陈列波导器件封装系统中运动平台误差建模及仿真分析
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摘要
集成光子器件在全光通信网络的构建中具有广泛的应用前景,而目前制约其发展的关键在于器件封装技术。在集成光子器件封装工艺中,实现器件功能的耦合对准过程难度较大,需要通过多轴运动平台多维空间亚微米精度位置控制才能实现多光路的精确对准与耦合,因此研究阵列波导器件封装系统中多轴运动平台的综合空间误差建模并对其误差敏感性进行仿真分析具有极其重要的意义。
首先详细介绍了适应于多轴精密运动平台的多体系统误差建模分析方法的理论基础。并以四轴运动平台为例,对该平台结构部件进行了最优化组合成为7个相邻单元体,就平台的误差源及各单元的基本误差进行了分析,得到了影响平台综合空间误差的基本误差。
基于结合了齐次坐标变化理论与多序体特征描述方法的多体系统误差分析建模方法,对四轴运动平台建立了静止状态和运动状态两种情况下的综合空间误差模型。并在两种情况下利用仿真计算程序得到了四轴运动平台综合空间误差模型对单个基本误差的敏感性仿真分析。
基于ISO-230-2/1997定位精度评定标准,采用LDDM激光位移测量系统实验测量分析了各平动轴向定位精度的重要技术指标。对综合空间误差模型仿真过程中的各项误差参数设置具有指导意义,使综合空间误差模型仿真更具可靠性。
Integrated optical devices have a wide range of applications in the construction of all optical networks, but the integrated optical devices' development is seriously conditioned by the packaging technology at present. In the Integrated optical devices packaging's technics, the process of coupling alignment is the main difficult part, achieved by using the high-precision multi-axis motion platform and multi-dimensional sub-micron-precision positioning control. So the study of the multi-axis motion platform's integrated spatial error modeling and the analysis of errors' sensitivity simulation are extremely important and needed.
The theoretical basis for the multi-body system's error modeling and analysis method that is adapted to multi-axis precision motion platform is introduced in detail. As a Four-axis motion platform for example, the structure of the platform is optimized to combination of seven adjacent units. The fundamental errors impacting the platform's integrated space error had been gained from the analysis of the error sources on the platform
Based on the multi-body system errors' modeling and analysis theory, the integrated error modeling of the four-axis motion platform in both cases of the static and the movement are established, and in the same situation, the Sensitivity of the unit fundamental errors about Four-axis motion platform's error model has been simulated and analyzed.
The axial positioning accuracy has been measured and analyzed, based on the assessment of ISO-230-2/1997 positioning accuracy standards, using LDDM experimental measurement system. This will be meaningful for parameter setting of the series errors in the spatial error modeling process, and make the comprehensive spatial error model simulation achieve a better reliability.
首先详细介绍了适应于多轴精密运动平台的多体系统误差建模分析方法的理论基础。并以四轴运动平台为例,对该平台结构部件进行了最优化组合成为7个相邻单元体,就平台的误差源及各单元的基本误差进行了分析,得到了影响平台综合空间误差的基本误差。
基于结合了齐次坐标变化理论与多序体特征描述方法的多体系统误差分析建模方法,对四轴运动平台建立了静止状态和运动状态两种情况下的综合空间误差模型。并在两种情况下利用仿真计算程序得到了四轴运动平台综合空间误差模型对单个基本误差的敏感性仿真分析。
基于ISO-230-2/1997定位精度评定标准,采用LDDM激光位移测量系统实验测量分析了各平动轴向定位精度的重要技术指标。对综合空间误差模型仿真过程中的各项误差参数设置具有指导意义,使综合空间误差模型仿真更具可靠性。
Integrated optical devices have a wide range of applications in the construction of all optical networks, but the integrated optical devices' development is seriously conditioned by the packaging technology at present. In the Integrated optical devices packaging's technics, the process of coupling alignment is the main difficult part, achieved by using the high-precision multi-axis motion platform and multi-dimensional sub-micron-precision positioning control. So the study of the multi-axis motion platform's integrated spatial error modeling and the analysis of errors' sensitivity simulation are extremely important and needed.
The theoretical basis for the multi-body system's error modeling and analysis method that is adapted to multi-axis precision motion platform is introduced in detail. As a Four-axis motion platform for example, the structure of the platform is optimized to combination of seven adjacent units. The fundamental errors impacting the platform's integrated space error had been gained from the analysis of the error sources on the platform
Based on the multi-body system errors' modeling and analysis theory, the integrated error modeling of the four-axis motion platform in both cases of the static and the movement are established, and in the same situation, the Sensitivity of the unit fundamental errors about Four-axis motion platform's error model has been simulated and analyzed.
The axial positioning accuracy has been measured and analyzed, based on the assessment of ISO-230-2/1997 positioning accuracy standards, using LDDM experimental measurement system. This will be meaningful for parameter setting of the series errors in the spatial error modeling process, and make the comprehensive spatial error model simulation achieve a better reliability.
引文
[1]Z.J.Sun,J.N.Broughton,J.N.Broughton.Demultiplexer with 120 Channels and 0.29-nm Channel Spacing[J].Photonics Technology Letters,1998,(1):90-92
[2]张彤,崔一平.集成光学国际研究进展[J].电子器件,2004,27(1):196-200
[3]于荣金.集成光学与光子学[J].光电子·激光,1998,9(2):162-165
[4]Cui S,Ando M.Line integral representation'physical optics diffraction field from perfectly conducting plates[J].Micro-wave and Optical Technology Letters,2002,35(3):206-211
[5]Jahns J,Gruber M.The integration of planar integrated freaspace optics into optoelectzonics computing system[J].Conference Proceedings-Lasers and Electro-Optics Society Annual Meeting-LEOS,2002,(1):232-232
[6]Haidar R,Forget N,Rosencher E.Optical parametric oscillation in microcavities based on isotropic semiconductors[J].IEEE Journal of Quantum Electronics,2003,39(4):569-576.
[7]Leblond H,Sanchez F.Models for optical solitorw in the two-cycle regime,Physical Review A-Atomic Molecular and Optical Physics[J].2003,67(1):1-8
[8]Tianpei Li,Chandrasekhar S.High speed photonic integrated circuits and optoelectronic integrated circuits[J].Telecommunications science.1997,1(3)8-13
[9]王启明.光网络中关键性光子集成器件的研究进展[J].中国科学E 辑,2002,32(4):517-522
[10]王磊,裴丽.光纤通信的发展现状和未来[J].中国科技息,2006,(4):59-60
[11]李勇,钮海明.FTTH的最新进展与趋势[J].光通信研究,2004,(2):8-10,13
[12]B.J.Offrein,F.Horst.Wavelength Tunable Optical Add-After-Drop Filter with Flat Passband for WDM Networks[J].Photonics TechnologyLetters.1999,(2):239-241
[13]C.R.Doerr,C.H,Joyner,L.W.Stulz,et al.Wavelength-Division Multiplexing Cross Connect in Inp[J].Photonics Technology letters,1998,10(1):117-119
[14]潘建平,陈德棉,章仪.浅析光电子信息产业的特征与发展规律[J].集团经济研究,2005,(6):59-60
[15]黄伟志,刘皓宇.光集成的研究及应用[J].技术教育学报,1997,8(2):43-45
[16]光纤通信的发展历程以及未来应用[OL].http://www.net130.com/CMS/Pub/network/network_medium/2006_12_12_8475.htm,2008
[17]戴恩光,徐安士,吴德明.集成波导器件在光纤通信中的应用[J].电子产品世界,1999,(3):21-22
[18]虞瑛英.平面集成光波导器件概况及市场分析[J].激光与红外,2003,33(5): 390-391
[19]陈益新.光器件集成是光网络发展的必由之路[J].网络电信,2003,(1):38-40
[20]陈明.集成光学发展现状及对未来的影响-欧洲第十届集成光学会议简介[J].真空电子技术,2001,12(3):48
[21]张瑞君.用于光电子器件封装的耦合对准技术[J].光子技术,2003,2:79～80
[22]晁代宏,刘荣,吴跃民等.光波导封装机器人系统研究现状[J].仪器仪表学报,2004,25(4):575-578
[23]丁桂兰,陈才和,陈本智等.光纤-波导精密对准仪的设计与精度分析[J].1994,27(5):589-594
[24]Noda J,Milkami O,Minakata M,etal.Bell System Technical Journal[J].Appl.Opt.,1978,17(3):2092-2096
[25]虞丽生.光导纤维通信中的光耦合[M].北京:人民邮电出版社,1979:25-34
[26]Allen D M,Routledge J A.Anisotropic etching of silicon.2 model diffusion controlled reaction[J].IEE Proc,1983,3(2):49-55
[27]Schroeder C M.Accurate silicon spacer chips for an optical fiber cable connector[J],Bell System Technical Journal,1978,57(1):91-97
[28]焦向东,王栋民,胡治钢.自动光纤对准系统的研制[J].光学仪器,2003,25(3):27-31
[29]Minford W J,Korotky S K,Alferness R C.Low-loss Ti:LiNb03 waveguide bend at λ=1.3μm[J].IEEE Journal of Quantum Electronics,1982,18(10):1802-1813
[30]Murphy E J,Rice T C,etal.Permanent attachment of single-mode fiber arrays to waveguides[J].Journal of Light Wave Technology,1985,3(2):795-798
[31]K.C.Kao,G.A.Hockham.Dielectric-fiber Surface Waveguides for Optical Frequencies[J].Proceedings of IEEE,1966,113(7):1151-1158
[32]刘丽冰,王广彦,刘又午.复杂机械系统运动误差自动建模技术研究[J].中国机械工程,2000,10(6):642-646
[33]李圣怡,戴一帆,彭小强.超精密加工机床及其新技术发展[J].国防科技大学学报,2000,(2):95-100
[34]李圣怡等.精密与超精密机床精度建模技术[M].长沙:国防科技大学出版社,2007
[35]刘又午.多体动力学的休斯敦方法及其发展[J].中国机械工程,2000,(6):6010607
[36]S.C.Veldhuis and M.A.Elbestawi,A Strategy for the Compensation of Error in Five-Axis Machining,Annals of the CIRP,1995,(44):373-377
[37]V.S.B.Kiridena,P.M.Ferreira.Kinematic modeling of quasistatic errors of three-axis machining centers[J].International Journal of Machine Tools &Manufacture,1994,34(1):85-100.
[38]V.S.B.Kiridena,P.M.Ferreira.Parameter estimation and model verification of first order quasistatic error model for three-axis machining centers[J].International Journal of Machine Tools & Manufacture,1994,34(1):101-125
[39]朱建忠.精密超精密机床精度分析、建模与精度控制技术研究[D].长沙:国防科技大学,1997,10
[40]粟时平.多轴数控机床精度建模与误差补偿方法研究[D].长沙:国防科技大学,2002,10
[41]V.S.B.Kiridena,P.M.Ferreira.Computational approaches to compensating quasistatic errors of three-axis machining centers[J].International Journal of Machine Tools & Manufacture,1994,34(1):127-145.
[42]John C.Ziegert and Prashant Kalle,Error Compensation in Machine Tools:A Neural Network Approach,Journal of Intelligent Manufacturing,1994,5:143-151
[43]P.D.Lin,K.F.Ehmann.Direct volumetric error evaluation for multi-axis machines[J].International Journal of Machine Tools & Manufacture,1993,33(5):675-693
[44]杨建国.数控机床误差综合补偿技术及应用[D].上海交通大学,1998,1
[45]刘文彦,周学平,刘辉.现代测试技术[M].长沙:国防科技大学出版社.1995
[46]李书和.数控机床误差补偿技术的研究[D].天津大学,1996,8
[47]章青,刘又午,赵小松,张志飞.提高大型叶片数控加工精度技术[J].中国机械工程,2000,10(6):631-634
[48]J.S Chen,Yuan J,Ni J.Compensation of Non-Rigid Body Kinematics Effect of a machining Center[J].Transaction of NANRI,1992,20(2):325-329
[49]K.Kim,M.K.Kim.Volumetric accuracy analysis based generalized geometric error model in multi-axes machine tools[J].Mech.Mach.theory,1991,26(2):207-219
[50]D.N.Reshetov,V.T.Portman.Accuracy of machine tools[M].1988
[51]G.Zhang,R.Ouyang,B.Lu,R.Hocken,R.Veale,A.Donmez.A displacement Method for Machine Geometry Calibration[J].Annals of CIRP,1988,37(1):515-518
[52]M.Anjanappa,D.K.Anand,J.A.Kirk.Error correction methodologies and control strategies for mumerical control machines[J].Control Method for Manufacturing Process,1988,(7):41-49
[53]K.F.eman,B.T.Wu.A generalized geometric error Model for Multi-Axis Machines[J].Annals of CIRP,1987,(36):253-256
[54]G.Zhang,C.Wang,Xu.Hu,F.Jing.A Laser Interferometric System for Measuring Arbitrary Angles[J].Annals of CIRP,1987,(36),1:395-398
[55]P.M.Ferreira,C.R.Liu.A Contribution to the Analysis and Compensation of the Geometric Error of a Machining Center[J].Annals of CIRP,1986,(35),1:259-263
[56]赵小松,方沂,章青,刘又午.四轴联动加工中心误差补偿技术的研究[J].中国机械工程,2000,(6):637-639
[57]贺子康.机床传动精度测量和提高[M].北京:中国计量出版社.1987
[58]杨建国,潘志宏,薛秉源.数控机床几何和热误差综合的运动学建模[J].机械设计与制造,1998,(5):31-34
[59]费业泰.误差理论与数据处理(修订本)[M].北京:机械工业出版社.1987
[60]张琢.激光干涉测试技术及应用[M].北京:机械工业出版社.1998
[61]谭久彬.超精密测量技术与仪器工程研究中的几个热点问题[J].中国机械工程,2000,10(3):257-261
[62]许怡如.数控机床精度评估[J].航空精密制造技术.1997,33(2):20-24
[63]芦婷,程维明,孙麟治.精密定位工作台的定位精度标准分析对比[J].2007,(4):141-143
[2]张彤,崔一平.集成光学国际研究进展[J].电子器件,2004,27(1):196-200
[3]于荣金.集成光学与光子学[J].光电子·激光,1998,9(2):162-165
[4]Cui S,Ando M.Line integral representation'physical optics diffraction field from perfectly conducting plates[J].Micro-wave and Optical Technology Letters,2002,35(3):206-211
[5]Jahns J,Gruber M.The integration of planar integrated freaspace optics into optoelectzonics computing system[J].Conference Proceedings-Lasers and Electro-Optics Society Annual Meeting-LEOS,2002,(1):232-232
[6]Haidar R,Forget N,Rosencher E.Optical parametric oscillation in microcavities based on isotropic semiconductors[J].IEEE Journal of Quantum Electronics,2003,39(4):569-576.
[7]Leblond H,Sanchez F.Models for optical solitorw in the two-cycle regime,Physical Review A-Atomic Molecular and Optical Physics[J].2003,67(1):1-8
[8]Tianpei Li,Chandrasekhar S.High speed photonic integrated circuits and optoelectronic integrated circuits[J].Telecommunications science.1997,1(3)8-13
[9]王启明.光网络中关键性光子集成器件的研究进展[J].中国科学E 辑,2002,32(4):517-522
[10]王磊,裴丽.光纤通信的发展现状和未来[J].中国科技息,2006,(4):59-60
[11]李勇,钮海明.FTTH的最新进展与趋势[J].光通信研究,2004,(2):8-10,13
[12]B.J.Offrein,F.Horst.Wavelength Tunable Optical Add-After-Drop Filter with Flat Passband for WDM Networks[J].Photonics TechnologyLetters.1999,(2):239-241
[13]C.R.Doerr,C.H,Joyner,L.W.Stulz,et al.Wavelength-Division Multiplexing Cross Connect in Inp[J].Photonics Technology letters,1998,10(1):117-119
[14]潘建平,陈德棉,章仪.浅析光电子信息产业的特征与发展规律[J].集团经济研究,2005,(6):59-60
[15]黄伟志,刘皓宇.光集成的研究及应用[J].技术教育学报,1997,8(2):43-45
[16]光纤通信的发展历程以及未来应用[OL].http://www.net130.com/CMS/Pub/network/network_medium/2006_12_12_8475.htm,2008
[17]戴恩光,徐安士,吴德明.集成波导器件在光纤通信中的应用[J].电子产品世界,1999,(3):21-22
[18]虞瑛英.平面集成光波导器件概况及市场分析[J].激光与红外,2003,33(5): 390-391
[19]陈益新.光器件集成是光网络发展的必由之路[J].网络电信,2003,(1):38-40
[20]陈明.集成光学发展现状及对未来的影响-欧洲第十届集成光学会议简介[J].真空电子技术,2001,12(3):48
[21]张瑞君.用于光电子器件封装的耦合对准技术[J].光子技术,2003,2:79～80
[22]晁代宏,刘荣,吴跃民等.光波导封装机器人系统研究现状[J].仪器仪表学报,2004,25(4):575-578
[23]丁桂兰,陈才和,陈本智等.光纤-波导精密对准仪的设计与精度分析[J].1994,27(5):589-594
[24]Noda J,Milkami O,Minakata M,etal.Bell System Technical Journal[J].Appl.Opt.,1978,17(3):2092-2096
[25]虞丽生.光导纤维通信中的光耦合[M].北京:人民邮电出版社,1979:25-34
[26]Allen D M,Routledge J A.Anisotropic etching of silicon.2 model diffusion controlled reaction[J].IEE Proc,1983,3(2):49-55
[27]Schroeder C M.Accurate silicon spacer chips for an optical fiber cable connector[J],Bell System Technical Journal,1978,57(1):91-97
[28]焦向东,王栋民,胡治钢.自动光纤对准系统的研制[J].光学仪器,2003,25(3):27-31
[29]Minford W J,Korotky S K,Alferness R C.Low-loss Ti:LiNb03 waveguide bend at λ=1.3μm[J].IEEE Journal of Quantum Electronics,1982,18(10):1802-1813
[30]Murphy E J,Rice T C,etal.Permanent attachment of single-mode fiber arrays to waveguides[J].Journal of Light Wave Technology,1985,3(2):795-798
[31]K.C.Kao,G.A.Hockham.Dielectric-fiber Surface Waveguides for Optical Frequencies[J].Proceedings of IEEE,1966,113(7):1151-1158
[32]刘丽冰,王广彦,刘又午.复杂机械系统运动误差自动建模技术研究[J].中国机械工程,2000,10(6):642-646
[33]李圣怡,戴一帆,彭小强.超精密加工机床及其新技术发展[J].国防科技大学学报,2000,(2):95-100
[34]李圣怡等.精密与超精密机床精度建模技术[M].长沙:国防科技大学出版社,2007
[35]刘又午.多体动力学的休斯敦方法及其发展[J].中国机械工程,2000,(6):6010607
[36]S.C.Veldhuis and M.A.Elbestawi,A Strategy for the Compensation of Error in Five-Axis Machining,Annals of the CIRP,1995,(44):373-377
[37]V.S.B.Kiridena,P.M.Ferreira.Kinematic modeling of quasistatic errors of three-axis machining centers[J].International Journal of Machine Tools &Manufacture,1994,34(1):85-100.
[38]V.S.B.Kiridena,P.M.Ferreira.Parameter estimation and model verification of first order quasistatic error model for three-axis machining centers[J].International Journal of Machine Tools & Manufacture,1994,34(1):101-125
[39]朱建忠.精密超精密机床精度分析、建模与精度控制技术研究[D].长沙:国防科技大学,1997,10
[40]粟时平.多轴数控机床精度建模与误差补偿方法研究[D].长沙:国防科技大学,2002,10
[41]V.S.B.Kiridena,P.M.Ferreira.Computational approaches to compensating quasistatic errors of three-axis machining centers[J].International Journal of Machine Tools & Manufacture,1994,34(1):127-145.
[42]John C.Ziegert and Prashant Kalle,Error Compensation in Machine Tools:A Neural Network Approach,Journal of Intelligent Manufacturing,1994,5:143-151
[43]P.D.Lin,K.F.Ehmann.Direct volumetric error evaluation for multi-axis machines[J].International Journal of Machine Tools & Manufacture,1993,33(5):675-693
[44]杨建国.数控机床误差综合补偿技术及应用[D].上海交通大学,1998,1
[45]刘文彦,周学平,刘辉.现代测试技术[M].长沙:国防科技大学出版社.1995
[46]李书和.数控机床误差补偿技术的研究[D].天津大学,1996,8
[47]章青,刘又午,赵小松,张志飞.提高大型叶片数控加工精度技术[J].中国机械工程,2000,10(6):631-634
[48]J.S Chen,Yuan J,Ni J.Compensation of Non-Rigid Body Kinematics Effect of a machining Center[J].Transaction of NANRI,1992,20(2):325-329
[49]K.Kim,M.K.Kim.Volumetric accuracy analysis based generalized geometric error model in multi-axes machine tools[J].Mech.Mach.theory,1991,26(2):207-219
[50]D.N.Reshetov,V.T.Portman.Accuracy of machine tools[M].1988
[51]G.Zhang,R.Ouyang,B.Lu,R.Hocken,R.Veale,A.Donmez.A displacement Method for Machine Geometry Calibration[J].Annals of CIRP,1988,37(1):515-518
[52]M.Anjanappa,D.K.Anand,J.A.Kirk.Error correction methodologies and control strategies for mumerical control machines[J].Control Method for Manufacturing Process,1988,(7):41-49
[53]K.F.eman,B.T.Wu.A generalized geometric error Model for Multi-Axis Machines[J].Annals of CIRP,1987,(36):253-256
[54]G.Zhang,C.Wang,Xu.Hu,F.Jing.A Laser Interferometric System for Measuring Arbitrary Angles[J].Annals of CIRP,1987,(36),1:395-398
[55]P.M.Ferreira,C.R.Liu.A Contribution to the Analysis and Compensation of the Geometric Error of a Machining Center[J].Annals of CIRP,1986,(35),1:259-263
[56]赵小松,方沂,章青,刘又午.四轴联动加工中心误差补偿技术的研究[J].中国机械工程,2000,(6):637-639
[57]贺子康.机床传动精度测量和提高[M].北京:中国计量出版社.1987
[58]杨建国,潘志宏,薛秉源.数控机床几何和热误差综合的运动学建模[J].机械设计与制造,1998,(5):31-34
[59]费业泰.误差理论与数据处理(修订本)[M].北京:机械工业出版社.1987
[60]张琢.激光干涉测试技术及应用[M].北京:机械工业出版社.1998
[61]谭久彬.超精密测量技术与仪器工程研究中的几个热点问题[J].中国机械工程,2000,10(3):257-261
[62]许怡如.数控机床精度评估[J].航空精密制造技术.1997,33(2):20-24
[63]芦婷,程维明,孙麟治.精密定位工作台的定位精度标准分析对比[J].2007,(4):141-143