基于一维纳米材料的气体传感器及其应用研究
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摘要
本论文主要研究了两种典型一维纳米材料——ZnO纳米棒和碳纳米管的气敏特性,并探索了碳纳米管传感器在毒品/爆炸物检测上的应用。具体研究内容如下:
(1)介绍了ZnO纳米尖端场离子化气体传感器的制作方法和气敏测试系统的结构与操作方法,对比了击穿电压与预击穿电流测试方法和动态与静态预击穿电流测试方法的优缺点,并采用动态测试预击穿电流的方法对乙酸、丙酮等蒸气进行了气敏测试,探讨了测试条件对动态测试方法的影响,此外,还研究了碳纳米管作为离子化尖端的抗氧化性能。
(2)利用碳纳米管的场离子化、极化作用和吸附特性研制了四种新型气体传感器,并对它们的气敏特性进行了系统地研究。其中,采用丝网印刷的方法在SiO_2/Si上下表面各制作一层金属电极,构成了以SiO_2为介质层的平板电容结构,再采用CVD方法电容上表面原位生长MWCNT,构成了一种以MWCNT为敏感材料的电容式气体传感器;另外,采用CVD方法在SiO_2/Si上生长SWCNT,再采用MEMS工艺在SWCNT上制作梳状电极,构成了一种基于SWCNT的电容/电导式气体传感器;还有,采用湿化学方法将SnO_2纳米颗粒修饰在MWCNT表面,制作了一种SnO_2修饰的MWCNT气体传感器;此外,采用化学气相沉积的方法在AAO模板中生长MWCNT阵列,然后将模板中的MWCNT阵列两端各粘结一块平板电极,再用HF腐蚀除掉AAO,构成了一种基于MWCNT阵列的电容式气体传感器。
(3)采用电子鼻技术将SnO_2修饰的MWCNT电导式传感器、SnO_2传感器和基于MWCNT膜的电容式传感器作为敏感单元组成传感器阵列,研究了它们对几种常见毒品和爆炸物的敏感特性,并且研制出体积小、重量轻、响应快、运行稳定的毒品/爆炸物检测仪原理样机。
In this dissertation,the sensing properties of two kinds of one-dimentional(1D) nanomaterials(ZnO nanorods and carbon nanotubes) have been investigated.The gas sensors based on carbon nanotubes have been applied to detect drugs and explosives. The main contents can be briefly described as follows:
(1) The ionization gas sensors based on ZnO nanorods have been introduced including their fabrication methods and the structure and operation method of their measurement system.The different measurement methods have been campared including breakdown voltage vs.prebreakdown current measurement and static vs. dynamic measurement of prebreakdown current.The sensing properties of the ZnO based ionization sensor to VOCs(for example,acetic acid and acetone) have been studied by the dynamic prebreakdown current measurement.It has been discussed in detail about the influence factors of the dynamic measurement.In addition,the anti-oxidation performances of carbon nanotubes as ionization tips have been indicated by experiment.
(2) Exploiting the properties of field ionization,polarization and adsorption of carbon nanotubes,four kinds of novel gas sensors have been fabricated as follows: Metal electrodes were prepared on two sides of a SiO_2/Si wafer by screen printing, which constituted a flat capacitor.MWCNTs were synthesized on the top electrode by chemical vapor deposition.So,a capacitive gas sensor based on MWCNT film brought to success,in which MWCNTs act as the sensing matrials;SWCNTs were synthesized on a SiO_2/Si wafer in advance,and then interdigited electrodes were fabricated onto the SWCNT film by MEMS process.Then,a capacitive/conductive gas sensor based on SWCNTs brought to success;SnO_2 nano-particles were modified onto the sufaces of MWCNTs by wet-chemical technique,which were used to fabricated a conductive gas sensor;Vertically aligned MWCNT arrays were synthesized by acetone pyrolysis in anodized aluminum oxide(AAO) templates.After a series of processes,two Si wafers were pasted to the MWCNTs terminals on the top and bottom surfaces of the AAO template.Then,the AAO was etched by HF acid and a capacitive gas sensor based on MWCNT arrays was accomplished.The sensing properties of those carbon nanotube based gas sensors have been systemically investigated.
(3) Three kinds of gas sensors were arrayed by e-nose technology including the conductive gas sensor based on SnO_2 nano-particles modified MWCNTs,a SnO_2 gas sensor and the capacitive gas sensor based on MWCNT film.The sensing properties of the arrays to drugs and explosives were investigated and a prototype was furtherly developed which have many advantages such as small bulk,small weight,fast response,reliable working and so on.
(1)介绍了ZnO纳米尖端场离子化气体传感器的制作方法和气敏测试系统的结构与操作方法,对比了击穿电压与预击穿电流测试方法和动态与静态预击穿电流测试方法的优缺点,并采用动态测试预击穿电流的方法对乙酸、丙酮等蒸气进行了气敏测试,探讨了测试条件对动态测试方法的影响,此外,还研究了碳纳米管作为离子化尖端的抗氧化性能。
(2)利用碳纳米管的场离子化、极化作用和吸附特性研制了四种新型气体传感器,并对它们的气敏特性进行了系统地研究。其中,采用丝网印刷的方法在SiO_2/Si上下表面各制作一层金属电极,构成了以SiO_2为介质层的平板电容结构,再采用CVD方法电容上表面原位生长MWCNT,构成了一种以MWCNT为敏感材料的电容式气体传感器;另外,采用CVD方法在SiO_2/Si上生长SWCNT,再采用MEMS工艺在SWCNT上制作梳状电极,构成了一种基于SWCNT的电容/电导式气体传感器;还有,采用湿化学方法将SnO_2纳米颗粒修饰在MWCNT表面,制作了一种SnO_2修饰的MWCNT气体传感器;此外,采用化学气相沉积的方法在AAO模板中生长MWCNT阵列,然后将模板中的MWCNT阵列两端各粘结一块平板电极,再用HF腐蚀除掉AAO,构成了一种基于MWCNT阵列的电容式气体传感器。
(3)采用电子鼻技术将SnO_2修饰的MWCNT电导式传感器、SnO_2传感器和基于MWCNT膜的电容式传感器作为敏感单元组成传感器阵列,研究了它们对几种常见毒品和爆炸物的敏感特性,并且研制出体积小、重量轻、响应快、运行稳定的毒品/爆炸物检测仪原理样机。
In this dissertation,the sensing properties of two kinds of one-dimentional(1D) nanomaterials(ZnO nanorods and carbon nanotubes) have been investigated.The gas sensors based on carbon nanotubes have been applied to detect drugs and explosives. The main contents can be briefly described as follows:
(1) The ionization gas sensors based on ZnO nanorods have been introduced including their fabrication methods and the structure and operation method of their measurement system.The different measurement methods have been campared including breakdown voltage vs.prebreakdown current measurement and static vs. dynamic measurement of prebreakdown current.The sensing properties of the ZnO based ionization sensor to VOCs(for example,acetic acid and acetone) have been studied by the dynamic prebreakdown current measurement.It has been discussed in detail about the influence factors of the dynamic measurement.In addition,the anti-oxidation performances of carbon nanotubes as ionization tips have been indicated by experiment.
(2) Exploiting the properties of field ionization,polarization and adsorption of carbon nanotubes,four kinds of novel gas sensors have been fabricated as follows: Metal electrodes were prepared on two sides of a SiO_2/Si wafer by screen printing, which constituted a flat capacitor.MWCNTs were synthesized on the top electrode by chemical vapor deposition.So,a capacitive gas sensor based on MWCNT film brought to success,in which MWCNTs act as the sensing matrials;SWCNTs were synthesized on a SiO_2/Si wafer in advance,and then interdigited electrodes were fabricated onto the SWCNT film by MEMS process.Then,a capacitive/conductive gas sensor based on SWCNTs brought to success;SnO_2 nano-particles were modified onto the sufaces of MWCNTs by wet-chemical technique,which were used to fabricated a conductive gas sensor;Vertically aligned MWCNT arrays were synthesized by acetone pyrolysis in anodized aluminum oxide(AAO) templates.After a series of processes,two Si wafers were pasted to the MWCNTs terminals on the top and bottom surfaces of the AAO template.Then,the AAO was etched by HF acid and a capacitive gas sensor based on MWCNT arrays was accomplished.The sensing properties of those carbon nanotube based gas sensors have been systemically investigated.
(3) Three kinds of gas sensors were arrayed by e-nose technology including the conductive gas sensor based on SnO_2 nano-particles modified MWCNTs,a SnO_2 gas sensor and the capacitive gas sensor based on MWCNT film.The sensing properties of the arrays to drugs and explosives were investigated and a prototype was furtherly developed which have many advantages such as small bulk,small weight,fast response,reliable working and so on.
引文
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