Preparation of highly (100)-oriented PLCT thin films on Pt/Ti/SiO₂/Si substrates by a simple sol–gel process

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• 作者：Fu ; Xiaorong ; Li ; Jinhua ; Song ; Zhitang ; Zhu ; Xiangrong ; Lin ; Chenglu
• 关键词：Lead titanate ; Ferroelectricity ; Pyroelectric ; Sol&ndash ; gel
• 刊名：Materials Letters
• 出版年：2000
• 出版时间：June, 2000
• 年：2000
• 卷：44
• 期：2
• 页码：70-74
• 全文大小：249 K

文摘

Highly (100)-oriented lanthanum- and calcium-modified PbTiO₃ (PLCT68/17/15 and PLCT80/10/10) ferroelectric thin films were successfully prepared on Pt/Ti/SiO₂/Si substrates by a simple sol–gel spin-on process. The effects of thin film composition, film thickness and annealing temperature on the (100) orientation were reported. Highly (100)-oriented PLCT80/10/10 and PLCT68/17/15 thin films with pure perovskite could be obtained with around 0.3 and 0.45 μm thicknesses, respectively, when annealed at 600°C for 1 h. The films' crystallization and orientation were studied using the techniques of X-ray diffraction (XRD) and atomic force microscopy (AFM).