Liquid-Phase Chemical and Biochemical Detection Using Fully Integrated Magnetically Actuated Complementary Metal Oxide Semiconductor Resonant Cantilever Sensor Systems

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• 作者：Cyril Van//pubs.acs.org/images/entities/ccaron.gif" border="0">ura ; Yue Li ; Jan Lichtenberg ; Kay-Uwe Kirstein ; Andreas Hierlemann ; Fabien Josse
• 刊名：Analytical Chemistry
• 出版年：2007
• 出版时间：February 15, 2007
• 年：2007
• 卷：79
• 期：4
• 页码：1646 - 1654
• 全文大小：389K
• 年卷期：v.79,no.4(February 15, 2007)
• ISSN：1520-6882

文摘

A novel resonant cantilever sensor system for liquid-phaseapplications is presented. The monolithic system consistsof an array of four electromagnetically actuated cantileverswith transistor-based readout, an analog feedback circuit,and a digital interface. The biochemical sensor chip witha size of 3 mm × 4.5 mm is fabricated in an industrialcomplementary metal oxide semiconductor (CMOS) process with subsequent CMOS-compatible micromachining.A package, which protects the electrical components andthe associated circuitry against liquid exposure, allows fora stable operation of the resonant cantilevers in liquidenvironments. The device is operated at the fundamentalcantilever resonance frequency of ~200 kHz in water witha frequency stability better than 3 Hz. The use of theintegrated CMOS resonant cantilever system as a chemicalsensor for the detection of volatile organic compounds inliquid environments is demonstrated. Low concentrationsof toluene, xylenes, and ethylbenzene in deionized waterhave been detected by coating the cantilevers with chemically sensitive polymers. The liquid-phase detection ofanalyte concentrations in the single-ppm range has beenachieved. Furthermore, the application of this sensorsystem to the label-free detection of biomarkers, such astumor markers, is shown. By functionalizing the cantilevers with anti-prostate-specific antigen antibody (anti-PSA), the corresponding antigen (PSA) has been detectedat concentration levels as low as 10 ng/mL in a samplefluid.