大功率半导体激光器阵列光束整形系统研究
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摘要
时代在进步,科技在发展。自1962年第一台半导体激光器发明,经过四十多年时间发展到了现今的大功率半导体激光器阵列。大功率半导体激光器阵列以其功率高、体积小、电光转换效率高等优点,广泛用于泵浦固体激光器、材料加工及激光光源照明等应用领域。由于其输出光束的质量不好影响了实际应用,大功率半导体激光器阵列的输出光束整形成为人们研究的一个热点问题。
我们在总结国内外报道的各种整形方法的基础上,研究并设计一个光能效率高、光强均匀性好的远场主动成像照明光源。本文主要涉及采用大功率半导体激光器堆叠并进行光束整形,从而使得该半导体激光器堆叠成为主动成像的照明激光光源。
本论文主要工作是回顾了国内外大功率半导体激光器光束各种整形技术,并从中采用了倾斜多高斯光束模型的光束整形方法。通过调整每束出射光线与对应的每个微柱面透镜中心的相对位移,达到改变每束光线的出射角度的目的,从而形成一个倾斜多高斯光束模型。
本论文设计了基于微柱面透镜的半导体激光器阵列光束整形光学系统,并讨论了微柱面透镜的曲率半径和透镜厚度两个参数对光束整形的影响。系统在光学软件ASAP中进行了模拟仿真,该方案在10度视场角内可以达到80%以上的光能效率和85%以上的均匀性。本论文同时设计了光束整形实验,搭建了实验装置,通过数字摄像机实时反映接收屏光强分布来固定微柱面透镜阵列,最后投射到远场照明区域进行探测并获取图像。利用数学工具MATLAB对实验结果图进行验证和分析,最终的实验结果是系统在10度视场角内可以达到80%以上的均匀性。
As the time is moving forward, the technology is progressing. It has been over forty years since the invention of the first laser diode in 1962. And nowadays we develop the high-power laser diode array. Owing to its advantages of high-power output, simple structure and high electro-optical conversion efficiency, high-power laser diode array has been widely used in many fields, such as pumping solid-state laser, material processing, illuminating light source and so on. However, because of the poor quality of the output beam, shaping the beams of the high-power laser diode array to meet the requirements of many practical applications becomes a research focus which attracts people's attention.
On the basis of summarizing various methods for beam-shaping from lots of reports, we aim to design a laser active imaging illuminator with excellent uniformity and high efficiency in far field. In the thesis we obtain an illuminating light source for an active imaging system by shaping the beams of a high-power laser diode stack (LD Stack).
The thesis reviews a variety of domestic and foreign beam-shaping techniques for high-power laser diode. After analyzing each method, we choose the theory of the Multi-tilted Gaussian Beam (MTGB). By adjusting the offset of each cylindrical micro-lens, each output beam gains the different tilted emitting-angle, and then forms a MTGB model.
We design a beam-shaping optical system of high-power laser diode stack for uniform illumination by cylindrical micro-lenses. The curvature radius and the thickness of the lenses which affect the beam-shaping are also discussed. The simulation results from ASAP software show that uniform illumination can be obtained in the far-field district. The shaping efficiency reaches to 80%, and the uniformity is beyond 85%. A beam-shaping experiment is also carried out. We set up the instruments and adopt the CCD camera to fix the cylindrical micro-lenses array. After finish the system, we project the illuminator to the far-field and receive the detecting images. To estimate the effect of the system, we analyze the detecting images by MATLAB. The final experimental results is the uniformity is over 80% in the field-angle of 10 degree.
我们在总结国内外报道的各种整形方法的基础上,研究并设计一个光能效率高、光强均匀性好的远场主动成像照明光源。本文主要涉及采用大功率半导体激光器堆叠并进行光束整形,从而使得该半导体激光器堆叠成为主动成像的照明激光光源。
本论文主要工作是回顾了国内外大功率半导体激光器光束各种整形技术,并从中采用了倾斜多高斯光束模型的光束整形方法。通过调整每束出射光线与对应的每个微柱面透镜中心的相对位移,达到改变每束光线的出射角度的目的,从而形成一个倾斜多高斯光束模型。
本论文设计了基于微柱面透镜的半导体激光器阵列光束整形光学系统,并讨论了微柱面透镜的曲率半径和透镜厚度两个参数对光束整形的影响。系统在光学软件ASAP中进行了模拟仿真,该方案在10度视场角内可以达到80%以上的光能效率和85%以上的均匀性。本论文同时设计了光束整形实验,搭建了实验装置,通过数字摄像机实时反映接收屏光强分布来固定微柱面透镜阵列,最后投射到远场照明区域进行探测并获取图像。利用数学工具MATLAB对实验结果图进行验证和分析,最终的实验结果是系统在10度视场角内可以达到80%以上的均匀性。
As the time is moving forward, the technology is progressing. It has been over forty years since the invention of the first laser diode in 1962. And nowadays we develop the high-power laser diode array. Owing to its advantages of high-power output, simple structure and high electro-optical conversion efficiency, high-power laser diode array has been widely used in many fields, such as pumping solid-state laser, material processing, illuminating light source and so on. However, because of the poor quality of the output beam, shaping the beams of the high-power laser diode array to meet the requirements of many practical applications becomes a research focus which attracts people's attention.
On the basis of summarizing various methods for beam-shaping from lots of reports, we aim to design a laser active imaging illuminator with excellent uniformity and high efficiency in far field. In the thesis we obtain an illuminating light source for an active imaging system by shaping the beams of a high-power laser diode stack (LD Stack).
The thesis reviews a variety of domestic and foreign beam-shaping techniques for high-power laser diode. After analyzing each method, we choose the theory of the Multi-tilted Gaussian Beam (MTGB). By adjusting the offset of each cylindrical micro-lens, each output beam gains the different tilted emitting-angle, and then forms a MTGB model.
We design a beam-shaping optical system of high-power laser diode stack for uniform illumination by cylindrical micro-lenses. The curvature radius and the thickness of the lenses which affect the beam-shaping are also discussed. The simulation results from ASAP software show that uniform illumination can be obtained in the far-field district. The shaping efficiency reaches to 80%, and the uniformity is beyond 85%. A beam-shaping experiment is also carried out. We set up the instruments and adopt the CCD camera to fix the cylindrical micro-lenses array. After finish the system, we project the illuminator to the far-field and receive the detecting images. To estimate the effect of the system, we analyze the detecting images by MATLAB. The final experimental results is the uniformity is over 80% in the field-angle of 10 degree.
引文
[1]王启明.半导体激光器的进展(I)[J].物理.1996,25(2)：67-75.
[2]李学千.半导体激光器的最新进展及其应用[J].长春光学精密机械学院学报.1997,12(4)：56-63.
[3]王启明.中国半导体激光器的历次突破与发展[J].中国激光.2010,37(9)：2190-2197.
[4]吴雄.激光二极管的发展及其应用前景[J].电子与自动化.1998,第1期：3-5.
[5]熊玲玲.半导体激光二极管列阵的光束整形[D].重庆.重庆师范大学.2006：3-4.
[6]T. Fujimoto. High-power in GaAs/AlGaAs laser diodes with double heterostructure[C]. Proc. of SPIE.1999, Vol.3628:38-45.
[7]M.Behringer, F.Eberhard, GHerrmann, et al. High power diode lasers technology and application in Europe[C]. Proc. of SPIE.2003, Vol.4831:4-13.
[8]黄修德,刘雪峰.半导体激光器及其应用[M].北京.国防工业出版社.1999：185-215.
[9]Keming Du. High power diode lasers and their applications[C]. Proc. of SPIE.1998, Vol.3550:450-459.
[10]吕百达,张彬,蔡邦维等.高功率二极管泵浦固体激光器的技术问题和应用前景分析[J].红外与激光工程.1996,25(1)：24-26.
[11]王勇刚,马骁宇等.泵浦用大功率半导体激光器研制与应用发展状况[J].光电子技术.2003,23(4)：250-253.
[12]http://www.semi.ac.cn/kxcb/kpwz/200811/t20081107_2286685.html
[13]陈丽江,晓晨.纵向二极管泵浦固体激光器在雷达和光通信方面的应用[J].激光与光电子进展.1996,第10期：35-37.
[14]耿素杰,王琳.半导体激光器及其在军事领域的应用[J].激光与红外.2003,33(4)：311-312.
[15]J.Sackos, B.Bradiley. The emerging versatility of a scanner less range lmager[C]. Proc. of SPIE.1996, Vol.2748:47-60.
[16]http://www.optochina.net/html/products/9810.html
[17]严惠民,倪旭翔,陈奇霖等.无扫描三维激光雷达的研究[J].中国激光.2000,9(27)：861-864.
[18]Stephen Lee,赵钦.半导体激光器在电子焊接领域的应用[J].世界电子元器件.1999,第7期：76-77.
[19]韩晓俊,李正佳,朱长虹.半导体激光器在医学上的应用[J].光学技术.1998,第2期：7-10.
[20]郁道银,谈恒英.工程光学[M].北京.机械工业出版社.2006：2-5.
[21]卢亚雄,杨亚培,陈淑芬.激光束传输与变换技术[M].成都.电子科技大学出版社.1999：31-41.
[22]吕百达.激光光学-激光束的传输变换和光束质量控制[M].成都.四川大学出版社1992：16-26.
[23]陈钰清,王静环.激光原理[M].杭州.浙江大学出版社.1992：86-188.
[24]郑春艳.大功率半导体激光器面阵的准直和均匀化研究[D].成都.电子科技大学.2003：13-15.
[25]A.Parent, K.J.Snell, GLafrance, et al. Laser-diode array collimation for scene illumination purposes[C]. Proc. of SPIE.1998, Vol.3267:84.
[26]Anthony.A.Tovar. Propagation of flat-topped multi-Gaussian laser beams [J]. Optical Society of America.2001,18(8):1897-1904.
[27]吴平,庄建,吕百达.一种产生平顶光束的新方法：厄米-高斯光束的合成[J].中国激光.2004,31(1)：48-52.
[28]Jiang.Y, Yan. H, Zhang.X. Beam-shaping method for uniform illumination by superposition of tilted Gaussian beams[J]. Opt. Eng.2010,49(4):04203-1-04203-5.
[29]Y.Lutz, F.Christnacher. Laser diode illuminator for night vision on-board of a 155mm artillery shell [C]. Proc. of SPIE.2003, Vol.5087:185-194.
[30]宁长春,陈天禄等.大功率半导体激光器光纤耦合技术研究[J].激光与红外.2007,37(10)：1041-1043.
[31]Raymond.J.Beach. Theory and optimization of lens ducts[J]. Applied Optics.1996,35(12): 2005-2015.
[32]R.J.Beach, E.C.Honea, Camille Bibeau, et al. Hollow lensing duct[P]. US patent 6160934. 2000.
[33]Marc Eichhorn. Theory and optimization of Hollow ducts[J]. Applied Optics.2008,47(11): 1740-1744.
[34]Xiaodong Zeng, Changqing Cao, Yuying An. Asymmetrical prism for beam shaping of laser diode stacks[J]. Applied Optics.2005,44(26):5408-5414.
[35]Rulian Fu, Guangjun Wang, et al. Design of efficient lens ducts[J]. Applied Optics.1998, 37(18):4000-4003.
[36]贾伟,胡永明,李明中等.空心透镜导管的模拟与设计[J].中国激光.2004,31(8)：939-942.
[37]Xiaojuan Liu, Shenggui Fu. Theoretical and experimental research of lens duct as coupling system for LDA[C]. Proc. of SPIE-OSA-IEEE. Vol.7631:76312R-1-76312R-7.
[38]Glaser I. Applications of the lenslet array processor[C]. Proc. of SPIE.1983, Vol.564: 180-185.
[39]匡丽娟,翟金会等.复眼透镜阵列应用于均匀照明系统的特性研究[J].光学与光电技术.2005,3(6)：29-31.
[40]Yoshiharu Ozaki, Kiichi Takamoto. Cylindrical fly's eye lens for intensity redistribution of an excimer laser beam[J]. Applied Optics.1989,28(1):106-110.
[41]O. Homburg, A. Bayer,et, et al. Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays [C]. Proc. of SPIE.2008, Vol.6876: 68760B-0-68760B-7
[42]Frank.C.Wippermann, Uwe-D.Zeitner, et al. Beam homogenizers based on chirped microlens arrays[J]. Optics Express.2007,15(10):6218-6231.
[43]Frank.C.Wippermann, Uwe-D.Zeitner, et al. Fly's eye condenser based on chirped microlens arrays[C]. Proc. of SPIE.2007, Vol.6663:666309-1-666309-10.
[44]Yajun Li. Beam shaping by superposition of fundamental mode Gaussian beams[C]. Proc. of SPIE.2004, Vol.5525:128-137.
[2]李学千.半导体激光器的最新进展及其应用[J].长春光学精密机械学院学报.1997,12(4)：56-63.
[3]王启明.中国半导体激光器的历次突破与发展[J].中国激光.2010,37(9)：2190-2197.
[4]吴雄.激光二极管的发展及其应用前景[J].电子与自动化.1998,第1期：3-5.
[5]熊玲玲.半导体激光二极管列阵的光束整形[D].重庆.重庆师范大学.2006：3-4.
[6]T. Fujimoto. High-power in GaAs/AlGaAs laser diodes with double heterostructure[C]. Proc. of SPIE.1999, Vol.3628:38-45.
[7]M.Behringer, F.Eberhard, GHerrmann, et al. High power diode lasers technology and application in Europe[C]. Proc. of SPIE.2003, Vol.4831:4-13.
[8]黄修德,刘雪峰.半导体激光器及其应用[M].北京.国防工业出版社.1999：185-215.
[9]Keming Du. High power diode lasers and their applications[C]. Proc. of SPIE.1998, Vol.3550:450-459.
[10]吕百达,张彬,蔡邦维等.高功率二极管泵浦固体激光器的技术问题和应用前景分析[J].红外与激光工程.1996,25(1)：24-26.
[11]王勇刚,马骁宇等.泵浦用大功率半导体激光器研制与应用发展状况[J].光电子技术.2003,23(4)：250-253.
[12]http://www.semi.ac.cn/kxcb/kpwz/200811/t20081107_2286685.html
[13]陈丽江,晓晨.纵向二极管泵浦固体激光器在雷达和光通信方面的应用[J].激光与光电子进展.1996,第10期：35-37.
[14]耿素杰,王琳.半导体激光器及其在军事领域的应用[J].激光与红外.2003,33(4)：311-312.
[15]J.Sackos, B.Bradiley. The emerging versatility of a scanner less range lmager[C]. Proc. of SPIE.1996, Vol.2748:47-60.
[16]http://www.optochina.net/html/products/9810.html
[17]严惠民,倪旭翔,陈奇霖等.无扫描三维激光雷达的研究[J].中国激光.2000,9(27)：861-864.
[18]Stephen Lee,赵钦.半导体激光器在电子焊接领域的应用[J].世界电子元器件.1999,第7期：76-77.
[19]韩晓俊,李正佳,朱长虹.半导体激光器在医学上的应用[J].光学技术.1998,第2期：7-10.
[20]郁道银,谈恒英.工程光学[M].北京.机械工业出版社.2006：2-5.
[21]卢亚雄,杨亚培,陈淑芬.激光束传输与变换技术[M].成都.电子科技大学出版社.1999：31-41.
[22]吕百达.激光光学-激光束的传输变换和光束质量控制[M].成都.四川大学出版社1992：16-26.
[23]陈钰清,王静环.激光原理[M].杭州.浙江大学出版社.1992：86-188.
[24]郑春艳.大功率半导体激光器面阵的准直和均匀化研究[D].成都.电子科技大学.2003：13-15.
[25]A.Parent, K.J.Snell, GLafrance, et al. Laser-diode array collimation for scene illumination purposes[C]. Proc. of SPIE.1998, Vol.3267:84.
[26]Anthony.A.Tovar. Propagation of flat-topped multi-Gaussian laser beams [J]. Optical Society of America.2001,18(8):1897-1904.
[27]吴平,庄建,吕百达.一种产生平顶光束的新方法：厄米-高斯光束的合成[J].中国激光.2004,31(1)：48-52.
[28]Jiang.Y, Yan. H, Zhang.X. Beam-shaping method for uniform illumination by superposition of tilted Gaussian beams[J]. Opt. Eng.2010,49(4):04203-1-04203-5.
[29]Y.Lutz, F.Christnacher. Laser diode illuminator for night vision on-board of a 155mm artillery shell [C]. Proc. of SPIE.2003, Vol.5087:185-194.
[30]宁长春,陈天禄等.大功率半导体激光器光纤耦合技术研究[J].激光与红外.2007,37(10)：1041-1043.
[31]Raymond.J.Beach. Theory and optimization of lens ducts[J]. Applied Optics.1996,35(12): 2005-2015.
[32]R.J.Beach, E.C.Honea, Camille Bibeau, et al. Hollow lensing duct[P]. US patent 6160934. 2000.
[33]Marc Eichhorn. Theory and optimization of Hollow ducts[J]. Applied Optics.2008,47(11): 1740-1744.
[34]Xiaodong Zeng, Changqing Cao, Yuying An. Asymmetrical prism for beam shaping of laser diode stacks[J]. Applied Optics.2005,44(26):5408-5414.
[35]Rulian Fu, Guangjun Wang, et al. Design of efficient lens ducts[J]. Applied Optics.1998, 37(18):4000-4003.
[36]贾伟,胡永明,李明中等.空心透镜导管的模拟与设计[J].中国激光.2004,31(8)：939-942.
[37]Xiaojuan Liu, Shenggui Fu. Theoretical and experimental research of lens duct as coupling system for LDA[C]. Proc. of SPIE-OSA-IEEE. Vol.7631:76312R-1-76312R-7.
[38]Glaser I. Applications of the lenslet array processor[C]. Proc. of SPIE.1983, Vol.564: 180-185.
[39]匡丽娟,翟金会等.复眼透镜阵列应用于均匀照明系统的特性研究[J].光学与光电技术.2005,3(6)：29-31.
[40]Yoshiharu Ozaki, Kiichi Takamoto. Cylindrical fly's eye lens for intensity redistribution of an excimer laser beam[J]. Applied Optics.1989,28(1):106-110.
[41]O. Homburg, A. Bayer,et, et al. Beam shaping of high power diode lasers benefits from asymmetrical refractive micro-lens arrays [C]. Proc. of SPIE.2008, Vol.6876: 68760B-0-68760B-7
[42]Frank.C.Wippermann, Uwe-D.Zeitner, et al. Beam homogenizers based on chirped microlens arrays[J]. Optics Express.2007,15(10):6218-6231.
[43]Frank.C.Wippermann, Uwe-D.Zeitner, et al. Fly's eye condenser based on chirped microlens arrays[C]. Proc. of SPIE.2007, Vol.6663:666309-1-666309-10.
[44]Yajun Li. Beam shaping by superposition of fundamental mode Gaussian beams[C]. Proc. of SPIE.2004, Vol.5525:128-137.