外电场作用下精微机械的界面粘附特性研究与控制
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摘要
由于尺寸效应和表面效应,界面行为已经成为精微机械领域中的关键性基础问题,其导致的界面粘附失效是精微机械中最常见的失效模式之一。本论文针对精微机械的典型粘附失效形式,分别从固-固界面及固-液界面角度讨论了外电场作用下的界面粘附特性及规律。
为了研究外电场作用下的固-固界面粘附特性,本文研制了力分辨率在10μN的微观粘着测试仪,可以测量不同环境湿度、外电场强度下各种接触材料在0.1-7mN范围内的接触粘着力。该仪器可研究外电场作用下的固-固界面粘附特性以及液体介质对外电场作用下的固-固界面粘附特性的影响。
论文实验研究了外电场作用下固-固界面的粘附力及其变化规律,建立了针对球-面接触的粗糙表面扩散充电模型。利用该模型分析了接触充电时间、外电场强度、界面材料特性等对固-固界面粘附特性的影响,建立了最大电荷注入密度、等效充电时间常数与外电场强度、电介质材料性质之间关系的物理模型,并基于该模型揭示出不同电介质材料对固-固界面粘附特性的影响。
论文将外电场作用下固-固界面粘着物理模型应用到射频MEMS开关设计,从引入表面形貌修正的C-V曲线揭示了三种开关失效模式的机理和规律,给出了考虑界面电荷积累效应的开关使用寿命计算模型,并提出了改进开关性能的新设计方案。通过对外电场作用下固-固界面粘附机理的分析,提出将液体介质引入固-固界面以实现对其界面粘附特性的改变与控制,并以甘油及十六烷作为典型的极性与非极性液体,应用微观粘着测试仪进行了相关的实验验证。
本论文将动态石英晶振微天平(QCM)在液体测试中的响应函数拓展到双层膜模型,并在此基础上定量研究了外电场作用下5CB液晶近固-液界面(近壁面)层的粘弹性性质及相变行为。研究发现外电场作用将导致5CB近壁面层复剪切粘度降低,与体相液晶的电粘效应相反,同时电场与壁面的耦合作用导致近壁面层液晶的相变温度升高,且高于根据向列相模型得到的5CB液晶的相应理论值。论文利用液晶分子长棒模型从分子排列角度对其进行了解释,并发现电场导致的近壁面有序分子层的存在可以使液晶在边界润滑区产生较低摩擦系数的现象,提出了通过电场控制精密机械低速启动中的界面粘附问题的新思路。
The interface properties have become the basic key problem of micro-machine because of scale effect and surface effect. The interfacial adhesion failure is one of the most common failure models of micro-machine. This thesis investigates the interfacial adhesion properties under external electric field (EEF) from two points of view: solid-solid interface and solid-liquid interface, which focuses on the two kinds of classical model of adhesion failure: stiction and stick.
For investigating the solid-solid adhesion properties under EEF, a micro-adhesion tester is made to measure the pull-off force during different humidity and EEF, with resolution of 10μN in the range of 0.1-7mN. The adhesion properties of solid-solid interface and the effect of liquid on solid-solid’s properties under EEF have been investigated by this tester.
The adhesion and its’change rule of solid-solid interface under EEF are experimentally researched. The diffuse charging model of roughness surface for ball-plat contacted is constructed. The effect on solid-solid interface adhesion of charging time, EEF strength, material properties has been analyzed by this model. Then the physics model about the relation of EEF strength, material properties and the max charging density, constant charing time is constructed. And the research of different materials on the solid-solid interface adhesion has been completed based on the physics model.
The physics model discussed above is applied in the design of RF MEMS switches. The mechanism of three kinds of failure model of RF MEMS swithes have been explained from the C-V curve which considered the roughness. The life-time model of switches has bean constructed with charging effect, and the new design for improving the switches’performance is given. From the analysis of the adhesion mechanism of solid-solid interface under EEF, the liquid has been introduced to change and control the adhesion of solid-solid interface, which has been validated experimentally by the micro-adhesion tester use the classical polar liquid (glycerin) and non-polar liquid (n-hexadecane).
This thesis extends the response function of quartz crystal microbalance (QCM) in liquid to two layers model. And then it analyzes the viscoelasticity and phase transition of the near-interface layer of 5CB liquid crystal under EEF based on this model. The investigation indicated that EEF can decrease the complex shear viscocity of near-interface layer of 5CB, which is opposite with the bulk properties. At the same time, the coupling effect of EEF and surface effect will increase the phase transition temperature of 5CB and the increasing level is higher than the theory prediction got by the nematic phase model. This thesis gives the explain of these experiments by molecular model of liquid crystal, and it is found that the ordering of near-interface layer caused by EEF can result in low coefficient of friction in boundary lubrication, which can be used to control the stiction during startup of micro-machine.
为了研究外电场作用下的固-固界面粘附特性,本文研制了力分辨率在10μN的微观粘着测试仪,可以测量不同环境湿度、外电场强度下各种接触材料在0.1-7mN范围内的接触粘着力。该仪器可研究外电场作用下的固-固界面粘附特性以及液体介质对外电场作用下的固-固界面粘附特性的影响。
论文实验研究了外电场作用下固-固界面的粘附力及其变化规律,建立了针对球-面接触的粗糙表面扩散充电模型。利用该模型分析了接触充电时间、外电场强度、界面材料特性等对固-固界面粘附特性的影响,建立了最大电荷注入密度、等效充电时间常数与外电场强度、电介质材料性质之间关系的物理模型,并基于该模型揭示出不同电介质材料对固-固界面粘附特性的影响。
论文将外电场作用下固-固界面粘着物理模型应用到射频MEMS开关设计,从引入表面形貌修正的C-V曲线揭示了三种开关失效模式的机理和规律,给出了考虑界面电荷积累效应的开关使用寿命计算模型,并提出了改进开关性能的新设计方案。通过对外电场作用下固-固界面粘附机理的分析,提出将液体介质引入固-固界面以实现对其界面粘附特性的改变与控制,并以甘油及十六烷作为典型的极性与非极性液体,应用微观粘着测试仪进行了相关的实验验证。
本论文将动态石英晶振微天平(QCM)在液体测试中的响应函数拓展到双层膜模型,并在此基础上定量研究了外电场作用下5CB液晶近固-液界面(近壁面)层的粘弹性性质及相变行为。研究发现外电场作用将导致5CB近壁面层复剪切粘度降低,与体相液晶的电粘效应相反,同时电场与壁面的耦合作用导致近壁面层液晶的相变温度升高,且高于根据向列相模型得到的5CB液晶的相应理论值。论文利用液晶分子长棒模型从分子排列角度对其进行了解释,并发现电场导致的近壁面有序分子层的存在可以使液晶在边界润滑区产生较低摩擦系数的现象,提出了通过电场控制精密机械低速启动中的界面粘附问题的新思路。
The interface properties have become the basic key problem of micro-machine because of scale effect and surface effect. The interfacial adhesion failure is one of the most common failure models of micro-machine. This thesis investigates the interfacial adhesion properties under external electric field (EEF) from two points of view: solid-solid interface and solid-liquid interface, which focuses on the two kinds of classical model of adhesion failure: stiction and stick.
For investigating the solid-solid adhesion properties under EEF, a micro-adhesion tester is made to measure the pull-off force during different humidity and EEF, with resolution of 10μN in the range of 0.1-7mN. The adhesion properties of solid-solid interface and the effect of liquid on solid-solid’s properties under EEF have been investigated by this tester.
The adhesion and its’change rule of solid-solid interface under EEF are experimentally researched. The diffuse charging model of roughness surface for ball-plat contacted is constructed. The effect on solid-solid interface adhesion of charging time, EEF strength, material properties has been analyzed by this model. Then the physics model about the relation of EEF strength, material properties and the max charging density, constant charing time is constructed. And the research of different materials on the solid-solid interface adhesion has been completed based on the physics model.
The physics model discussed above is applied in the design of RF MEMS switches. The mechanism of three kinds of failure model of RF MEMS swithes have been explained from the C-V curve which considered the roughness. The life-time model of switches has bean constructed with charging effect, and the new design for improving the switches’performance is given. From the analysis of the adhesion mechanism of solid-solid interface under EEF, the liquid has been introduced to change and control the adhesion of solid-solid interface, which has been validated experimentally by the micro-adhesion tester use the classical polar liquid (glycerin) and non-polar liquid (n-hexadecane).
This thesis extends the response function of quartz crystal microbalance (QCM) in liquid to two layers model. And then it analyzes the viscoelasticity and phase transition of the near-interface layer of 5CB liquid crystal under EEF based on this model. The investigation indicated that EEF can decrease the complex shear viscocity of near-interface layer of 5CB, which is opposite with the bulk properties. At the same time, the coupling effect of EEF and surface effect will increase the phase transition temperature of 5CB and the increasing level is higher than the theory prediction got by the nematic phase model. This thesis gives the explain of these experiments by molecular model of liquid crystal, and it is found that the ordering of near-interface layer caused by EEF can result in low coefficient of friction in boundary lubrication, which can be used to control the stiction during startup of micro-machine.
引文
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