阀芯轴向尺寸配磨微进给闭环控制系统的研究
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摘要
电液伺服阀是大量应用在航空、航天、航海等领域航行控制的电液伺服控制系统中的关键元件,它的加工质量直接影响伺服控制系统的总体性能。目前我国伺服阀生产一般属于单件小批量生产,尚未形成规模化生产,电液伺服阀的制造工艺尺寸精度要求高,其加工普遍采用偶件配做的方式。因此,伺服阀阀芯轴向配磨技术是伺服阀制造过程中的一项关键技术。
本文针对目前我国伺服阀阀芯轴向配磨领域的现状,研制了一套滑阀轴向闭环控制配磨专用高精度自动化加工系统。在系统设计过程中,提出了三套系统整体方案,通过各种方案之间的对比分析,确定选用了其中最优者。在已确定的系统整体方案基础上,对压电陶瓷微进给装置的三个组成要素进行了分析,选择了适合该系统的微进给方案。
该系统采用压电陶瓷微进给顶尖作为微进给装置,电感式高精度位移传感器在线检测轴向磨削量,以单片机为核心的控制仪控制加工过程。按照电液伺服阀阀芯轴向磨削加工工艺的要求,编写了控制程序,使之具有自动进给、加工状态判断、加工完成后快速归位等功能,完成阀芯零件的轴向精密配磨。
对系统进行了实验研究,结果证明该系统可以实现40μm的进给量,进给监视行程达到200μm,配磨误差预计在0.5μm之内,闭环检测分辨率达0.1μm,并且可以根据工艺要求实现不同的进给速度。
Servovalve is the key part of the electro-hydraulic servo system widely applied in the navigating control fields, and its machining technology directly influences the total performance of servo system. Presently, servovalves are limited in Single and Mini-Batch Production, thus professional large scale production hasn’t come into being. Couple match method is usually adopted because the making technique of electro-hydraulic valve requires stricter dimension. Hence , the technology of servovalve core axial match grinding is one of key problems during servovalve manufacturing.
According to the statue In the field of China's servovalve core axial match grinding areas, develop a set of servovalve core axial closed-loop control for high-precision grinding with automated micro-feed system. In the process of system design, three sets of systems are proposed. Through comparation between three methods, the optimal one is chosed . On the basis of the overall programme which was chosed, three elements of the piezoelectric ceramics micro-feed device were analyzed, then the micro-feeding programmes is chosed.
This system mainly consists of a macro feed of piezoelectrical ceramics center as the drive device, a high precision movement-inductance sensor as the online axial grinding measurement and a microprocessor as the main controller. Programe the control procedures, in order to make it automatically feed and processing state judge, after the completion of rapid processing of naturalization, and other functions.Complete spool axial precision parts with grinding.
The results show that the system can conduct the axial precision mate-grinding with the feed of 40μm ,the monitor strok of 200μm ,the mate-grinding error of less than 0.5μm, and closed-loop measurement sensitivity of 0.1μm,it also can feed with different feed rate.
本文针对目前我国伺服阀阀芯轴向配磨领域的现状,研制了一套滑阀轴向闭环控制配磨专用高精度自动化加工系统。在系统设计过程中,提出了三套系统整体方案,通过各种方案之间的对比分析,确定选用了其中最优者。在已确定的系统整体方案基础上,对压电陶瓷微进给装置的三个组成要素进行了分析,选择了适合该系统的微进给方案。
该系统采用压电陶瓷微进给顶尖作为微进给装置,电感式高精度位移传感器在线检测轴向磨削量,以单片机为核心的控制仪控制加工过程。按照电液伺服阀阀芯轴向磨削加工工艺的要求,编写了控制程序,使之具有自动进给、加工状态判断、加工完成后快速归位等功能,完成阀芯零件的轴向精密配磨。
对系统进行了实验研究,结果证明该系统可以实现40μm的进给量,进给监视行程达到200μm,配磨误差预计在0.5μm之内,闭环检测分辨率达0.1μm,并且可以根据工艺要求实现不同的进给速度。
Servovalve is the key part of the electro-hydraulic servo system widely applied in the navigating control fields, and its machining technology directly influences the total performance of servo system. Presently, servovalves are limited in Single and Mini-Batch Production, thus professional large scale production hasn’t come into being. Couple match method is usually adopted because the making technique of electro-hydraulic valve requires stricter dimension. Hence , the technology of servovalve core axial match grinding is one of key problems during servovalve manufacturing.
According to the statue In the field of China's servovalve core axial match grinding areas, develop a set of servovalve core axial closed-loop control for high-precision grinding with automated micro-feed system. In the process of system design, three sets of systems are proposed. Through comparation between three methods, the optimal one is chosed . On the basis of the overall programme which was chosed, three elements of the piezoelectric ceramics micro-feed device were analyzed, then the micro-feeding programmes is chosed.
This system mainly consists of a macro feed of piezoelectrical ceramics center as the drive device, a high precision movement-inductance sensor as the online axial grinding measurement and a microprocessor as the main controller. Programe the control procedures, in order to make it automatically feed and processing state judge, after the completion of rapid processing of naturalization, and other functions.Complete spool axial precision parts with grinding.
The results show that the system can conduct the axial precision mate-grinding with the feed of 40μm ,the monitor strok of 200μm ,the mate-grinding error of less than 0.5μm, and closed-loop measurement sensitivity of 0.1μm,it also can feed with different feed rate.
引文
1 H.Hahn, A. Piepenbrink, K.D.Leimbach. Input/output Linearization Control of an Electro Servo-hydraulic Actuator. Proceedings of the IEEE Conference on Control Applications 1994,(2):995~1000
2叶发中.电液伺服阀可靠性设计与分析.战术导弹控制技术.1992,(1):1~7
3任光融,张振华,周永强.电液伺服阀制造工艺.宇航出版社, 1988:2~9 128~129 171~173
4陶崇德等.微机控制滑阀付节流口叠合量自动测量系统的研究.微电子学与计算机. 1997,(3):17~19
5张建锋,周永强,王广林.微机控制伺服阀液动配磨精密测量技术.液压与气动. 1999,2:48~51
6 S.T. Tsai, A. Akers, S. J. Lin. Use of a Flapper-nozzle valve for Axial Piston Pump Control. SAE Special Publications Vehicle Hydraulic Systems and Digital/Electrohydraulic Controls International Off-Highway and Powerplant Congress and Exposition. 1991,882:35~45
7吴敏镜.超精密加工向毫微米级精度发展.机械工艺师. 1997,(1):6~8
8袁哲俊,王先逵.精密和超精密加工技术.机械工业出版社, 1999:141~147
9王广林,李文权,邵东向,陈大维,陶崇德.闭环控制电致伸缩陶瓷微位移驱动系统的研制.制造自动化现代技术研究(全国高等学校制造自动化研究会论文集).机械工业出版社, 1999:254~257
10陈光明,吴洪彬.数控车床的对刀原理及对刀方法.机床与液压, 2002,(3):15~20
11刘建萍,郭建华.华中世纪星数控车床的几种精确对刀方法. CAD/CAM与制造业信息化, 2005,(1)
12王广林.伺服阀阀口加工质量自动检测与控制的研究.哈尔滨工业大学博士论文. 1992:8~13
13 LI Yong. An overview of research on inchworm type of microfeed and positioning mechanism. China Mechanical Engineering. 1999,10(12): 1410~1412
14 Rao G S, Ro P I. Submicrometer control of a traction drive using statefeedback and estimation. Precision Eng. 1995,17(2):124~130
15 Chao C L, Neou J. Model reference adaptive control of air-lubricated capstan drive for precision positioning.Precision Eng. 2000,24(4):285~290
16冯晓光,赵万生,栗岩.压电陶瓷微位移器驱动电源及减小其纹波的方法.压电与声光. 1997;19(1):35~38
17王广林,杨兴,陶崇德,邵东向.内置单片机的压电陶瓷驱动电源的设计.制造自动化技术研究(全国高等学校制造自动化研究会1997年学术年会论文集).大连理工大学出版社. 1997: 420~423
18 ZHU Wen-hong, JUN M B, ALTINTAS Y. A fast tool servo design precision for turning of shafts on conventional CNC lathes. International Journal of Machine Tools and Manufacture. 2001,41(7):953~965
19 PAROS J M, WEISBORD L. How to design a flexurehinge. Machine Des. 1965,37(11):151~157
20 WORONKO A, HUANG Jin, ALTINTAS Y. Piezoelectric tool actuator for precision machining on conventional CNC turning centers. Precision Engineering. 2003,27(4):335-345
21 Koganezawa et al. Development of Shear-Mode Piezoelectric Micro actuator for Precise Head Positioning. FUJITSU.Sci.Tech.J. 2001,Vol.37 No.2: 212~219
22 Xinhua Zhu, Wang Qun, Zhongyan Meng. Preparation and Micro-displacement Characteristics of Piezoelectric Ceramic Actuation with FGM. Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University. 1995, 29(1):20~26
23 J.M.T.A. Adriaens, W.L.Koning, R.Banning. Design and Modeling of a Piezo-actuated Positioning Mechanism. IEEE. 1997,123(2):1978~1983
24 Hwanh S C, Mcmeeking R M.A Finite Element Model of Ferro elastic Polycrystals. International Journal of Solids and Structures. 1999,Vol.36 No.10:1541~1556
25 Guyom ar D.Piezoelectric Ceramics Nonlinear Behavior: Application to Langev -in T ransduCer. Jour-nal de Physique. 1997,Vol.7 No.6:1197~1208
26王秀梅,凌文玉等.压电陶瓷驱动微进给伺服阀控制系统设计.微计算机信息. 1999,15(2):42~43
27俞锁龙,袁永铮等.压电陶瓷应变的测量及应用.声学与电子工程.1995,40(4):24~25
28黄贤武,郑筱霞,曲波,刘文杰.传感器实际应用电路设计.电子科技大学出版社, 1998:150~157
29黄贤武,郑筱霞.传感器原理与应用.电子科技大学出版社, 1994:78~85
30何立民.单片机应用系统设计.北京航天航空大学出版社, 1990:265-268
31余永权.单片机在工业控制中的应用.北京电子工业出版社, 2003:55~58
32胡伟,季晓衡.单片机C程序设计及应用实例.北京人民邮电出版社, 2003:112~120
33张毅刚,彭喜元,姜守达,乔立岩.新编MCS-51单片机应用设计.哈尔滨工业大学出版社, 2003:213~256
34王福瑞等.单片微机测控系统设计大全.北京航空航天大学出版社, 1998:201~223
35曹坚,周庆华等.基于压电陶瓷的二维微动工组台有限元分析.机床与液压. 2003.(3):39~40
36 Sebastian, Abu. Design methodologies for robust nano positioning. IEEE Transactions on Control Systems Technology. 2005:868~876
37 Heui Jae Pahk, Dong Sung Lee. Ultra precision positioning system for servo motor- piezo actuator using the dual loop and digital filter implementation. International Journal of Machine Tool and Manufacture, 41 (2001):51~63
38 Yunhe Yu, Nagi Naganathan, Rao Dukkipati. Preisach modeling of hysteresis for piezoceramic actuator system. Mechanism and Machine Theory 37(2002):49~59
39江塑,孙立宁,安辉等.机构、驱动、检测一体化的压电陶瓷直线驱动模块的研究.哈尔滨工业大学学报. 1998,30(2):35~37
40 Jacquies Duparre.,Peter Buecker, Bernt Goetz and Tomas Martin. Theoretical and Experimental Investigation of Significant Characteristic Parameters of Piezoelectrical Actuators. SPIE Society of Photo-Optical Instrumentation Engineers. 2000,(9):672~677
41 T.Idogak, H.Kannagama. Charateristics of Piezoelectric Locomotive Machine. Proceeding of the 6th International Sysposium on Micro Machine and Human Science, 1995:193~198
42 H.S.Tzou. Design of a Piezoelectric Exciter/Actuator for Micro-displacement Control. Theory and Experiment, Precision Engineering. Apr.1991,13(2):104~110
43陈维山,赵杰.机电系统计算机控制.哈尔滨工业大学出版社, 1999:137-138
44牛于朋,成曙.单片机数字滤波算法研究.中国测试技术. 2005,31(6):96~99
45 BASSINI R, BOIANO C, PULLIA A. A low-noise charge amplifier with fast rise time and active discharge mechanism. IEEE,2002:436-439
46 KISTLER C. Drift of the charge amplifier. Measure & Analyze. www.kistler.com.cn
47丁振良.误差理论与数据处理.哈尔滨工业大学出版社. 1999:56~59
2叶发中.电液伺服阀可靠性设计与分析.战术导弹控制技术.1992,(1):1~7
3任光融,张振华,周永强.电液伺服阀制造工艺.宇航出版社, 1988:2~9 128~129 171~173
4陶崇德等.微机控制滑阀付节流口叠合量自动测量系统的研究.微电子学与计算机. 1997,(3):17~19
5张建锋,周永强,王广林.微机控制伺服阀液动配磨精密测量技术.液压与气动. 1999,2:48~51
6 S.T. Tsai, A. Akers, S. J. Lin. Use of a Flapper-nozzle valve for Axial Piston Pump Control. SAE Special Publications Vehicle Hydraulic Systems and Digital/Electrohydraulic Controls International Off-Highway and Powerplant Congress and Exposition. 1991,882:35~45
7吴敏镜.超精密加工向毫微米级精度发展.机械工艺师. 1997,(1):6~8
8袁哲俊,王先逵.精密和超精密加工技术.机械工业出版社, 1999:141~147
9王广林,李文权,邵东向,陈大维,陶崇德.闭环控制电致伸缩陶瓷微位移驱动系统的研制.制造自动化现代技术研究(全国高等学校制造自动化研究会论文集).机械工业出版社, 1999:254~257
10陈光明,吴洪彬.数控车床的对刀原理及对刀方法.机床与液压, 2002,(3):15~20
11刘建萍,郭建华.华中世纪星数控车床的几种精确对刀方法. CAD/CAM与制造业信息化, 2005,(1)
12王广林.伺服阀阀口加工质量自动检测与控制的研究.哈尔滨工业大学博士论文. 1992:8~13
13 LI Yong. An overview of research on inchworm type of microfeed and positioning mechanism. China Mechanical Engineering. 1999,10(12): 1410~1412
14 Rao G S, Ro P I. Submicrometer control of a traction drive using statefeedback and estimation. Precision Eng. 1995,17(2):124~130
15 Chao C L, Neou J. Model reference adaptive control of air-lubricated capstan drive for precision positioning.Precision Eng. 2000,24(4):285~290
16冯晓光,赵万生,栗岩.压电陶瓷微位移器驱动电源及减小其纹波的方法.压电与声光. 1997;19(1):35~38
17王广林,杨兴,陶崇德,邵东向.内置单片机的压电陶瓷驱动电源的设计.制造自动化技术研究(全国高等学校制造自动化研究会1997年学术年会论文集).大连理工大学出版社. 1997: 420~423
18 ZHU Wen-hong, JUN M B, ALTINTAS Y. A fast tool servo design precision for turning of shafts on conventional CNC lathes. International Journal of Machine Tools and Manufacture. 2001,41(7):953~965
19 PAROS J M, WEISBORD L. How to design a flexurehinge. Machine Des. 1965,37(11):151~157
20 WORONKO A, HUANG Jin, ALTINTAS Y. Piezoelectric tool actuator for precision machining on conventional CNC turning centers. Precision Engineering. 2003,27(4):335-345
21 Koganezawa et al. Development of Shear-Mode Piezoelectric Micro actuator for Precise Head Positioning. FUJITSU.Sci.Tech.J. 2001,Vol.37 No.2: 212~219
22 Xinhua Zhu, Wang Qun, Zhongyan Meng. Preparation and Micro-displacement Characteristics of Piezoelectric Ceramic Actuation with FGM. Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University. 1995, 29(1):20~26
23 J.M.T.A. Adriaens, W.L.Koning, R.Banning. Design and Modeling of a Piezo-actuated Positioning Mechanism. IEEE. 1997,123(2):1978~1983
24 Hwanh S C, Mcmeeking R M.A Finite Element Model of Ferro elastic Polycrystals. International Journal of Solids and Structures. 1999,Vol.36 No.10:1541~1556
25 Guyom ar D.Piezoelectric Ceramics Nonlinear Behavior: Application to Langev -in T ransduCer. Jour-nal de Physique. 1997,Vol.7 No.6:1197~1208
26王秀梅,凌文玉等.压电陶瓷驱动微进给伺服阀控制系统设计.微计算机信息. 1999,15(2):42~43
27俞锁龙,袁永铮等.压电陶瓷应变的测量及应用.声学与电子工程.1995,40(4):24~25
28黄贤武,郑筱霞,曲波,刘文杰.传感器实际应用电路设计.电子科技大学出版社, 1998:150~157
29黄贤武,郑筱霞.传感器原理与应用.电子科技大学出版社, 1994:78~85
30何立民.单片机应用系统设计.北京航天航空大学出版社, 1990:265-268
31余永权.单片机在工业控制中的应用.北京电子工业出版社, 2003:55~58
32胡伟,季晓衡.单片机C程序设计及应用实例.北京人民邮电出版社, 2003:112~120
33张毅刚,彭喜元,姜守达,乔立岩.新编MCS-51单片机应用设计.哈尔滨工业大学出版社, 2003:213~256
34王福瑞等.单片微机测控系统设计大全.北京航空航天大学出版社, 1998:201~223
35曹坚,周庆华等.基于压电陶瓷的二维微动工组台有限元分析.机床与液压. 2003.(3):39~40
36 Sebastian, Abu. Design methodologies for robust nano positioning. IEEE Transactions on Control Systems Technology. 2005:868~876
37 Heui Jae Pahk, Dong Sung Lee. Ultra precision positioning system for servo motor- piezo actuator using the dual loop and digital filter implementation. International Journal of Machine Tool and Manufacture, 41 (2001):51~63
38 Yunhe Yu, Nagi Naganathan, Rao Dukkipati. Preisach modeling of hysteresis for piezoceramic actuator system. Mechanism and Machine Theory 37(2002):49~59
39江塑,孙立宁,安辉等.机构、驱动、检测一体化的压电陶瓷直线驱动模块的研究.哈尔滨工业大学学报. 1998,30(2):35~37
40 Jacquies Duparre.,Peter Buecker, Bernt Goetz and Tomas Martin. Theoretical and Experimental Investigation of Significant Characteristic Parameters of Piezoelectrical Actuators. SPIE Society of Photo-Optical Instrumentation Engineers. 2000,(9):672~677
41 T.Idogak, H.Kannagama. Charateristics of Piezoelectric Locomotive Machine. Proceeding of the 6th International Sysposium on Micro Machine and Human Science, 1995:193~198
42 H.S.Tzou. Design of a Piezoelectric Exciter/Actuator for Micro-displacement Control. Theory and Experiment, Precision Engineering. Apr.1991,13(2):104~110
43陈维山,赵杰.机电系统计算机控制.哈尔滨工业大学出版社, 1999:137-138
44牛于朋,成曙.单片机数字滤波算法研究.中国测试技术. 2005,31(6):96~99
45 BASSINI R, BOIANO C, PULLIA A. A low-noise charge amplifier with fast rise time and active discharge mechanism. IEEE,2002:436-439
46 KISTLER C. Drift of the charge amplifier. Measure & Analyze. www.kistler.com.cn
47丁振良.误差理论与数据处理.哈尔滨工业大学出版社. 1999:56~59