光纤微加工技术及器件应用研究
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摘要
随着光纤通信技术和光纤传感技术的快速发展,光纤器件在人类生活的多个领域得到了广泛的应用。光纤器件的微加工技术及其应用引起了学术界和产业界的极大兴趣。本文针对新型种类光纤的光栅刻写技术、光纤器件的化学腐蚀、功能化处理以及相关的光刻微加工技术及其应用进行了研究。
本文首先简单介绍了光纤微加工技术的研究背景和发展状况,接着介绍了光纤光栅的分类和理论基础以及刻写技术,并给出了本论文中所使用的光纤光栅制作系统。研究了微结构光纤光栅的刻写技术以及应用于光栅高阶模式选择性激发和获取的光刻微加工技术。利用193nm的准分子激光器制作出了高性能的微结构布拉格光栅,并对相应光栅的光谱特性进行了实验研究及模拟分析；然后利用光致聚合光刻在光纤端面制备了不同形貌、表面光滑的微尖,实现了次高阶模式耦合6.85dB的增强以及微流折射率传感,实验结果表明由于次高阶模式具有更强的倏逝场,其折射率灵敏度为基模折射率灵敏度的6.52倍。
接着介绍了光纤干涉仪的分类和研究状况,设计并制作了一种新型的细芯模式干涉仪。结合光纤腐蚀微加工技术对细芯模式干涉仪进行了不同程度的包层腐蚀；最终获得了折射率灵敏度高达24584nm/R.I.U的传感应用；然后研究了光纤表面DNA分子绑定的层层自组装技术,实现了包层腐蚀的细芯模式干涉仪DNA传感器；随后通过将细芯模式干涉仪封装在微流槽内成功实现了光纤传感器件在微流芯片上的应用。
然后根据光纤光栅的理论研究了光纤光栅的化学腐蚀及金属镀膜微加工技术,提出并实验验证了反射型的长周期光纤光栅传感器和低损耗微纳布拉格光纤光栅的制作方案。利用化学腐蚀微加工技术在长周期光纤光栅末端的纤芯内引入模式散射器,并结合金属镀膜微加工制作了光纤端面反射镜,获得了中心波长处深度大于15dB的反射型长周期光纤光栅传感器；同时利用对写有布拉格光栅的普通光纤进行施加提升控制的化学腐蚀制作了直径3.3um表面光滑的微纳光纤光栅,其反射信号光学损耗得到了6.29dB的优化。
最后介绍了光纤端面器件及其微加工技术的研究背景,针对光纤端面器件结构紧凑、使用灵活、可满足特殊场合的传感应用等优点和目前制作成本非常高的现状,提出并实验验证了利用激光干涉光刻技术实现多根光纤端面低成本、批量化制作微纳结构的方案。
With the rapid development of optical fiber communication and fiber-optic sensor technologies, the optical fiber-based devices have been widely employed in many aspects of the human life. Recently the micro-fabrication technologies for the optical fiber devices have attracted great research interests both academically and industrially. This thesis mainly focuses on the study of fiber grating inscription technology for new types of optical fibers, chemical etching, functional micro-processing and optical lithography technologies for novel optical fiber devices, and their optical fiber sensing applications.
Firstly, a brief overview of the research background of optical fiber micro-machining technologies is presented. Then the classification and theory of the optical fiber gratings and their fabrication technologies are introduced, and the fabrication system used in this thesis is presented. The fiber gratings inscription technology for the microstructure fiber and the lithography technology for fiber-end microtip have been experimentally demonstrated. Microstructure fiber Bragg gratings were fabricated by using the193nm Excimer laser and its spectral characteristics have been tested and compared with simulation analysis. Different fiber-end microtips with smooth surface have been fabricated on the optical fiber-end facet by the light-induced polymerization lithography. A6.85dB improvement in the excitation and coupling efficiency of the second-order optical mode has been experimentally achieved and used for microfluidic refractive index sensing applications. Experimental results revealed that the sensitivity of the second-order optical mode was around6.25times higher than that of the fundamental optical mode due to its relatively stronger evanescent wave.
After that, the status and classification of the fiber-optic interferometers are introduced and a novel thin-core fiber modal interferometer was experimentally demonstrated. The sensitivity optimization was realized by the chemical etching technology and the refractive index sensitivity up to24584nm/R.I.U was illustrated in the optofluidic sensing experiments. Self-assembly of the probe DNA molecules was investigated and a label free DNA biosensor based on the cladding etched thin-core fiber modal interferometer was achieved. Subsequently the packing process was successfully employed to implement a microfluidic chip.
Then, based on the theory of optical fiber gratings, the reflective long period grating sensor and low-loss microfiber Bragg grating sensors are proposed and experimental demonstrated by using chemical etching and metal coating technologies. A core mode scatter was formed in the optical fiber core region using the chemical etching method, and a fiber end-face mirror was fabricated through metal film coating technology. The reflective long period grating sensor with SNR of15dB at the central wavelength was demonstrated in the sensing applications. Meanwhile, a mechanically drawing aided HF etching method to fabricate a low-loss high-sensitivity microfiber Bragg grating sensor was presented. Through a precisely mechanically drawing of the optical fiber during HF etching process, a very smooth microfiber Bragg grating with a diameter of3.3um was obtained and a6.29dB improvement in reflection intensity was achieved.
Finally, the fiber-end facet devices and some related fabrication technologies are described. The fiber-end facet devices have the advantages including compactness and flexible configuration. However, the current fabrication process has the drawback of high cost and low production. A scheme for the mass production of fiber-end facet with photonic crystal membrane based on the laser interference lithography was proposed and experimental demonstrated.
本文首先简单介绍了光纤微加工技术的研究背景和发展状况,接着介绍了光纤光栅的分类和理论基础以及刻写技术,并给出了本论文中所使用的光纤光栅制作系统。研究了微结构光纤光栅的刻写技术以及应用于光栅高阶模式选择性激发和获取的光刻微加工技术。利用193nm的准分子激光器制作出了高性能的微结构布拉格光栅,并对相应光栅的光谱特性进行了实验研究及模拟分析；然后利用光致聚合光刻在光纤端面制备了不同形貌、表面光滑的微尖,实现了次高阶模式耦合6.85dB的增强以及微流折射率传感,实验结果表明由于次高阶模式具有更强的倏逝场,其折射率灵敏度为基模折射率灵敏度的6.52倍。
接着介绍了光纤干涉仪的分类和研究状况,设计并制作了一种新型的细芯模式干涉仪。结合光纤腐蚀微加工技术对细芯模式干涉仪进行了不同程度的包层腐蚀；最终获得了折射率灵敏度高达24584nm/R.I.U的传感应用；然后研究了光纤表面DNA分子绑定的层层自组装技术,实现了包层腐蚀的细芯模式干涉仪DNA传感器；随后通过将细芯模式干涉仪封装在微流槽内成功实现了光纤传感器件在微流芯片上的应用。
然后根据光纤光栅的理论研究了光纤光栅的化学腐蚀及金属镀膜微加工技术,提出并实验验证了反射型的长周期光纤光栅传感器和低损耗微纳布拉格光纤光栅的制作方案。利用化学腐蚀微加工技术在长周期光纤光栅末端的纤芯内引入模式散射器,并结合金属镀膜微加工制作了光纤端面反射镜,获得了中心波长处深度大于15dB的反射型长周期光纤光栅传感器；同时利用对写有布拉格光栅的普通光纤进行施加提升控制的化学腐蚀制作了直径3.3um表面光滑的微纳光纤光栅,其反射信号光学损耗得到了6.29dB的优化。
最后介绍了光纤端面器件及其微加工技术的研究背景,针对光纤端面器件结构紧凑、使用灵活、可满足特殊场合的传感应用等优点和目前制作成本非常高的现状,提出并实验验证了利用激光干涉光刻技术实现多根光纤端面低成本、批量化制作微纳结构的方案。
With the rapid development of optical fiber communication and fiber-optic sensor technologies, the optical fiber-based devices have been widely employed in many aspects of the human life. Recently the micro-fabrication technologies for the optical fiber devices have attracted great research interests both academically and industrially. This thesis mainly focuses on the study of fiber grating inscription technology for new types of optical fibers, chemical etching, functional micro-processing and optical lithography technologies for novel optical fiber devices, and their optical fiber sensing applications.
Firstly, a brief overview of the research background of optical fiber micro-machining technologies is presented. Then the classification and theory of the optical fiber gratings and their fabrication technologies are introduced, and the fabrication system used in this thesis is presented. The fiber gratings inscription technology for the microstructure fiber and the lithography technology for fiber-end microtip have been experimentally demonstrated. Microstructure fiber Bragg gratings were fabricated by using the193nm Excimer laser and its spectral characteristics have been tested and compared with simulation analysis. Different fiber-end microtips with smooth surface have been fabricated on the optical fiber-end facet by the light-induced polymerization lithography. A6.85dB improvement in the excitation and coupling efficiency of the second-order optical mode has been experimentally achieved and used for microfluidic refractive index sensing applications. Experimental results revealed that the sensitivity of the second-order optical mode was around6.25times higher than that of the fundamental optical mode due to its relatively stronger evanescent wave.
After that, the status and classification of the fiber-optic interferometers are introduced and a novel thin-core fiber modal interferometer was experimentally demonstrated. The sensitivity optimization was realized by the chemical etching technology and the refractive index sensitivity up to24584nm/R.I.U was illustrated in the optofluidic sensing experiments. Self-assembly of the probe DNA molecules was investigated and a label free DNA biosensor based on the cladding etched thin-core fiber modal interferometer was achieved. Subsequently the packing process was successfully employed to implement a microfluidic chip.
Then, based on the theory of optical fiber gratings, the reflective long period grating sensor and low-loss microfiber Bragg grating sensors are proposed and experimental demonstrated by using chemical etching and metal coating technologies. A core mode scatter was formed in the optical fiber core region using the chemical etching method, and a fiber end-face mirror was fabricated through metal film coating technology. The reflective long period grating sensor with SNR of15dB at the central wavelength was demonstrated in the sensing applications. Meanwhile, a mechanically drawing aided HF etching method to fabricate a low-loss high-sensitivity microfiber Bragg grating sensor was presented. Through a precisely mechanically drawing of the optical fiber during HF etching process, a very smooth microfiber Bragg grating with a diameter of3.3um was obtained and a6.29dB improvement in reflection intensity was achieved.
Finally, the fiber-end facet devices and some related fabrication technologies are described. The fiber-end facet devices have the advantages including compactness and flexible configuration. However, the current fabrication process has the drawback of high cost and low production. A scheme for the mass production of fiber-end facet with photonic crystal membrane based on the laser interference lithography was proposed and experimental demonstrated.
引文
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