CMOS图像传感器的并行测试开发
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摘要
图像传感器是能感受光学图像信号并转换成电信号输出的器件。图象传感器主要分CCD (Charge Coupled Device,电荷耦合元件)和CMOS (Complementary Metal-Oxide Semiconductor,互补金属氧化物半导体元件)两种类型。由于工艺的不同CCD不方便将图象传感电路和控制电路集成在一起。CMOS图象传感器由于图像单元和控制单元都采用CMOS工艺,因此能集成在一块芯片上。
由于CMOS图像传感器的应用越来越广泛,完全超过了CCD市场,因而CMOS图像传感器设计制造时对成本控制的要求越来越高。CMOS图象传感器测试与一般的逻辑电路不同,它还需要光学测试,导致整个测试系统与一般的测试系统不同,需要在测试时提供光源,以及需要对测试芯片输出的图像数据的采集处理系统,比如图像采集卡。因此图像传感器芯片的测试成本相对较高。
本文主要研究对CMOS图像传感器的wafer级测试进行多个方面的改进,引入针对图像传感器的并行测试系统,降低测试时间。从选择自动测试机的型号,测试系统硬件设计到最大同测数的设计都是为了有效的降低测试成本。
The Image sensor is a device which can convert optical information into electrical signal. CCD (charge coupled device) and CMOS (com-plementary metal oxide semiconductor) image sensors are two types of the Image sensor and with different technologies for capturing images digitally. CMOS image sensor can be integrated with control circuit, while CCD can not do this.
CMOS image sensors are more widely used than CCD in the market.And more companies pay high attention to the cost of the CMOS image sensor-fabrication. The testing of the CMOS image sensors is different from other logic devices.It needs optical testing. So the CMOS image sensors need light source and capture modules when doing the chip test. It's extra cost for CMOS image sensors.
This thesis is focus on how to cost down the the CMOS image sensors wafer-level testing by using parallel testing. This will reduce the testing time. We also need to choose the right Automatic Test Equipment and multi-site probe card for the low cost testing.
由于CMOS图像传感器的应用越来越广泛,完全超过了CCD市场,因而CMOS图像传感器设计制造时对成本控制的要求越来越高。CMOS图象传感器测试与一般的逻辑电路不同,它还需要光学测试,导致整个测试系统与一般的测试系统不同,需要在测试时提供光源,以及需要对测试芯片输出的图像数据的采集处理系统,比如图像采集卡。因此图像传感器芯片的测试成本相对较高。
本文主要研究对CMOS图像传感器的wafer级测试进行多个方面的改进,引入针对图像传感器的并行测试系统,降低测试时间。从选择自动测试机的型号,测试系统硬件设计到最大同测数的设计都是为了有效的降低测试成本。
The Image sensor is a device which can convert optical information into electrical signal. CCD (charge coupled device) and CMOS (com-plementary metal oxide semiconductor) image sensors are two types of the Image sensor and with different technologies for capturing images digitally. CMOS image sensor can be integrated with control circuit, while CCD can not do this.
CMOS image sensors are more widely used than CCD in the market.And more companies pay high attention to the cost of the CMOS image sensor-fabrication. The testing of the CMOS image sensors is different from other logic devices.It needs optical testing. So the CMOS image sensors need light source and capture modules when doing the chip test. It's extra cost for CMOS image sensors.
This thesis is focus on how to cost down the the CMOS image sensors wafer-level testing by using parallel testing. This will reduce the testing time. We also need to choose the right Automatic Test Equipment and multi-site probe card for the low cost testing.
引文
[1]林聚承.新型CMOS图像传感器的研究[D].重庆：重庆大学,2006：
[2]S. Kavadias, B. Dierickx, D. Scherer, A. Alaerts, D. Uwaerts, J. Bogaerts, " A Logarithmic Response CMOS Image Sensor witll On—Chip Calibration" [J]. IEEE Journal of Solid. State Circuits, Volume 3 5, Number 8, August 2000:1-9
[3]杨经国,冉瑞江.光电子技术[M].成都：四川大学出版社,1983：11-23
[4]王庆有,陈晓东.光电传感器应用技术[M].北京：机械工业出版社,2007,192-201
[5]董博彦.CMOS图像传感器的测试与分析[D].天津：天津大学,2005：
[6]池国泉.高性能CMOS图像传感器测试与评价系统的设计与实现[D].天津：天津大学,2008：
[7]Zhi Zhang, Xianghui Yuan. CMOS correlated double sampling and hold structure based on novel dynamic source～follower for large format infrared focal plane array [J]. Semicond Sei. Yechn01. V18(7):680-684
[8]Yunteng Huang, Temes, G. C, Ferguanson, P. F, "Reduced nonl inear distortion in circuits with correlated double sampling。 " [J]. IEEE, Circuits and System,1996, vol 1,12-15 May:159-162
[9]Wey, t1. M:6uggenbuhl, W., An improved correlated double sampling circuit for low noise charge coupled devices-[J]. IEEE, Circuits and System, v0137,1990: 1559-1565
[10]王高周汉昌CMOS图像传感器的商业化发展[J].传感器世界,2004年,10(2)：13-15
[11]郑晓.一种CMOS图像传感器的设计[D].西安：西安电子科技大学,2007：
[12]Priore, Ryan J oseph. T he design, fabricat ion and impl ement at ion of point detect ion and chemical imaging sensors ut ilizin g opt ical and digit al regressi on techniques[D]. Un iversit y of South Carolina. Diss ert ati on Abs t racts Interna-tional,2005:3687.
[13]Carrie Meadows. iSuppli:CCDs fall in image sensor market as CMOS surge [EB/OL].: http://www.vision-systems.com/articles/2010/10/isuppli-image-sensors-market-2010. html
[14]VisEra INC. CIS Market Overview [EB/OL].: http://www.viseratech.com/html/English/VisEra_CIS_Market_Overview.htm
[15]汪敏,夏咸军.新型LED背光源技术及应用[J].光电子术,2005,25(4)：267-270
[16]Teradyne. Semiconductor Test-IP750EP Test System [EB/OL].: http://www.teradyne.com/ip750/
[17]Gamal AE I.Digital pixel image sensors [C]. ISL Industrial Affiliates Meet-ing.1999.1-5.
[18]陈榕庭CMOS图像传感器封装与测试技术[M].北京：电子工业出版社,2006：272.
[19]Ozaki, T.:Kinugasa, H., A low—noise line—amplified MOS imaging Devices [J]. Electron Devices, IEEE Transactions on Vol 38, Issue 5, May 1991:969-975
[20]YONEMOTO, K.:Sumi, H., A numerical analysis of a CMOS image sensor with a simple fixed—pattern—noise—reduction technology [J]. Electron Devices, IEEE Transactions on Vol 49, May 2002:746-753
[21]Chroma ATE INC. Model 3360-D VLSI Test System [EB/OL].: http://www.chromaate.com/product/detai].aspx?id=1931
[22]Chroma ATE INC. Chroma 3360D Test System Maintenance Manual [M/CD].:Chroma ATE INC.2008
[23]ADLINK TECHNOLOGY. PCI-7300A RevB Manual [EB/OL]. http://www.nudaq.com/download/PCI-7300A/P7300A%20Manual.PDF
[24]高成，张栋,王香芬CMOS最新集成电路测试技术[M].北京：国防工业出版社：2009：20.
[25]孙黎斌CMOS图像传感器的研究与设计[D].西安：西安电子科技大学,2008：
[2]S. Kavadias, B. Dierickx, D. Scherer, A. Alaerts, D. Uwaerts, J. Bogaerts, " A Logarithmic Response CMOS Image Sensor witll On—Chip Calibration" [J]. IEEE Journal of Solid. State Circuits, Volume 3 5, Number 8, August 2000:1-9
[3]杨经国,冉瑞江.光电子技术[M].成都：四川大学出版社,1983：11-23
[4]王庆有,陈晓东.光电传感器应用技术[M].北京：机械工业出版社,2007,192-201
[5]董博彦.CMOS图像传感器的测试与分析[D].天津：天津大学,2005：
[6]池国泉.高性能CMOS图像传感器测试与评价系统的设计与实现[D].天津：天津大学,2008：
[7]Zhi Zhang, Xianghui Yuan. CMOS correlated double sampling and hold structure based on novel dynamic source～follower for large format infrared focal plane array [J]. Semicond Sei. Yechn01. V18(7):680-684
[8]Yunteng Huang, Temes, G. C, Ferguanson, P. F, "Reduced nonl inear distortion in circuits with correlated double sampling。 " [J]. IEEE, Circuits and System,1996, vol 1,12-15 May:159-162
[9]Wey, t1. M:6uggenbuhl, W., An improved correlated double sampling circuit for low noise charge coupled devices-[J]. IEEE, Circuits and System, v0137,1990: 1559-1565
[10]王高周汉昌CMOS图像传感器的商业化发展[J].传感器世界,2004年,10(2)：13-15
[11]郑晓.一种CMOS图像传感器的设计[D].西安：西安电子科技大学,2007：
[12]Priore, Ryan J oseph. T he design, fabricat ion and impl ement at ion of point detect ion and chemical imaging sensors ut ilizin g opt ical and digit al regressi on techniques[D]. Un iversit y of South Carolina. Diss ert ati on Abs t racts Interna-tional,2005:3687.
[13]Carrie Meadows. iSuppli:CCDs fall in image sensor market as CMOS surge [EB/OL].: http://www.vision-systems.com/articles/2010/10/isuppli-image-sensors-market-2010. html
[14]VisEra INC. CIS Market Overview [EB/OL].: http://www.viseratech.com/html/English/VisEra_CIS_Market_Overview.htm
[15]汪敏,夏咸军.新型LED背光源技术及应用[J].光电子术,2005,25(4)：267-270
[16]Teradyne. Semiconductor Test-IP750EP Test System [EB/OL].: http://www.teradyne.com/ip750/
[17]Gamal AE I.Digital pixel image sensors [C]. ISL Industrial Affiliates Meet-ing.1999.1-5.
[18]陈榕庭CMOS图像传感器封装与测试技术[M].北京：电子工业出版社,2006：272.
[19]Ozaki, T.:Kinugasa, H., A low—noise line—amplified MOS imaging Devices [J]. Electron Devices, IEEE Transactions on Vol 38, Issue 5, May 1991:969-975
[20]YONEMOTO, K.:Sumi, H., A numerical analysis of a CMOS image sensor with a simple fixed—pattern—noise—reduction technology [J]. Electron Devices, IEEE Transactions on Vol 49, May 2002:746-753
[21]Chroma ATE INC. Model 3360-D VLSI Test System [EB/OL].: http://www.chromaate.com/product/detai].aspx?id=1931
[22]Chroma ATE INC. Chroma 3360D Test System Maintenance Manual [M/CD].:Chroma ATE INC.2008
[23]ADLINK TECHNOLOGY. PCI-7300A RevB Manual [EB/OL]. http://www.nudaq.com/download/PCI-7300A/P7300A%20Manual.PDF
[24]高成，张栋,王香芬CMOS最新集成电路测试技术[M].北京：国防工业出版社：2009：20.
[25]孙黎斌CMOS图像传感器的研究与设计[D].西安：西安电子科技大学,2008：
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