。文中建立了带激发态吸收的慢恢复可饱和吸收体被动调Q激光器的运转及优化模型,建立了含激发态吸收的慢恢复可饱和吸收体被动调Q激光器的运转速率方程组,得出获得良好巨脉冲输出所必须满足的调Q判据以及被动调Q激光器输出特性参数的解析表达式。求出在一定的泵浦条件下,通过选取适当的可饱和吸收体参数和输出耦合率,来实现被动调Q激光器最优化运转的条件。
研究了单轴及双轴晶体的相位匹配方式并推导了相位匹配角公式。由倍频效率公式,得出影响倍频效率的因素及提高倍频效率的方法。研究了非线性晶体三波相互作用允许参量的计算理论。确定了倍频晶体所采用的相位匹配方式并计算相位匹配角及倍频时的走离角。
根据被动调Q及倍频理论,本文设计并研制成功一台输出波长为266nm的紫外激光器。设计方案为氙灯泵浦、Cr~(4+):YAG被动调Q的Nd:YAG激光器,工作频率1、3、5、10、20Hz可调,Cr~(4+):YAG初始透过率为30%,;经腔外KTP晶体二倍频和BBO晶体四倍频,得到三个波长的混合光,用软件作图法设计并制作分光棱镜分光,得到266nm的紫外激光。1064nm向532nm转换效率最大为44%,单脉冲最大输出能量54.2mJ;532nm向266nm转换效率最大为23%,266nm紫外光单脉冲能量最大值为12.5mJ,脉冲宽度12ns。将266nm紫外激光作为光源,结合紫外积分接收器和紫外激光指印检测仪组成紫外激光指印探测仪系统,指纹提取率达65%,30天的指纹仍可检测。
266nm ultraviolet laser has become a new research direction because of its wide application in material processing,photolithograph,microlithograph,and medical and scientific research field.In this paper,266nm quadrupled Nd:YAG ultraviolet laser used in fingerprint representing has been deeply studied from theory and experiment..The main contents are:
Firstly,the development of ultraviolet laser at home and abroad during the last ten years is reviewed and various schemes to generate ultraviolet laser and the corresponding achieved performance index are analyzed in detail.On the basis of the literature,the scheme of Xe-lamp pumped and Cr~(4+):YAG passively Q-switched Nd:YAG laser is adopted,its repetition rate is adjustable from 1,3,5,10 to 20Hz.Then the laser is extra-cavity frequency doubled with KTP crystal and quadrupled with BBO crystal to obtain 266nm ultraviolet laser.
Secondly,the principle of Cr~(4+):YAG passive Q-switching is discussed.The operating and optimal model for passively Q-switched laser is established by using slow-recovery saturable absorber with excited-state absorption.The operating rate equation of passively Q-switched laser is also established.Then Q-switching criterion which must be satisfied to obtain good giant-pulse output and analytical expression of output characteristic parameter for passively Q-switched laser are prescnted.The optimal operating conditions for passively Q-switched laser by selecting suitable absorber parameter and output mirror transmission under certain pumping conditions are also solved.
Then the phase-matching mode and angle of uniaxial and biaxial crystals are discussed. On the basis of frequency-doubling efficiency formula,the factors to influence the efficiency and the methods to improve the efficiency are analyzed.Calculation theory of allowed parameter during the three-wave-interaction in nonlinear crystal is discussed as well.Then the phase-matching mode is presented and angle for the frequency-doubling crystal is calculated based on the formulas and curves of phase-matching angle and effective nonlinear coefficient. The walk-off angle during frequency doubling is also analyzed.
Basing on passive Q-switching and frequency-doubling theory,we have designed and developed an ultraviolet laser generating 266nm laser.The laser is Cr~(4+):YAG passively Q-switched and Xe-lamp pumped Nd:YAG laser,whose repetition rate is adjustable from 1,3, 5,10 to 20Hz;the initial transmission ratio of 3mm Cr~(4+):YAG crystal is 30%.Then the laser is extra-cavity frequency doubled with KTP crystal and quadrupled with BBO crystal to obtain the mixture of three wavelengths.Beam splitting prism has been designed by using software to draw figure to obtain 266nm ultraviolet laser.The optical conversion efficiency from 1064nm to 532nm is 44%,and maximum output energy per pulse is 54.2mJ;the optical conversion efficiency from 532nm to 266nm is 23%,and maximum output energy per pulse at 266nm is 12.5mJ,pulse width of 266nm laser is 12ns.Combined with ultraviolet integral receiver and fingerprint detector,the designed 266nm ultraviolet laer has been applied as light source to ultraviolet laser fingerprint detecting system.The fingerprint extraction rate reaches 65%,and fingerprint 30 days before still can be detected.
首先对近十年来国内外紫外激光器的发展状况作出较为全面的综合评述。较为详尽地分析了各种产生紫外激光的方案并给出了相应的性能指标。在此基础上本文提出了采用氙灯泵浦、Cr~(4+):YAG被动调Q Nd:YAG激光器,经腔外KTP二倍频和BBO四倍频获得266nm紫外激光的方案。
其次,对Cr~(4+):YAG被动调Q的原理进行研究。文中建立了带激发态吸收的慢恢复可饱和吸收体被动调Q激光器的运转及优化模型,建立了含激发态吸收的慢恢复可饱和吸收体被动调Q激光器的运转速率方程组,得出获得良好巨脉冲输出所必须满足的调Q判据以及被动调Q激光器输出特性参数的解析表达式。求出在一定的泵浦条件下,通过选取适当的可饱和吸收体参数和输出耦合率,来实现被动调Q激光器最优化运转的条件。
研究了单轴及双轴晶体的相位匹配方式并推导了相位匹配角公式。由倍频效率公式,得出影响倍频效率的因素及提高倍频效率的方法。研究了非线性晶体三波相互作用允许参量的计算理论。确定了倍频晶体所采用的相位匹配方式并计算相位匹配角及倍频时的走离角。
根据被动调Q及倍频理论,本文设计并研制成功一台输出波长为266nm的紫外激光器。设计方案为氙灯泵浦、Cr~(4+):YAG被动调Q的Nd:YAG激光器,工作频率1、3、5、10、20Hz可调,Cr~(4+):YAG初始透过率为30%,;经腔外KTP晶体二倍频和BBO晶体四倍频,得到三个波长的混合光,用软件作图法设计并制作分光棱镜分光,得到266nm的紫外激光。1064nm向532nm转换效率最大为44%,单脉冲最大输出能量54.2mJ;532nm向266nm转换效率最大为23%,266nm紫外光单脉冲能量最大值为12.5mJ,脉冲宽度12ns。将266nm紫外激光作为光源,结合紫外积分接收器和紫外激光指印检测仪组成紫外激光指印探测仪系统,指纹提取率达65%,30天的指纹仍可检测。
266nm ultraviolet laser has become a new research direction because of its wide application in material processing,photolithograph,microlithograph,and medical and scientific research field.In this paper,266nm quadrupled Nd:YAG ultraviolet laser used in fingerprint representing has been deeply studied from theory and experiment..The main contents are:
Firstly,the development of ultraviolet laser at home and abroad during the last ten years is reviewed and various schemes to generate ultraviolet laser and the corresponding achieved performance index are analyzed in detail.On the basis of the literature,the scheme of Xe-lamp pumped and Cr~(4+):YAG passively Q-switched Nd:YAG laser is adopted,its repetition rate is adjustable from 1,3,5,10 to 20Hz.Then the laser is extra-cavity frequency doubled with KTP crystal and quadrupled with BBO crystal to obtain 266nm ultraviolet laser.
Secondly,the principle of Cr~(4+):YAG passive Q-switching is discussed.The operating and optimal model for passively Q-switched laser is established by using slow-recovery saturable absorber with excited-state absorption.The operating rate equation of passively Q-switched laser is also established.Then Q-switching criterion which must be satisfied to obtain good giant-pulse output and analytical expression of output characteristic parameter for passively Q-switched laser are prescnted.The optimal operating conditions for passively Q-switched laser by selecting suitable absorber parameter and output mirror transmission under certain pumping conditions are also solved.
Then the phase-matching mode and angle of uniaxial and biaxial crystals are discussed. On the basis of frequency-doubling efficiency formula,the factors to influence the efficiency and the methods to improve the efficiency are analyzed.Calculation theory of allowed parameter during the three-wave-interaction in nonlinear crystal is discussed as well.Then the phase-matching mode is presented and angle for the frequency-doubling crystal is calculated based on the formulas and curves of phase-matching angle and effective nonlinear coefficient. The walk-off angle during frequency doubling is also analyzed.
Basing on passive Q-switching and frequency-doubling theory,we have designed and developed an ultraviolet laser generating 266nm laser.The laser is Cr~(4+):YAG passively Q-switched and Xe-lamp pumped Nd:YAG laser,whose repetition rate is adjustable from 1,3, 5,10 to 20Hz;the initial transmission ratio of 3mm Cr~(4+):YAG crystal is 30%.Then the laser is extra-cavity frequency doubled with KTP crystal and quadrupled with BBO crystal to obtain the mixture of three wavelengths.Beam splitting prism has been designed by using software to draw figure to obtain 266nm ultraviolet laser.The optical conversion efficiency from 1064nm to 532nm is 44%,and maximum output energy per pulse is 54.2mJ;the optical conversion efficiency from 532nm to 266nm is 23%,and maximum output energy per pulse at 266nm is 12.5mJ,pulse width of 266nm laser is 12ns.Combined with ultraviolet integral receiver and fingerprint detector,the designed 266nm ultraviolet laer has been applied as light source to ultraviolet laser fingerprint detecting system.The fingerprint extraction rate reaches 65%,and fingerprint 30 days before still can be detected.
引文
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