直拉单晶硅炉用炭素材料防护涂层的制备与性能研究
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摘要
随着单晶硅在太阳能光伏行业和半导体行业的应用越来越广泛,炭素材料作为直拉单晶硅炉重要的热场材料也得到迅速发展。但是由于直拉单晶硅炉内微氧化气氛使得炭素热场材料缓慢氧化,生成的二氧化碳和一氧化碳溶解于硅料里面,造成直拉单晶硅产品的碳沉降和氧沉降。另外直拉单晶过程中,硅料的熔融可能会产生硅蒸汽和熔融硅飞溅,造成炭素热场材料硅化,严重影响炭素部件的力学性能和使用寿命。所以,对直拉单晶硅炉内炭素热场材料的抗氧化防护和抗硅化腐蚀防护显得尤为必要,其中涂层技术是必要的选择。
本文首先研究了炭素热场材料在氧化环境和硅化腐蚀情况下的失效机理。研究发现,炭素材料的基体类型、物相结构、杂质含量、表面抛光处理等对其氧化性能的影响比较显著。由于碳纤维属于皮芯结构,外层碳原子排列规整,反应活性低,因此纤维含量高的炭素材料的抗氧化性能较好,且在氧化过程中,氧化反应首先从炭素基体开始。另外对于碳原子排列规整、石墨微晶完整的炭素材料抗氧化性能较好,也就是石墨化程度越高越抗氧化。炭素材料内部金属杂质有效的降低了碳元素与氧元素的反应活化能,对炭材料的氧化起到催化作用。表面抛光处理会减少炭素材料比表面积,降低碳原子与氧原子撞击概率,提高了炭素材料的抗氧化性能。对炭素材料进行熔融硅的硅化腐蚀发现,硅元素对炭素材料的腐蚀主要是通过炭素材料表面开气孔和缺陷向材料内部扩散。对于C/C复合材料,纤维束之间存在大量的连续孔隙,硅元素主要通过这些孔隙和基体纵向缺陷进行。另外随着硅化腐蚀时间的延长,C/C复合材料力学性能逐渐下降,而石墨材料硅化腐蚀后表面生成连续的SiC,使石墨材料的力学性能优于未硅化材料,但是表面硅化腐蚀使炭素材料在使用过程中长期存在残余应力,严重影响了其使用寿命。
以炭素材料氧化侵蚀和硅化腐蚀机理为基础,设计了树脂热解炭涂层和气相沉积热解炭涂层改善炭素材料的抗氧化和抗硅化腐蚀性能。通过对两种热解炭涂层的物相结构和微观形貌发现,树脂热解炭涂层由于树脂炭化过程收缩,表面有很多孔洞,通过添加石墨粉作为填料,抑制了树脂收缩引起的孔洞。经过900℃的静态氧化试验和1600℃硅化腐蚀试验发现,树脂热解炭涂层对炭素材料起到一定的抗氧化防护能力,但是经过4小时的静态氧化后,失重率仍然高达60%。气相沉积热解炭涂层的抗氧化效果比较好,4小时氧化失重率在10%左右。在经过1600℃硅化腐蚀之后,气相沉积热解炭具有极佳的硅化防护能力,而树脂热解炭涂层的抗硅化腐蚀虽然优于未加涂层样品,但仍与气相沉积热解炭涂层有一定差距。抗氧化效果不理想主要是因为炭素涂层自身固有易氧化性引起的。
热解炭涂层由于自身固有的易氧化性,使得热解炭涂层作为防护涂层的抗氧化效果不佳。本文用包埋熔渗法和气相沉积法分别制备了SiC涂层。研究表明,随着包埋法制备SiC涂层熔渗时间的增长,SiC晶粒逐渐长大,根据XRD计算结果,SiC涂层主要为β-SiC,且SiC晶粒沿着(311)晶面堆垛方向长大速度较快。C/C复合材料基体对包埋法制备SiC涂层的影响较为显著,SiC涂层由于与炭素基体热膨胀系数差异,引起涂层表面微裂纹的产生。通过900。C,10h的氧化试验发现,SiC涂层具有较好的抗氧化防护能力,氧化失重率在4%左右。而通过SiC涂层的硅化腐蚀试验发现,SiC涂层表面微裂纹的存在,成为熔融硅向基体内部扩散的通道。如何抑制SiC表面微裂纹的产生,成为SiC涂层发挥抗氧化防护和抗硅化防护能力的关键。
为了缓解SiC涂层与炭素材料热膨胀系数不匹配造成的应力集中,抑制SiC涂层表面微裂纹的产生,本文设计了以热解炭涂层为过渡层,以SiC涂层为外涂层的复合防护体系。通过对PyC过渡层的测试分析发现,由于石墨粉的添加,涂层内部存在大量晶界与缺陷,这些缺陷的存在提高了过渡层的韧性。经过1600。C处理的PyC过渡层内部残余应力要小于900。C处理的PyC过渡层,主要是因为石墨化程度高的PyC过渡层能消耗更多的热应力能量。经过制备SiC外涂层发现,表征SiC残余应力的拉曼频移与平衡位置基本平衡,说明PyC过渡层的存在为SiC涂层缓解了大部分热应力,使得SiC表面有较少的微裂纹,更有效的发挥SiC涂层的抗氧化防护和抗硅化防护效果。通过对PyC增韧涂层机理研究发现,PyC过渡层其实是引入一层弱界面,在弱界面内部存在大量缺陷和微裂纹,这些缺陷和微裂纹可以对主裂纹进行分散,吸收主裂纹能量,缓解主裂纹垂直于涂层方向扩展,避免了穿透性微裂纹的产生。
作为直拉单晶硅炉热场材料,炭素材料的热辐射性能非常重要。随着直拉单晶硅的发展,对炉内热场设计和模拟尤为重要,其中热场材料的热辐射性能是其中重要的参数。本文研究炭素基底材料及涂层复合材料的热辐射性能,分析发现,C/C复合材料AC100和等静压石墨G330的光谱发射率相对其他炭素材料较高,光谱发射率随波长变化幅度较小,发射率相对稳定。C/C复合材料AC100和等静压石墨G330的石墨微晶结构相对于同类其他材料的规整性不高,缺陷结构的存在几率大,紊乱结构引起局域振动模式使炭素材料形成较强的光谱辐射带。表面不平整度对炭素材料光谱发射率有较大影响,AC100表面不平整程度较大,粗糙表面引起电磁波吸收散射较强,光谱发射率较强；石墨材料表面不平整程度差别并不明显,由表面状态引起的发射率变化不明显。热解炭防护涂层复合材料在测试波段内的热辐射性能优于基底C/C复合材料,气相沉积热解炭涂层复合材料的热辐射性能最佳,法向光谱发射率基本在0.85-0.9范围内,法向总发射率达0.89。相对于基底C/C复合材料来说,碳化硅热防护涂层复合材料的光谱发射率在测试波段内有明显提高,其中包埋法制备Pyc/SiC涂层的光谱发射率基本高于气相沉积的涂层,包埋法复合涂层,可有效改善炭素材料的热辐射性能。
With the application of single crystal silicon in solar photovoltaic and the semiconductor industry more widely, carbon materials used as thermal field parts developed more quickly. But because the micro oxidizing atmosphere in CZ furnace makes carbon thermal field slow oxidation, generate carbon dioxide and carbon monoxide, these gas dissolved in silicon materials cause the silicon products carbon and oxygen settlement. In addition, in the process of pulling crystal, silicon material melt may produce silicon steam and molten silicon splash, cause carbon thermal field material surface silicification, seriously affecting the mechanical properties of carbon parts and service life. So, the antioxidant protection and corrosion protection of carbon thermal field material in monocrystalline silicon furnace is necessary, and coating technology is a necessary choice.
This paper first studied carbon thermal field materials in oxidation environment and silicification corrosion cases failure mechanism. This study found that carbon materials matrix type, which structure, impurity content, surface finish effect the oxidation performance significantly. Due to the carbon fiber skin core structure, outer carbon atoms are arranged neat, reaction activity is relatively low, and in the oxidation process, oxidation reaction begin from carbon matrix began, the antioxidant performance of high fiber content carbon material is good. In addition, oxidation performance of carbon material with carbon atoms arranged neat, graphite crystallite complete is good, the higher graphitization degree, the higher antioxidant performance. Carbon materials internal metal impurity effectively reduces the carbon and oxygen element reaction activation energy, the carbon materials play a catalytic role in oxidation. Surface polishing treatment will reduce carbon material specific surface area, reduce carbon atoms and oxygen atom collision probability and improve the carbon material of oxidation resistance. For carbon materials for molten silicon silicification corrosion found that silicon elements on carbon material corrosion is mainly through the carbon material surface open pore and defect to material internal diffusion. For C/C composite material, cellulose exist between a large number of continuous pore, silicon mainly through these pore and matrix longitudinal defects. In addition with silicification corrosion the extension of time, the C/C composite material mechanics performance gradually declined, and graphite material silicification corrosion surface generation after continuous SiC, the mechanical properties of graphite materials for not silicification materials, but surface silicification seriously affect its service life.
According to the carbon material oxidation erosion and silicification corrosion mechanism research, this paper designed a resin pyrolytic carbon coating and deposition pyrolytic carbon coating on carbon materials to protection oxidation and silicification. Based on two kinds of pyrolytic carbon coating phase structure and microstructure, because resin contracte in carbonized process, the surface of resin pyrolytic carbon coating has a lot of holes.Adding graphite powder as filler, restrain the the hole caused by resin shrinkage. After900℃static oxidation test and1600℃silicification corrosion test, resin pyrolytic carbon coating on carbon materials have some antioxidant protection ability, but after four hours of static oxidation, weight loss rate is still as high as60%. Antioxidant effect of CVD pyrolytic carbon coating is good,4hours oxidation weightlessness rate at about10%. After1600℃silicification corrosion, vapor deposition pyrolytic carbon has excellent silicification protection ability, and resin pyrolytic carbon coating corrosion resistance is better than that of silicide though without coating samples.
Because of pyrolytic carbon coating inherent oxidation performance, makes the pyrolytic carbon coating as a protective coating of antioxidant effect is not good. In this paper, using embedding melt infiltration method and deposition method, we prepared the SiC coating. This study found that, along with the melt infiltration embedding for SiC coating time growth, SiC grain grew older, according to the XRD results, SiC coating is mainly beta SiC, and SiC grain grow up priority along the (311) crystal plane stacking direction. C/C composites matrix for embedding method for SiC coating effect is significant, SiC coating with carbon matrix coefficient of thermal expansion difference, causes micro crack generation in coating surface. Through the900℃,10h oxidation test found that SiC coating has good antioxidant protection ability, oxidation weightlessness rate at about4%.Through the SiC coating silicification corrosion test found that SiC coating surface microcrack exists, and be fused silicon to matrix internal diffusion channels. How to suppress the SiC surface micro crack generation, called SiC coating play antioxidant protection and resistance to silicification protection ability of the key.
In order to alleviate the stress concentration caused by SiC coating and carbon material coefficient of thermal expansion mismatch, restrain SiC coating surface microcrack production, this paper designed a pyrolytic carbon coating for transition layer to SiC coating for external coating of composite protective system. Through the PyC transition layer test analysis found that, with the graphite powder add, coating internal exist a lot of grain boundary and defects existed, and these defects improve the transition layer of plastic. After1600℃processing PyC transition layer internal residual stress to less than900℃processing PyC transition layer, mainly because of the high degree of graphitization PyC transition layer can consume more energy thermal stress. After preparation SiC external coating found that characterization of SiC residual stress of Raman frequency shift and the equilibrium position basic balance, explain the existence of PyC transition layer for SiC coating ease most thermal stress, makes the SiC surface is less micro crack, more effective play SiC coating of antioxidant protection and resistance to silicification protective effect. Through the PyC toughening coating mechanism study found that PyC transition layer is actually into a layer of weak interface, in the weak interface internal there are many defects and micro crack, these defects and micro crack can be the main crack is dispersed, absorb the main crack energy, alleviate the main crack perpendicular to the direction of expansion coating, to avoid the penetrability micro crack generation.
As furnace thermal field material in Czochralski silicon, the thermal radiation properties of carbon materials is very important. With the development of Czochralski silicon, the design and simulation of the thermal field in the furnace is particularly important, wherein the heat radiation performance of the thermal field of materials is one of the important parameters. This paper sdudied carbon substrate material and coating composite heat radiation performance analysis and found that the spectral emissivity of the C/C composites AC100and isostatic graphite G330high relative to other carbon materials, the spectral emissivity with wavelength variation smaller, the emission rate is relatively stable. C/C composites AC100and isostatic graphite G330graphite microcrystalline structure relative to the regularity of similar other materials is not high, the probability of the existence of the defect structure disorders cause localized vibrational mode structure of the carbon material to form a strong spectral radiation belts. Surface irregularities of the spectral emissivity of carbon materials, AC100surface smoothness of the rough surface caused by strong electromagnetic wave absorption scattering, strong spectral emissivity; graphite material surface uneven degree of difference is not obvious from the emission caused by the surface state of the rate change is not obvious. Thermal radiation properties of the protective coating of pyrolytic carbon composite materials in the test band is better than the base C/C composites, the performance of the vapor deposition of pyrolytic carbon coated composite thermal radiation, normal the basic spectral emissivity0.85-0.9range, to the total emission rate of0.89. Relative to the base C/C composites, silicon carbide heat protection coating composite spectral emissivity significantly improved in the test band embedding method Pyc/SiC coating the spectral emissivity basic higher than the vapor deposition coating, embedding composite coating, which can effectively improve the thermal radiation properties of carbon materials.
本文首先研究了炭素热场材料在氧化环境和硅化腐蚀情况下的失效机理。研究发现,炭素材料的基体类型、物相结构、杂质含量、表面抛光处理等对其氧化性能的影响比较显著。由于碳纤维属于皮芯结构,外层碳原子排列规整,反应活性低,因此纤维含量高的炭素材料的抗氧化性能较好,且在氧化过程中,氧化反应首先从炭素基体开始。另外对于碳原子排列规整、石墨微晶完整的炭素材料抗氧化性能较好,也就是石墨化程度越高越抗氧化。炭素材料内部金属杂质有效的降低了碳元素与氧元素的反应活化能,对炭材料的氧化起到催化作用。表面抛光处理会减少炭素材料比表面积,降低碳原子与氧原子撞击概率,提高了炭素材料的抗氧化性能。对炭素材料进行熔融硅的硅化腐蚀发现,硅元素对炭素材料的腐蚀主要是通过炭素材料表面开气孔和缺陷向材料内部扩散。对于C/C复合材料,纤维束之间存在大量的连续孔隙,硅元素主要通过这些孔隙和基体纵向缺陷进行。另外随着硅化腐蚀时间的延长,C/C复合材料力学性能逐渐下降,而石墨材料硅化腐蚀后表面生成连续的SiC,使石墨材料的力学性能优于未硅化材料,但是表面硅化腐蚀使炭素材料在使用过程中长期存在残余应力,严重影响了其使用寿命。
以炭素材料氧化侵蚀和硅化腐蚀机理为基础,设计了树脂热解炭涂层和气相沉积热解炭涂层改善炭素材料的抗氧化和抗硅化腐蚀性能。通过对两种热解炭涂层的物相结构和微观形貌发现,树脂热解炭涂层由于树脂炭化过程收缩,表面有很多孔洞,通过添加石墨粉作为填料,抑制了树脂收缩引起的孔洞。经过900℃的静态氧化试验和1600℃硅化腐蚀试验发现,树脂热解炭涂层对炭素材料起到一定的抗氧化防护能力,但是经过4小时的静态氧化后,失重率仍然高达60%。气相沉积热解炭涂层的抗氧化效果比较好,4小时氧化失重率在10%左右。在经过1600℃硅化腐蚀之后,气相沉积热解炭具有极佳的硅化防护能力,而树脂热解炭涂层的抗硅化腐蚀虽然优于未加涂层样品,但仍与气相沉积热解炭涂层有一定差距。抗氧化效果不理想主要是因为炭素涂层自身固有易氧化性引起的。
热解炭涂层由于自身固有的易氧化性,使得热解炭涂层作为防护涂层的抗氧化效果不佳。本文用包埋熔渗法和气相沉积法分别制备了SiC涂层。研究表明,随着包埋法制备SiC涂层熔渗时间的增长,SiC晶粒逐渐长大,根据XRD计算结果,SiC涂层主要为β-SiC,且SiC晶粒沿着(311)晶面堆垛方向长大速度较快。C/C复合材料基体对包埋法制备SiC涂层的影响较为显著,SiC涂层由于与炭素基体热膨胀系数差异,引起涂层表面微裂纹的产生。通过900。C,10h的氧化试验发现,SiC涂层具有较好的抗氧化防护能力,氧化失重率在4%左右。而通过SiC涂层的硅化腐蚀试验发现,SiC涂层表面微裂纹的存在,成为熔融硅向基体内部扩散的通道。如何抑制SiC表面微裂纹的产生,成为SiC涂层发挥抗氧化防护和抗硅化防护能力的关键。
为了缓解SiC涂层与炭素材料热膨胀系数不匹配造成的应力集中,抑制SiC涂层表面微裂纹的产生,本文设计了以热解炭涂层为过渡层,以SiC涂层为外涂层的复合防护体系。通过对PyC过渡层的测试分析发现,由于石墨粉的添加,涂层内部存在大量晶界与缺陷,这些缺陷的存在提高了过渡层的韧性。经过1600。C处理的PyC过渡层内部残余应力要小于900。C处理的PyC过渡层,主要是因为石墨化程度高的PyC过渡层能消耗更多的热应力能量。经过制备SiC外涂层发现,表征SiC残余应力的拉曼频移与平衡位置基本平衡,说明PyC过渡层的存在为SiC涂层缓解了大部分热应力,使得SiC表面有较少的微裂纹,更有效的发挥SiC涂层的抗氧化防护和抗硅化防护效果。通过对PyC增韧涂层机理研究发现,PyC过渡层其实是引入一层弱界面,在弱界面内部存在大量缺陷和微裂纹,这些缺陷和微裂纹可以对主裂纹进行分散,吸收主裂纹能量,缓解主裂纹垂直于涂层方向扩展,避免了穿透性微裂纹的产生。
作为直拉单晶硅炉热场材料,炭素材料的热辐射性能非常重要。随着直拉单晶硅的发展,对炉内热场设计和模拟尤为重要,其中热场材料的热辐射性能是其中重要的参数。本文研究炭素基底材料及涂层复合材料的热辐射性能,分析发现,C/C复合材料AC100和等静压石墨G330的光谱发射率相对其他炭素材料较高,光谱发射率随波长变化幅度较小,发射率相对稳定。C/C复合材料AC100和等静压石墨G330的石墨微晶结构相对于同类其他材料的规整性不高,缺陷结构的存在几率大,紊乱结构引起局域振动模式使炭素材料形成较强的光谱辐射带。表面不平整度对炭素材料光谱发射率有较大影响,AC100表面不平整程度较大,粗糙表面引起电磁波吸收散射较强,光谱发射率较强；石墨材料表面不平整程度差别并不明显,由表面状态引起的发射率变化不明显。热解炭防护涂层复合材料在测试波段内的热辐射性能优于基底C/C复合材料,气相沉积热解炭涂层复合材料的热辐射性能最佳,法向光谱发射率基本在0.85-0.9范围内,法向总发射率达0.89。相对于基底C/C复合材料来说,碳化硅热防护涂层复合材料的光谱发射率在测试波段内有明显提高,其中包埋法制备Pyc/SiC涂层的光谱发射率基本高于气相沉积的涂层,包埋法复合涂层,可有效改善炭素材料的热辐射性能。
With the application of single crystal silicon in solar photovoltaic and the semiconductor industry more widely, carbon materials used as thermal field parts developed more quickly. But because the micro oxidizing atmosphere in CZ furnace makes carbon thermal field slow oxidation, generate carbon dioxide and carbon monoxide, these gas dissolved in silicon materials cause the silicon products carbon and oxygen settlement. In addition, in the process of pulling crystal, silicon material melt may produce silicon steam and molten silicon splash, cause carbon thermal field material surface silicification, seriously affecting the mechanical properties of carbon parts and service life. So, the antioxidant protection and corrosion protection of carbon thermal field material in monocrystalline silicon furnace is necessary, and coating technology is a necessary choice.
This paper first studied carbon thermal field materials in oxidation environment and silicification corrosion cases failure mechanism. This study found that carbon materials matrix type, which structure, impurity content, surface finish effect the oxidation performance significantly. Due to the carbon fiber skin core structure, outer carbon atoms are arranged neat, reaction activity is relatively low, and in the oxidation process, oxidation reaction begin from carbon matrix began, the antioxidant performance of high fiber content carbon material is good. In addition, oxidation performance of carbon material with carbon atoms arranged neat, graphite crystallite complete is good, the higher graphitization degree, the higher antioxidant performance. Carbon materials internal metal impurity effectively reduces the carbon and oxygen element reaction activation energy, the carbon materials play a catalytic role in oxidation. Surface polishing treatment will reduce carbon material specific surface area, reduce carbon atoms and oxygen atom collision probability and improve the carbon material of oxidation resistance. For carbon materials for molten silicon silicification corrosion found that silicon elements on carbon material corrosion is mainly through the carbon material surface open pore and defect to material internal diffusion. For C/C composite material, cellulose exist between a large number of continuous pore, silicon mainly through these pore and matrix longitudinal defects. In addition with silicification corrosion the extension of time, the C/C composite material mechanics performance gradually declined, and graphite material silicification corrosion surface generation after continuous SiC, the mechanical properties of graphite materials for not silicification materials, but surface silicification seriously affect its service life.
According to the carbon material oxidation erosion and silicification corrosion mechanism research, this paper designed a resin pyrolytic carbon coating and deposition pyrolytic carbon coating on carbon materials to protection oxidation and silicification. Based on two kinds of pyrolytic carbon coating phase structure and microstructure, because resin contracte in carbonized process, the surface of resin pyrolytic carbon coating has a lot of holes.Adding graphite powder as filler, restrain the the hole caused by resin shrinkage. After900℃static oxidation test and1600℃silicification corrosion test, resin pyrolytic carbon coating on carbon materials have some antioxidant protection ability, but after four hours of static oxidation, weight loss rate is still as high as60%. Antioxidant effect of CVD pyrolytic carbon coating is good,4hours oxidation weightlessness rate at about10%. After1600℃silicification corrosion, vapor deposition pyrolytic carbon has excellent silicification protection ability, and resin pyrolytic carbon coating corrosion resistance is better than that of silicide though without coating samples.
Because of pyrolytic carbon coating inherent oxidation performance, makes the pyrolytic carbon coating as a protective coating of antioxidant effect is not good. In this paper, using embedding melt infiltration method and deposition method, we prepared the SiC coating. This study found that, along with the melt infiltration embedding for SiC coating time growth, SiC grain grew older, according to the XRD results, SiC coating is mainly beta SiC, and SiC grain grow up priority along the (311) crystal plane stacking direction. C/C composites matrix for embedding method for SiC coating effect is significant, SiC coating with carbon matrix coefficient of thermal expansion difference, causes micro crack generation in coating surface. Through the900℃,10h oxidation test found that SiC coating has good antioxidant protection ability, oxidation weightlessness rate at about4%.Through the SiC coating silicification corrosion test found that SiC coating surface microcrack exists, and be fused silicon to matrix internal diffusion channels. How to suppress the SiC surface micro crack generation, called SiC coating play antioxidant protection and resistance to silicification protection ability of the key.
In order to alleviate the stress concentration caused by SiC coating and carbon material coefficient of thermal expansion mismatch, restrain SiC coating surface microcrack production, this paper designed a pyrolytic carbon coating for transition layer to SiC coating for external coating of composite protective system. Through the PyC transition layer test analysis found that, with the graphite powder add, coating internal exist a lot of grain boundary and defects existed, and these defects improve the transition layer of plastic. After1600℃processing PyC transition layer internal residual stress to less than900℃processing PyC transition layer, mainly because of the high degree of graphitization PyC transition layer can consume more energy thermal stress. After preparation SiC external coating found that characterization of SiC residual stress of Raman frequency shift and the equilibrium position basic balance, explain the existence of PyC transition layer for SiC coating ease most thermal stress, makes the SiC surface is less micro crack, more effective play SiC coating of antioxidant protection and resistance to silicification protective effect. Through the PyC toughening coating mechanism study found that PyC transition layer is actually into a layer of weak interface, in the weak interface internal there are many defects and micro crack, these defects and micro crack can be the main crack is dispersed, absorb the main crack energy, alleviate the main crack perpendicular to the direction of expansion coating, to avoid the penetrability micro crack generation.
As furnace thermal field material in Czochralski silicon, the thermal radiation properties of carbon materials is very important. With the development of Czochralski silicon, the design and simulation of the thermal field in the furnace is particularly important, wherein the heat radiation performance of the thermal field of materials is one of the important parameters. This paper sdudied carbon substrate material and coating composite heat radiation performance analysis and found that the spectral emissivity of the C/C composites AC100and isostatic graphite G330high relative to other carbon materials, the spectral emissivity with wavelength variation smaller, the emission rate is relatively stable. C/C composites AC100and isostatic graphite G330graphite microcrystalline structure relative to the regularity of similar other materials is not high, the probability of the existence of the defect structure disorders cause localized vibrational mode structure of the carbon material to form a strong spectral radiation belts. Surface irregularities of the spectral emissivity of carbon materials, AC100surface smoothness of the rough surface caused by strong electromagnetic wave absorption scattering, strong spectral emissivity; graphite material surface uneven degree of difference is not obvious from the emission caused by the surface state of the rate change is not obvious. Thermal radiation properties of the protective coating of pyrolytic carbon composite materials in the test band is better than the base C/C composites, the performance of the vapor deposition of pyrolytic carbon coated composite thermal radiation, normal the basic spectral emissivity0.85-0.9range, to the total emission rate of0.89. Relative to the base C/C composites, silicon carbide heat protection coating composite spectral emissivity significantly improved in the test band embedding method Pyc/SiC coating the spectral emissivity basic higher than the vapor deposition coating, embedding composite coating, which can effectively improve the thermal radiation properties of carbon materials.
引文
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