微细电火花沉积与去除可逆加工关键技术研究
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摘要
先进制造技术的水平是决定国家经济发展和现代化进程的重要因素之一。随着制造技术内涵的不断拓展,材料的加工已经不再局限于传统的去除过程。作为先进制造技术的一个重要分支,微细精密加工技术的开发和研究受到了各国的高度重视。在这一背景下,微细电火花加工以其无宏观作用力、加工单位小、可控性好等诸多优点而成为微细加工领域的研究热点之一。
以往对微细电火花加工技术的研究主要集中在如何提高其去除加工时的精度、效率和微细化程度等方面,然而电火花加工的原理决定了其电极损耗、极性效应等存在的必然性。本文从微细电火花加工的机理及工艺特殊性出发,深入研究了微细电火花加工中的工具电极损耗和极性效应规律。并以此为出发点,确定了在同一加工系统中实现微细电火花沉积与去除可逆加工的可行性,进而提出了电火花沉积与去除可逆加工方法。分别从加工极性效应、工作介质和加工工艺参数选择等方面研究了微细电火花沉积与去除可逆加工的实现条件和转换策略。
分析了微细电火花沉积加工中影响工具电极材料蚀除的主要因素。建立了时变放电通道半径条件下,工具电极材料蚀除的单脉冲放电温度场仿真模型。分析了工具电极蚀除的微观过程,研究了放电通道中由于放电能量密度变化对工具电极材料蚀除形式的影响规律。研究了不同类型脉冲电源在微细电火花沉积加工中的放电波形特点及对沉积材料成形的影响,并分析了其适用场合。
对微细电火花沉积加工的沉积材料特性进行了深入研究。结果表明,沉积材料内部微观组织结构致密,与基体结合紧密;沉积材料的成分取决于工具电极材料,在以空气为加工介质的沉积加工过程中发生了微量氧化;硬度测试结果表明,45钢、钨沉积材料硬度相对与工具电极材料有较大的提高;沉积材料具有较好的承受压缩载荷的能力,黄铜沉积材料能承受的最大压强约为490Mpa,45钢的沉积材料能承受的最大压强约为1764Mpa,说明微细电火花沉积加工方法能适用于微细支撑结构的制作。
研究了微细电火花沉积加工微细结构的沉积策略问题,提出了两种沉积加工策略:基于单圆柱沉积加工稳定性的多次沉积策略和基于放电间隙伺服的分层扫描沉积加工策略。提出了基于间隙伺服控制进行工具电极实时补偿,X-Y平面规划单层扫描轨迹的沉积加工策略。建立了工具电极轴向损耗补偿模型,得到了分层扫描沉积加工中沉积层厚度的一致性规律,提出了平面任意形状路径轨迹规划方法。并进行了微细电火花沉积加工实验,得到了加工效果较好的沉积样件。
研究了微细电火花可逆加工方法制作微细结构的实现过程,建立了微细电火花可逆加工系统。提出了微细电火花可逆加工实现的具体工艺步骤,将其分为微细工具电极的在线制作、微细电火花沉积加工工艺和微细电火花精微选择性去除3个相互联系的阶段,形成了微细电火花可逆加工方法。利用微细电火花可逆加工工艺方法进行了金属微三维结构的成功制作。在微细电火花选择性去除加工过程中,采用了多种去除加工方式,包括Z轴方向的直接去除加工、轴向阵列孔加工、径向孔加工及分层铣削加工等去除方式,得到成形精度和尺寸精度良好的金属微三维结构。在微细电火花分层铣削去除加工工艺中,提出了采用工具电极预置长度方法进行工具电极的轴向损耗补偿,提高了加工效率和加工精度,达到较好的清根效果。
综上所述,本文研究的微细电火花沉积与去除可逆加工方法,具有设备简单、可操作性强、材料适应范围广、能量易于控制等特点,突破了传统电火花加工的单一模式,为微细加工技术提供了一种新的技术手段。
The level of Advanced Manufacturing Technology (AMT) is one of the most important factors to influence economic development and modernization. With the development of manufacturing technology, materials processing is no longer confined to traditional removal process. As an important branch of AMT, micro machining technology has been much accounted of all over the world. With the unique advantages such as non-contact process, small removal unit, energy easy to be controlled and so on, micro electrical discharge machining (EDM) process has become one of the research focuses in the field of micro-machining.
In the past, the researches of micro EDM mainly focus on how to improve the machining accuracy, the machining efficiency, and the micro-level of removal. But the principle of EDM determines the phenomena of tool electrode wear and polarity effect are inevitable. In this paper, the tool electrode wear and the polarity effect in micro EDM process are researched firstly based on analyzing the mechanism and process characteristics of micro EDM. On this basis, a reversible machining method is put forward, in which metal material can be deposited or removed in one EDM machining system. From analyzing the polarity effect, the working medium, the processing parameters, the processing conditions of the micro reversible EDM and the transformation strategy from deposition machining to removal machining are researched.
The major factors influence the tool electrode removal in micro EDM deposition are analyzed, and the temperature field simulation of tool electrode under the condition of single discharge with time-varying discharge channel radius is developed. Through analyzing the micro-process of the tool electrode removal, the law of different tool electrode removal form with different discharge energy density in discharge channel is obtained. In addition, the discharge waveform characteristics of transistor pulse source and RC pulse source in micro EDM deposition are analyzed, the formation process of the deposited material with the discharge characteristics are researched.
The characteristics of the deposited material have been analyzed detailed, the results show that the deposited material has compact fine texture and bonds close to the base material, the components of the deposited material are almost the same as those of the tool electrode and micro oxidation occurs using air working medium. Hardness test results show that when using 45 steel and tungsten as tool electrode, the hardness of deposited materials increase obviously compare with the tool electrode. Moreover, the deposited material has a better ability to withstand compression loads. Brass deposited material can withstand the maximum pressure of about 490Mpa and 45 steel deposited material of about 1764Mpa, which show that micro EDM deposition process can be applied to fabrication of micro supporting structures.
The deposition strategies of fabricating micro structures by using micro EDM deposition process are researched. In this paper, two kinds of deposition strategies are put forward, which are multi-deposition based on the stability of single cylinder deposition and scanning layer by layer deposition based on discharge gap servo. The deposition strategy combines the tool electrode real-time servo along Z axis with the X-Y plane single layer scanning path planning is built. The tool electrode wear compensation model and the consistency law of deposition layer are analyzed. In this research, a scanning path planning method of arbitrary shape in X-Y plan is built too, and the samples from deposition experiments have satisfied results.
On the basis of above researches, the machining system of micro reversible EDM is built and the micro reversible EDM method is put forward. The micro reversible EDM method can be divided into three continuous processes, which are micro tool electrode on-line machining, micro EDM deposition process, and micro EDM selective removal process. In step of selective removal process, several removal strategies including direct removing along Z-axis, axial direction array-holes and radial direction micro holes drilling on the deposited micro cylinder and micro EDM milling were carried out respectively, micro 3D structures of metal material with high shape accuracy and high dimensional precision are fabricated successfully. In micro EDM milling process, a present length method of tool electrode is applied to compensate the axial wear, which improve the machining efficiency and machining precision and easy to achieve the better results of clearing root
All above, the reversible EDM method is a breakthrough of traditional EDM, which provides the ability of depositing or removing metal material for fabrication of micro structures in one machining system. The new reversible EDM process has the advantages such as the low-cost equipment requirements, a wide adaptability of materials and the energy easy to be controlled and so on, which provides a new technique method for micro machining technology.
以往对微细电火花加工技术的研究主要集中在如何提高其去除加工时的精度、效率和微细化程度等方面,然而电火花加工的原理决定了其电极损耗、极性效应等存在的必然性。本文从微细电火花加工的机理及工艺特殊性出发,深入研究了微细电火花加工中的工具电极损耗和极性效应规律。并以此为出发点,确定了在同一加工系统中实现微细电火花沉积与去除可逆加工的可行性,进而提出了电火花沉积与去除可逆加工方法。分别从加工极性效应、工作介质和加工工艺参数选择等方面研究了微细电火花沉积与去除可逆加工的实现条件和转换策略。
分析了微细电火花沉积加工中影响工具电极材料蚀除的主要因素。建立了时变放电通道半径条件下,工具电极材料蚀除的单脉冲放电温度场仿真模型。分析了工具电极蚀除的微观过程,研究了放电通道中由于放电能量密度变化对工具电极材料蚀除形式的影响规律。研究了不同类型脉冲电源在微细电火花沉积加工中的放电波形特点及对沉积材料成形的影响,并分析了其适用场合。
对微细电火花沉积加工的沉积材料特性进行了深入研究。结果表明,沉积材料内部微观组织结构致密,与基体结合紧密;沉积材料的成分取决于工具电极材料,在以空气为加工介质的沉积加工过程中发生了微量氧化;硬度测试结果表明,45钢、钨沉积材料硬度相对与工具电极材料有较大的提高;沉积材料具有较好的承受压缩载荷的能力,黄铜沉积材料能承受的最大压强约为490Mpa,45钢的沉积材料能承受的最大压强约为1764Mpa,说明微细电火花沉积加工方法能适用于微细支撑结构的制作。
研究了微细电火花沉积加工微细结构的沉积策略问题,提出了两种沉积加工策略:基于单圆柱沉积加工稳定性的多次沉积策略和基于放电间隙伺服的分层扫描沉积加工策略。提出了基于间隙伺服控制进行工具电极实时补偿,X-Y平面规划单层扫描轨迹的沉积加工策略。建立了工具电极轴向损耗补偿模型,得到了分层扫描沉积加工中沉积层厚度的一致性规律,提出了平面任意形状路径轨迹规划方法。并进行了微细电火花沉积加工实验,得到了加工效果较好的沉积样件。
研究了微细电火花可逆加工方法制作微细结构的实现过程,建立了微细电火花可逆加工系统。提出了微细电火花可逆加工实现的具体工艺步骤,将其分为微细工具电极的在线制作、微细电火花沉积加工工艺和微细电火花精微选择性去除3个相互联系的阶段,形成了微细电火花可逆加工方法。利用微细电火花可逆加工工艺方法进行了金属微三维结构的成功制作。在微细电火花选择性去除加工过程中,采用了多种去除加工方式,包括Z轴方向的直接去除加工、轴向阵列孔加工、径向孔加工及分层铣削加工等去除方式,得到成形精度和尺寸精度良好的金属微三维结构。在微细电火花分层铣削去除加工工艺中,提出了采用工具电极预置长度方法进行工具电极的轴向损耗补偿,提高了加工效率和加工精度,达到较好的清根效果。
综上所述,本文研究的微细电火花沉积与去除可逆加工方法,具有设备简单、可操作性强、材料适应范围广、能量易于控制等特点,突破了传统电火花加工的单一模式,为微细加工技术提供了一种新的技术手段。
The level of Advanced Manufacturing Technology (AMT) is one of the most important factors to influence economic development and modernization. With the development of manufacturing technology, materials processing is no longer confined to traditional removal process. As an important branch of AMT, micro machining technology has been much accounted of all over the world. With the unique advantages such as non-contact process, small removal unit, energy easy to be controlled and so on, micro electrical discharge machining (EDM) process has become one of the research focuses in the field of micro-machining.
In the past, the researches of micro EDM mainly focus on how to improve the machining accuracy, the machining efficiency, and the micro-level of removal. But the principle of EDM determines the phenomena of tool electrode wear and polarity effect are inevitable. In this paper, the tool electrode wear and the polarity effect in micro EDM process are researched firstly based on analyzing the mechanism and process characteristics of micro EDM. On this basis, a reversible machining method is put forward, in which metal material can be deposited or removed in one EDM machining system. From analyzing the polarity effect, the working medium, the processing parameters, the processing conditions of the micro reversible EDM and the transformation strategy from deposition machining to removal machining are researched.
The major factors influence the tool electrode removal in micro EDM deposition are analyzed, and the temperature field simulation of tool electrode under the condition of single discharge with time-varying discharge channel radius is developed. Through analyzing the micro-process of the tool electrode removal, the law of different tool electrode removal form with different discharge energy density in discharge channel is obtained. In addition, the discharge waveform characteristics of transistor pulse source and RC pulse source in micro EDM deposition are analyzed, the formation process of the deposited material with the discharge characteristics are researched.
The characteristics of the deposited material have been analyzed detailed, the results show that the deposited material has compact fine texture and bonds close to the base material, the components of the deposited material are almost the same as those of the tool electrode and micro oxidation occurs using air working medium. Hardness test results show that when using 45 steel and tungsten as tool electrode, the hardness of deposited materials increase obviously compare with the tool electrode. Moreover, the deposited material has a better ability to withstand compression loads. Brass deposited material can withstand the maximum pressure of about 490Mpa and 45 steel deposited material of about 1764Mpa, which show that micro EDM deposition process can be applied to fabrication of micro supporting structures.
The deposition strategies of fabricating micro structures by using micro EDM deposition process are researched. In this paper, two kinds of deposition strategies are put forward, which are multi-deposition based on the stability of single cylinder deposition and scanning layer by layer deposition based on discharge gap servo. The deposition strategy combines the tool electrode real-time servo along Z axis with the X-Y plane single layer scanning path planning is built. The tool electrode wear compensation model and the consistency law of deposition layer are analyzed. In this research, a scanning path planning method of arbitrary shape in X-Y plan is built too, and the samples from deposition experiments have satisfied results.
On the basis of above researches, the machining system of micro reversible EDM is built and the micro reversible EDM method is put forward. The micro reversible EDM method can be divided into three continuous processes, which are micro tool electrode on-line machining, micro EDM deposition process, and micro EDM selective removal process. In step of selective removal process, several removal strategies including direct removing along Z-axis, axial direction array-holes and radial direction micro holes drilling on the deposited micro cylinder and micro EDM milling were carried out respectively, micro 3D structures of metal material with high shape accuracy and high dimensional precision are fabricated successfully. In micro EDM milling process, a present length method of tool electrode is applied to compensate the axial wear, which improve the machining efficiency and machining precision and easy to achieve the better results of clearing root
All above, the reversible EDM method is a breakthrough of traditional EDM, which provides the ability of depositing or removing metal material for fabrication of micro structures in one machining system. The new reversible EDM process has the advantages such as the low-cost equipment requirements, a wide adaptability of materials and the energy easy to be controlled and so on, which provides a new technique method for micro machining technology.
引文
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