凹面变线距光栅的二维线密度分布测试及软X射线平场光谱仪的研制
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摘要
光栅作为重要的分光元件,在光谱技术领域发挥着重要作用。近年,随着激光、全息等技术的发展,使得光栅制作工艺水平得到很大的进步,一些高级光栅被制作出来,并得到广泛使用。凹而变线距光栅是像差矫正光栅中的一种,其不仅具有凹面光栅分光、聚焦的特性,同时又能通过改变光栅表而不同位置的刻线密度使得不同波长的光成像在一个平面附近,有利于采用CCD等平面探测器接收光谱,实现快速全波段光谱分析。随着阵列探测器技术的快速发展和日益成熟,凹面变线距光栅的应用领域迅速拓展并逐渐显示出其独特的优势。
本文研究了凹面变线距光栅的以下三部分内容：凹面光栅二维刻线密度分布测试系统、平场凹面变线距光栅光学系统的高精度波长标定方法以及凹面变线距光栅在平场光谱仪器中的应用。
首先,光栅的刻线密度参数是影响光栅分光和成像性能的最重要物理参数,发展光栅刻线密度的高精度测试技术具有重要的意义。一方面,光栅作为产品或商品,用户需要检验其指标是否满足设计要求；另一方面,通过对光栅的检测,可以发现光栅制作工艺过程中存在的问题,有助于提高光栅的加工制作工艺水平；第三,对于一块现成的光栅,获得精确的光栅刻线密度参数,对设计光栅光学系统、分析光学系统像差以及根据现有光栅参数进行光学系统优化等多方面具有重要的作用。此外,光栅的刻线密度精度还会直接影响光谱仪的波长标定精度。因此对光栅刻线密度进行高精度测试,具有重要的实际意义。
对于凹面变线距光栅,其表面不同位置的刻线密度并不相等,因此对光栅中心单点的线密度测量或一维线密度测量,已无法满足测量需求。在论文第3章中,建立了光栅的二维刻线密度测试系统,可实现对光栅表面任意一点的线密度进行高精度测量。采用基于光栅衍射方程的衍射测量法作为本文线密度测试方法,并以Littrow光路,以获得最小的系统误差。首次实现了对光栅的二维刻线密度分布的测量装置,获得两块光栅的线密度测试数据。并首次在光栅线密度衍射法测试系统中,发现全息光栅的弯曲刻线条纹,可以利用此测试系统,实现对光栅刻线弯曲程度进行测试。定义光栅线密度测试误差△N与实际线密度N之问的比值为测量精度,最终测试系统的绝对测量精度可达3.4×10-5。
其次,一个光学系统在投入使用之前,必须经过波长标定这一环节,以确定探测器感光面上的任意一点所对应的波长。波长标定精度直接影响仪器的正常使用,如在化学分析、等离子体温度诊断、天体速度测量等一些应用领域,对波长精度有着非常高甚至近乎苛刻的要求。因此,研究高精度波长标定技术,具有重.要的意义。在论文第4章研究波长标定的另一重要目的是为后文软X射线平场光谱仪的研制预先提供研究基础。用一块工作在可见光波段的凹面变线距光栅,搭建了一台小型平场光谱仪,用于专门研究高精度波长标定方法。提出一种基于光栅衍射方程、直接以光学系统的结构参数作为拟合变量、以光学分光系统的波长分布函数作为波长标定模型的参数拟合波长标定方法。与常用的基于多项式拟合的波长标定方法相比,参数拟合波长标定具有更高的波长标定精度。其次,由于标定模型是以光学系统物理参数(如光栅线密度、入射角、入射臂等光学元件相对位置参数)作为拟合变量,通过本文提出的参数拟合波长标定可以反算出这些参数,进而评价实际光学系统的准直、安装水平,对光学系统的调试具有指导作用。此外,本章提出的参数拟合波长标定方法,并不局限凹面变线距光栅光学系统,还可以作为采用平面阵列探测器的光学系统的一种普适方法,并对其他光学系统具有参考价值。
最后,在第5章给出了凹面变线距光栅在光谱仪器中的应用实例,从光学系统设计、像差考虑、光谱分辨率分析、仪器设计、调试安装等多个方面,系统地介绍了凹面变线距光栅光谱仪器的研制方法和过程。采用凹面变线距光栅作为分光元件,为中国科学院等离子体物理研究所的先进实验超导托卡马克装置研制一套高分辨率宽谱段、紧凑型,具有空间分辨的软X射线-极紫外波段光谱仪。在托卡马克运行过程中,其内部的等离子体中的杂质会引起大量的辐射损失,制约所能获得的等离子体的品质,影响托卡马克高参数、准稳态运行。利用光谱仪对托卡马克内部等离子体的发射光谱进行诊断,是研究托卡马克等离子体芯部杂质输运的重要手段。研制的光谱仪器波长覆盖范围10A-500A,空间覆盖范围900mm。分长、短两个波段设计。在10A-100A的短波段,光谱分辨率为0.06A@35A；在50A-500A的长波段,其光谱分辨率为0.15A@200A,光谱分辨率指标达到世界同类装置水平。日前,该套光谱仪器已成为研究EAST芯部杂质输运的常规诊断仪器,为实现EAST高参数稳态运行提供重要的物理支持。
As an important optical element, gratings play a key role in the field of spectroscopy field. In recent years, with the development of laser and holographic technology, the grating manufacturing level has got a profound progress. Advanced gratings are produced and have been widely used. Concave varied line space gratings, as one kind of aberration corrected holographic grating, have the ability to diffract and focus different wavelengths along a plane, which facilities the spectrum recording by CCDs and other kind of array detectors. This realizes the fast and full spectrum recording by a single exposure. With the rapid development of array detector technology, the application fields of concave varied line space gratings are expanding quickly. The unique features of concave varied line space gratings will be exploited gradually in the near future.
This paper consists three parts:grating2D groove density measuring system, the high accuracy wavelength calibration methods for flat field spectrograph with concave varied line space gratings and the application of concave varied line space grating in a soft x-ray spectrograph which is used as a Tokamak plasma diagnostics tool.
Groove density of grating is an important parameter that affects the diffraction and imaging performance of a spectrograph or spectrometer. As a product, a grating should undergo factory test and customer acceptance test to make sure its groove distribution meets the application requirements. By the testing, the groove distribution error in grating manufacturing process can be found and corrected. For grating users, the actual parameters of grating groove density will be used for the final optical system optimization during the installation. Moreover, the accuracy of gratings' groove density will affect the wavelength calibration directly. Therefore the high-accuracy measurement of grating groove density is of great significance.
The grating groove density of concave varied line space gratings varies on the different positions on the grating surface; therefore the measurement of the groove density only on the center or just one-dimensional measurement cannot fulfill the demand. In chapter3, a2-dimension measurement setup for grating groove density is established, which achieves high-accuracy measurement of the groove density at any point of a grating. The diffraction measurement method based on the grating diffraction equation and the Littrow configuration is proposed which has the advantage of smaller measuring error. The groove densities of2gratings are tested. It is first time that the2D grating groove density distribution is measured by diffraction method. It is the first time that the curved grooves in holographic grating are observed by our measuring system. This measurement setup could be used to measuring the curvature of the grooves. The accuracy of measurement is defined as the ratio of the RMS error of grating groove density△N and the nominal groove density N. The measuring accuracy of the groove density is about3.4×10-5in our experiment.
The wavelength calibration for a spectrometer/spectrograph is an essential procedure before its use. Wavelength calibration for a flat field spectrograph is to determine the wavelength value and the pixel number of the array detector. The wavelength precision is important in the fields such as Tokamak plasma temperature diagnoses and astronomy observation. In chapter4, a wavelength calibration method is proposed which is applied to a soft X-ray flat field spectrometer (Ref to chapter5). A visible range flat field spectrometer with a concave varied line space grating is developed to study high accuracy wavelength calibration method. A parameter-fitting wavelength calibration method has been proposed. In this new method, the physical parameters (grating groove density and relationships between different optical elements such as incident angle, incident arms, et al) of the spectrometer are included in the wavelength calibration model. Compared to the common-used wavelength calibration method, like polynomial fitting, the proposed wavelength calibration method can reach higher wavelength calibration accuracy. As the calibration model uses the physical parameters of the optical system that means these parameters can be computed by the wavelength fitting process. So we can use the wavelength method to evaluate the installation, d alignment and adjust of the spectrometer system. By way, the proposed wavelength calibration method not only can be applied to concave varied line space grating based spectrograph, but also to other spectrograph adopting plane array detectors.
Chapter5presents an example of the concave varied line space grating used in soft x-ray spectrographs. The optical system design, structural design, installation and adjustment are described in details. The spectrometers are developed for the Experimental Advanced Superconducting Tokamak (EAST) for Institute of Plasma Physics of Chinese Academy of Science. It is compact in dimension, has high wavelength resolution, covering wide wavelength range and the spatial resolved ability. The impurities in plasma cause lot of radiation loss, which limits the quality of the plasma and affects the high-quality and quasi-steady-state operation of Tokamak. Spectrometer is an important tool to study the impurities transportation in the plasma. There are two spectrometers to cover the wavelength range of10A-500A and the plasma zone area of900mm is covered in space. One spectrometer for short wavelength range of10A-100A, its spectral resolution is0.06A at35A; another spectrometer covers long wavelength range of50A-500A, its spectral resolution is0.15A at200A. Test results show that both spectrometers reach the same spectral resolution among the similar instruments in the world. At present, both spectrometers have been used as a general diagnostic tool for the plasma impurities study which supports a lot to the research of EAST.
本文研究了凹面变线距光栅的以下三部分内容：凹面光栅二维刻线密度分布测试系统、平场凹面变线距光栅光学系统的高精度波长标定方法以及凹面变线距光栅在平场光谱仪器中的应用。
首先,光栅的刻线密度参数是影响光栅分光和成像性能的最重要物理参数,发展光栅刻线密度的高精度测试技术具有重要的意义。一方面,光栅作为产品或商品,用户需要检验其指标是否满足设计要求；另一方面,通过对光栅的检测,可以发现光栅制作工艺过程中存在的问题,有助于提高光栅的加工制作工艺水平；第三,对于一块现成的光栅,获得精确的光栅刻线密度参数,对设计光栅光学系统、分析光学系统像差以及根据现有光栅参数进行光学系统优化等多方面具有重要的作用。此外,光栅的刻线密度精度还会直接影响光谱仪的波长标定精度。因此对光栅刻线密度进行高精度测试,具有重要的实际意义。
对于凹面变线距光栅,其表面不同位置的刻线密度并不相等,因此对光栅中心单点的线密度测量或一维线密度测量,已无法满足测量需求。在论文第3章中,建立了光栅的二维刻线密度测试系统,可实现对光栅表面任意一点的线密度进行高精度测量。采用基于光栅衍射方程的衍射测量法作为本文线密度测试方法,并以Littrow光路,以获得最小的系统误差。首次实现了对光栅的二维刻线密度分布的测量装置,获得两块光栅的线密度测试数据。并首次在光栅线密度衍射法测试系统中,发现全息光栅的弯曲刻线条纹,可以利用此测试系统,实现对光栅刻线弯曲程度进行测试。定义光栅线密度测试误差△N与实际线密度N之问的比值为测量精度,最终测试系统的绝对测量精度可达3.4×10-5。
其次,一个光学系统在投入使用之前,必须经过波长标定这一环节,以确定探测器感光面上的任意一点所对应的波长。波长标定精度直接影响仪器的正常使用,如在化学分析、等离子体温度诊断、天体速度测量等一些应用领域,对波长精度有着非常高甚至近乎苛刻的要求。因此,研究高精度波长标定技术,具有重.要的意义。在论文第4章研究波长标定的另一重要目的是为后文软X射线平场光谱仪的研制预先提供研究基础。用一块工作在可见光波段的凹面变线距光栅,搭建了一台小型平场光谱仪,用于专门研究高精度波长标定方法。提出一种基于光栅衍射方程、直接以光学系统的结构参数作为拟合变量、以光学分光系统的波长分布函数作为波长标定模型的参数拟合波长标定方法。与常用的基于多项式拟合的波长标定方法相比,参数拟合波长标定具有更高的波长标定精度。其次,由于标定模型是以光学系统物理参数(如光栅线密度、入射角、入射臂等光学元件相对位置参数)作为拟合变量,通过本文提出的参数拟合波长标定可以反算出这些参数,进而评价实际光学系统的准直、安装水平,对光学系统的调试具有指导作用。此外,本章提出的参数拟合波长标定方法,并不局限凹面变线距光栅光学系统,还可以作为采用平面阵列探测器的光学系统的一种普适方法,并对其他光学系统具有参考价值。
最后,在第5章给出了凹面变线距光栅在光谱仪器中的应用实例,从光学系统设计、像差考虑、光谱分辨率分析、仪器设计、调试安装等多个方面,系统地介绍了凹面变线距光栅光谱仪器的研制方法和过程。采用凹面变线距光栅作为分光元件,为中国科学院等离子体物理研究所的先进实验超导托卡马克装置研制一套高分辨率宽谱段、紧凑型,具有空间分辨的软X射线-极紫外波段光谱仪。在托卡马克运行过程中,其内部的等离子体中的杂质会引起大量的辐射损失,制约所能获得的等离子体的品质,影响托卡马克高参数、准稳态运行。利用光谱仪对托卡马克内部等离子体的发射光谱进行诊断,是研究托卡马克等离子体芯部杂质输运的重要手段。研制的光谱仪器波长覆盖范围10A-500A,空间覆盖范围900mm。分长、短两个波段设计。在10A-100A的短波段,光谱分辨率为0.06A@35A；在50A-500A的长波段,其光谱分辨率为0.15A@200A,光谱分辨率指标达到世界同类装置水平。日前,该套光谱仪器已成为研究EAST芯部杂质输运的常规诊断仪器,为实现EAST高参数稳态运行提供重要的物理支持。
As an important optical element, gratings play a key role in the field of spectroscopy field. In recent years, with the development of laser and holographic technology, the grating manufacturing level has got a profound progress. Advanced gratings are produced and have been widely used. Concave varied line space gratings, as one kind of aberration corrected holographic grating, have the ability to diffract and focus different wavelengths along a plane, which facilities the spectrum recording by CCDs and other kind of array detectors. This realizes the fast and full spectrum recording by a single exposure. With the rapid development of array detector technology, the application fields of concave varied line space gratings are expanding quickly. The unique features of concave varied line space gratings will be exploited gradually in the near future.
This paper consists three parts:grating2D groove density measuring system, the high accuracy wavelength calibration methods for flat field spectrograph with concave varied line space gratings and the application of concave varied line space grating in a soft x-ray spectrograph which is used as a Tokamak plasma diagnostics tool.
Groove density of grating is an important parameter that affects the diffraction and imaging performance of a spectrograph or spectrometer. As a product, a grating should undergo factory test and customer acceptance test to make sure its groove distribution meets the application requirements. By the testing, the groove distribution error in grating manufacturing process can be found and corrected. For grating users, the actual parameters of grating groove density will be used for the final optical system optimization during the installation. Moreover, the accuracy of gratings' groove density will affect the wavelength calibration directly. Therefore the high-accuracy measurement of grating groove density is of great significance.
The grating groove density of concave varied line space gratings varies on the different positions on the grating surface; therefore the measurement of the groove density only on the center or just one-dimensional measurement cannot fulfill the demand. In chapter3, a2-dimension measurement setup for grating groove density is established, which achieves high-accuracy measurement of the groove density at any point of a grating. The diffraction measurement method based on the grating diffraction equation and the Littrow configuration is proposed which has the advantage of smaller measuring error. The groove densities of2gratings are tested. It is first time that the2D grating groove density distribution is measured by diffraction method. It is the first time that the curved grooves in holographic grating are observed by our measuring system. This measurement setup could be used to measuring the curvature of the grooves. The accuracy of measurement is defined as the ratio of the RMS error of grating groove density△N and the nominal groove density N. The measuring accuracy of the groove density is about3.4×10-5in our experiment.
The wavelength calibration for a spectrometer/spectrograph is an essential procedure before its use. Wavelength calibration for a flat field spectrograph is to determine the wavelength value and the pixel number of the array detector. The wavelength precision is important in the fields such as Tokamak plasma temperature diagnoses and astronomy observation. In chapter4, a wavelength calibration method is proposed which is applied to a soft X-ray flat field spectrometer (Ref to chapter5). A visible range flat field spectrometer with a concave varied line space grating is developed to study high accuracy wavelength calibration method. A parameter-fitting wavelength calibration method has been proposed. In this new method, the physical parameters (grating groove density and relationships between different optical elements such as incident angle, incident arms, et al) of the spectrometer are included in the wavelength calibration model. Compared to the common-used wavelength calibration method, like polynomial fitting, the proposed wavelength calibration method can reach higher wavelength calibration accuracy. As the calibration model uses the physical parameters of the optical system that means these parameters can be computed by the wavelength fitting process. So we can use the wavelength method to evaluate the installation, d alignment and adjust of the spectrometer system. By way, the proposed wavelength calibration method not only can be applied to concave varied line space grating based spectrograph, but also to other spectrograph adopting plane array detectors.
Chapter5presents an example of the concave varied line space grating used in soft x-ray spectrographs. The optical system design, structural design, installation and adjustment are described in details. The spectrometers are developed for the Experimental Advanced Superconducting Tokamak (EAST) for Institute of Plasma Physics of Chinese Academy of Science. It is compact in dimension, has high wavelength resolution, covering wide wavelength range and the spatial resolved ability. The impurities in plasma cause lot of radiation loss, which limits the quality of the plasma and affects the high-quality and quasi-steady-state operation of Tokamak. Spectrometer is an important tool to study the impurities transportation in the plasma. There are two spectrometers to cover the wavelength range of10A-500A and the plasma zone area of900mm is covered in space. One spectrometer for short wavelength range of10A-100A, its spectral resolution is0.06A at35A; another spectrometer covers long wavelength range of50A-500A, its spectral resolution is0.15A at200A. Test results show that both spectrometers reach the same spectral resolution among the similar instruments in the world. At present, both spectrometers have been used as a general diagnostic tool for the plasma impurities study which supports a lot to the research of EAST.
引文
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