垂直磁记录介质薄膜的制备及其晶体结构和磁性研究
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摘要
在当今飞速发展的数字化、信息化时代,需要保存和处理大量计算数据或各类多媒体信息,这就要求信息存储介质不但具有高密度、大容量、高速度,而且还要低成本、微型化的特点,产品应保持不断更新。磁记录具有记录密度高、稳定可靠、可反复使用、信息写入与读出速度快等特点,广泛应用于医疗、电子计算技术、军事、航天及日常生活等方面,从而成为当今信息社会必不可少的信息记录方式。
目前,纵向磁记录应用较广,但由于较高的自退磁效应,使高密度记录介质的进一步提高纵向磁记录模式的记录密度是比较困难的。而自退磁效应对于垂直磁记录模式是可以克服的,进而为提高磁记录密度提供了出路。
在垂直磁记录材料中,薄膜材料因为其晶体结构和磁性等方面的优势成为磁记录领域中研究的热点。在薄膜材料中,CoCr合金薄膜尤其是掺杂的薄膜更是成为重中之重。
本文在室温下应用对向靶直流磁控溅射法制备了不同系列C/CoCrTa/X (X=Cr、Ti)样品,采用X射线衍射仪测量了样品的晶体结构,采用振动样品磁强计测量了样品的磁特性。
通过对C/CoCrTa/Ti磁性膜的系统研究,可以看到,薄膜的磁各向异性与合适的基片温度和衬层成分以及衬层厚度密切相关。
In today's rapid development of the digital and information era, this request information storage medium not only has high density, high speed, high capacity, but also the characteristics of low cost, miniaturization, the product should be kept constantly updated. Magnetic recording with high record density, stable and reliable etc, widely used in medical, electronic computing technology, military and aerospace and daily life etc. It is i essential information recording mode nowadays.
Recently, the longitudinal magnetic recording technology was used widely, but it is very difficult to enhancement of longitudinal recording mode for the demagnetizing effect. Then perpendicular magnetic recording mode was promised candidate for its overcoming the demagnetizing effect. In recent years, the perpendicular magnetic recording films was studied extensively because of its advantage including crystal structure and magnetic properties.
The CoCr alloy has been the focus in magnetic recording field for its excellent properties, especially the doped CoCr alloy films. Different types of C/CoCrTa/X (X=Cr、Ti) was prepared by facing target sputtering method in room temperature. Crystal structure and magnetic properties were studied systematically in this thesis.
It was found that different Substrate temperature, different underlayer and different thickness affect the magnetic anisotropy of films importantly.
目前,纵向磁记录应用较广,但由于较高的自退磁效应,使高密度记录介质的进一步提高纵向磁记录模式的记录密度是比较困难的。而自退磁效应对于垂直磁记录模式是可以克服的,进而为提高磁记录密度提供了出路。
在垂直磁记录材料中,薄膜材料因为其晶体结构和磁性等方面的优势成为磁记录领域中研究的热点。在薄膜材料中,CoCr合金薄膜尤其是掺杂的薄膜更是成为重中之重。
本文在室温下应用对向靶直流磁控溅射法制备了不同系列C/CoCrTa/X (X=Cr、Ti)样品,采用X射线衍射仪测量了样品的晶体结构,采用振动样品磁强计测量了样品的磁特性。
通过对C/CoCrTa/Ti磁性膜的系统研究,可以看到,薄膜的磁各向异性与合适的基片温度和衬层成分以及衬层厚度密切相关。
In today's rapid development of the digital and information era, this request information storage medium not only has high density, high speed, high capacity, but also the characteristics of low cost, miniaturization, the product should be kept constantly updated. Magnetic recording with high record density, stable and reliable etc, widely used in medical, electronic computing technology, military and aerospace and daily life etc. It is i essential information recording mode nowadays.
Recently, the longitudinal magnetic recording technology was used widely, but it is very difficult to enhancement of longitudinal recording mode for the demagnetizing effect. Then perpendicular magnetic recording mode was promised candidate for its overcoming the demagnetizing effect. In recent years, the perpendicular magnetic recording films was studied extensively because of its advantage including crystal structure and magnetic properties.
The CoCr alloy has been the focus in magnetic recording field for its excellent properties, especially the doped CoCr alloy films. Different types of C/CoCrTa/X (X=Cr、Ti) was prepared by facing target sputtering method in room temperature. Crystal structure and magnetic properties were studied systematically in this thesis.
It was found that different Substrate temperature, different underlayer and different thickness affect the magnetic anisotropy of films importantly.
引文
[1]金养智,魏杰.信息记录材料[M].北京:化学工业出版社,2003:399-403,
[2]White R M.Magnetic recording-Pushing back the superparamagnetic barrier[J]. Journal of Magnetism and Magnetic Materials,2001,226-230:2042-2045.
[3]Dennis E.Speliotis. Magnetic recording beyond the first100 Years[J].Journal of Magnetism and Magnetic Materials,1999.193:29-35.
[4] Johnson K E, Magnetic materials and structures for thin-film recording media[J].J.Appl.Phys.,2000, 87 (9): 5365-5370
[5] B. Ramamurthy Acharya, Akihiro Inomata, E. Noel Abarra et al. Synthetic ferromagnetic media for over 100 Gb/in2 longitudinal magnetic recording[J]. J.Magn.Magn.Mater.,2003, 260: 261-272
[6] Roger Wood. The feasibility of magnetic recording at 1 terabit per square inch[J].IEEE Trans.on Magn.,2000,36 (1): 36-42
[7]都有为,罗河烈.磁记录材料[M].电子工业出版社,1992: 17-38
[8]杨邦朝,王文生.薄膜物理与技术[M].电子科技大学出版社,1994:8-12
[9] R.C.奥汉德利[美].现代磁性材料原理和应用[M].化学工业出版社,2002:663-666
[10] Andreas Moser, et al. Magnetic recording: advancing into the future[J]. J. Phys. D: Appl. Phys.,2002, 35: 157-167
[11] J.Moritz, et al. Patterned Media Made From Pre-Etched Wafers: A Promising Route toward Ultrahigh-Density Magnetic Recording[J]. IEEE Trans. on Magnet.,2002, 38(4): 1731-1735
[12]蔡炳初.磁记录技术中的薄膜磁性材料[J].金属热处理学报,1996, 17(增刊):79-83
[13] J. A. Christodoulides, Y. Zhang and G. C. Hadjipanayis. CoPt and FePt thin films for high density recording media[J]. J. Appl. Phys., 2000, 87: 6938-6940
[14] J. J. Delaunay, T. Hayashi, M. Tomita, et al. Effect of Pt addition on the magnetic and microstructual properties of CoC grunular films[J]. IEEE Trans. Magn., 1998, 34: 1627-1629
[15] J. Du, S. Wang, C. Ruby, A. Khapikov, W.J. Liu, J.A. Barnard, J. W. Harrell. Magnetic and structural properties of annealed CoPt/C multilayers[J]. J. Magn. Magn. Mater., 2001, 231: 231-240
[16] M. Yu, Y. Liu, and D. J. Sellmyer. Nanostructure and magnetic properties of composite CoPt/C films for extremely high-density recording[J]. J. Appl. Phys., 2000, 87: 6959-6961
[17] M. Yu, Y. Liu, and D. J. Sellmyer. Structural and magnetic properties of nanocomposite Co/C films[J]. J. Appl. Phys, 1999, 85: 4319-4321
[18]高汝伟,李卫,俞晓军,李华.磁性材料中的晶粒相互作用[J].功能材料, 1998, 29: 362-365
[19]高汝伟,周寿增,李华等.烧结Nd-Fe-B永磁合金矫顽力机制的理论和实验研究[J].物理学报, 1994, 43: 146-153
[20] GaoRuwei, ZhouShouzeng, ZhangDeheng, et al. Coercivity and its dependence on the strength of alignment magnetic field in Nd-Fe-B sintered magnets[J]. J. Appl. Phys,1995, 78: 1156-1159
[21] J. Fidler and T. Screfl. Over view of Nd-Fe-B magnets and coercivity (invited) [J]. J. Appl. Phys., 1996, 79: 5029-5034
[22] Herzer G. Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets[J]. IEEE Trans on Magnet., 1990, 26: 1397-1400
[23] Mayo P I, O’Grady K, Kelly P E, et al. A magnetic evalutation of interaction and noise characteristics of CoNiCr thin films[J]. J. Appl. Phys., 1991, 69 (8): 4733-4735
[24] Beardsley Irene A and Zhu Jian-Gang. Significance ofδM measurements in thin film media[J]. IEEE Trans. Magn., 1991, 27 (6): 5037-5039
[25] Okumura Y, Yasui M, Akita T., et al. Effects of CrNiN pre-layer on magnetic properties and medium noise of CoCrTa longitudinal media[J]. J. Magn. Magn. Mater., 1998, 185: 249-257
[26]王芳,许小红.震动样品磁强计在磁记录介质中的应用[J].信息记录材料, 2005, 6: 55-59
[27] X. W. Wu, R. J. M. van de Veerdonk, R. W. Chantrell and D. Weller.δM study of perpendicular recording media[J]. J. Appl. Phys., 2003, 93: 6760-6762
[28] Hesse J., Thamm S., A simple plot indicating interactions between single-domain particles[J]. J. Magn. Magn. Mater., 1996, 154: 254-262
[29] G. Bottoni. Influence of the magnetic interactions on the reversal mode of magnetic recording particles[J]. J. Appl. Phys., 1991, 69: 4499-4501
[30] Ogrin F Y, Oates C J, Lee S L. Torque magnetometry: investigation of the intergranular exchange interaction in longitudinal magnetic recording media[J]. J. Magn. Magn. Mater., 2002, 242–245: 321-324
[31]张宝峰,曹文斗,魏立锋.用转矩仪测量薄膜磁各向异性的研究[J].仪器仪表学报. 1999, 20 (4): 398-400
[32] Speliotis D E. Magnetic recording beyond the first 100 years[J]. J. Magn. Magn. Mater., 1999, 193: 26-35
[33] Laughlin David E, Cheong B, Feng Y C, et al. The control of microstructural features of thin films for magnetic recording[J]. Scripta metallurgica Materialia,1995, 33(10/11): 1525-1536
[34]Jack H.Judy.Past,presenet and future of per pendicular magnetic recording(Invited)[J]. Journal of Magnetism and Magnetic Materials,2001, 235: 235-240
[35]Iwasaki Shun-ichi.Development of perpen dicular magnetic recording conference[J]. Journal of Magnetism and Magnetic Materials,2005, 287: 1-8
[36]成洪甫,高召顺,王栋梁等.超高密度磁记录介质的研究进展[J].仪器仪表学报,2010, 24(7): 35-39
[37] Liu W H, Schouterden K, Mei L, et al. High linear density written transitions in exchange isolated Pt/CoCrTa mutilayer thin films[J]. Appl. Phys. Let., 1996, 69(1): 124-126
[38]王辉,黄致新,张峰等.硬盘磁记录介质的发展与展望[J].信息记录材料,2006, 7(3): 29-31
[2]White R M.Magnetic recording-Pushing back the superparamagnetic barrier[J]. Journal of Magnetism and Magnetic Materials,2001,226-230:2042-2045.
[3]Dennis E.Speliotis. Magnetic recording beyond the first100 Years[J].Journal of Magnetism and Magnetic Materials,1999.193:29-35.
[4] Johnson K E, Magnetic materials and structures for thin-film recording media[J].J.Appl.Phys.,2000, 87 (9): 5365-5370
[5] B. Ramamurthy Acharya, Akihiro Inomata, E. Noel Abarra et al. Synthetic ferromagnetic media for over 100 Gb/in2 longitudinal magnetic recording[J]. J.Magn.Magn.Mater.,2003, 260: 261-272
[6] Roger Wood. The feasibility of magnetic recording at 1 terabit per square inch[J].IEEE Trans.on Magn.,2000,36 (1): 36-42
[7]都有为,罗河烈.磁记录材料[M].电子工业出版社,1992: 17-38
[8]杨邦朝,王文生.薄膜物理与技术[M].电子科技大学出版社,1994:8-12
[9] R.C.奥汉德利[美].现代磁性材料原理和应用[M].化学工业出版社,2002:663-666
[10] Andreas Moser, et al. Magnetic recording: advancing into the future[J]. J. Phys. D: Appl. Phys.,2002, 35: 157-167
[11] J.Moritz, et al. Patterned Media Made From Pre-Etched Wafers: A Promising Route toward Ultrahigh-Density Magnetic Recording[J]. IEEE Trans. on Magnet.,2002, 38(4): 1731-1735
[12]蔡炳初.磁记录技术中的薄膜磁性材料[J].金属热处理学报,1996, 17(增刊):79-83
[13] J. A. Christodoulides, Y. Zhang and G. C. Hadjipanayis. CoPt and FePt thin films for high density recording media[J]. J. Appl. Phys., 2000, 87: 6938-6940
[14] J. J. Delaunay, T. Hayashi, M. Tomita, et al. Effect of Pt addition on the magnetic and microstructual properties of CoC grunular films[J]. IEEE Trans. Magn., 1998, 34: 1627-1629
[15] J. Du, S. Wang, C. Ruby, A. Khapikov, W.J. Liu, J.A. Barnard, J. W. Harrell. Magnetic and structural properties of annealed CoPt/C multilayers[J]. J. Magn. Magn. Mater., 2001, 231: 231-240
[16] M. Yu, Y. Liu, and D. J. Sellmyer. Nanostructure and magnetic properties of composite CoPt/C films for extremely high-density recording[J]. J. Appl. Phys., 2000, 87: 6959-6961
[17] M. Yu, Y. Liu, and D. J. Sellmyer. Structural and magnetic properties of nanocomposite Co/C films[J]. J. Appl. Phys, 1999, 85: 4319-4321
[18]高汝伟,李卫,俞晓军,李华.磁性材料中的晶粒相互作用[J].功能材料, 1998, 29: 362-365
[19]高汝伟,周寿增,李华等.烧结Nd-Fe-B永磁合金矫顽力机制的理论和实验研究[J].物理学报, 1994, 43: 146-153
[20] GaoRuwei, ZhouShouzeng, ZhangDeheng, et al. Coercivity and its dependence on the strength of alignment magnetic field in Nd-Fe-B sintered magnets[J]. J. Appl. Phys,1995, 78: 1156-1159
[21] J. Fidler and T. Screfl. Over view of Nd-Fe-B magnets and coercivity (invited) [J]. J. Appl. Phys., 1996, 79: 5029-5034
[22] Herzer G. Grain size dependence of coercivity and permeability in nanocrystalline ferromagnets[J]. IEEE Trans on Magnet., 1990, 26: 1397-1400
[23] Mayo P I, O’Grady K, Kelly P E, et al. A magnetic evalutation of interaction and noise characteristics of CoNiCr thin films[J]. J. Appl. Phys., 1991, 69 (8): 4733-4735
[24] Beardsley Irene A and Zhu Jian-Gang. Significance ofδM measurements in thin film media[J]. IEEE Trans. Magn., 1991, 27 (6): 5037-5039
[25] Okumura Y, Yasui M, Akita T., et al. Effects of CrNiN pre-layer on magnetic properties and medium noise of CoCrTa longitudinal media[J]. J. Magn. Magn. Mater., 1998, 185: 249-257
[26]王芳,许小红.震动样品磁强计在磁记录介质中的应用[J].信息记录材料, 2005, 6: 55-59
[27] X. W. Wu, R. J. M. van de Veerdonk, R. W. Chantrell and D. Weller.δM study of perpendicular recording media[J]. J. Appl. Phys., 2003, 93: 6760-6762
[28] Hesse J., Thamm S., A simple plot indicating interactions between single-domain particles[J]. J. Magn. Magn. Mater., 1996, 154: 254-262
[29] G. Bottoni. Influence of the magnetic interactions on the reversal mode of magnetic recording particles[J]. J. Appl. Phys., 1991, 69: 4499-4501
[30] Ogrin F Y, Oates C J, Lee S L. Torque magnetometry: investigation of the intergranular exchange interaction in longitudinal magnetic recording media[J]. J. Magn. Magn. Mater., 2002, 242–245: 321-324
[31]张宝峰,曹文斗,魏立锋.用转矩仪测量薄膜磁各向异性的研究[J].仪器仪表学报. 1999, 20 (4): 398-400
[32] Speliotis D E. Magnetic recording beyond the first 100 years[J]. J. Magn. Magn. Mater., 1999, 193: 26-35
[33] Laughlin David E, Cheong B, Feng Y C, et al. The control of microstructural features of thin films for magnetic recording[J]. Scripta metallurgica Materialia,1995, 33(10/11): 1525-1536
[34]Jack H.Judy.Past,presenet and future of per pendicular magnetic recording(Invited)[J]. Journal of Magnetism and Magnetic Materials,2001, 235: 235-240
[35]Iwasaki Shun-ichi.Development of perpen dicular magnetic recording conference[J]. Journal of Magnetism and Magnetic Materials,2005, 287: 1-8
[36]成洪甫,高召顺,王栋梁等.超高密度磁记录介质的研究进展[J].仪器仪表学报,2010, 24(7): 35-39
[37] Liu W H, Schouterden K, Mei L, et al. High linear density written transitions in exchange isolated Pt/CoCrTa mutilayer thin films[J]. Appl. Phys. Let., 1996, 69(1): 124-126
[38]王辉,黄致新,张峰等.硬盘磁记录介质的发展与展望[J].信息记录材料,2006, 7(3): 29-31