微泵动态特性及优化评价规则的分析与研究
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摘要
微泵是微流动系统的核心部分，是MEMS的重要微型器件，有着巨大的市场前景和发展潜力，被广泛地应用于各个科学领域。但是目前对微泵在动态特性方面的研究存在片面性的问题，还缺乏一定优化评价规则，本文对微泵进行动态特性分析及优化评价规则研究可以为高质量微泵设计提供保障。
针对微泵的研究现状，采用有限元分析方法，对微泵的动态特性进行分析和研究，建立有限元分析流程和模型，并采用ANSYS软件对参数化动态特性分析程序进行开发；采用粗糙集（Rough Sets）理论对微泵动态特性分析的相关数据进行处理，建立优化决策信息系统，进行属性约简和优化规则提取，其中优化决策信息系统采用决策信息表来表达，属性约简采用基于遗传算法的下三角形矩阵的方法，优化决策规则采用合并归约的方法；在此基础上，利用所开发的微泵动态特性分析和优化规则提取软件对双金属热驱动微泵实例进行动态特性分析和优化规则提取。通过实例分析，验证了方法的可行性和相应的算法、程序可操作性。同时也为双金属热驱动微泵产品优化设计提供了比较全面客观的优化评价依据。
本文提出的微泵动态特性分析和优化规则提取的方法，在微泵研究领域是一次新的尝试和探索，首次以有限元和粗糙集理论相结合的方法对微泵优化规则进行提取，这一研究成果将弥补微泵产品设计缺乏优化评价规则的缺陷，为微泵产品优化设计奠定了基础；同时，所开发的软件为微泵动态特性分析和优化评价提供了原型工具，利用此软件工具可以对微泵类产品进行动态分析和优化评价，避免了设计的盲目性，提高了设计的效率。
The micro-pump is the core part of the micro-fluid system, and it is a key micro device in the MEMS. It could broadly be applied in every science fields, which has an enormous market and development potential. It is not in the round that the dynamic properties research of the micro-pump, which absence the rules of the optimization and evaluation. The design of the high quality micro-pump can be ensured by the study of the dynamic property of the micro-pump and the rule of the optimization and evaluation in this dissertation.
According to the status of the micro-pump research, the dynamical property of the micro-pump is analyzed by finite element method (FEM), and the FEM model and analysis flow of the micro-pump are founded, and the dynamic property analysis program using the parameter is developed by use of the ANSYS software in this dissertation. The correlative data of the dynamic property analysis is processed by the rough sets theory, and the information system of the optimization and decision-making is founded, and the reduced attribute and the optimization rule are performed, which the information system of the optimization and decision-making are expressed by the information table and the triangle matrix based on the genetic algorithm is used in the reduced attribute method and the combination and reduction are used in the rule of the optimization and decision-making. The dynamic property analysis and optimization rules of the thermal driven micro-pump are got by the extracting software of the dynamic property analysis and optimization rule of micro-pump, which is developed in the dissertation. It is indicated that the method is the feasibility and the correspond arithmetic and program is operable based on this instance. And it provides a general and impersonal evaluation rule for the optimization design of the thermal
driven micro-pump products.
It is a new method research that the dynamic analysis of the micro-pump and the acquirement of the optimization rule in the dissertation. Combine approach of FEM, rough set theory and GA is used to realize optimization rules of the micro-pump. The research result will make up the lacuna the limitation for optimization rules lack and establish base for micro-pump products optimization. At the same time, the software being developed will provide a prototype tool for the dynamic property analysis of the micro-pump and optimization evaluation. It will avoid the blindness and improve the efficiency.
针对微泵的研究现状，采用有限元分析方法，对微泵的动态特性进行分析和研究，建立有限元分析流程和模型，并采用ANSYS软件对参数化动态特性分析程序进行开发；采用粗糙集（Rough Sets）理论对微泵动态特性分析的相关数据进行处理，建立优化决策信息系统，进行属性约简和优化规则提取，其中优化决策信息系统采用决策信息表来表达，属性约简采用基于遗传算法的下三角形矩阵的方法，优化决策规则采用合并归约的方法；在此基础上，利用所开发的微泵动态特性分析和优化规则提取软件对双金属热驱动微泵实例进行动态特性分析和优化规则提取。通过实例分析，验证了方法的可行性和相应的算法、程序可操作性。同时也为双金属热驱动微泵产品优化设计提供了比较全面客观的优化评价依据。
本文提出的微泵动态特性分析和优化规则提取的方法，在微泵研究领域是一次新的尝试和探索，首次以有限元和粗糙集理论相结合的方法对微泵优化规则进行提取，这一研究成果将弥补微泵产品设计缺乏优化评价规则的缺陷，为微泵产品优化设计奠定了基础；同时，所开发的软件为微泵动态特性分析和优化评价提供了原型工具，利用此软件工具可以对微泵类产品进行动态分析和优化评价，避免了设计的盲目性，提高了设计的效率。
The micro-pump is the core part of the micro-fluid system, and it is a key micro device in the MEMS. It could broadly be applied in every science fields, which has an enormous market and development potential. It is not in the round that the dynamic properties research of the micro-pump, which absence the rules of the optimization and evaluation. The design of the high quality micro-pump can be ensured by the study of the dynamic property of the micro-pump and the rule of the optimization and evaluation in this dissertation.
According to the status of the micro-pump research, the dynamical property of the micro-pump is analyzed by finite element method (FEM), and the FEM model and analysis flow of the micro-pump are founded, and the dynamic property analysis program using the parameter is developed by use of the ANSYS software in this dissertation. The correlative data of the dynamic property analysis is processed by the rough sets theory, and the information system of the optimization and decision-making is founded, and the reduced attribute and the optimization rule are performed, which the information system of the optimization and decision-making are expressed by the information table and the triangle matrix based on the genetic algorithm is used in the reduced attribute method and the combination and reduction are used in the rule of the optimization and decision-making. The dynamic property analysis and optimization rules of the thermal driven micro-pump are got by the extracting software of the dynamic property analysis and optimization rule of micro-pump, which is developed in the dissertation. It is indicated that the method is the feasibility and the correspond arithmetic and program is operable based on this instance. And it provides a general and impersonal evaluation rule for the optimization design of the thermal
driven micro-pump products.
It is a new method research that the dynamic analysis of the micro-pump and the acquirement of the optimization rule in the dissertation. Combine approach of FEM, rough set theory and GA is used to realize optimization rules of the micro-pump. The research result will make up the lacuna the limitation for optimization rules lack and establish base for micro-pump products optimization. At the same time, the software being developed will provide a prototype tool for the dynamic property analysis of the micro-pump and optimization evaluation. It will avoid the blindness and improve the efficiency.
引文
俞武嘉等. 面向MEMS的CAD显示设计研究. 机电工程, 2001, 18(5): 78~80
孙立宁等. 抓住机遇,全面推动我国MEMS的发展. 机器人技术与应用, 2003(2):3~6
鞠挥等. MEMS和微流体分析系统的发展. 光机电信息, 2003(7): 27~31
王沫然等. 基于MEMS的微泵的研究进展. 传感器技术, 2002, 21(6): 59~61
罗小兵等. 一种新型无阀微泵的原理和模拟. 中国机械工程, 2002, 13(15): 1261~1263
杨华勇等. 流体传动及控制. 见温诗铸编: 机械学发展战略研究. 北京: 清华大学出版社. 2003: 159~182
尹执中等. 热驱动薄膜式微型泵的性能的初步分析. 仪器仪表学报, 2000, 21(2): 132~134
InskiR, S., Rough set approach to Decision Analysis. AI Expert, 1995(March)
Olivier Francais, I.D. Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena. Sensors and Actuator, 1998(A70): 56~60
Eiji Makino, T.S., Dynamic thermo-mechanical properties of evaporated TiNi shape memory thin film. Sensors and Actuators, 1999(78): 163~167
L.S. Pan, T.Y.N.. Analytical solutions for the dynamic analysis of a valveless micropump--a fluid-membrane coupling study. Sensors and Actuators, 2001(93): 173~181
J.Ulrich, R.z.. Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method. Sensors and Actuators, 1996(53): 379~385
杨岳等. 微型热致动泵. 半导体技术, 1999, 24(6): 37~41
周兆英等. 微流量系统的基础技术研究. 中国机械工程, 1999, 10(9): 991~993
徐东等. 形状记忆合金薄膜驱动微泵的动态特性. 微加工技术, 2002(1): 54~58
徐东等. 形状记忆合金/硅复合膜驱动的微泵. 微加工技术, 2000(4): 50~53
谢海波等. 微型无阀泵的数值仿真与参数设计. 流体机械, 2002, 30(1): 11~14
丁辛芳等. 微型泵的物理模型与动态模拟. 固体电子学研究与进展, 2002, 20: 23~33
丁辛芳等. 微型泵的驱动技术. 电子器件, 2001, 34(1): 87~92
Senturia.S.D. Proc. 4th Int.Conf. Solid-State Sensors and Actuators (Transducers87) [c]. Tokyo,2-5 June, 1987: 11~16
S.Stephen, D.D.. Simulation and design of Microsystems:a 10-year perspective. Sensors
and Actuators, 1998, 67: 1~7
Design for Mixed Technology Integration ( Composite CAD). http:// www.darpa.mil//MTO/CompCAD/index.htm1
L.Steffensen, O.T. S.Buettgenbach, BICEPS: a Modular Environment for the Design of Micromachined Silicon Device. Sensors and Actuators, 2000(79): 76~81
Lyshevski, S.E. Optimal structural synthesis, modeling, and control of micro-mechatronic systems. Mechatronics, 2001(11): 837~851
Hahn, R.B. An Approach to Layout and Process Vertification for Microsystem Physical Design. Microsystem Technologies, 1997(3): 53~60
M.Schuenemann. A Highly Flexible Design and Production Framework for Modularized Microelectromechanical system. Sensors and Actuators, 1999( 73): 153~168
Nagler, O., Michael trost. bernd Hillerich, Frank Kozlowski. Efficient design and optimization of MEMS by integrating commercial simulation tool. Sensors and Actuators, 1998(66): 15~20
康建初等. 支持MEMS的CAD/CAE系统结构研究. 北京航空航天大学学报, 1998, 24(4): 475~478
孟为民等. MEMS的设计方法与系统模拟. 传感器技术, 2001, 20(10)
温诗铸等. 微机械学, 见温诗铸编: 机械学发展战略研究, 北京: 清华大学出版社. 2003
王沫然等. 基于MEMS的微泵的研究进展. 传感器技术, 2002, 21(6): 59~61
曲炳郡等. TiNi形状记忆合金薄膜制备工艺及其单元互联微执行器研究: [博士学位论文]. 大连: 大连理工大学. 2001: 13~14
Yang, Y. Bimetallic thermally actuated micropump. Proc. 1996 ASME International Mechanical Engineering Congress and Exposition, Atlanta, GA, USA, 1996. Nov: 17~22
Zhan, C. Silicon membrane micropump with integrated bimetallic actuator. Chin. J. electron, 1996, 5(2): 29~35
Zou, Q. Single-chip fabrication of integrated fluid system(IFS). Proc. 11th IEEE MEMS98 Workshop, Germany , 1998: 448~453
尹执中等. 热驱动薄膜式微型泵的模拟与实验. 工程热物理学报, 2000(21), 2: 202~205
张文修等. 信息系统与知识发现. 北京: 科学出版社, 2003
刘同明等. 数据挖掘技术及其应用. 北京: 国防工业出版社, 2001
赵丹群. 数据挖掘: 原理、方法及其应用. 图书馆自动化, 2000(6)
韩祯祥等. 粗糙集理论及其应用. 信息与控制, 1998, 27(1): 38~45
Pawlak, Z. Rough Sets. Communications of ACM, 1995, November
Szladow A, z.Z. Rough Sets: Working with imperfect Data. AI Expert, 1993(July)
InskiR, S. Rough set approach to, Decision Analysis. AI Expert, 1995(March)
王文辉等. 基于遗传算法的一种粗糙集知识约简算法. 系统仿真学报(增刊), 2001. 13: 91~96
龚晓燕, 江平宇. 基于虚拟原型的微器件动态特性分析与评价. 系统仿真学报, 2004, 16(2): 316~318
杨世铭. 传热学. 北京: 高等教育出版社, 1987
陈国良等. 遗传算法及其应用. 北京:人民邮电出版社, 1996
王小平等. 遗传算法理论、应用及软件实现. 西安: 西安交通大学出版社, 2002
吴晓东. Java程序设计基础. 北京: 清华大学出版社, 2002
谭浩强. C程序设计. 北京: 清华大学出版社, 1991
王国强. 实用工程数值模拟技术及其在ANSYS上的实践. 西安: 西北工业大学出版社, 1999
孙立宁等. 抓住机遇,全面推动我国MEMS的发展. 机器人技术与应用, 2003(2):3~6
鞠挥等. MEMS和微流体分析系统的发展. 光机电信息, 2003(7): 27~31
王沫然等. 基于MEMS的微泵的研究进展. 传感器技术, 2002, 21(6): 59~61
罗小兵等. 一种新型无阀微泵的原理和模拟. 中国机械工程, 2002, 13(15): 1261~1263
杨华勇等. 流体传动及控制. 见温诗铸编: 机械学发展战略研究. 北京: 清华大学出版社. 2003: 159~182
尹执中等. 热驱动薄膜式微型泵的性能的初步分析. 仪器仪表学报, 2000, 21(2): 132~134
InskiR, S., Rough set approach to Decision Analysis. AI Expert, 1995(March)
Olivier Francais, I.D. Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena. Sensors and Actuator, 1998(A70): 56~60
Eiji Makino, T.S., Dynamic thermo-mechanical properties of evaporated TiNi shape memory thin film. Sensors and Actuators, 1999(78): 163~167
L.S. Pan, T.Y.N.. Analytical solutions for the dynamic analysis of a valveless micropump--a fluid-membrane coupling study. Sensors and Actuators, 2001(93): 173~181
J.Ulrich, R.z.. Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method. Sensors and Actuators, 1996(53): 379~385
杨岳等. 微型热致动泵. 半导体技术, 1999, 24(6): 37~41
周兆英等. 微流量系统的基础技术研究. 中国机械工程, 1999, 10(9): 991~993
徐东等. 形状记忆合金薄膜驱动微泵的动态特性. 微加工技术, 2002(1): 54~58
徐东等. 形状记忆合金/硅复合膜驱动的微泵. 微加工技术, 2000(4): 50~53
谢海波等. 微型无阀泵的数值仿真与参数设计. 流体机械, 2002, 30(1): 11~14
丁辛芳等. 微型泵的物理模型与动态模拟. 固体电子学研究与进展, 2002, 20: 23~33
丁辛芳等. 微型泵的驱动技术. 电子器件, 2001, 34(1): 87~92
Senturia.S.D. Proc. 4th Int.Conf. Solid-State Sensors and Actuators (Transducers87) [c]. Tokyo,2-5 June, 1987: 11~16
S.Stephen, D.D.. Simulation and design of Microsystems:a 10-year perspective. Sensors
and Actuators, 1998, 67: 1~7
Design for Mixed Technology Integration ( Composite CAD). http:// www.darpa.mil//MTO/CompCAD/index.htm1
L.Steffensen, O.T. S.Buettgenbach, BICEPS: a Modular Environment for the Design of Micromachined Silicon Device. Sensors and Actuators, 2000(79): 76~81
Lyshevski, S.E. Optimal structural synthesis, modeling, and control of micro-mechatronic systems. Mechatronics, 2001(11): 837~851
Hahn, R.B. An Approach to Layout and Process Vertification for Microsystem Physical Design. Microsystem Technologies, 1997(3): 53~60
M.Schuenemann. A Highly Flexible Design and Production Framework for Modularized Microelectromechanical system. Sensors and Actuators, 1999( 73): 153~168
Nagler, O., Michael trost. bernd Hillerich, Frank Kozlowski. Efficient design and optimization of MEMS by integrating commercial simulation tool. Sensors and Actuators, 1998(66): 15~20
康建初等. 支持MEMS的CAD/CAE系统结构研究. 北京航空航天大学学报, 1998, 24(4): 475~478
孟为民等. MEMS的设计方法与系统模拟. 传感器技术, 2001, 20(10)
温诗铸等. 微机械学, 见温诗铸编: 机械学发展战略研究, 北京: 清华大学出版社. 2003
王沫然等. 基于MEMS的微泵的研究进展. 传感器技术, 2002, 21(6): 59~61
曲炳郡等. TiNi形状记忆合金薄膜制备工艺及其单元互联微执行器研究: [博士学位论文]. 大连: 大连理工大学. 2001: 13~14
Yang, Y. Bimetallic thermally actuated micropump. Proc. 1996 ASME International Mechanical Engineering Congress and Exposition, Atlanta, GA, USA, 1996. Nov: 17~22
Zhan, C. Silicon membrane micropump with integrated bimetallic actuator. Chin. J. electron, 1996, 5(2): 29~35
Zou, Q. Single-chip fabrication of integrated fluid system(IFS). Proc. 11th IEEE MEMS98 Workshop, Germany , 1998: 448~453
尹执中等. 热驱动薄膜式微型泵的模拟与实验. 工程热物理学报, 2000(21), 2: 202~205
张文修等. 信息系统与知识发现. 北京: 科学出版社, 2003
刘同明等. 数据挖掘技术及其应用. 北京: 国防工业出版社, 2001
赵丹群. 数据挖掘: 原理、方法及其应用. 图书馆自动化, 2000(6)
韩祯祥等. 粗糙集理论及其应用. 信息与控制, 1998, 27(1): 38~45
Pawlak, Z. Rough Sets. Communications of ACM, 1995, November
Szladow A, z.Z. Rough Sets: Working with imperfect Data. AI Expert, 1993(July)
InskiR, S. Rough set approach to, Decision Analysis. AI Expert, 1995(March)
王文辉等. 基于遗传算法的一种粗糙集知识约简算法. 系统仿真学报(增刊), 2001. 13: 91~96
龚晓燕, 江平宇. 基于虚拟原型的微器件动态特性分析与评价. 系统仿真学报, 2004, 16(2): 316~318
杨世铭. 传热学. 北京: 高等教育出版社, 1987
陈国良等. 遗传算法及其应用. 北京:人民邮电出版社, 1996
王小平等. 遗传算法理论、应用及软件实现. 西安: 西安交通大学出版社, 2002
吴晓东. Java程序设计基础. 北京: 清华大学出版社, 2002
谭浩强. C程序设计. 北京: 清华大学出版社, 1991
王国强. 实用工程数值模拟技术及其在ANSYS上的实践. 西安: 西北工业大学出版社, 1999