用于传像光纤束集成的折射微透镜阵列研究
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摘要
随着现代科学技术的飞速发展,微光学技术的制作工艺有了极大的提高,作为重要的微光学元器件家族的一员-微透镜在许多领域有了广泛的应用和迫切的需求。由于光纤有着良好的柔韧性和光信号传递能力,近年来光纤用于传像领域的研究在国内外越来越得到重视,并且已经在军事方面比如导弹预警等领域发挥着巨大的作用。由于传像光纤束一般的填充系数很低,接收信号光能力较低,为了提高传像能力,提高信号利用率,有必要在光信号收集端集成微透镜阵列,使之与光纤束相配。
本文介绍了基于某种传像光纤束制作微透镜阵列的工艺流程以及微透镜阵列与这种传像光纤束的集成,其主要内容如下:
(1)从光学填充系数和几何光学的角度对折射微透镜阵列的设计理论进行了分析讨论,着重介绍了球冠形折射微透镜和方形折射微透镜的设计方法和计算公式,并利用ZEMAX光学软件对微透镜进行模拟分析,得到较为理想的微透镜的参数。
(2)针对某种传像光纤束,研究了用于集成微透镜阵列的设计和制作方案,从前期的图像的采集和数据的计算、掩模版的设计,到后期的实验制作,重点研究了热熔成形法制作折射微透镜阵列的整个工艺流程,并对实验过程中的各流程的参数设置进行了介绍。
(3)对实验制作出的折射微透镜阵列进行了扫描测试与分析,根据设计理论和公式对制作的微透镜的参数进行了计算,并利用ZEMAX根据其参数进行了聚光能力的模拟和分析。
(4)研究了微透镜阵列与光纤阵列的集成方式,介绍了具体的集成方法,在自制的手动对准平台上实现了微透镜阵列与光纤束的集成。
With the rapid development of modern science and technology, the manufacture process of micro-optics has greatly improved. As one of the most important devices in micro-optics, microlens is widely used in many fields and needed urgently. In recent years optical fibers used in transferring image field is more and more regarded because the fiber has good flexility and ability of sending optical signal and has great application in military field such as missile warning receiver system.Since optical fiber bundles inherently has low fill factor and low light gathering efficiency,to enhance the light transferring performance,it is desirable to integrate microlens array with optical fiber bundles.
In this thesis manufacture process of refractive microlens matching a certain fiber array is presented and the integration technology is also given. The main contents of this thesis are as follows:
(1) Present the design principle of the microlens at a viewpoint of optical fill factor and geometrical optical theory. Design formulas of the ball crown-shaped refraction microlens and square refraction microlens are given and structure parameters are obtained from simulating results by using ZEMAX software.
(2) Design a manufacture process and give a detail description on the entire manufacture process including acquisition of imaging data,mask layout and processing schedule.Fabrication of refractive microlens array using thermal melting method are mainly studied.
(3) Test and analyze the refraction microlens, and compute the parameters of the microlens according to the design theory and formulas, simulate and analyse the capability of gathering light for the microlens array.
(4) Achieve the integration of optical fiber array with the microlens array by using a home-made alignment platform.
本文介绍了基于某种传像光纤束制作微透镜阵列的工艺流程以及微透镜阵列与这种传像光纤束的集成,其主要内容如下:
(1)从光学填充系数和几何光学的角度对折射微透镜阵列的设计理论进行了分析讨论,着重介绍了球冠形折射微透镜和方形折射微透镜的设计方法和计算公式,并利用ZEMAX光学软件对微透镜进行模拟分析,得到较为理想的微透镜的参数。
(2)针对某种传像光纤束,研究了用于集成微透镜阵列的设计和制作方案,从前期的图像的采集和数据的计算、掩模版的设计,到后期的实验制作,重点研究了热熔成形法制作折射微透镜阵列的整个工艺流程,并对实验过程中的各流程的参数设置进行了介绍。
(3)对实验制作出的折射微透镜阵列进行了扫描测试与分析,根据设计理论和公式对制作的微透镜的参数进行了计算,并利用ZEMAX根据其参数进行了聚光能力的模拟和分析。
(4)研究了微透镜阵列与光纤阵列的集成方式,介绍了具体的集成方法,在自制的手动对准平台上实现了微透镜阵列与光纤束的集成。
With the rapid development of modern science and technology, the manufacture process of micro-optics has greatly improved. As one of the most important devices in micro-optics, microlens is widely used in many fields and needed urgently. In recent years optical fibers used in transferring image field is more and more regarded because the fiber has good flexility and ability of sending optical signal and has great application in military field such as missile warning receiver system.Since optical fiber bundles inherently has low fill factor and low light gathering efficiency,to enhance the light transferring performance,it is desirable to integrate microlens array with optical fiber bundles.
In this thesis manufacture process of refractive microlens matching a certain fiber array is presented and the integration technology is also given. The main contents of this thesis are as follows:
(1) Present the design principle of the microlens at a viewpoint of optical fill factor and geometrical optical theory. Design formulas of the ball crown-shaped refraction microlens and square refraction microlens are given and structure parameters are obtained from simulating results by using ZEMAX software.
(2) Design a manufacture process and give a detail description on the entire manufacture process including acquisition of imaging data,mask layout and processing schedule.Fabrication of refractive microlens array using thermal melting method are mainly studied.
(3) Test and analyze the refraction microlens, and compute the parameters of the microlens according to the design theory and formulas, simulate and analyse the capability of gathering light for the microlens array.
(4) Achieve the integration of optical fiber array with the microlens array by using a home-made alignment platform.
引文
[1]刘德森.微小光学的研究现状.物理, 1994, 6: 321-328
[2]赫尔齐克H.P,周海宪.微光学元件、系统和应用.北京:国防工业出版社, 2002.10-12
[3] Turunen J, Wyrowski F. Diffractive optics for industrial and commercial applications. Berlin, Germany: Akademie Ve r l a g , 1997. 103-108
[4] Veldkamp W B, McHugh T J. Binary optics. Scientific American, 1992, 66(5): 92-97
[5] Leger J., Holz M., Swanson G., et al. Coherent laser beam addition:An application of binary optics technology. MIT Lincoln Lab., 1988, 1(2): 225-216
[6] Vledkamp W.B.. Overview of Microoptics Past, Present, and future. SPIE, 1991, 1554: 287-299
[7]杨国光,侯西云.微系统与微光学的发展.光子学报, 1994, 23(Z2): 12-22
[8]金国藩,严瑛白,邬敏贤等.二元光学.北京:国防工业出版社, 1998. 57-63
[9] Sauer F., Jahns J., Nljauder V.R., et al. Refractive-diffractive micro-optics for permutation interconnects. Opt.Eng, 1994, 33(5):1550-1559
[10]严瑛白,金国藩,邬敏贤.多位相微光学阵列发生器的设计与研制.光子学报, 1994, 23(Z2): 53-60
[11]严瑛白,冯毅,崔晓明等.微光学视网膜器件与光学子波图像纹理分割.仪器仪表学报, 1996, 17(1): 114-117
[12]周进,韩良恺,高文琦等.二元光学元件各级光强的分布规律和衍射效率.中国激光, 1996, 23(5): 449-452
[13]包春红,邬敏贤,金国藩等.二元光学波面变换器件的研究.光学学报, 1994, 14(9): 988-991
[14]许超,张静娟,陈俊本.用于圆对称光束波前变换的位相型光学系统.物理学报, 1993, 42(8): 1245-1251
[15]王超,严瑛白,邬敏贤.用于波面校正的几种二元光学器件.仪器仪表学报, 1995, 16(1): 356-360
[16]付振海,邬敏贤,崔晓明等.半导体激光器泵浦固体激光器中的二元光学器件.仪器仪表学报, 1996, 17(1): 382-383
[17] Schwider J., Stork W., Streibl N., et al. Possibilities and limitations of space-variant holographic optical elements for switching networks and general interconnects. Appl. Opt, 1992, 31: 7403-7410
[18] Stern M.B., Holz M., Medeiros S., et al. Fabricating binary optics variables critical to optical efficiency. J.Vac.Sci.Technol.,1991, B9: 3117-3121
[19] Ruthen R.. Binary optics developers focus on sensors and communication. Scientif. Amer., 1991, 265(6): 32-36
[20] Vledkamp W.B.. Wireless focal plane on the road to amacronic sensors. IEEE J.Quantum Electronics, 1993, 29(2): 801-802
[21]赵光兴,杨国光,陈洪廖等.微透镜阵列的离子束刻蚀及衍射效率测量.中国激光, 1997, A24(1): 35-401
[22]郑师海,李得华,陈岩松等.微米亚微米有限凹槽衍射特性的实验研究.物理学报, 1996, 45(8): 1292-1296
[23]陈岩松,李得华.一种设计二元衍射元件的优化方法.物理学报, 1996, 45(8): 1231-1236
[24]吴小萍,范朝阳,汤伟中等.二元微透镜阵列在密集多载波波分复用器中的应用.光学学报, 1997, 17(8):1103-11-7
[25] Thomas J. Suleski and Robert D. Te Kolste. A roadmap for micro-optics fabrication. SPIE . 2001. v4440. 1～15
[26] Motamedi M.E.. Merging micro-optics with micromechanics: micro-opto-Electro- mechanical (MOEM) devices. Proc.SPIE, 1993, CR49: 302-328
[27] Glockner S., Goring R., possner T.. Micro-opto-mechanical beam defelctors. Opt.Eng, 1997, 36(5): 1339-1345
[28] Roggemau M.C., Bright V.M., Hick S.R.. Use of micro-electrol-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental result. Opt.Eng, 1997, 36(5):1326-1338
[29]朱传贵,刘德森,薛鸣球等.高密度微小透镜面阵列研制.光子学报, 1992, 21(4): 310-315
[30] Rolf Goering, Torsten Possner, Peter Schreiber. Planar gradient-index cylindrical microlenses: flexible components for laser diode applications. SPIE, 1996, 2687: 131-139
[31] Bernhard Messerschmidt, Ulf Possner, Albrecht von Pfeil, et al. Diffraction-limited gradient-index (GRIN) microlenses with high numerical apertures produced by silver ion exchange in glass: diffusion modeling and process optimization .Proc. SPIE Int. Soc. Opt. Eng., 1998, 3424: 88-89
[32] Popovic Z.D, Prague R.A, Neville Connell G.A. Technique for monolithic fabrication of microlens arrays. Appl. Opt., 1988, 7: 1281-1284
[33] Daly D, Stevens R.F, Hutley M.C, et.al. The manufacture of microlenses by melting photoresist. Meas. Sci. Technol., 1990, 1: 759-766
[34] Borreli N F, Morse D L, Bellman R H, et al. Photolytic technique for Producing Microlenses in Photosensitive glass. Appl Opt., 1988, 24(16): 2520-2525
[35]许乔,叶钧,周光亚等.折射型微透镜列阵的光刻热熔法研究.光学学报, 1996, 16(9): 1327-1331
[36] Motanedi M. Edward. Micro-opto-electro-mechanical systems. Opt. Eng., 1994, 33 (1) : 3505-3517
[37] Streibl N, N?lscher U, Jahns J, et.al. Array generation with lenslet arrays. Appl. Opt. 1991, 30: 2739-2742
[38] Cordingley J. Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers. Appl. Opt., 1993, 32(14) : 2538-2542
[39] D?schner W, Long P, Larsson M., et al. Fabrication of diffractive Optical elements using a single optical exposure with a gray level mask. J. Val. Sci. Technol.. B, 1995, 13: 729-2731
[40] D?schner Walter, Long Pin, Stein Robert, et al. Cost-effective mass fabrication of multilevel diffractive optical elements by was of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass. Applied Optics, 1997, 36 (20): 4675-4680
[41] Jiang Hongjin, Yuan Xiaocong, Yun ZhiSheng, et al. Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask. Materials Science and Engineering C, 2001, 16: 99-102
[42] M. R. Wang, H. Su. Multilevel diffractive micrelens fabrication by one-step laser-assisted chemical etching upon high-energy-beam-sensitive glass. Opt. Lett.,1998, 23 (13): 876-878
[43] Daschner W, Larsson M.S, Lee H. Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step. Appl. Opt., 1995, 34 (14): 2534-2538
[44] Ernst–Bernhard Kley. Continuous profile writing by electron and optical lithography. Microeletronic Engineering, 1997, 34: 261-298
[45] M. Edward Motamedi, William E. Tennant, Haluk O. Sankur, et al. Micro-optic integration with focal plane arrays. Opt. Eng., 1997, 36 (5): 1374-1381
[46] Harry G. Erhardt. James Kane. Silicon cylindrical lens arrays for improved photoresponse in focal plane arrays. Proc. SPIE, 1984, 501: 165-172
[47] Anthony Lee. High-powered laser diode transmitter with integrated microlens for fast axis collimation. SPIE, 1998, 3289: 33-42
[48] Ying-Ruel Huang, Hwai-Pwu Chou. Fabrication of ball-type spherical microlens array for optical fiber coupling. Proc. of SPIE, 2004, 5347: 281-286
[49] Masaharu Deguchi, Takesuke Maruyama, Futoshi Yamasaki. Microlens design using simulation for CCD image sensor. IEEE Transactions on Consumer Electronics, 1992, 38(3): 583-589
[50] Arnold Daniels, Till W.Liepmann. A fiber-optically coupled infrared focal plane array system for use in missile warning receiver applications. Part of SPIE conference on infrared imaging system: design, analysis, modeling, and testing X.Orlando,Florida. SPIE, 1999, 3701: 118-130
[51] Wolfgang Ehrfeld, Ursula Ehrfeld, Markus Winzenick, et al. Microtechnology on the Threshold of the 21th Century Proc. 22nd international conference on miroelectronics (MIEL), 2000,1:14-17
[2]赫尔齐克H.P,周海宪.微光学元件、系统和应用.北京:国防工业出版社, 2002.10-12
[3] Turunen J, Wyrowski F. Diffractive optics for industrial and commercial applications. Berlin, Germany: Akademie Ve r l a g , 1997. 103-108
[4] Veldkamp W B, McHugh T J. Binary optics. Scientific American, 1992, 66(5): 92-97
[5] Leger J., Holz M., Swanson G., et al. Coherent laser beam addition:An application of binary optics technology. MIT Lincoln Lab., 1988, 1(2): 225-216
[6] Vledkamp W.B.. Overview of Microoptics Past, Present, and future. SPIE, 1991, 1554: 287-299
[7]杨国光,侯西云.微系统与微光学的发展.光子学报, 1994, 23(Z2): 12-22
[8]金国藩,严瑛白,邬敏贤等.二元光学.北京:国防工业出版社, 1998. 57-63
[9] Sauer F., Jahns J., Nljauder V.R., et al. Refractive-diffractive micro-optics for permutation interconnects. Opt.Eng, 1994, 33(5):1550-1559
[10]严瑛白,金国藩,邬敏贤.多位相微光学阵列发生器的设计与研制.光子学报, 1994, 23(Z2): 53-60
[11]严瑛白,冯毅,崔晓明等.微光学视网膜器件与光学子波图像纹理分割.仪器仪表学报, 1996, 17(1): 114-117
[12]周进,韩良恺,高文琦等.二元光学元件各级光强的分布规律和衍射效率.中国激光, 1996, 23(5): 449-452
[13]包春红,邬敏贤,金国藩等.二元光学波面变换器件的研究.光学学报, 1994, 14(9): 988-991
[14]许超,张静娟,陈俊本.用于圆对称光束波前变换的位相型光学系统.物理学报, 1993, 42(8): 1245-1251
[15]王超,严瑛白,邬敏贤.用于波面校正的几种二元光学器件.仪器仪表学报, 1995, 16(1): 356-360
[16]付振海,邬敏贤,崔晓明等.半导体激光器泵浦固体激光器中的二元光学器件.仪器仪表学报, 1996, 17(1): 382-383
[17] Schwider J., Stork W., Streibl N., et al. Possibilities and limitations of space-variant holographic optical elements for switching networks and general interconnects. Appl. Opt, 1992, 31: 7403-7410
[18] Stern M.B., Holz M., Medeiros S., et al. Fabricating binary optics variables critical to optical efficiency. J.Vac.Sci.Technol.,1991, B9: 3117-3121
[19] Ruthen R.. Binary optics developers focus on sensors and communication. Scientif. Amer., 1991, 265(6): 32-36
[20] Vledkamp W.B.. Wireless focal plane on the road to amacronic sensors. IEEE J.Quantum Electronics, 1993, 29(2): 801-802
[21]赵光兴,杨国光,陈洪廖等.微透镜阵列的离子束刻蚀及衍射效率测量.中国激光, 1997, A24(1): 35-401
[22]郑师海,李得华,陈岩松等.微米亚微米有限凹槽衍射特性的实验研究.物理学报, 1996, 45(8): 1292-1296
[23]陈岩松,李得华.一种设计二元衍射元件的优化方法.物理学报, 1996, 45(8): 1231-1236
[24]吴小萍,范朝阳,汤伟中等.二元微透镜阵列在密集多载波波分复用器中的应用.光学学报, 1997, 17(8):1103-11-7
[25] Thomas J. Suleski and Robert D. Te Kolste. A roadmap for micro-optics fabrication. SPIE . 2001. v4440. 1～15
[26] Motamedi M.E.. Merging micro-optics with micromechanics: micro-opto-Electro- mechanical (MOEM) devices. Proc.SPIE, 1993, CR49: 302-328
[27] Glockner S., Goring R., possner T.. Micro-opto-mechanical beam defelctors. Opt.Eng, 1997, 36(5): 1339-1345
[28] Roggemau M.C., Bright V.M., Hick S.R.. Use of micro-electrol-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental result. Opt.Eng, 1997, 36(5):1326-1338
[29]朱传贵,刘德森,薛鸣球等.高密度微小透镜面阵列研制.光子学报, 1992, 21(4): 310-315
[30] Rolf Goering, Torsten Possner, Peter Schreiber. Planar gradient-index cylindrical microlenses: flexible components for laser diode applications. SPIE, 1996, 2687: 131-139
[31] Bernhard Messerschmidt, Ulf Possner, Albrecht von Pfeil, et al. Diffraction-limited gradient-index (GRIN) microlenses with high numerical apertures produced by silver ion exchange in glass: diffusion modeling and process optimization .Proc. SPIE Int. Soc. Opt. Eng., 1998, 3424: 88-89
[32] Popovic Z.D, Prague R.A, Neville Connell G.A. Technique for monolithic fabrication of microlens arrays. Appl. Opt., 1988, 7: 1281-1284
[33] Daly D, Stevens R.F, Hutley M.C, et.al. The manufacture of microlenses by melting photoresist. Meas. Sci. Technol., 1990, 1: 759-766
[34] Borreli N F, Morse D L, Bellman R H, et al. Photolytic technique for Producing Microlenses in Photosensitive glass. Appl Opt., 1988, 24(16): 2520-2525
[35]许乔,叶钧,周光亚等.折射型微透镜列阵的光刻热熔法研究.光学学报, 1996, 16(9): 1327-1331
[36] Motanedi M. Edward. Micro-opto-electro-mechanical systems. Opt. Eng., 1994, 33 (1) : 3505-3517
[37] Streibl N, N?lscher U, Jahns J, et.al. Array generation with lenslet arrays. Appl. Opt. 1991, 30: 2739-2742
[38] Cordingley J. Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers. Appl. Opt., 1993, 32(14) : 2538-2542
[39] D?schner W, Long P, Larsson M., et al. Fabrication of diffractive Optical elements using a single optical exposure with a gray level mask. J. Val. Sci. Technol.. B, 1995, 13: 729-2731
[40] D?schner Walter, Long Pin, Stein Robert, et al. Cost-effective mass fabrication of multilevel diffractive optical elements by was of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass. Applied Optics, 1997, 36 (20): 4675-4680
[41] Jiang Hongjin, Yuan Xiaocong, Yun ZhiSheng, et al. Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask. Materials Science and Engineering C, 2001, 16: 99-102
[42] M. R. Wang, H. Su. Multilevel diffractive micrelens fabrication by one-step laser-assisted chemical etching upon high-energy-beam-sensitive glass. Opt. Lett.,1998, 23 (13): 876-878
[43] Daschner W, Larsson M.S, Lee H. Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step. Appl. Opt., 1995, 34 (14): 2534-2538
[44] Ernst–Bernhard Kley. Continuous profile writing by electron and optical lithography. Microeletronic Engineering, 1997, 34: 261-298
[45] M. Edward Motamedi, William E. Tennant, Haluk O. Sankur, et al. Micro-optic integration with focal plane arrays. Opt. Eng., 1997, 36 (5): 1374-1381
[46] Harry G. Erhardt. James Kane. Silicon cylindrical lens arrays for improved photoresponse in focal plane arrays. Proc. SPIE, 1984, 501: 165-172
[47] Anthony Lee. High-powered laser diode transmitter with integrated microlens for fast axis collimation. SPIE, 1998, 3289: 33-42
[48] Ying-Ruel Huang, Hwai-Pwu Chou. Fabrication of ball-type spherical microlens array for optical fiber coupling. Proc. of SPIE, 2004, 5347: 281-286
[49] Masaharu Deguchi, Takesuke Maruyama, Futoshi Yamasaki. Microlens design using simulation for CCD image sensor. IEEE Transactions on Consumer Electronics, 1992, 38(3): 583-589
[50] Arnold Daniels, Till W.Liepmann. A fiber-optically coupled infrared focal plane array system for use in missile warning receiver applications. Part of SPIE conference on infrared imaging system: design, analysis, modeling, and testing X.Orlando,Florida. SPIE, 1999, 3701: 118-130
[51] Wolfgang Ehrfeld, Ursula Ehrfeld, Markus Winzenick, et al. Microtechnology on the Threshold of the 21th Century Proc. 22nd international conference on miroelectronics (MIEL), 2000,1:14-17
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