WolterⅠ型反射镜面形检测及成像性能检测研究
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摘要
X射线天文学逐渐成为国际空间研究热点。针对未来进行空间软X射线波段成像观测的迫切需求,本实验室研制出国内首台太阳软X射线-极紫外波段复合型望远镜样机,其中软X射线波段采用掠入射式Wolter I型筒状反射镜聚焦X射线成像。为实现高的空间分辨率和光能转换效率,需要高面形精度的反射镜,这就对Wolter I型反射镜加工和面形检测提出了严格要求。为此,研制高精度的非球面表面面形测量装置具有重要意义。本文的主要工作是围绕Wolter I型反射镜面形检测和成像性能检测两部分来进行的:
1、研究目前广泛采用的表面检测方法,重点讨论光学干涉法和细光束扫描法应用在Wolter I型反射镜面形检测中的优劣。最终选定细光束扫描测量法,对其典型仪器——长程轮廓仪进行详细分析,为仪器的研制奠定理论基础。
2、以长程轮廓仪为基础,结合实验室现有条件,研制出一台Wolter I型反射镜面形检测装置。对各个组成部件性能指标及数据采集、处理方法进行讨论。最后对该面形检测装置进行标定:其倾斜度测量误差为1.70μrad(RMS值),轮廓高度测量误差为56nm(PV值)。结果表明测量精度满足加工要求。
3、建立Wolter I型反射镜加工与在线面形检测系统。在线实时测量加工反射镜样品表面轮廓变化。实测加工样品抛物面部分轮廓面形误差为1.51μm(PV值),双曲面部分轮廓面形误差为3.52μm(PV值),为面形精细加工提供可靠的反馈数据。
4、搭建Wolter I型反射镜成像性能检测装置,进行成像实验。通过与理论模拟的比较,分析影响像质的因素。结果表明:反射镜表面波纹度引起的散射对成像质量影响较大,加工样品的面形质量有待提高。
X-ray astronomy has been widely focused on in the world. Observation in solar x-ray region is functionally important for space weather forcast and exploratory research. The first domestic prototype of solar x-ray and EUV waveband imaging telescope was developed in our lab for the urgent need of imaging observation in short wavelength band of space in future. In x-ray region, the Wolter type I configuration is widely used in grazing incidence to bring x-ray into focus. The more accurate surface profile of the Wolter mirror is, the higher spatial resolution and luminous flux of imaging telescope can be obtained. This has promoted requirements for optics fabrication and metrology with very stringent tolerances on profile accuracy. Therefore, it is necessary to develop aspherical surface profile measuring device with high accuracy for Wolter mirror. My main work includes two parts: surface profile measurement and imaging test of Wolter type I mirror. The details are as follows:
1. Various methods of surface profile measurement were studied. Compared with optical interference test, pencil beam scanning has more advantages and is selected to measure surface profile of Wolter mirror. As a representative instrument based on pencil beam scanning, Long Trace Profiler is analyzed in details in order to develop surface profile measuring device.
2. A prototype of surface profile measuring device, based on the principle of Long Trace Profiler, is designed and established to measure the surface profile of Wolter type I mirror. Some improvements are made to obtain higher surface profile measuring accuracy, according to the existing conditions in our lab. The properties and parameters in all parts, measuring data collection and processing algorithm are also present. The calibration experiments are done with a standard flat mirror and the results show that the prototype can achieve an accuracy of 1.7μrad RMS for slope error and 56nm PV for residual height error, which indicates that this surface profile measuring device can meet the requirement of mirror fabrication.
3. Wolter type I mirror fabrication and measurement system consists of aspherical mirror fabrication instrument and surface profile measuring device of Wolter mirror. With this system surface profile of sample under fabrication can be measured on line, and real-time profile variety can be obtained. The experimental results show that sample surface profile is similar to standard profile. Maximum PV deviation is about 1.51μm from the ideal paraboloidal surface and 3.52μm from the ideal hyperboloidal surface. These data can feed back into next fabrication.
4. Imaging performance test device was established to do some experiments on the sample of Wolter type I mirror. The test data are contrasted with simulation in theory, and the main causes that affect imaging performance can be analyzed. The results indicate that image degradation is caused by scattering produced from surface waviness, and the surface quality of sample mirror should be further improved.
1、研究目前广泛采用的表面检测方法,重点讨论光学干涉法和细光束扫描法应用在Wolter I型反射镜面形检测中的优劣。最终选定细光束扫描测量法,对其典型仪器——长程轮廓仪进行详细分析,为仪器的研制奠定理论基础。
2、以长程轮廓仪为基础,结合实验室现有条件,研制出一台Wolter I型反射镜面形检测装置。对各个组成部件性能指标及数据采集、处理方法进行讨论。最后对该面形检测装置进行标定:其倾斜度测量误差为1.70μrad(RMS值),轮廓高度测量误差为56nm(PV值)。结果表明测量精度满足加工要求。
3、建立Wolter I型反射镜加工与在线面形检测系统。在线实时测量加工反射镜样品表面轮廓变化。实测加工样品抛物面部分轮廓面形误差为1.51μm(PV值),双曲面部分轮廓面形误差为3.52μm(PV值),为面形精细加工提供可靠的反馈数据。
4、搭建Wolter I型反射镜成像性能检测装置,进行成像实验。通过与理论模拟的比较,分析影响像质的因素。结果表明:反射镜表面波纹度引起的散射对成像质量影响较大,加工样品的面形质量有待提高。
X-ray astronomy has been widely focused on in the world. Observation in solar x-ray region is functionally important for space weather forcast and exploratory research. The first domestic prototype of solar x-ray and EUV waveband imaging telescope was developed in our lab for the urgent need of imaging observation in short wavelength band of space in future. In x-ray region, the Wolter type I configuration is widely used in grazing incidence to bring x-ray into focus. The more accurate surface profile of the Wolter mirror is, the higher spatial resolution and luminous flux of imaging telescope can be obtained. This has promoted requirements for optics fabrication and metrology with very stringent tolerances on profile accuracy. Therefore, it is necessary to develop aspherical surface profile measuring device with high accuracy for Wolter mirror. My main work includes two parts: surface profile measurement and imaging test of Wolter type I mirror. The details are as follows:
1. Various methods of surface profile measurement were studied. Compared with optical interference test, pencil beam scanning has more advantages and is selected to measure surface profile of Wolter mirror. As a representative instrument based on pencil beam scanning, Long Trace Profiler is analyzed in details in order to develop surface profile measuring device.
2. A prototype of surface profile measuring device, based on the principle of Long Trace Profiler, is designed and established to measure the surface profile of Wolter type I mirror. Some improvements are made to obtain higher surface profile measuring accuracy, according to the existing conditions in our lab. The properties and parameters in all parts, measuring data collection and processing algorithm are also present. The calibration experiments are done with a standard flat mirror and the results show that the prototype can achieve an accuracy of 1.7μrad RMS for slope error and 56nm PV for residual height error, which indicates that this surface profile measuring device can meet the requirement of mirror fabrication.
3. Wolter type I mirror fabrication and measurement system consists of aspherical mirror fabrication instrument and surface profile measuring device of Wolter mirror. With this system surface profile of sample under fabrication can be measured on line, and real-time profile variety can be obtained. The experimental results show that sample surface profile is similar to standard profile. Maximum PV deviation is about 1.51μm from the ideal paraboloidal surface and 3.52μm from the ideal hyperboloidal surface. These data can feed back into next fabrication.
4. Imaging performance test device was established to do some experiments on the sample of Wolter type I mirror. The test data are contrasted with simulation in theory, and the main causes that affect imaging performance can be analyzed. The results indicate that image degradation is caused by scattering produced from surface waviness, and the surface quality of sample mirror should be further improved.
引文
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