阵列孔微细电解加工基础技术研究
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摘要
由于杂散电场腐蚀和小间隙中电解液困难,微细电解加工的实现及其加工精度的提高需考虑多方面因素,采取综合性技术措施。
本文首先分析了影响微细电解加工的主要因素,揭示出以气泡为主的电解产物在微小加工间隙中蓄积,从而控制阳极表面电化学反应速度的机理。因此会导致当加工间隙减小到一定程度,平衡加工状态无法维持,使得微细电解的实际加工速度随加工间隙减小而降低。数值仿真了电极侧壁绝缘对加工精度的影响,结果表明侧壁绝缘膜能有效将电场约束在电极导电端面附近,从而减小孔径的扩张、抑制孔壁锥度的形成。对异型截面电极电解加工仿真表明:在电极拐角几何效应对电场分布的影响下,型孔拐角呈圆弧过渡,且整个孔形有随加工时间延长向圆形演化的趋势。
研制了微细电解加工装置,包括机械本体、运动伺服控制系统、高频脉冲电源和电解液循环系统等几部分。核心的伺服进给机构运动分辨率0.1μm、阶跃运动峰值时间10ms,重复定位精度约0.55μm,可实现工具电极高精度进给和快速回退。控制系统以PMAC多轴控制器为核心,采取“NC嵌入PC”的架构,并行实现人机交互、过程控制和位置伺服控制,保证了控制过程的实时性和可靠性。
研究了用于电解加工的微细电极制备方法。基于电场分析,提出一种在线电解制备直径一致性好的微细电极轴的方法。研究实现了LIGA工艺制备微细阵列电极用于微细阵列孔加工。针对高质量微细孔电解加工,提出采用旋涂环氧树脂制备电极侧壁绝缘膜的工艺,以有效抑制杂散电场腐蚀,为提高微细孔电解加工精度提供了一可行的技术途径。
采用单电极和阵列电极进行了微细电解加工基础实验和典型型孔加工实验。优化工艺参数,加工出11×11阵列、边长130~140μm、侧壁半锥角小于3°、截面形状特征明显、一致性较好的三角形、方形和圆形微细阵列孔。
The stray current corrosion and the difficulty of electrolyte renewal in the micro machining gap impair the performance of micro ECM. Influening factors should be considered and comprehensive techniques should be adopted to improve machining accuracy.
The main influencing factors on machining performance are discussed, especially the effect of electrolytic products. The accumulation of electrolytic products (mainly the hydrogen bubbles) in the machining gap is the key factor controlling the anodic dissolution rate. In the feeding procedure of electrode, as the gap decreased to a certain extent, the electrolytic products can not be removed immediately from the gap, leading to the decrease of anodic dissolution rate and the breakdown of balance state of machining, therefore, the practical machining rate of micro ECM usually decreases with the decrease of the gap. Thus, the servo control strategy of intermittent retraction of electrode during feeding procedure is employed to remove electrolytic products and promote the machining efficiency.
The effect of side-insulated electrode on machining accuracy is numerically simulated. The results indicate that the side insulation layer can effectively confine the electric field to the area near the conducting end face of the electrode, thus restraining the growth of diameter and taper angle of the hole. Results also indicate that the section shape of hole tend to be rounded even if the electrodes with triangle or square sections are applied in micro ECM because of the geometry effect of the corner on the distribution of electric field.
A micro ECM setup is developed, which includes mechanical body, servo control and gap status detection system, pulse power supply and electrolyte circulation system. The spindle, driven by a linear moving coil actuator, can provide accurate smoothly positioning and rapid servo response, the feed resolution of which is 0.1μm, the peak time is less than 10ms in step response, and the repetitive positioning accuracy is about 0.55μm. The control system, based on a programmable multi axes controller embedded in an industrial computer, can concurrently and real-timely implement human-computer interaction, process control and position servo control with high reliability.
A process to fabricate micro pin with uniform diameter is proposed. The mechanism that affecting the shape and the diameter of micro pin is discussed by analyzing the distribution of electric field. Micro array electrodes are fabricated by LIGA process. To confine electric field and restrain stray current corrosion, a side insulating process based on spin-coating is developed. Uniform and compact epoxy films are coated on the surface of electrode by centrifugal force. The spin-coating process provides a feasible technical approach to improve the machining accuracy of micro ECM.
A serial of experiments are carried out in which side insulating of electrode, micro machining gap servo control, high frequency vibration of electrode, low concentration passivating electrolyte and other techniques are synthetically adopted to improve the performance of micro ECM. By optimizing machining parameters, various micro array holes, with 130~140μm edge length or diameter and less than 3°taper angle, are simultaneously machined by using side-insulated array electrodes and have obvious and uniform shape feature.
本文首先分析了影响微细电解加工的主要因素,揭示出以气泡为主的电解产物在微小加工间隙中蓄积,从而控制阳极表面电化学反应速度的机理。因此会导致当加工间隙减小到一定程度,平衡加工状态无法维持,使得微细电解的实际加工速度随加工间隙减小而降低。数值仿真了电极侧壁绝缘对加工精度的影响,结果表明侧壁绝缘膜能有效将电场约束在电极导电端面附近,从而减小孔径的扩张、抑制孔壁锥度的形成。对异型截面电极电解加工仿真表明:在电极拐角几何效应对电场分布的影响下,型孔拐角呈圆弧过渡,且整个孔形有随加工时间延长向圆形演化的趋势。
研制了微细电解加工装置,包括机械本体、运动伺服控制系统、高频脉冲电源和电解液循环系统等几部分。核心的伺服进给机构运动分辨率0.1μm、阶跃运动峰值时间10ms,重复定位精度约0.55μm,可实现工具电极高精度进给和快速回退。控制系统以PMAC多轴控制器为核心,采取“NC嵌入PC”的架构,并行实现人机交互、过程控制和位置伺服控制,保证了控制过程的实时性和可靠性。
研究了用于电解加工的微细电极制备方法。基于电场分析,提出一种在线电解制备直径一致性好的微细电极轴的方法。研究实现了LIGA工艺制备微细阵列电极用于微细阵列孔加工。针对高质量微细孔电解加工,提出采用旋涂环氧树脂制备电极侧壁绝缘膜的工艺,以有效抑制杂散电场腐蚀,为提高微细孔电解加工精度提供了一可行的技术途径。
采用单电极和阵列电极进行了微细电解加工基础实验和典型型孔加工实验。优化工艺参数,加工出11×11阵列、边长130~140μm、侧壁半锥角小于3°、截面形状特征明显、一致性较好的三角形、方形和圆形微细阵列孔。
The stray current corrosion and the difficulty of electrolyte renewal in the micro machining gap impair the performance of micro ECM. Influening factors should be considered and comprehensive techniques should be adopted to improve machining accuracy.
The main influencing factors on machining performance are discussed, especially the effect of electrolytic products. The accumulation of electrolytic products (mainly the hydrogen bubbles) in the machining gap is the key factor controlling the anodic dissolution rate. In the feeding procedure of electrode, as the gap decreased to a certain extent, the electrolytic products can not be removed immediately from the gap, leading to the decrease of anodic dissolution rate and the breakdown of balance state of machining, therefore, the practical machining rate of micro ECM usually decreases with the decrease of the gap. Thus, the servo control strategy of intermittent retraction of electrode during feeding procedure is employed to remove electrolytic products and promote the machining efficiency.
The effect of side-insulated electrode on machining accuracy is numerically simulated. The results indicate that the side insulation layer can effectively confine the electric field to the area near the conducting end face of the electrode, thus restraining the growth of diameter and taper angle of the hole. Results also indicate that the section shape of hole tend to be rounded even if the electrodes with triangle or square sections are applied in micro ECM because of the geometry effect of the corner on the distribution of electric field.
A micro ECM setup is developed, which includes mechanical body, servo control and gap status detection system, pulse power supply and electrolyte circulation system. The spindle, driven by a linear moving coil actuator, can provide accurate smoothly positioning and rapid servo response, the feed resolution of which is 0.1μm, the peak time is less than 10ms in step response, and the repetitive positioning accuracy is about 0.55μm. The control system, based on a programmable multi axes controller embedded in an industrial computer, can concurrently and real-timely implement human-computer interaction, process control and position servo control with high reliability.
A process to fabricate micro pin with uniform diameter is proposed. The mechanism that affecting the shape and the diameter of micro pin is discussed by analyzing the distribution of electric field. Micro array electrodes are fabricated by LIGA process. To confine electric field and restrain stray current corrosion, a side insulating process based on spin-coating is developed. Uniform and compact epoxy films are coated on the surface of electrode by centrifugal force. The spin-coating process provides a feasible technical approach to improve the machining accuracy of micro ECM.
A serial of experiments are carried out in which side insulating of electrode, micro machining gap servo control, high frequency vibration of electrode, low concentration passivating electrolyte and other techniques are synthetically adopted to improve the performance of micro ECM. By optimizing machining parameters, various micro array holes, with 130~140μm edge length or diameter and less than 3°taper angle, are simultaneously machined by using side-insulated array electrodes and have obvious and uniform shape feature.
引文
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