基于Cu/15°YX-LiNbO_3的声表面波滤波器研究
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摘要
近年来，多模多频射频前端体积庞大的问题特别突出。小型化宽频带可调声表面波滤波器(SurfaceAcoustic Wave, SAW)，由于体积小性能优良等特点，为解决上述问题提供了可能性。
小型化宽频带可调声表面波滤波器实现的关键在于声表面波技术在高机电耦合系数的压电基片上的应用。本论文将Cu/15oYX-LiNbO3压电基片与声表面波技术相结合，研究声表面波在其上的传播特性，探讨可以实现滤波器的性能，解决其实用化过程中可能遇到的问题。论文的主要内容和创新点如下：
1.利用标量势场法对横向模进行了理论分析。首先，确定了声波导中存在两种类型的声表面波模态，发现假指电极长度在某些特定值时，两种模态发生耦合。当总线电极宽度可视为半无限大平面，假指电极较短的情况下，高次模态发生能量泄露现象。其次，利用Coupling of Mode (COM)理论分析了横向模的传播特性，定性分析了两种模态的声表面波及漏波之间的耦合规律，通过设置边界条件将集中在孔径区域的能量转移到假指区域，实现了横向漏模的抑制。最后，改变了假指电极长度以及进行图形加权，制作多组谐振器，用实验的方法验证了标量势场分析横向模的有效性。
2.提出了一种贝塞尔型声表面波滤波器。以Bessel函数为基础设计了通带内具有恒定时延的集中参数滤波器，用声表面波谐振器取代电路中的谐振单元，分析了有限电容比（γ）对滤波器通带及时延的影响，归纳到具有恒定时延通带的宽度取决于基片的机电耦合系数，即基片机电耦合系数越大，可实现的恒时延带宽越宽；进一步利用SimulatedAnnealing的优化法对SAWR的谐振频率及静态电容进行优化，设计出群时延波动小于4纳秒通带为1000±20MHz的滤波器。在上述电路中插入两个理想的Norton变压器，解决了SAWR静态电容比大难以制作的缺点。最后，采用电子束曝光+lift-off+电子束蒸发（Cu电极）在15oYX-LiNbO3制作出中心频率为980MHz的滤波器，其在通带15MHz内，群时延迟波动小于3纳秒的滤波器，证明了该设计方法的有效性。
3.以椭圆滤波器为基础，设计了任意带宽的声表面波滤波器，克服了一般梯形滤波器在基片确定的情况下滤波器通带固定的缺点，并有效地提高了滤波器的矩形系数。在15oYX-LiNbO3基片上，设计出了相对带宽分别为2%、5%和10%等几组滤波器，并通过半导体加工技术，实现了中心频率为1000MHz、相对带宽为5%以及插入损耗5.3dB的器件。其次基于Cu-/15oYX-LiNbO3超宽带声表面波谐振器，设计了两种可调声表面波滤波器，探讨了滤波器的可调范围，并分析了可变电容对整体滤波器的非线性的影响。
4.在Cu/15oYX-LiNbO3基片上，借助于COM理论与P矩阵模型建立DMS滤波器设计软件，采用SimulatingAnnealing对DMS的各个结构参数进行优化，设计出了中心频率为850MHz、-3dB带宽高达12%的滤波器。将IDT分成四种不同的周期，以增加谐振模的个数，解决了孔径过长的问题；利用电路并联的拓扑结构，降低了电极的欧姆损耗。最后根据理论优化的结构参数，在Cu/15oYX-LiNbO3基片上制作出了中心频率为860MHz、-3dB相对带宽高达14.2%的器件，证实了滤波器设计模型的有效性。
Surface and bulk acoustic wave (SAW/BAW) filters are now widely used in themobile communication systems for their excellent characteristics, small size and lowinsert loss. Recently, SAW/BAW resonators in combination with variable capacitors(VCs) are applied in tunable RF-filters to relax the complex design of the radiofrequency (RF) front-end of current mobile terminals, which have to support multi-bandand multi-mode operations.
One of the key techniques to realize tunable SAW filter is piezoelectric materialswith extremely large electromechanical coupling factor applied for SAW resonators.Cu-grating/15oYX-LiNbO3structure brings extremely large piezoelectricity. Based onthe material, we study the character of SAW propagation, how the performance of filtercan be got and the tunable range and nonlinearity character of tunable SAW filter. Someimportant and valuable results which bring forth some new ideas are accomplished andlisted as followings,
1. Cu/LiNbO3structure has so strong confinement effect in the aperture that thedominant mode decays under the apodizing aperture for the suppression of transversalmodes. By applying scalar potential theory to the IDT expressed as waveguide modelwhich has multiple tracks, characteristic of the transversal modes can be derived. Theresult revealed that setting proper length of dummy electrode makes two transversalmodes coupled or higher transversal modes leaky. Suppression mechanism of transversemodes is assumed that the modes trapped into aperture are coupled with ones intodummy electrodes and they become leaky. Based on these assumptions, these couplingand leaking of transversal modes can be theoretically modeled using coupling-of-model(COM) theory. This model allows simulating energy transfer of each transversal mode.By fabrication of resonators in which shape of its dummy electrodes is changed, thisanalytical method shows efficacy.
2. A new SAW filter structure with constant group delay in passband is proposed.The bandpass Bessel LC filter is designed, and LC resonators in the filter were replacedby SAW/BAW resonators. It is shown ripples in the group delay could be suppressed by optimal design of SAW/BAW resonators. Norton s first transform was also applied toreduce variation of resonator shunt capacitances. It is shown that flat group delay withthe deviation of3ns is realizable over the frequency range of98015MHz.
3. A new design technology to flexibly control the passband is proposed with highpiezoelectric materials. A bandpass LC filter is designed based on the traditional ellipticfilter design. We replace the LC resonators with SAW/BAW resonators in this filter andoptimize the design of the resonators to suppress passband ripples generated by finitecapacitance ratio γ. It revealed that filters with different relative bandwidth are easy tobe designed using one piezoelectric substrate. A SAW filter with relative bandwidth of5%is realizable at the center frequency of about1GHz on Cu/15oYX-LiNbO3substrate.The tunable range and IMD2characteristic of two types of tunable filters usingSAW/BAW Resonators and VCs are discussed.
4. A wide band DMS SAW filter is designed and farbricated withCu/15oYX-LiNbO3substrate. The design-simulator that is supposed the using ofCu-grating/15YX-LiNbO3-substrate structure was built. For the accuracy enhancementabout that design-simulator, parameters needed in that are determined by probativelyfabricated one-port SAW resonators on the Cu-grating/15YXLiNbO3-substratestructure. DMS filters were optimally-designed by using that simulator. As a result, it isshown that the relative-3dB bandwidth more than12%is achievable. However, toolong aperture is needed in that design. In this case, because electrical resistance andresistance loss at interdigital transducer (IDT) become extremely large, that is notsuitable for fabrication. Therefore, the pitch modulation technique was applied for thedesign of IDTs. The pitch modulation technique allows us increasing the number ofdesign variables, and much shorter aperture is achieved by using this technique. Finally,the designed DMS filter was fabricated on Cu-grating/15YX-LiNbO3-substratestructure. The measured result agrees well with the design, and the passband width of14.2%and the minimum insertion loss of1.3dB were obtained at900MHz range.
小型化宽频带可调声表面波滤波器实现的关键在于声表面波技术在高机电耦合系数的压电基片上的应用。本论文将Cu/15oYX-LiNbO3压电基片与声表面波技术相结合，研究声表面波在其上的传播特性，探讨可以实现滤波器的性能，解决其实用化过程中可能遇到的问题。论文的主要内容和创新点如下：
1.利用标量势场法对横向模进行了理论分析。首先，确定了声波导中存在两种类型的声表面波模态，发现假指电极长度在某些特定值时，两种模态发生耦合。当总线电极宽度可视为半无限大平面，假指电极较短的情况下，高次模态发生能量泄露现象。其次，利用Coupling of Mode (COM)理论分析了横向模的传播特性，定性分析了两种模态的声表面波及漏波之间的耦合规律，通过设置边界条件将集中在孔径区域的能量转移到假指区域，实现了横向漏模的抑制。最后，改变了假指电极长度以及进行图形加权，制作多组谐振器，用实验的方法验证了标量势场分析横向模的有效性。
2.提出了一种贝塞尔型声表面波滤波器。以Bessel函数为基础设计了通带内具有恒定时延的集中参数滤波器，用声表面波谐振器取代电路中的谐振单元，分析了有限电容比（γ）对滤波器通带及时延的影响，归纳到具有恒定时延通带的宽度取决于基片的机电耦合系数，即基片机电耦合系数越大，可实现的恒时延带宽越宽；进一步利用SimulatedAnnealing的优化法对SAWR的谐振频率及静态电容进行优化，设计出群时延波动小于4纳秒通带为1000±20MHz的滤波器。在上述电路中插入两个理想的Norton变压器，解决了SAWR静态电容比大难以制作的缺点。最后，采用电子束曝光+lift-off+电子束蒸发（Cu电极）在15oYX-LiNbO3制作出中心频率为980MHz的滤波器，其在通带15MHz内，群时延迟波动小于3纳秒的滤波器，证明了该设计方法的有效性。
3.以椭圆滤波器为基础，设计了任意带宽的声表面波滤波器，克服了一般梯形滤波器在基片确定的情况下滤波器通带固定的缺点，并有效地提高了滤波器的矩形系数。在15oYX-LiNbO3基片上，设计出了相对带宽分别为2%、5%和10%等几组滤波器，并通过半导体加工技术，实现了中心频率为1000MHz、相对带宽为5%以及插入损耗5.3dB的器件。其次基于Cu-/15oYX-LiNbO3超宽带声表面波谐振器，设计了两种可调声表面波滤波器，探讨了滤波器的可调范围，并分析了可变电容对整体滤波器的非线性的影响。
4.在Cu/15oYX-LiNbO3基片上，借助于COM理论与P矩阵模型建立DMS滤波器设计软件，采用SimulatingAnnealing对DMS的各个结构参数进行优化，设计出了中心频率为850MHz、-3dB带宽高达12%的滤波器。将IDT分成四种不同的周期，以增加谐振模的个数，解决了孔径过长的问题；利用电路并联的拓扑结构，降低了电极的欧姆损耗。最后根据理论优化的结构参数，在Cu/15oYX-LiNbO3基片上制作出了中心频率为860MHz、-3dB相对带宽高达14.2%的器件，证实了滤波器设计模型的有效性。
Surface and bulk acoustic wave (SAW/BAW) filters are now widely used in themobile communication systems for their excellent characteristics, small size and lowinsert loss. Recently, SAW/BAW resonators in combination with variable capacitors(VCs) are applied in tunable RF-filters to relax the complex design of the radiofrequency (RF) front-end of current mobile terminals, which have to support multi-bandand multi-mode operations.
One of the key techniques to realize tunable SAW filter is piezoelectric materialswith extremely large electromechanical coupling factor applied for SAW resonators.Cu-grating/15oYX-LiNbO3structure brings extremely large piezoelectricity. Based onthe material, we study the character of SAW propagation, how the performance of filtercan be got and the tunable range and nonlinearity character of tunable SAW filter. Someimportant and valuable results which bring forth some new ideas are accomplished andlisted as followings,
1. Cu/LiNbO3structure has so strong confinement effect in the aperture that thedominant mode decays under the apodizing aperture for the suppression of transversalmodes. By applying scalar potential theory to the IDT expressed as waveguide modelwhich has multiple tracks, characteristic of the transversal modes can be derived. Theresult revealed that setting proper length of dummy electrode makes two transversalmodes coupled or higher transversal modes leaky. Suppression mechanism of transversemodes is assumed that the modes trapped into aperture are coupled with ones intodummy electrodes and they become leaky. Based on these assumptions, these couplingand leaking of transversal modes can be theoretically modeled using coupling-of-model(COM) theory. This model allows simulating energy transfer of each transversal mode.By fabrication of resonators in which shape of its dummy electrodes is changed, thisanalytical method shows efficacy.
2. A new SAW filter structure with constant group delay in passband is proposed.The bandpass Bessel LC filter is designed, and LC resonators in the filter were replacedby SAW/BAW resonators. It is shown ripples in the group delay could be suppressed by optimal design of SAW/BAW resonators. Norton s first transform was also applied toreduce variation of resonator shunt capacitances. It is shown that flat group delay withthe deviation of3ns is realizable over the frequency range of98015MHz.
3. A new design technology to flexibly control the passband is proposed with highpiezoelectric materials. A bandpass LC filter is designed based on the traditional ellipticfilter design. We replace the LC resonators with SAW/BAW resonators in this filter andoptimize the design of the resonators to suppress passband ripples generated by finitecapacitance ratio γ. It revealed that filters with different relative bandwidth are easy tobe designed using one piezoelectric substrate. A SAW filter with relative bandwidth of5%is realizable at the center frequency of about1GHz on Cu/15oYX-LiNbO3substrate.The tunable range and IMD2characteristic of two types of tunable filters usingSAW/BAW Resonators and VCs are discussed.
4. A wide band DMS SAW filter is designed and farbricated withCu/15oYX-LiNbO3substrate. The design-simulator that is supposed the using ofCu-grating/15YX-LiNbO3-substrate structure was built. For the accuracy enhancementabout that design-simulator, parameters needed in that are determined by probativelyfabricated one-port SAW resonators on the Cu-grating/15YXLiNbO3-substratestructure. DMS filters were optimally-designed by using that simulator. As a result, it isshown that the relative-3dB bandwidth more than12%is achievable. However, toolong aperture is needed in that design. In this case, because electrical resistance andresistance loss at interdigital transducer (IDT) become extremely large, that is notsuitable for fabrication. Therefore, the pitch modulation technique was applied for thedesign of IDTs. The pitch modulation technique allows us increasing the number ofdesign variables, and much shorter aperture is achieved by using this technique. Finally,the designed DMS filter was fabricated on Cu-grating/15YX-LiNbO3-substratestructure. The measured result agrees well with the design, and the passband width of14.2%and the minimum insertion loss of1.3dB were obtained at900MHz range.
引文
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