激光光致热塑成型效应及三维微结构制备新方法研究
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摘要
微纳米技术代表着未来科技的发展趋势,被越来越多的国家列为优先发展的前沿领域。微纳结构与器件制备技术是微纳米技术的重要基础,而激光微加工技术是这类制备技术的一个重要分支。光刻、准分子激光微加工及飞秒激光加工等现有的激光微加工技术,其共同的特点是基于激光对材料表面的刻蚀实现凹进的微纳结构加工。为了直接实现凸起的微结构制备,本文首次提出了一种基于激光光致热塑成型的微结构制备新方法,可实现各种形式及尺寸的点、线、面、体等微结构的实时制备。该方法具有原理新颖、系统简洁、操作方便、无需掩模、可进行实时制备等特点,不仅具有重要的科学意义,而且在微纳米技术等领域具有广阔的实际应用前景。
本课题首先对激光光致热塑成型机制进行了完整系统的理论研究,揭示了三维微结构热塑成型的动态平衡条件及规律。分析了激光照射在基底材料表面所引起的光热效应,建立了表面温度升高分布的二维数值模型；讨论在此温度分布情况下的物质相变过程,与环境界面的表面张力方向以及熔体内部环流的形成,进而导致基底材料表面的微结构光致热塑成型。进一步研究了热塑成型过程中的熔体内部环流变化规律,揭示了熔体环流的熔化上升速度与冷却凝固速度的相互关系；建立光致热塑成型过程的动态平衡方程,表明满足动态平衡条件是获得连续稳定成型效果的基础；分析了制备过程中影响动态平衡情况的主要因素,并对它们的影响规律进行了探讨。
在理论研究的基础上,提出和发展了基于激光光致热塑成型的微结构制备新方法。围绕这一方法,本文设计研究了基于光致热塑成型的微结构制备总体方案。针对热塑性材料、制备环境及温度、热塑成型时间等微结构成型过程中的重要影响因素,开展了系统的研究,包括热塑性材料的选择和制备基底的准备、制备环境温度和光致热塑成型时间的有效控制等；并利用步进扫描控制方法实现基底与激光光斑之间的三维相对位移,以获得与扫描路径一致的图形化微结构,并为制备更为复杂的微结构甚至微器件奠定基础。
研制了三维微结构的光致热塑成型制备系统。整个系统主要包括激光及其光路、基底材料、液体环境及液体池、CCD显微监控单元、步进扫描微动台以及计算机软硬件系统。激光光路部分实现制备激光束的输出和调节,通过快门进行光束的开启和闭合控制。当聚焦光斑照射在放置于液体环境中的基底材料上时,可在光斑处制备得到点状或柱状微结构；利用步进扫描微动台带动基底相对于激光光斑做横向平移,即可制备得到各种所需的复杂微结构。为了监控激光束的聚焦情况并实时观测制备成型效果,引入CCD显微监控单元,以获得基底表面被照射区域的显微画面。激光束的快门控制信号及微结构制备过程中的扫描路径控制信号,由计算机系统输出。
利用上述系统广泛开展了基于光致热塑成型的三维微结构制备实验研究,实现了点、柱、线、面、体及其它复杂微结构的制备成型。证明了液体环境对微结构形貌的决定性影响；进行了半导体激光器与固体激光器两种光源的制备成型比较实验,分析了不同光源对微结构制备效果的影响；在不同的热塑性基底上,黑色聚乙烯塑料可以实现微米级结构成型,而石蜡混合物材料获得的成型结构在形貌参数上更具优势；实验探索光致热塑成型的微结构形貌与激光照射时间的关系。开展柱型微结构的制备优化研究,针对提高高宽比和缩小直径两种应用需求,分别获得了高宽比约为8和直径约为50μm的柱型微结构。进行阵列微结构制备实验,完成点阵微结构和柱阵微结构的制备成型。在线型微结构制备研究中,分析激光功率和步进扫描速度等主要参数设置对制备效果的影响。进行了复杂微结构的制备实验探索,实现了多种复杂微结构的光致热塑成型。
最后对本课题的研究成果进行总结：从理论和实验两方面研究了激光光致热塑成型效应,证明了基于光致热塑成型的微结构制备的可行性,针对制备参数优化和多种微结构制备开展了实验研究。此外提出了课题研究工作中的不足和需要改进之处,对未来的研究提出了方向性的建议。
Micro/nano-technique represents the research tendency of future science and technology; it has been counted as the advanced field for priority development by more and more countries. One of the micro/nano-technique development foundations is micro/nano structures and devices fabrication, which has the laser-induced fabrication technique as an important branch. The common feature of current laser-induced microfabrication, like photolithography, excimer laser technology, femtosecond pulse microfabrication etc, is utilizing laser-induced etching effect on material surface to perform the depressed microstructure fabrication. In order to get a convex micro-projection, a novel microstructure fabricating method based on laser-induced thermoplastic formation is introduced in this dissertation for the first time. It can complete real-time fabrication of micro-dot,-pillar,-line,-wall,-bulk etc in various forms and sizes. It has advantages of novel principle, simple equipment, easy operation, no masking, and real-time manufacture. It has an extraordinary scientific meaning and comprehensive application prospect in micro/nano-technique field.
This dissertation carries out complete and systematic research on laser-induced thermoplastic formation mechanism, discloses the qualification of dynamic balance in three-dimensional (3D) microstructure manufacturing process. We analyze the photo-thermal effect on material surface generated by laser irradiation, and build a two-dimensional (2D) static model of temperature rising distribution on material surface. This temperature rising distribution generates phase change process, surface tension towards particular direction and circulation inside melt material. These end up with thermoplastic formation above material surface. Then we study the variation of melt material circulation; discuss the balance between melting velocity and solidifying velocity of melt circulation. An equation of dynamic balance in thermoplastic formation process is provided, which has been proved to be the foundation of getting a continuous and stabile thermoplastic formation results. We analyze the main fabricating parameters, and discuss their influences to the thermoplastic formatted microstructures.
According to above theoretical analyses, we present and develop the micro-fabrication method based on laser-induced thermoplastic formation. Revolving around this method, an overall scheme of microstructure fabrication based on laser-induced thermoplastic formation is designed. About important influences in microstructure formation process, such as thermoplastic material, temperature of liquid environment and laser irradiation time, systematic researches has been carried out, including selecting thermoplastic material, preparing samples, controlling the temperature of distilled water and manipulating the proper time of thermoplastic formation. Scanning control method is employed to move the sample in three dimensional relatively to laser beam, in order to get microstructures corresponding to the scanning route, and make preparations for fabricating graphic or more complicated microstructures.
A 3D microstructure fabricating system based on laser-induced thermoplastic formation has been built up. It consists of laser and its beam path, substrate material, liquid environment and its container, microscopy monitor unit with charged couple device (CCD), step scanning stage. and computer hardware with dependent program. The laser beam path is responsible for laser beam adjusting and focusing, with a shutter to control the fabricating laser beam on and off. As the focal spot irradiated on the substrate material placing in liquid environment, a micro-dot or-pillar is fabricated there. While laterally moving the substrate relatively to the focal spot by a step scanning stage, desire shapes of microstructures can be obtained. To monitoring the laser focusing and observing the formation results instantly, we modify a microscopy monitor unit, displaying the lateral view of laser irradiated zone on substrate surface. The controlling message of laser shutter and scanning path in microstructure fabrication process is output from the computer system.
We carry out experimental study of laser-induced thermoplastic micro-fabrication, complete the fabrication of micro-dot,-pillar,-line,-wall,-bulk and other kinds of complicated microstructures. The liquid environment has been proved to be determinant for fabricating results through experiment. Laser diode source and solid laser source have been compared on thermoplastic formation effects. We carry out fabrication experiments on different thermoplastic materials. Micro scale structures can be obtained on polythene (PE) material, while microstructures with better appearance can be obtained on paraffin mixture. The relation between microstructure shape and laser irradiation time has been studied through experiments. We carry out the fabricating parameter optimization study for micro-pillar. For the requirements of high height-width (HW) ratio and small diameter, micro-pillar with HW ratio of 8 and micro-pillar with diameter of 50μm has been achieved. Microstructure arrays have been fabricated, including dot array and pillar array. We study the thermoplastic formation of micro-lines with different laser power and different scanning velocity, analyzing their influences for fabrication results. We also explore the fabrication of complicated microstructures; complete the laser-induced thermoplastic formation of various kinds of complicated microstructures.
The achievements of this whole subject are concluded at the end:studying the mechanism of laser-induced thermoplastic formation in both theoretical and experimental ways, approving feasibility of microstructure fabrication based on laser-induce thermoplastic formation, optimizing the fabricating parameters and accomplishing fabricating experiments of different types of microstructures. Besides, we point out some inadequacy of this work, and give some advices on the future research.
本课题首先对激光光致热塑成型机制进行了完整系统的理论研究,揭示了三维微结构热塑成型的动态平衡条件及规律。分析了激光照射在基底材料表面所引起的光热效应,建立了表面温度升高分布的二维数值模型；讨论在此温度分布情况下的物质相变过程,与环境界面的表面张力方向以及熔体内部环流的形成,进而导致基底材料表面的微结构光致热塑成型。进一步研究了热塑成型过程中的熔体内部环流变化规律,揭示了熔体环流的熔化上升速度与冷却凝固速度的相互关系；建立光致热塑成型过程的动态平衡方程,表明满足动态平衡条件是获得连续稳定成型效果的基础；分析了制备过程中影响动态平衡情况的主要因素,并对它们的影响规律进行了探讨。
在理论研究的基础上,提出和发展了基于激光光致热塑成型的微结构制备新方法。围绕这一方法,本文设计研究了基于光致热塑成型的微结构制备总体方案。针对热塑性材料、制备环境及温度、热塑成型时间等微结构成型过程中的重要影响因素,开展了系统的研究,包括热塑性材料的选择和制备基底的准备、制备环境温度和光致热塑成型时间的有效控制等；并利用步进扫描控制方法实现基底与激光光斑之间的三维相对位移,以获得与扫描路径一致的图形化微结构,并为制备更为复杂的微结构甚至微器件奠定基础。
研制了三维微结构的光致热塑成型制备系统。整个系统主要包括激光及其光路、基底材料、液体环境及液体池、CCD显微监控单元、步进扫描微动台以及计算机软硬件系统。激光光路部分实现制备激光束的输出和调节,通过快门进行光束的开启和闭合控制。当聚焦光斑照射在放置于液体环境中的基底材料上时,可在光斑处制备得到点状或柱状微结构；利用步进扫描微动台带动基底相对于激光光斑做横向平移,即可制备得到各种所需的复杂微结构。为了监控激光束的聚焦情况并实时观测制备成型效果,引入CCD显微监控单元,以获得基底表面被照射区域的显微画面。激光束的快门控制信号及微结构制备过程中的扫描路径控制信号,由计算机系统输出。
利用上述系统广泛开展了基于光致热塑成型的三维微结构制备实验研究,实现了点、柱、线、面、体及其它复杂微结构的制备成型。证明了液体环境对微结构形貌的决定性影响；进行了半导体激光器与固体激光器两种光源的制备成型比较实验,分析了不同光源对微结构制备效果的影响；在不同的热塑性基底上,黑色聚乙烯塑料可以实现微米级结构成型,而石蜡混合物材料获得的成型结构在形貌参数上更具优势；实验探索光致热塑成型的微结构形貌与激光照射时间的关系。开展柱型微结构的制备优化研究,针对提高高宽比和缩小直径两种应用需求,分别获得了高宽比约为8和直径约为50μm的柱型微结构。进行阵列微结构制备实验,完成点阵微结构和柱阵微结构的制备成型。在线型微结构制备研究中,分析激光功率和步进扫描速度等主要参数设置对制备效果的影响。进行了复杂微结构的制备实验探索,实现了多种复杂微结构的光致热塑成型。
最后对本课题的研究成果进行总结：从理论和实验两方面研究了激光光致热塑成型效应,证明了基于光致热塑成型的微结构制备的可行性,针对制备参数优化和多种微结构制备开展了实验研究。此外提出了课题研究工作中的不足和需要改进之处,对未来的研究提出了方向性的建议。
Micro/nano-technique represents the research tendency of future science and technology; it has been counted as the advanced field for priority development by more and more countries. One of the micro/nano-technique development foundations is micro/nano structures and devices fabrication, which has the laser-induced fabrication technique as an important branch. The common feature of current laser-induced microfabrication, like photolithography, excimer laser technology, femtosecond pulse microfabrication etc, is utilizing laser-induced etching effect on material surface to perform the depressed microstructure fabrication. In order to get a convex micro-projection, a novel microstructure fabricating method based on laser-induced thermoplastic formation is introduced in this dissertation for the first time. It can complete real-time fabrication of micro-dot,-pillar,-line,-wall,-bulk etc in various forms and sizes. It has advantages of novel principle, simple equipment, easy operation, no masking, and real-time manufacture. It has an extraordinary scientific meaning and comprehensive application prospect in micro/nano-technique field.
This dissertation carries out complete and systematic research on laser-induced thermoplastic formation mechanism, discloses the qualification of dynamic balance in three-dimensional (3D) microstructure manufacturing process. We analyze the photo-thermal effect on material surface generated by laser irradiation, and build a two-dimensional (2D) static model of temperature rising distribution on material surface. This temperature rising distribution generates phase change process, surface tension towards particular direction and circulation inside melt material. These end up with thermoplastic formation above material surface. Then we study the variation of melt material circulation; discuss the balance between melting velocity and solidifying velocity of melt circulation. An equation of dynamic balance in thermoplastic formation process is provided, which has been proved to be the foundation of getting a continuous and stabile thermoplastic formation results. We analyze the main fabricating parameters, and discuss their influences to the thermoplastic formatted microstructures.
According to above theoretical analyses, we present and develop the micro-fabrication method based on laser-induced thermoplastic formation. Revolving around this method, an overall scheme of microstructure fabrication based on laser-induced thermoplastic formation is designed. About important influences in microstructure formation process, such as thermoplastic material, temperature of liquid environment and laser irradiation time, systematic researches has been carried out, including selecting thermoplastic material, preparing samples, controlling the temperature of distilled water and manipulating the proper time of thermoplastic formation. Scanning control method is employed to move the sample in three dimensional relatively to laser beam, in order to get microstructures corresponding to the scanning route, and make preparations for fabricating graphic or more complicated microstructures.
A 3D microstructure fabricating system based on laser-induced thermoplastic formation has been built up. It consists of laser and its beam path, substrate material, liquid environment and its container, microscopy monitor unit with charged couple device (CCD), step scanning stage. and computer hardware with dependent program. The laser beam path is responsible for laser beam adjusting and focusing, with a shutter to control the fabricating laser beam on and off. As the focal spot irradiated on the substrate material placing in liquid environment, a micro-dot or-pillar is fabricated there. While laterally moving the substrate relatively to the focal spot by a step scanning stage, desire shapes of microstructures can be obtained. To monitoring the laser focusing and observing the formation results instantly, we modify a microscopy monitor unit, displaying the lateral view of laser irradiated zone on substrate surface. The controlling message of laser shutter and scanning path in microstructure fabrication process is output from the computer system.
We carry out experimental study of laser-induced thermoplastic micro-fabrication, complete the fabrication of micro-dot,-pillar,-line,-wall,-bulk and other kinds of complicated microstructures. The liquid environment has been proved to be determinant for fabricating results through experiment. Laser diode source and solid laser source have been compared on thermoplastic formation effects. We carry out fabrication experiments on different thermoplastic materials. Micro scale structures can be obtained on polythene (PE) material, while microstructures with better appearance can be obtained on paraffin mixture. The relation between microstructure shape and laser irradiation time has been studied through experiments. We carry out the fabricating parameter optimization study for micro-pillar. For the requirements of high height-width (HW) ratio and small diameter, micro-pillar with HW ratio of 8 and micro-pillar with diameter of 50μm has been achieved. Microstructure arrays have been fabricated, including dot array and pillar array. We study the thermoplastic formation of micro-lines with different laser power and different scanning velocity, analyzing their influences for fabrication results. We also explore the fabrication of complicated microstructures; complete the laser-induced thermoplastic formation of various kinds of complicated microstructures.
The achievements of this whole subject are concluded at the end:studying the mechanism of laser-induced thermoplastic formation in both theoretical and experimental ways, approving feasibility of microstructure fabrication based on laser-induce thermoplastic formation, optimizing the fabricating parameters and accomplishing fabricating experiments of different types of microstructures. Besides, we point out some inadequacy of this work, and give some advices on the future research.
引文
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