10.6μm TEA CO_2激光光学薄膜损伤阈值研究
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摘要
在高能脉冲TEA CO2激光系统中,光学薄膜的性能是限制激光功率提高和光束质量改善的关键技术问题。本文对高功率激光系统中薄膜的损伤机理进行了探讨,并重点研究了如何提高薄膜的损伤阈值。
分析了目前人们提出的多种损伤机理模型,介绍了不同的激光输出特性下薄膜损伤的规律。讨论了目前薄膜损伤阈值的几种测量方法以及各种测量方法的测量机理和测量方式,并分析了各种方法的特点。
对TEA CO2激光器抗损伤薄膜进行了设计和制备。介绍了多种可以提高薄膜损伤阈值的处理方法。结合实验室条件,对大光斑激光预处理的可行性进行了论证,并就大光斑激光预处理对薄膜阈值的影响进行了研究,得出了10.6μm光学薄膜在不同预处理条件下阈值变化的规律,成功的提高了10.6μm光学薄膜的损伤阈值。
对光学薄膜损伤阈值与光学薄膜基底厚度的关系进行了相关实验研究,揭示了元件基底厚度与薄膜阈值的关系:在较薄基底上镀制薄膜的阈值比较厚基底上的要高。分析了氧化物薄膜和非氧化物薄膜经离子后处理前后的性质变化,进一步揭示了离子后处理对于薄膜阈值提升的机理。
本文分析了高能激光与光学薄膜相互作用机理,讨论了薄膜损伤阈值测量的各种实验方法,探讨了提高光学薄膜损伤阈值的各种方法,对于改进光学薄膜损伤阈值的测量,提高光学薄膜的激光损伤阈值具有重大意义。
In high power TEA CO2 laser systems, optical coating’s performance is a key technical problem which restricts the increase of the laser power and the laser beam quality. Fundamentals of laser-induced damage in high power TEA CO2 laser systems were discussed in this thesis, and laid a strong emphasis on how to improve laser-induced damage threshold of optical coating.
Several damage mechanisms of laser-induced damage of coating were discussed. The damage mechanism varying with radiation manner and laser parameters was also analyzed. Introduced several methods of testing damage threshold of coating, both mechanism and method in several threshold test were discussed; the characteristic of different methods was analyzed.
Anti-injury coatings in high power TEA CO2 laser systems were designed and manufactured. Several methods of dealing optical coating to improve damage threshold were discussed. Consult idiographic condition, the feasibility of using large area laser spot was proved, the variety of damage threshold under the influence of large area laser spot was also theoretical and experimental studied in detail. The mechanism of damage threshold variety of 10.6μm optical coating under different laser conditioning condition was gained, and the damage threshold of 10.6μm optical coating was successfully improved.
The relationship between laser-induced damage thresholds of optical coating and thickness of substrate of optical coating was investigated experimentally. The results show that higher damage threshold could be gained when coatings were on thicker substrate.
The variety in characteristic of both oxide and oxide-free optical coatings after ion post-treatment was analyzed; the mechanism of improving laser-induced damage threshold by ion post-treatment was clarified further.
分析了目前人们提出的多种损伤机理模型,介绍了不同的激光输出特性下薄膜损伤的规律。讨论了目前薄膜损伤阈值的几种测量方法以及各种测量方法的测量机理和测量方式,并分析了各种方法的特点。
对TEA CO2激光器抗损伤薄膜进行了设计和制备。介绍了多种可以提高薄膜损伤阈值的处理方法。结合实验室条件,对大光斑激光预处理的可行性进行了论证,并就大光斑激光预处理对薄膜阈值的影响进行了研究,得出了10.6μm光学薄膜在不同预处理条件下阈值变化的规律,成功的提高了10.6μm光学薄膜的损伤阈值。
对光学薄膜损伤阈值与光学薄膜基底厚度的关系进行了相关实验研究,揭示了元件基底厚度与薄膜阈值的关系:在较薄基底上镀制薄膜的阈值比较厚基底上的要高。分析了氧化物薄膜和非氧化物薄膜经离子后处理前后的性质变化,进一步揭示了离子后处理对于薄膜阈值提升的机理。
本文分析了高能激光与光学薄膜相互作用机理,讨论了薄膜损伤阈值测量的各种实验方法,探讨了提高光学薄膜损伤阈值的各种方法,对于改进光学薄膜损伤阈值的测量,提高光学薄膜的激光损伤阈值具有重大意义。
In high power TEA CO2 laser systems, optical coating’s performance is a key technical problem which restricts the increase of the laser power and the laser beam quality. Fundamentals of laser-induced damage in high power TEA CO2 laser systems were discussed in this thesis, and laid a strong emphasis on how to improve laser-induced damage threshold of optical coating.
Several damage mechanisms of laser-induced damage of coating were discussed. The damage mechanism varying with radiation manner and laser parameters was also analyzed. Introduced several methods of testing damage threshold of coating, both mechanism and method in several threshold test were discussed; the characteristic of different methods was analyzed.
Anti-injury coatings in high power TEA CO2 laser systems were designed and manufactured. Several methods of dealing optical coating to improve damage threshold were discussed. Consult idiographic condition, the feasibility of using large area laser spot was proved, the variety of damage threshold under the influence of large area laser spot was also theoretical and experimental studied in detail. The mechanism of damage threshold variety of 10.6μm optical coating under different laser conditioning condition was gained, and the damage threshold of 10.6μm optical coating was successfully improved.
The relationship between laser-induced damage thresholds of optical coating and thickness of substrate of optical coating was investigated experimentally. The results show that higher damage threshold could be gained when coatings were on thicker substrate.
The variety in characteristic of both oxide and oxide-free optical coatings after ion post-treatment was analyzed; the mechanism of improving laser-induced damage threshold by ion post-treatment was clarified further.
引文
[1] H.A. Macleod. Thin-Film Optical Filters. 3rd Edition. Institute of Physics Publishing, Bristol and Philadelphia.1999: 368-377
[2]李景镇.光学手册.陕西科学技术出版社, 1986年5月,第1版: 609-618
[3] M R Kozlowski, I M Thomas, J H Campbell ,et al .High-power optical coatings for a megajoule-class ICF laser. Thin Film for Optical Systems, SPIE Proc.,1993, 1782: 105-121
[4] N Bloembergen. Laser induced electric breakdown in solids. IEEE J Quantum Electron, 1974, QE-10: 375-386
[5] A S Epifanov, A A Manenkov and A M Proknorov. Theory or avalancne ionization induced in transparent dielectrics by an electromagnetic field. Sov. Phys.-JETP, 1976, 43(2): 377-382
[6] R W Hopper, D R Uhlmann. Mechanism of inclusion damage in laser glass. Applied Physics, 1970, 41(10): 4023-4037
[7] C J Stolz, R J Tech, M R Kozlowski, et al. A comparison of nodular defect seed geometries from different deposition techniques. Laser Induced Damage in Optical Materials. SPIE Proc, 1995, 2714: 374-382
[8] J Dijon, B Rafin, C Pelle, et al. One hundred joule per square centimeter 1.06um mirrors. SPIE Proc., 1999, 3902: 158
[9] J A Harrington, B L Bobbs and M Braunstein. Optical absorption in UV laser window materials. SPIE Proc., 1977, 509: 127-131
[10]贺洪波.高功率激光薄膜的损伤研究.博士后出站工作报告.中科院上海光机所, 2004
[11] B C Stuart, M D Feit, S Herman, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics. Physics Review B, 1996, 53(4): 1749-1761
[12] C R Wolfe, M R Kozlowski, J H Campbell, et al. Laser Conditioning of Optical Thin Films. Laser Induced Damage in Optical Materials, NIST (USA), 1989, Spec. Pub. 801: 360-375
[13] C W Carr, H B Radousky and S G Demos. Wavelength Dependence of Laser-InducedDamage: Determining the Damage Initiation Mechanisms. Physics Review Letters. 2003.91(12): 1-4
[14] Laser-Induced Damage threshold and certification procedures for Optical materials, NASA Reference Publication 1997, 7: 1395
[15] R M Oconnell. Onset threshold analysis of defect-driven surface and bulk laser damage, Applied Optics, 1992, 31(21): 4143-4153
[16]施正荣,范正修,邓和.光学薄膜的损伤及其累积效应.中国激光, 1988, 15(1): 22-25
[17]范正修,吴周令,汤雪飞.重复率激光对光学薄膜的损伤.中国激光, 1994, A21(9): 734-738
[18] K H Guenther, R G Menningen. 1.06μm Laser Damage to Thin Film Optical Coatings: a Round-Robin Experiment Involving Various Pulse Lengths and Beam Diameters, Applied Optics, 1984, 23 (21): 3743-3752
[19] ISO/CD 11254, Lasers and laser-related equipment - Determination of laser induced damage threshold of optical surfaces.
[20] P K Kuo, S Y Zhang. A new diffraction theory for the mirage effect and thermal lensing, Progress in Natural Science, 1996, 6: 191-205
[21] A F Stewart, A H Guenther. Laser damage test results on Balzers round-robin thin film samples. Applied Optics, 1984, 23(21): 3774-3778
[22] H Y Hu, Z X Fan, F Luo. Laser induced damage of 1064nm ZnS/MgF2 narrow-band interference filter. Applied Optics, 2001, 40(12): 1950-1956
[23]范正修,贺洪波,胡海洋等.激光对薄膜的损伤形貌分析. 1999-2000年激光的热和力学效应学术会议论文集,广西北海, 2000: 142-149
[24] T W Walker, A H Guenther, P E Nelsen. Pulsed laser-induced damage to thin-film optical coatings– part I: experimental. IEEE Journal of Quantum Electronics, 1981, QE-17(10): 2041-2052
[25] N Mansour, G Reali, P Aiello, et al. Laser generated ripple patterns on dielectrics and intermediate band gap semiconductors. SPIE, 1986, 727: 137-146
[26] Y A Zhao, W D Gao, J D Shao, et al. Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation. Applied SurfaceScience, 2004, 227(1-4): 275-281
[27] H Kuster, J Ebert. Activated reactive evaporation of Ti02 layers and their absorption indices. Thin Solid Films, 1980, 70 (1): 43-47
[28]张大伟,张东平,邵建达等.离子束清洗在激光薄膜中的应用.光学技术, 2005, 31(2): 238-240
[29] Q Zhao, Z X Fan, Z J Wang. Role of interface absorption in laser induced local heating of optical coatings, Optical Engineering, 1997, 36 (5): 1530-1536
[30] Yang Chunhua. Research and preparation of optical coatings used in pulse CO2 laser: [硕士论文].武汉:华中科技大学图书馆, 2007
[31] M Q Zhan, T Y Tan, H B He, et al. Temperature dependence of laser-induced damage threshold of 355nm Al2O3/MgF2 HR coatings, TFPA 2004, Shanghai, SPIE: 145-149
[32] Yoshikawa A, Wang Xinqiang. Surface and interface engineering in MBE-growth of ZnO epilayers on c-plane sapphire: polarity control and quality improvement of ZnO epilayers. International Symposium on ZnO and Relative Materials and Devices. 2004, 1-6: 57-60
[33] Yan Xiaolong, Liu Dali, Shi Zengliang, et al. Effects of surface pretreatment on ZnO thin films quality. Chinese Journal of Luminescence, 2005, 26(6): 777-780
[34]黄树来,姜永超,盖凌云等.退火处理对掺锑Zn-Sn-O薄膜的特性的影响.功能材料, 2006, 2(37): 219-221
[35] Q Zhao, Z X Fan. Improving laser damage resistance of Al mirror and Si window by dielectric protective, layer, Chinese. Journal of Lasers, 1996, A23 (1): 85-90
[36] Z X Fan, H Y Hu, R Y Fan. Preparation of Laser coatings used in high power laser system .High power laser and particle beams, 1999, 27 (2): 117-122
[37] Y A Zhao, J D Shao, T Wang, et al. Laser conditioning of dielectric oxide mirror coatings at 1064nm. TFPA2004, Shanghai, SPIE: 167-172
[38] L M Sheehan, M R Kozlowski, F Rainer, et al. Large area conditioning of optics for high-power laser systems, SPIE Proc., 1993, 2114: 559-568
[39] Spalvins T, Brainard W A. Nodular growth in thick-sputtered metallic coatings. J Vac Sci Technol, 1974, 11: 1186-1192
[40] Qu Jingxin, Wang Honghong. Handbook of surface engineering. Beijing: ChemicalIndustry Press, 1998: 250
[41] Baglin J E E, Clark GJ. Ion beam bonding of thin films. Nuclear Instruments and Methods in Physics Research, Section B-Beam Inter-actions with Materials and Atoms, 1985, B7/ 8: 881-885
[42] Picard R, Milam D, Bradbury R. Applied Optics, 1977, (16): 1563-1571
[43] Dijon J, Poiroux T, Desrumaux C. Laser-induced damage in optical in materials. SPIE, 1996, 2966: 3156-3166
[44]尚光强,王聪娟,袁磊等.两种后处理方法对HfO2薄膜性能的影响.光子学报. 2007, 36(9): 1683-1686
[45] Liu Jin-sheng. Ion beam deposition film technology and application. National Defence Industry Press, 2003: 239-243
[46] Arenberg J W, Mordaunt D W. Experimental investigation on the role of wavelength in the laser conditioning effect. Laser Induced Damage in Optical Materials. 1988, NBS Spec. Pub., 1989, 775: 516-519
[47] Stewart A, Guenther A H et al. The properties of laser annealed dielectric films. Laser Induced Damage in Optical Materials: 1987, NBS. Spec. Pub., 1988, 756: 369-187
[48] Wolfe C R, Kozlowski M R, Campbell J H et al. Laser conditioning of optical thin films. Laser induced damage in optical materials, NIST(USA), 1989, 801: 360-375
[49]魏朝阳,赵元安,贺洪波等.光学薄膜元件的激光预处理技术.激光与光电子学进展,第四十二卷,第五期, 2005.5: 178-183
[50]崔云,赵元安,晋云霞等.激光预处理对增透膜阈值的影响.真空科学与技术学报,第二十六卷,第四期, 2006.7-8: 321-325
[51]谭荣清.高功率高重复率TEA CO2激光器研究: [博士论文].中国科学院电子研究所, 2001
[52] A. J. Beaulieu. High Peak Power Gas Lasers. Proc. of the IEEE, 1971, 59(4): 667-674
[2]李景镇.光学手册.陕西科学技术出版社, 1986年5月,第1版: 609-618
[3] M R Kozlowski, I M Thomas, J H Campbell ,et al .High-power optical coatings for a megajoule-class ICF laser. Thin Film for Optical Systems, SPIE Proc.,1993, 1782: 105-121
[4] N Bloembergen. Laser induced electric breakdown in solids. IEEE J Quantum Electron, 1974, QE-10: 375-386
[5] A S Epifanov, A A Manenkov and A M Proknorov. Theory or avalancne ionization induced in transparent dielectrics by an electromagnetic field. Sov. Phys.-JETP, 1976, 43(2): 377-382
[6] R W Hopper, D R Uhlmann. Mechanism of inclusion damage in laser glass. Applied Physics, 1970, 41(10): 4023-4037
[7] C J Stolz, R J Tech, M R Kozlowski, et al. A comparison of nodular defect seed geometries from different deposition techniques. Laser Induced Damage in Optical Materials. SPIE Proc, 1995, 2714: 374-382
[8] J Dijon, B Rafin, C Pelle, et al. One hundred joule per square centimeter 1.06um mirrors. SPIE Proc., 1999, 3902: 158
[9] J A Harrington, B L Bobbs and M Braunstein. Optical absorption in UV laser window materials. SPIE Proc., 1977, 509: 127-131
[10]贺洪波.高功率激光薄膜的损伤研究.博士后出站工作报告.中科院上海光机所, 2004
[11] B C Stuart, M D Feit, S Herman, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics. Physics Review B, 1996, 53(4): 1749-1761
[12] C R Wolfe, M R Kozlowski, J H Campbell, et al. Laser Conditioning of Optical Thin Films. Laser Induced Damage in Optical Materials, NIST (USA), 1989, Spec. Pub. 801: 360-375
[13] C W Carr, H B Radousky and S G Demos. Wavelength Dependence of Laser-InducedDamage: Determining the Damage Initiation Mechanisms. Physics Review Letters. 2003.91(12): 1-4
[14] Laser-Induced Damage threshold and certification procedures for Optical materials, NASA Reference Publication 1997, 7: 1395
[15] R M Oconnell. Onset threshold analysis of defect-driven surface and bulk laser damage, Applied Optics, 1992, 31(21): 4143-4153
[16]施正荣,范正修,邓和.光学薄膜的损伤及其累积效应.中国激光, 1988, 15(1): 22-25
[17]范正修,吴周令,汤雪飞.重复率激光对光学薄膜的损伤.中国激光, 1994, A21(9): 734-738
[18] K H Guenther, R G Menningen. 1.06μm Laser Damage to Thin Film Optical Coatings: a Round-Robin Experiment Involving Various Pulse Lengths and Beam Diameters, Applied Optics, 1984, 23 (21): 3743-3752
[19] ISO/CD 11254, Lasers and laser-related equipment - Determination of laser induced damage threshold of optical surfaces.
[20] P K Kuo, S Y Zhang. A new diffraction theory for the mirage effect and thermal lensing, Progress in Natural Science, 1996, 6: 191-205
[21] A F Stewart, A H Guenther. Laser damage test results on Balzers round-robin thin film samples. Applied Optics, 1984, 23(21): 3774-3778
[22] H Y Hu, Z X Fan, F Luo. Laser induced damage of 1064nm ZnS/MgF2 narrow-band interference filter. Applied Optics, 2001, 40(12): 1950-1956
[23]范正修,贺洪波,胡海洋等.激光对薄膜的损伤形貌分析. 1999-2000年激光的热和力学效应学术会议论文集,广西北海, 2000: 142-149
[24] T W Walker, A H Guenther, P E Nelsen. Pulsed laser-induced damage to thin-film optical coatings– part I: experimental. IEEE Journal of Quantum Electronics, 1981, QE-17(10): 2041-2052
[25] N Mansour, G Reali, P Aiello, et al. Laser generated ripple patterns on dielectrics and intermediate band gap semiconductors. SPIE, 1986, 727: 137-146
[26] Y A Zhao, W D Gao, J D Shao, et al. Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation. Applied SurfaceScience, 2004, 227(1-4): 275-281
[27] H Kuster, J Ebert. Activated reactive evaporation of Ti02 layers and their absorption indices. Thin Solid Films, 1980, 70 (1): 43-47
[28]张大伟,张东平,邵建达等.离子束清洗在激光薄膜中的应用.光学技术, 2005, 31(2): 238-240
[29] Q Zhao, Z X Fan, Z J Wang. Role of interface absorption in laser induced local heating of optical coatings, Optical Engineering, 1997, 36 (5): 1530-1536
[30] Yang Chunhua. Research and preparation of optical coatings used in pulse CO2 laser: [硕士论文].武汉:华中科技大学图书馆, 2007
[31] M Q Zhan, T Y Tan, H B He, et al. Temperature dependence of laser-induced damage threshold of 355nm Al2O3/MgF2 HR coatings, TFPA 2004, Shanghai, SPIE: 145-149
[32] Yoshikawa A, Wang Xinqiang. Surface and interface engineering in MBE-growth of ZnO epilayers on c-plane sapphire: polarity control and quality improvement of ZnO epilayers. International Symposium on ZnO and Relative Materials and Devices. 2004, 1-6: 57-60
[33] Yan Xiaolong, Liu Dali, Shi Zengliang, et al. Effects of surface pretreatment on ZnO thin films quality. Chinese Journal of Luminescence, 2005, 26(6): 777-780
[34]黄树来,姜永超,盖凌云等.退火处理对掺锑Zn-Sn-O薄膜的特性的影响.功能材料, 2006, 2(37): 219-221
[35] Q Zhao, Z X Fan. Improving laser damage resistance of Al mirror and Si window by dielectric protective, layer, Chinese. Journal of Lasers, 1996, A23 (1): 85-90
[36] Z X Fan, H Y Hu, R Y Fan. Preparation of Laser coatings used in high power laser system .High power laser and particle beams, 1999, 27 (2): 117-122
[37] Y A Zhao, J D Shao, T Wang, et al. Laser conditioning of dielectric oxide mirror coatings at 1064nm. TFPA2004, Shanghai, SPIE: 167-172
[38] L M Sheehan, M R Kozlowski, F Rainer, et al. Large area conditioning of optics for high-power laser systems, SPIE Proc., 1993, 2114: 559-568
[39] Spalvins T, Brainard W A. Nodular growth in thick-sputtered metallic coatings. J Vac Sci Technol, 1974, 11: 1186-1192
[40] Qu Jingxin, Wang Honghong. Handbook of surface engineering. Beijing: ChemicalIndustry Press, 1998: 250
[41] Baglin J E E, Clark GJ. Ion beam bonding of thin films. Nuclear Instruments and Methods in Physics Research, Section B-Beam Inter-actions with Materials and Atoms, 1985, B7/ 8: 881-885
[42] Picard R, Milam D, Bradbury R. Applied Optics, 1977, (16): 1563-1571
[43] Dijon J, Poiroux T, Desrumaux C. Laser-induced damage in optical in materials. SPIE, 1996, 2966: 3156-3166
[44]尚光强,王聪娟,袁磊等.两种后处理方法对HfO2薄膜性能的影响.光子学报. 2007, 36(9): 1683-1686
[45] Liu Jin-sheng. Ion beam deposition film technology and application. National Defence Industry Press, 2003: 239-243
[46] Arenberg J W, Mordaunt D W. Experimental investigation on the role of wavelength in the laser conditioning effect. Laser Induced Damage in Optical Materials. 1988, NBS Spec. Pub., 1989, 775: 516-519
[47] Stewart A, Guenther A H et al. The properties of laser annealed dielectric films. Laser Induced Damage in Optical Materials: 1987, NBS. Spec. Pub., 1988, 756: 369-187
[48] Wolfe C R, Kozlowski M R, Campbell J H et al. Laser conditioning of optical thin films. Laser induced damage in optical materials, NIST(USA), 1989, 801: 360-375
[49]魏朝阳,赵元安,贺洪波等.光学薄膜元件的激光预处理技术.激光与光电子学进展,第四十二卷,第五期, 2005.5: 178-183
[50]崔云,赵元安,晋云霞等.激光预处理对增透膜阈值的影响.真空科学与技术学报,第二十六卷,第四期, 2006.7-8: 321-325
[51]谭荣清.高功率高重复率TEA CO2激光器研究: [博士论文].中国科学院电子研究所, 2001
[52] A. J. Beaulieu. High Peak Power Gas Lasers. Proc. of the IEEE, 1971, 59(4): 667-674