光干涉法检测光学非球面面形研究
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摘要
非球面光学元件对于改善光学系统像质、减轻重量、提高光学特性、简化结构、减少装配工作量、缩短研制和生产周期、降低成本等具有重要意义。非球面光学系统越来越多地应用在航空、航天、军事、信息、照相、投影等领域。
采用非球面光学系统首先要制造出高精度的非球面。作为完整的非球面制造技术主要包括两部分：非球面的加工技术和检测技术。虽然非球面镜在性能上大大优于球面镜,但由于非球面的面形复杂,其加工和检验要比球面镜困难得多,长期以来,一直是制约其广泛应用的两大难题。目前,已有多种用于非球面检测的技术,各种方法都有其特点,光学干涉方法由于其测量精度高而得到普遍应用。
本文综合各种非球面面形检测方法,比较优缺点,选择了波面剪切干涉法、波面相减干涉法、波面补偿干涉法等三种方法对非球面面形进行了测量研究。
1.结合兵器工业“十五”科研规划重点课题“非球面面形测试仪研制”,研制了一台利用相移式横向剪切干涉原理测量非球面面形的测试仪,干涉仪精度达到1/10λ,达到国内先进水平,获国家实用新型专利。
利用该仪器对对口径为110mm,顶点曲率半径为960mm的抛物面进行了实测,测量误差为PV=0.43λ,RMS=0.01λ。
对相移式波面干涉仪的主要误差源相移误差进行了分析。首先,采用基于小波数字滤波和傅里叶变换相结合的方法,对相移器进行了标定,标定精度为0.39%；其次,提出了将四步相移技术与傅里叶变换技术相结合的算法,对相移误差进行补偿,算法误差为1/100λ。
2.利用ZYGO干涉仪,研究了利用波面相减方法直接检测非球面面形误差。该方法将数学计算得到的理想波面函数与干涉仪测得的实际波面函数相减得到被测面的面形误差；采用了表面绝对检测技术,减小了测量误差；针对口径为300mm,顶点曲率半径为2500mm的抛物面进行了实测,测量误差为PV=0.16λ,RMS=0.03λ；并用自准直干涉法进行了验证。
3.设计了基于波面补偿干涉技术的波带板共光路干涉系统；提出了基于坐标变换的干涉条纹处理算法,对波面进行重建,算法误差为1/50λ；针对顶点曲率半径103.26mm,口径40mm的被测双曲面,设计并制作了波带板,进行了实测,测量误差为PV=0.38λ,RMS=0.05λ；用泰勒-霍普森轮廓仪进行了结果验证。
Aspheric optical elements are important role in improving image quality, reducing weight, improving optical properties, simplifying the structure, reducing the workload of assembly, shorten the development and production cycles, lower cost. Aspheric optical system has been more and more used in these fields, such as aviation, aerospace, military, information, photography and so on.
Aspheric optical system must contain one more high-precision aspherical surface. A complete aspherical manufacturing technology includes two parts:the precision processing and testing technology. Although aspherical lens is much better than spherical lens in the performance, but it is much more difficult than the spherical in processing and testing due to its complex surface shape, which are two big problems for application wildly for a long time. Currently, there are already some ways to test aspheric, but there is not a good method, which is good universal property, easy use, high precision and low cost, so researchers are still exploring.
Some methods of aspheric testing are compared with their advantages and disadvantages, and have been deep studied on phase-shifting shearing interferometry, ZYGO interferometry and zone plate interferometry, and give research results in this paper. The main works we have done as follows:
1. A set of inspection device with lateral shearing phase-shifting interferometer for optical aspheric surface has been developed through combination of "10th five" research plan project, including a test device, four standard lens, a set of test software. The testing accuracy of this device is less than λ/10, and with domestic advance level and patent also.
The experiment for parabolic aspheric surface, which is diameter110mm and vertex radius of curvature960mm, was done with this device, and the measurement error is PV=0.43λ. and RMS=0.01λ.
The error analysis was done for phase shifting technology. At first, the phase shifter has been calibrated by Wavelet digit filter and Fourier transform, and the calibration accuracy is0.39%; then compensating algorithm for phase shift was presented, which based on combination of four phase shift and Fourier transfom, and the error is1/100λ.
2. Based on ZYGO interferometer, the direct testing method obtaining the aspheric surface error has been studied by wave subtraction. This method is different between idea wavefront from calculation and testing wavefront from ZYGO interferometry, and the error is reduced with surface absolute measurement technology. For parabolic aspheric surface with diameter300mm and vertex radius of curvature2500mm, the measurement error is PV=0.16λ and RMS=0.03λ, and is verified by autocollimator method.
3. The common path interference system based on zone plate interferometry is designed and built. The processing algorithm for interference fringe, which based on coordinate transform, is developed. For the hyperboloid with radius of curvature of103.26mm and diameter of40mm, the measurement error is PV=0.38λ and RMS=0.05λ, and the result is verified with Taylor-Hopson profiler.
采用非球面光学系统首先要制造出高精度的非球面。作为完整的非球面制造技术主要包括两部分：非球面的加工技术和检测技术。虽然非球面镜在性能上大大优于球面镜,但由于非球面的面形复杂,其加工和检验要比球面镜困难得多,长期以来,一直是制约其广泛应用的两大难题。目前,已有多种用于非球面检测的技术,各种方法都有其特点,光学干涉方法由于其测量精度高而得到普遍应用。
本文综合各种非球面面形检测方法,比较优缺点,选择了波面剪切干涉法、波面相减干涉法、波面补偿干涉法等三种方法对非球面面形进行了测量研究。
1.结合兵器工业“十五”科研规划重点课题“非球面面形测试仪研制”,研制了一台利用相移式横向剪切干涉原理测量非球面面形的测试仪,干涉仪精度达到1/10λ,达到国内先进水平,获国家实用新型专利。
利用该仪器对对口径为110mm,顶点曲率半径为960mm的抛物面进行了实测,测量误差为PV=0.43λ,RMS=0.01λ。
对相移式波面干涉仪的主要误差源相移误差进行了分析。首先,采用基于小波数字滤波和傅里叶变换相结合的方法,对相移器进行了标定,标定精度为0.39%；其次,提出了将四步相移技术与傅里叶变换技术相结合的算法,对相移误差进行补偿,算法误差为1/100λ。
2.利用ZYGO干涉仪,研究了利用波面相减方法直接检测非球面面形误差。该方法将数学计算得到的理想波面函数与干涉仪测得的实际波面函数相减得到被测面的面形误差；采用了表面绝对检测技术,减小了测量误差；针对口径为300mm,顶点曲率半径为2500mm的抛物面进行了实测,测量误差为PV=0.16λ,RMS=0.03λ；并用自准直干涉法进行了验证。
3.设计了基于波面补偿干涉技术的波带板共光路干涉系统；提出了基于坐标变换的干涉条纹处理算法,对波面进行重建,算法误差为1/50λ；针对顶点曲率半径103.26mm,口径40mm的被测双曲面,设计并制作了波带板,进行了实测,测量误差为PV=0.38λ,RMS=0.05λ；用泰勒-霍普森轮廓仪进行了结果验证。
Aspheric optical elements are important role in improving image quality, reducing weight, improving optical properties, simplifying the structure, reducing the workload of assembly, shorten the development and production cycles, lower cost. Aspheric optical system has been more and more used in these fields, such as aviation, aerospace, military, information, photography and so on.
Aspheric optical system must contain one more high-precision aspherical surface. A complete aspherical manufacturing technology includes two parts:the precision processing and testing technology. Although aspherical lens is much better than spherical lens in the performance, but it is much more difficult than the spherical in processing and testing due to its complex surface shape, which are two big problems for application wildly for a long time. Currently, there are already some ways to test aspheric, but there is not a good method, which is good universal property, easy use, high precision and low cost, so researchers are still exploring.
Some methods of aspheric testing are compared with their advantages and disadvantages, and have been deep studied on phase-shifting shearing interferometry, ZYGO interferometry and zone plate interferometry, and give research results in this paper. The main works we have done as follows:
1. A set of inspection device with lateral shearing phase-shifting interferometer for optical aspheric surface has been developed through combination of "10th five" research plan project, including a test device, four standard lens, a set of test software. The testing accuracy of this device is less than λ/10, and with domestic advance level and patent also.
The experiment for parabolic aspheric surface, which is diameter110mm and vertex radius of curvature960mm, was done with this device, and the measurement error is PV=0.43λ. and RMS=0.01λ.
The error analysis was done for phase shifting technology. At first, the phase shifter has been calibrated by Wavelet digit filter and Fourier transform, and the calibration accuracy is0.39%; then compensating algorithm for phase shift was presented, which based on combination of four phase shift and Fourier transfom, and the error is1/100λ.
2. Based on ZYGO interferometer, the direct testing method obtaining the aspheric surface error has been studied by wave subtraction. This method is different between idea wavefront from calculation and testing wavefront from ZYGO interferometry, and the error is reduced with surface absolute measurement technology. For parabolic aspheric surface with diameter300mm and vertex radius of curvature2500mm, the measurement error is PV=0.16λ and RMS=0.03λ, and is verified by autocollimator method.
3. The common path interference system based on zone plate interferometry is designed and built. The processing algorithm for interference fringe, which based on coordinate transform, is developed. For the hyperboloid with radius of curvature of103.26mm and diameter of40mm, the measurement error is PV=0.38λ and RMS=0.05λ, and the result is verified with Taylor-Hopson profiler.
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