基于V型导轨压电叠堆惯性驱动器的研究
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摘要
压电惯性驱动器作为压电驱动器的一个重要分支,是近年来国内外研究的热点之一。针对目前压电驱动器国内外研究现状,本文将研究基于导轨的压电惯性驱动器及其闭环控制系统。主要工作如下:
1.研究了压电驱动器的特点、应用领域、国内外研究现状及压电驱动器控制系统应用研究现状。
2.研究了压电惯性驱动器设计理论基础。选择压电叠堆振子为驱动元件,提出了采用对称电信号激励压电叠堆振子,通过控制变化的摩擦力与惯性驱动力有序配合,实现压电惯性驱动器运动的研究方案。设计了柔性铰链调整机构,用于压电叠堆角度调整,从而提高压电惯性驱动器运动性能。同时选择V型导轨用于压电惯性驱动器的设计,并对V型导轨进行受力分析。这些基础研究工作为基于V型导轨压电叠堆惯性驱动器的设计提供了理论依据。
3.设计了基于V型导轨的压电叠堆惯性驱动器,研制了试验样机,对样机的基本性能进行了相关试验测试。在理论分析基础上,分别设计了基于90?V型导轨和基于120?V型导轨两种压电叠堆惯性驱动器,并研制了两种驱动器的试验样机,分别对两种基于V型导轨的压电叠堆惯性驱动器样机相关性能进行试验测试。
4.开发设计了压电惯性驱动器闭环控制系统。设计了压电惯性驱动器的步长反馈闭环控制系统和PID闭环控制系统,搭建试验平台,分别在两个控制系统控制下对驱动器进行步长控制试验测试。试验结果表明:闭环控制系统能够有效提高驱动器运动精度。采用模糊控制算法对PID参数进行在线整定。本课题从结构设计和控制系统开发设计两个方面对压电惯性驱动器进行研究,将为压电惯性驱动器的研究开辟新的途径,为今后相关领域的研究工作提供新的思路。
The piezoelectric inertia actuator arouses people's interest unceasingly in the various trades and occupations by its own unique merits,such as non-electromagnetism interference,convenient control,high displacement differentiate rate,good response characteristic,etc.Especially in recent years, along with the piezoelectric element’s performances improved unceasingly, new structures, new forms of piezoelectric drive mechanisms emerged. The research area and application domain of piezoelectric actuator expanded quickly, piezoelectric inertia drive mechanism’s application scope also expanded unceasingly.
Funded by the National Natural Science Foundation Project“Theoretical And Experimental On New Micro Inertia Piezoelectric impact drive mechanism”. Making use of the surface friction and piezoelectric materials of the inertial force changing orderly to form a new kind of micro-displacement principle .According to the inertia driving mechanism theory, used the method that symmetrical voltage signal actuate piezoelectric stack,designed inertia piezoelectric stack actuator based on V-shaped groove,researched the length of stride closed-loop-control system,and did relate tests. The main content of this dissertion is as follows:
1.Researched the basic situation of the piezoelectric actuator, including its characteristics,application areas and piezoelectric inertia actuator’s research present situation in domestic and foreign countries.Analysed the present situation of the control algorithm that used on the piezoelectric ceramics driver.Laid solid theoretical foundation for the design of inertia piezoelectric drive mechanism.
2.Researched the piezoelectric stack element, including it’s composition ,structure and so on.And analyzed the important characteristics of piezoelectric stack,such as hysteresis characteristic,nonlinear characteristic,peristalsis characteristic,stiffness characteristic,force characteristic and temperature characteristic,etc.
Elaborated the movement theory of the piezoelectric inertia driving mechanism.Making use of the AE0505D16 piezoelectric stack which produced by Japanese TOKIN Corporation as the force source. Utilized symmetrical square wave signal actuate piezoelectric stack,through changing the vertical force that put on the mechanism,to change the friction.Cooperate the surface friction with the inertial force orderly to realize the driving mechanism’s movement.
Designed the hinge adjustment mechanism to adjust the piezoelectric stack’s angle. and have analyzed the flexible hinge's distortion characteristic and the amount of deformity size with the finite element analysis Anasys software. Researched the measure then manufactured the hinge adjustment mechanism. Researched the types and charistaristics of the groove,choosed the V-shaped groove to design the inertia piezoelectric drive mechanism.Analysed the stress.which was carried on V shape groove.The analysis results indicated that V-shaped groove can increase the equivalent friction coefficient.
The research of the basic knowledge laid solid theoretical basis for the design of the V-shaped groove piezoelectric stack inertial actuator.
3.According to the driving theory of piezoelectric inertia driving mechanism, designed two kinds of piezoelectric inertia actuators .One is based on the 120 degree V shaped groove and the other is 90 degreeV shaped groove. Has studied the influence of V shape groove's angle to the actuator, as well as the force of inertia production, the friction force reconfiguration, and has carried on the movement analysis contrast to the driving mechanism.
According to the design result, manufactured the samples of the V-shaped groove piezoelectric inertia driving mechanism, and has made the test of the key properties respectively. Has tested driving mechanism performance such as the velocity of movement, length of stride.has carried on the analysis to the test result. The experiment proved: the movement base-on-V shape-groove piezoelectric inertia driving mechanism to be steady, high resolution, and so on characteristics
4.Designed the length of stride feedback closed-loop control system, and the PID closed-loop control system. Has carried on the closed-loop control system experiment test as well as the PID closed-loop control system to test the actuator, make the test results contrast with the open-loop control system condition. The results indicate that the length of stride feedback closed-loop control system increased the length of stride’s stability, has good control effect. Developed the fuzzy PID control system, made the online real-time adjustment to the PID parameters.
5.Has given the full text’s main conclusion, and will propose the forecast to present's research work
This article has designed the driving mechanism structural and the control system to conduct the research of the piezoelectric inertia actuator, will open the new way for the research of piezoelectric inertia driving mechanism,and will provide new model for the related domain's research work.
1.研究了压电驱动器的特点、应用领域、国内外研究现状及压电驱动器控制系统应用研究现状。
2.研究了压电惯性驱动器设计理论基础。选择压电叠堆振子为驱动元件,提出了采用对称电信号激励压电叠堆振子,通过控制变化的摩擦力与惯性驱动力有序配合,实现压电惯性驱动器运动的研究方案。设计了柔性铰链调整机构,用于压电叠堆角度调整,从而提高压电惯性驱动器运动性能。同时选择V型导轨用于压电惯性驱动器的设计,并对V型导轨进行受力分析。这些基础研究工作为基于V型导轨压电叠堆惯性驱动器的设计提供了理论依据。
3.设计了基于V型导轨的压电叠堆惯性驱动器,研制了试验样机,对样机的基本性能进行了相关试验测试。在理论分析基础上,分别设计了基于90?V型导轨和基于120?V型导轨两种压电叠堆惯性驱动器,并研制了两种驱动器的试验样机,分别对两种基于V型导轨的压电叠堆惯性驱动器样机相关性能进行试验测试。
4.开发设计了压电惯性驱动器闭环控制系统。设计了压电惯性驱动器的步长反馈闭环控制系统和PID闭环控制系统,搭建试验平台,分别在两个控制系统控制下对驱动器进行步长控制试验测试。试验结果表明:闭环控制系统能够有效提高驱动器运动精度。采用模糊控制算法对PID参数进行在线整定。本课题从结构设计和控制系统开发设计两个方面对压电惯性驱动器进行研究,将为压电惯性驱动器的研究开辟新的途径,为今后相关领域的研究工作提供新的思路。
The piezoelectric inertia actuator arouses people's interest unceasingly in the various trades and occupations by its own unique merits,such as non-electromagnetism interference,convenient control,high displacement differentiate rate,good response characteristic,etc.Especially in recent years, along with the piezoelectric element’s performances improved unceasingly, new structures, new forms of piezoelectric drive mechanisms emerged. The research area and application domain of piezoelectric actuator expanded quickly, piezoelectric inertia drive mechanism’s application scope also expanded unceasingly.
Funded by the National Natural Science Foundation Project“Theoretical And Experimental On New Micro Inertia Piezoelectric impact drive mechanism”. Making use of the surface friction and piezoelectric materials of the inertial force changing orderly to form a new kind of micro-displacement principle .According to the inertia driving mechanism theory, used the method that symmetrical voltage signal actuate piezoelectric stack,designed inertia piezoelectric stack actuator based on V-shaped groove,researched the length of stride closed-loop-control system,and did relate tests. The main content of this dissertion is as follows:
1.Researched the basic situation of the piezoelectric actuator, including its characteristics,application areas and piezoelectric inertia actuator’s research present situation in domestic and foreign countries.Analysed the present situation of the control algorithm that used on the piezoelectric ceramics driver.Laid solid theoretical foundation for the design of inertia piezoelectric drive mechanism.
2.Researched the piezoelectric stack element, including it’s composition ,structure and so on.And analyzed the important characteristics of piezoelectric stack,such as hysteresis characteristic,nonlinear characteristic,peristalsis characteristic,stiffness characteristic,force characteristic and temperature characteristic,etc.
Elaborated the movement theory of the piezoelectric inertia driving mechanism.Making use of the AE0505D16 piezoelectric stack which produced by Japanese TOKIN Corporation as the force source. Utilized symmetrical square wave signal actuate piezoelectric stack,through changing the vertical force that put on the mechanism,to change the friction.Cooperate the surface friction with the inertial force orderly to realize the driving mechanism’s movement.
Designed the hinge adjustment mechanism to adjust the piezoelectric stack’s angle. and have analyzed the flexible hinge's distortion characteristic and the amount of deformity size with the finite element analysis Anasys software. Researched the measure then manufactured the hinge adjustment mechanism. Researched the types and charistaristics of the groove,choosed the V-shaped groove to design the inertia piezoelectric drive mechanism.Analysed the stress.which was carried on V shape groove.The analysis results indicated that V-shaped groove can increase the equivalent friction coefficient.
The research of the basic knowledge laid solid theoretical basis for the design of the V-shaped groove piezoelectric stack inertial actuator.
3.According to the driving theory of piezoelectric inertia driving mechanism, designed two kinds of piezoelectric inertia actuators .One is based on the 120 degree V shaped groove and the other is 90 degreeV shaped groove. Has studied the influence of V shape groove's angle to the actuator, as well as the force of inertia production, the friction force reconfiguration, and has carried on the movement analysis contrast to the driving mechanism.
According to the design result, manufactured the samples of the V-shaped groove piezoelectric inertia driving mechanism, and has made the test of the key properties respectively. Has tested driving mechanism performance such as the velocity of movement, length of stride.has carried on the analysis to the test result. The experiment proved: the movement base-on-V shape-groove piezoelectric inertia driving mechanism to be steady, high resolution, and so on characteristics
4.Designed the length of stride feedback closed-loop control system, and the PID closed-loop control system. Has carried on the closed-loop control system experiment test as well as the PID closed-loop control system to test the actuator, make the test results contrast with the open-loop control system condition. The results indicate that the length of stride feedback closed-loop control system increased the length of stride’s stability, has good control effect. Developed the fuzzy PID control system, made the online real-time adjustment to the PID parameters.
5.Has given the full text’s main conclusion, and will propose the forecast to present's research work
This article has designed the driving mechanism structural and the control system to conduct the research of the piezoelectric inertia actuator, will open the new way for the research of piezoelectric inertia driving mechanism,and will provide new model for the related domain's research work.
引文
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[2] 魏守水.压电材料与压电驱动新趋向[R].国际学术动态.2006(1)
[3] Ferdinand SCHMOECKEL Remotely controllable mobile microrobots acting as nano positioners and intelligent tweezers in scanning electron microscopes (SEMs)
[4] 陈维山,赵学涛,刘军考,郝铭.压电超声波马达发展现状及研究方向[J].电机与控制学报.2006,10(5):498~502
[5] (日)田中哲郎,陈俊彦.王余君 译.压电陶瓷材料[M].1973
[6] 卢秋红,高志军,颜国正,颜德田.压电型惯性微驱动器研究[J].压电与声光.2004,26(2):112~115
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