新型直线超声电机的研究及其在运动平台中的应用
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摘要
直线超声电机具有直接输出推力、无电磁干扰、定位精度高、结构简单、设计灵活等特点，这使得它在近些年得到了快速的发展，并在微小型精密驱动系统中发挥着日益显著的作用。目前，在德国、日本、美国、以色列等国家，直线超声电机正朝着产业化方向发展，且其产品逐步在某些高、精、尖技术领域得到了应用。我国的直线超声电机研究工作刚刚开始，尚没有国产直线超声电机产品出现。国外该类低端产品已进入我国市场，但其价格昂贵，高端产品也限制对我国出口。为此，加大直线超声电机的研究和开发力度，加速直线超声电机的产业化发展，将会有力的促进我国高新技术产业的发展。本课题在国家自然科学基金重点项目“压电精密致动技术的基础研究”（No.50735002）和国家自然基金和广东联合基金项目“精密电子制造装备关键理论与技术研究”（No. U0934004）的资助下，以研究和开发拥有自主知识产权的直线超声电机为目标，开展了直线超声电机的驱动机理、优化设计、接触动力学模型、性能仿真、电机实验等方面的研究工作，并把所研制的3种新型直线超声电机在运动平台中进行了应用尝试，实现了大行程，高精度。本论文的主要研究内容和成果如下：
1、总结了直线超声电机的特点，提出了新的分类方法。通过对国内外直线超声电机的研究历程、应用现状和应用前景的分析，指出了深入进行直线超声电机研究的必要性。
2、根据国内外现有的研究成果，对压电陶瓷的性能指标及其诱发应变机制、椭圆运动的形成机理、直线超声电机对压电陶瓷、定子及动子材料、摩擦材料的要求等关键技术问题进行了系统的总结。
3、提出了一种利用同形弯振模态的轮式直线超声电机的设计理论，并系统地分析了该种电机的工作机理。通过所研制的3种轮式直线超声电机，总结了该种电机定子的动态设计方法和电机总体结构设计方法。
4、提出了一种具有三角形位移放大机构的面内模态直线超声电机。系统的分析和阐述了该型电机的工作原理，动力学特性和定子动力学优化设计方法。三角形位移放大结构的特别设计，使得该种电机结构紧凑，易于小型化。
5、提出了利用响应面法对直线超声电机定子进行优化设计的方法，并应用于蝶形直线超声电机定子的优化设计。结果表明，优化后的电机满足了多方面的设计要求：两相工作模态频率差较小（<100Hz）；定子驱动足振幅较大（>2μm）；工作模态远离干扰模态（>1kHz）；定子支撑点振幅较小（<1μm）。
6、建立了基于库仑摩擦模型的驻波型直线超声电机接触动力学模型，对电机定、动子之间的动力学行为进行了研究。通过仿真，分析了不同模型参数对电机性能的影响，并通过实验对该模型进行了验证。
7、根据所研制的不同直线超声电机的结构特点，设计制作了3种不同结构形式的运动平台，并构建了运动平台的测控系统，实现了大行程（≤100mm）、高定位精度（±0.5μm）。
Linear ultrasonic motors have been developing rapidly in recent years and they are playing animportant role in microminiaturizing precision driving systems for their attractive characteristics ofsimple mechanical construction, easy to realize miniaturization and lightweight of the device, highpositioning accuracy, direct drive, no electromagnetic interference and so on. Now, several types oflinear ultrasonic motors have been commercialized by some foreign companies and well used in somehigh technology fields. However, the study on the linear ultrasonic motor is immature and there is noproduct for sale in China. At the same time, the high-end products of linear ultrasonic motors arelimited to export to China. Therefore, there is much need to strengthen the efforts to study linearultrasonic motors.
Supported by NSFC (No.50735002) and NSFC-Guangdong Natural Science Foundation(No.U0934004), this dissertation presents a systemic research on drive mechanism, optimizationdesign and experiment, contact dynamic model, performance simulation. Furthermore, three newtypes of linear ultrasonic motor have been used in moving stage and achieved long stroke and highprecision. To conclude, main contributions of this dissertation are as follows.
1. The characteristics of linear ultrasonic motor are systematically summarized and theclassification method of them is proposed. At the same time, the state of the art of linear ultrasonicmotors and their applications both here and abroad are reviewed and summarized. Furthermore, theapplication prospects of linear ultrasonic motor are described and the need for the study of linearultrasonic motors is proposed.
2. The key problems in design of linear ultrasonic motors are summarized and analyzed: theperformance figure of piezoelectric ceramic and its strain induced mechanism, the formation methodof elliptical motion, the requirement for piezoelectric ceramics, materials of the stator and the slider,friction materials, and so on.
3. A new design theory of the wheel-shaped linear ultrasonic motor based on bending modes isproposed. The motion mechanism of the motor is analyzed in detail. The dynamic design of the statorand the optimal design of the whole structure of the motor are carried out. Three types of linearultrasonic motors with wheel-shaped stator have been fabricated.
4．A new linear ultrasonic motor with triangular structure based on in-plane modes is proposed.The operation principle, dynamic performance and structural optimum design of the stator areanalyzed and described in detail. The especial design of the stator is its isosceles triangular structure part, which makes the motor structure compact and easy to realize miniaturization.
5. A butterfly-shaped linear ultrasonic motor is used as an example to study on the new optimumdesign method of linear ultrasonic motors based on response surface methodology. Many designrequirements of optimal results can be well fulfilled: the work mode frequency difference is little(<100Hz), the amplitude of the driving foots is large (>2μm), the disturb modes are far away fromworking modes (>1kHz) and the amplitude of the clamping points is little (<1μm).
6. A contact model is established based on coulomb law of friction, which simultaneouslydescribes the dynamic behavior between the slider and the stator. The influence of the modelparameters on the motor behavior is studied to find out the requirements for an optimal contactbetween the slider and the stator. The model prediction agrees well with the experiment data.
7．Several types of positioning stage drived by different linear ultrasonic motors developed inthis dissertation have been fabricated. At the same time, the measurement and control systems havebeen constructed. The motion stages realize long stroke(~100mm) and high positioning precision (±0.5μm).
1、总结了直线超声电机的特点，提出了新的分类方法。通过对国内外直线超声电机的研究历程、应用现状和应用前景的分析，指出了深入进行直线超声电机研究的必要性。
2、根据国内外现有的研究成果，对压电陶瓷的性能指标及其诱发应变机制、椭圆运动的形成机理、直线超声电机对压电陶瓷、定子及动子材料、摩擦材料的要求等关键技术问题进行了系统的总结。
3、提出了一种利用同形弯振模态的轮式直线超声电机的设计理论，并系统地分析了该种电机的工作机理。通过所研制的3种轮式直线超声电机，总结了该种电机定子的动态设计方法和电机总体结构设计方法。
4、提出了一种具有三角形位移放大机构的面内模态直线超声电机。系统的分析和阐述了该型电机的工作原理，动力学特性和定子动力学优化设计方法。三角形位移放大结构的特别设计，使得该种电机结构紧凑，易于小型化。
5、提出了利用响应面法对直线超声电机定子进行优化设计的方法，并应用于蝶形直线超声电机定子的优化设计。结果表明，优化后的电机满足了多方面的设计要求：两相工作模态频率差较小（<100Hz）；定子驱动足振幅较大（>2μm）；工作模态远离干扰模态（>1kHz）；定子支撑点振幅较小（<1μm）。
6、建立了基于库仑摩擦模型的驻波型直线超声电机接触动力学模型，对电机定、动子之间的动力学行为进行了研究。通过仿真，分析了不同模型参数对电机性能的影响，并通过实验对该模型进行了验证。
7、根据所研制的不同直线超声电机的结构特点，设计制作了3种不同结构形式的运动平台，并构建了运动平台的测控系统，实现了大行程（≤100mm）、高定位精度（±0.5μm）。
Linear ultrasonic motors have been developing rapidly in recent years and they are playing animportant role in microminiaturizing precision driving systems for their attractive characteristics ofsimple mechanical construction, easy to realize miniaturization and lightweight of the device, highpositioning accuracy, direct drive, no electromagnetic interference and so on. Now, several types oflinear ultrasonic motors have been commercialized by some foreign companies and well used in somehigh technology fields. However, the study on the linear ultrasonic motor is immature and there is noproduct for sale in China. At the same time, the high-end products of linear ultrasonic motors arelimited to export to China. Therefore, there is much need to strengthen the efforts to study linearultrasonic motors.
Supported by NSFC (No.50735002) and NSFC-Guangdong Natural Science Foundation(No.U0934004), this dissertation presents a systemic research on drive mechanism, optimizationdesign and experiment, contact dynamic model, performance simulation. Furthermore, three newtypes of linear ultrasonic motor have been used in moving stage and achieved long stroke and highprecision. To conclude, main contributions of this dissertation are as follows.
1. The characteristics of linear ultrasonic motor are systematically summarized and theclassification method of them is proposed. At the same time, the state of the art of linear ultrasonicmotors and their applications both here and abroad are reviewed and summarized. Furthermore, theapplication prospects of linear ultrasonic motor are described and the need for the study of linearultrasonic motors is proposed.
2. The key problems in design of linear ultrasonic motors are summarized and analyzed: theperformance figure of piezoelectric ceramic and its strain induced mechanism, the formation methodof elliptical motion, the requirement for piezoelectric ceramics, materials of the stator and the slider,friction materials, and so on.
3. A new design theory of the wheel-shaped linear ultrasonic motor based on bending modes isproposed. The motion mechanism of the motor is analyzed in detail. The dynamic design of the statorand the optimal design of the whole structure of the motor are carried out. Three types of linearultrasonic motors with wheel-shaped stator have been fabricated.
4．A new linear ultrasonic motor with triangular structure based on in-plane modes is proposed.The operation principle, dynamic performance and structural optimum design of the stator areanalyzed and described in detail. The especial design of the stator is its isosceles triangular structure part, which makes the motor structure compact and easy to realize miniaturization.
5. A butterfly-shaped linear ultrasonic motor is used as an example to study on the new optimumdesign method of linear ultrasonic motors based on response surface methodology. Many designrequirements of optimal results can be well fulfilled: the work mode frequency difference is little(<100Hz), the amplitude of the driving foots is large (>2μm), the disturb modes are far away fromworking modes (>1kHz) and the amplitude of the clamping points is little (<1μm).
6. A contact model is established based on coulomb law of friction, which simultaneouslydescribes the dynamic behavior between the slider and the stator. The influence of the modelparameters on the motor behavior is studied to find out the requirements for an optimal contactbetween the slider and the stator. The model prediction agrees well with the experiment data.
7．Several types of positioning stage drived by different linear ultrasonic motors developed inthis dissertation have been fabricated. At the same time, the measurement and control systems havebeen constructed. The motion stages realize long stroke(~100mm) and high positioning precision (±0.5μm).
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