大行程超精密工作台关键技术研究
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摘要
高精度和高分辨率的精密微位移工作台系统在近代尖端工业生产和科学研究领域内占有极为重要的地位。在已研制的超精密工作台中,往往整体性能存在缺陷,对环境的要求严格。因此迫切需要对精密平台的关键技术进行研究,为研制出性能均衡,适合工业环境应用的大行程超精密工作台打下坚实的基础。通过国内外大行程超精密平台的比较分析,认为先进结构材料、空气静压导轨、直接驱动技术是超精密平台的关键技术。本文对这些相关技术进行了研究。
应用有限元软件ANSYS对常用九种材料进行了热稳定性和抗振性分析。结果表明:零膨胀玻璃的综合性能在所分析的九种材料中是最佳的,石英陶瓷稍差。零膨胀玻璃的造价昂贵,在不追求极端性能的情况下,石英陶瓷是一种非常有发展前途的超精密平台用先进结构材料。
在对多孔质气体润滑理论进行分析时提出了一种基于商用有限元前后处理器的分析流程,并通过提高求解器的计算效率和内存利用率,使该方法具备解决工程中复杂多孔节流问题的分析能力。对多孔质节流器性能的影响因素进行了分析,为其设计打下了基础。在多孔质气体润滑的实验研究中,设计了实验方案及装置,进行了渗透率测试及加载实验,对多孔材料进行了加工堵塞工艺的研究。实验结果显示实验结果曲线与有限元分析结果曲线趋势接近一致,大致平行;多孔材料表面微孔的堵塞不均导致实验块出现严重倾斜,使得与有限元结果之间出现了很大偏差。加工堵塞的程度越严重,各部分渗透率也越不均。
在对空气静压导轨结构设计的研究中,分析了适用于大行程超精密工作台的导轨类型。通过对滑套运动误差的分析,得出了滑套长度及行程的影响趋势。对导轨的误差组成部分、性质及传递系数进行了分析,探讨了精度分配方法。对动导轨典型螺栓紧固结构结合正交试验方法进行了有限元分析,得出了设计原则。
建立了控制系统的数学模型,分析了外部扰动的形式及补偿方案,应用SIMULINK建立了单位反馈PID控制、带加速度前馈的PID控制、位置速度双环反馈等控制模型,比较了九种材料作为工作台材料时的控制效果,分析了各种控制模式以及Smith预估控制器的优点和不足。由于石英陶瓷较小的密度,能有效减轻运动部件的质量,在不同的控制系统下,能明显的提高系统的控制性能。
Precision micro-displacement stage system with high precision and high resolution plays an important role in modern industry and scientific research field. There are some defects existing in the whole performance and the demand of environment is strict in the developed ultraprecision stage. The key technology of precision stage is the urgent need for laying a foundation of developing new large travel ultraprecision stage with balanced performance and fitting the industry environment. By comparing the ultraprecision stage developed at home and abroad, it is concluded that the advanced structure material, aerostatic guideway and direct drive technology are the key technologies of ultraprecision stage. These related technologies were researched in this paper.
The thermal analysis, thermal-structure coupling analysis and transient thermal analysis are applied in nine common materials by using the finite element software ANSYS. The results indicate that the zero expansion glass ceramic has the best performance in the materials analyzed; the silica ceramic is slight interior. Due to the expensive cost of zero expansion glass ceramic, the silica ceramic is a promising material for ultraprecision stage while the extreme performance is not pursued.
A new analysis procedure based on commercial finite element pre-and post processor is put forward when the air lubrication theory with porous restrictors is analyzed. This method acquires the ability for analyzing the complicated porous restriction engineering problems by improving the solver’s calculation efficiency and the utilizing rate of memory. The factors which influence the performance of porous restrictor are analyzed for its design. The experiment scheme and devices are designed in the experiment research of air lubrication with porous restrictors. The permeability testing and loading experiment is carried out and the machining process of porous materials for blocking is researched. The experimental results indicate that the experiment result curves run parallel with the FEA result curves approximately; the bearing inclines expressly which cause the great deviation between the experiment results and FEA result due to the ununiformity of micropore blocking over the bearing surface. The more serious the blocking is, the larger the ununiformity of permeability
The guideways types which are suitable for ultraprecision stage are analyzed when the structure design of aerostatic guideways is researched. The influence trend of motion guideway's length and guideway’s travel is obtained by analyzing the motion error of the motion guideway. The component, property and transfer coefficient of errors are analyzed. And the accuracy allocation method is discussed, too. The design principle is obtained after the typical bolt fastening structure is analyzed with finite element method and orthogonal test.
The math model of the direct-driven control system is established, and the exterior disturbance and compensation proposal is analyzed. The unit-feedback PID control, PID+acceleration feedforward control, position and velocity dual loop feedback control system are built with SIMULINK and the control effects are compared when the motion part consists of different materials. All of the control model and the Smith predictor are analyzed to seek the ideal control model. The slider made of silica ceramic can lighten the weight of motion parts efficiently for its smaller density. So the slider made of silica ceramic has better control performance than made of other materials obviously.
应用有限元软件ANSYS对常用九种材料进行了热稳定性和抗振性分析。结果表明:零膨胀玻璃的综合性能在所分析的九种材料中是最佳的,石英陶瓷稍差。零膨胀玻璃的造价昂贵,在不追求极端性能的情况下,石英陶瓷是一种非常有发展前途的超精密平台用先进结构材料。
在对多孔质气体润滑理论进行分析时提出了一种基于商用有限元前后处理器的分析流程,并通过提高求解器的计算效率和内存利用率,使该方法具备解决工程中复杂多孔节流问题的分析能力。对多孔质节流器性能的影响因素进行了分析,为其设计打下了基础。在多孔质气体润滑的实验研究中,设计了实验方案及装置,进行了渗透率测试及加载实验,对多孔材料进行了加工堵塞工艺的研究。实验结果显示实验结果曲线与有限元分析结果曲线趋势接近一致,大致平行;多孔材料表面微孔的堵塞不均导致实验块出现严重倾斜,使得与有限元结果之间出现了很大偏差。加工堵塞的程度越严重,各部分渗透率也越不均。
在对空气静压导轨结构设计的研究中,分析了适用于大行程超精密工作台的导轨类型。通过对滑套运动误差的分析,得出了滑套长度及行程的影响趋势。对导轨的误差组成部分、性质及传递系数进行了分析,探讨了精度分配方法。对动导轨典型螺栓紧固结构结合正交试验方法进行了有限元分析,得出了设计原则。
建立了控制系统的数学模型,分析了外部扰动的形式及补偿方案,应用SIMULINK建立了单位反馈PID控制、带加速度前馈的PID控制、位置速度双环反馈等控制模型,比较了九种材料作为工作台材料时的控制效果,分析了各种控制模式以及Smith预估控制器的优点和不足。由于石英陶瓷较小的密度,能有效减轻运动部件的质量,在不同的控制系统下,能明显的提高系统的控制性能。
Precision micro-displacement stage system with high precision and high resolution plays an important role in modern industry and scientific research field. There are some defects existing in the whole performance and the demand of environment is strict in the developed ultraprecision stage. The key technology of precision stage is the urgent need for laying a foundation of developing new large travel ultraprecision stage with balanced performance and fitting the industry environment. By comparing the ultraprecision stage developed at home and abroad, it is concluded that the advanced structure material, aerostatic guideway and direct drive technology are the key technologies of ultraprecision stage. These related technologies were researched in this paper.
The thermal analysis, thermal-structure coupling analysis and transient thermal analysis are applied in nine common materials by using the finite element software ANSYS. The results indicate that the zero expansion glass ceramic has the best performance in the materials analyzed; the silica ceramic is slight interior. Due to the expensive cost of zero expansion glass ceramic, the silica ceramic is a promising material for ultraprecision stage while the extreme performance is not pursued.
A new analysis procedure based on commercial finite element pre-and post processor is put forward when the air lubrication theory with porous restrictors is analyzed. This method acquires the ability for analyzing the complicated porous restriction engineering problems by improving the solver’s calculation efficiency and the utilizing rate of memory. The factors which influence the performance of porous restrictor are analyzed for its design. The experiment scheme and devices are designed in the experiment research of air lubrication with porous restrictors. The permeability testing and loading experiment is carried out and the machining process of porous materials for blocking is researched. The experimental results indicate that the experiment result curves run parallel with the FEA result curves approximately; the bearing inclines expressly which cause the great deviation between the experiment results and FEA result due to the ununiformity of micropore blocking over the bearing surface. The more serious the blocking is, the larger the ununiformity of permeability
The guideways types which are suitable for ultraprecision stage are analyzed when the structure design of aerostatic guideways is researched. The influence trend of motion guideway's length and guideway’s travel is obtained by analyzing the motion error of the motion guideway. The component, property and transfer coefficient of errors are analyzed. And the accuracy allocation method is discussed, too. The design principle is obtained after the typical bolt fastening structure is analyzed with finite element method and orthogonal test.
The math model of the direct-driven control system is established, and the exterior disturbance and compensation proposal is analyzed. The unit-feedback PID control, PID+acceleration feedforward control, position and velocity dual loop feedback control system are built with SIMULINK and the control effects are compared when the motion part consists of different materials. All of the control model and the Smith predictor are analyzed to seek the ideal control model. The slider made of silica ceramic can lighten the weight of motion parts efficiently for its smaller density. So the slider made of silica ceramic has better control performance than made of other materials obviously.
引文
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