热式气体质量流量计传感芯片的研制
摘要
空气流量传感器是汽车电子控制燃油喷射装置中决定系统控制精度的重要部件之一，又称空气流量计。它是汽车电子配件中两个尚未能实现国产化的部件之一。研制热式气体质量流量传感器芯片，目的就是通过实验，掌握厚膜电路工艺，以期可以制作出性能优良的产品来取代进口产品，实现国有化。
本课题研究的汽车空气质量流量计综合分析各种工艺与技术，详尽地阐述了传感器工作的原理。采用厚膜电路工艺制作热膜式气体流量传感器，本文重点放在热式气体流量计传感器芯片的研制上。从芯片的结构和电路设计、热敏电阻材料和导电银浆的选取、热敏电阻结构设计和制备、烧结工艺对热敏电阻的影响和低热导基板材料的研制等方面进行了详尽的理论分析和反复的实践验证。
论文对两种结构进行了实验对比：一是一体式结构；二是分体式结构。实验发现，设计一体式结构比分体式结构有更好的结构稳定性，但基板材料的导热能力在热影响方面存在着较大问题。而采用分体式结构大大减弱了发热电阻的热影响，且响应速度高，灵敏度好。测量精度完全达到了要求，却在结构稳定性方面存在一定问题。
对于车用空气流量传感器的研制不仅在拥有独立自主知识产权的方面，更在能源节约与环境保护方面有着尤为重要的意义。
Air -mass meter, is an important part in the automobile electronic-control fuelinjection installment which determines the precision of system control. It is one of the twoelectronic components which haven’t been realized manufacture domestically. The reasonfor the research of the thermal gas mass flow sensor chip is to master the process of thethick-film circuit through a series of experiment, in order to produce a good performanceproduce to replace the imported products achieving its nationalization.
The air-mass sensor, generalized analysis each craft and the technology we havedevised, has elaborated the sensor’s working principle exhaustively. In this paper, wefocus on the research of the thermal gas mass flow sensor chip utilizing the thick-filmcircuit craft to manufacture the hot film type air mass sensor, which could be illustrated asfollowing points: the design of the chip’s structure and the circuit, the selection of PTCthermistor and the conduction, design and preparation of PTC thermistor structure, theexhaustive theoretical analysis and various experiment of the agglutination craft’influenceto the thermistor and the development of low heat conductivity plate.
In this article, we compared the experiment of the two the structure: the first isall-in-one structure; the second is split-type structure. It was found that the design of thestructure of all-in-one is better than the split structure in the stability of the structure, butthere are still some problems in the thermal conductivity of substrate material impact onthe ability to heat. Besides, split-type structure could reduce the thermal effects of heatresistance, and has high speed in response, good sensitivity. Measurement accuracy hasexactly met requirements, although there are certain problems in the stability of thestructure.
The research on the air-mass sensor not only has the independent intellectual propertyrights, but has the signification in energy conservation and the environmental protection.
本课题研究的汽车空气质量流量计综合分析各种工艺与技术，详尽地阐述了传感器工作的原理。采用厚膜电路工艺制作热膜式气体流量传感器，本文重点放在热式气体流量计传感器芯片的研制上。从芯片的结构和电路设计、热敏电阻材料和导电银浆的选取、热敏电阻结构设计和制备、烧结工艺对热敏电阻的影响和低热导基板材料的研制等方面进行了详尽的理论分析和反复的实践验证。
论文对两种结构进行了实验对比：一是一体式结构；二是分体式结构。实验发现，设计一体式结构比分体式结构有更好的结构稳定性，但基板材料的导热能力在热影响方面存在着较大问题。而采用分体式结构大大减弱了发热电阻的热影响，且响应速度高，灵敏度好。测量精度完全达到了要求，却在结构稳定性方面存在一定问题。
对于车用空气流量传感器的研制不仅在拥有独立自主知识产权的方面，更在能源节约与环境保护方面有着尤为重要的意义。
Air -mass meter, is an important part in the automobile electronic-control fuelinjection installment which determines the precision of system control. It is one of the twoelectronic components which haven’t been realized manufacture domestically. The reasonfor the research of the thermal gas mass flow sensor chip is to master the process of thethick-film circuit through a series of experiment, in order to produce a good performanceproduce to replace the imported products achieving its nationalization.
The air-mass sensor, generalized analysis each craft and the technology we havedevised, has elaborated the sensor’s working principle exhaustively. In this paper, wefocus on the research of the thermal gas mass flow sensor chip utilizing the thick-filmcircuit craft to manufacture the hot film type air mass sensor, which could be illustrated asfollowing points: the design of the chip’s structure and the circuit, the selection of PTCthermistor and the conduction, design and preparation of PTC thermistor structure, theexhaustive theoretical analysis and various experiment of the agglutination craft’influenceto the thermistor and the development of low heat conductivity plate.
In this article, we compared the experiment of the two the structure: the first isall-in-one structure; the second is split-type structure. It was found that the design of thestructure of all-in-one is better than the split structure in the stability of the structure, butthere are still some problems in the thermal conductivity of substrate material impact onthe ability to heat. Besides, split-type structure could reduce the thermal effects of heatresistance, and has high speed in response, good sensitivity. Measurement accuracy hasexactly met requirements, although there are certain problems in the stability of thestructure.
The research on the air-mass sensor not only has the independent intellectual propertyrights, but has the signification in energy conservation and the environmental protection.
引文
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[5]刘金平,施光林.一种具有环境温度补偿功能的新型热线式空气质量流量计[J].传感技术学报,2006,19(4):1110-1112
[6]高玉民.传感器概述[J].世界汽车,2002(4):55
[7]宋志宏,李骕.氧传感器[J].科技信息,2008(26):376
[8]刘慧敏.诺依克公司研发成功车用空气流量传感器[N].宁波日报,2006.5.23
[9]阿已.认识空气流量传感器[J].实用汽车技术，2005(9):7
[10] bcc research . automotive sensor technologies: global markets[EB/OL].www.bccresearch.com,2007.9
[11]郑冬冬.汽车传感器市场及发展趋势[J].半导体信息,2003(2):15
[12] Xueci.2009年汽车传感器行业研究报告[EB/OL].报告直通车,2009.2.23
[13]南海,魏华胜,修吉平等.热式和多项流式等多种流量传感器的研究和发展[J].传感器世界,1998(6):19-23.
[14]张昭勇,秦明,黄庆安.硅热流量传感器的研究与发展[J].电子器件,2001,24(1):41
[15]吴荣军,张宝成,亢春梅.国外传感器市场发展现状及预测[J].传感器技术,2003,22(5):5-7
[16]北京鑫诺金电子科技发展有限公司.汽车传感器发展前景看好[J].传感器世界,2008(7):51-52
[17]于凌宇.传感器技术及市场走势[J].电子元件与材料,2001,21(2):19-20
[18] ic37.com.传感器发展趋势:利用新技术发展新功能[EB/OL].中国IC网,2009.2.24
[19]无.汽车传感器分类[J].变频器世界,2004(2):139
[20] Rasmussen A, Zaghlou M E. the flow with MEMS[J]. IEEE Circuits and DevicesMagazine, 1998,14(4):12-25
[21]金敏福/尹千柱.车用传感器—空气流量传感器[J].汽车维修技师,2003(2):55-57
[22]巨永锋,李令举,兰英.汽车传感器(连载六)-空气流量传感器[J].传感器技术,1992(6):61-64
[23]任好,徐科军,王肖芬等.热膜式空气质量流量传感器动态非线性建模[J].计量学报, 2007,28(04):333-338
[24]滕勤,马标,徐科军.热膜式空气质量流量传感器块联模型结构辨识[J].仪器仪表学报, 2008,29(03).477-482
[25]王行乾.厚膜电路的应用及其发展刍议[J].电子元器件应用, 2001,3(03):1-4.
[26]潘婷玫.厚膜混合集成电路发展趋势[J] .世界电子元器件,1996(02):3-5
[27]百度百科.薄膜厚膜.百度百科
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[29]陈仲武.厚膜集成电路丝网印刷工艺技术[J] .电子工业专用设备,2002,31(01):48-50
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[38]许国良,王晓墨,邬田华等.工程传热学[M].北京:电力出版社,2005:189~250
[39]南海,魏华胜,修吉平等.热式和多项流式等多种流量传感器的研究与发展[J].传感器世界,1998[6]:34
[40] M.Ashauer.H.Glosch.F.Hedrich.Thermal flow sensors for liquids and gases based oncombinations of two principles[J].Sensors and Actuators.1999(73):7-13
[41] N.T.Nguen.Micromachined flow sensors—a review.Flow[J].MeasurementInstrument.1997(06):7-16
[42] Legtenberg R.Resonating Microbridge Mass Flow Sen-sorwith Low-TemperatureGlass-Bonded Cap Wafer.Sensorand Actuators.1991(27):723
[43] N.M.White.Thick-Film Senors:Past,Predent and Future.MeasurementScience&Technology.1997,8(1):1-18
[44]黄继昌,徐巧鱼,张海贵等编著.传感器工作原理及用用实例[M].北京:人民邮电出版社,1998:18-19
[45] Perry A.E.Hot-Wire Anemometry[M]. Oxford:Claredon Press Oxford.1982:532
[46] Helms V. T. Measurement of flow angle and mass flow rate in an unknown flowfiled using hot-film and hot-wire probe. AIAA.1978:780-794.
[47]孙承松,李瑞.热式气体质量流量传感器研究与发展[J].传感器世界,2005,11(10):29-32
[48] Martin Mischler,et al. IEEE Region 10 Annual international Conference,1995:20-23
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