Automatic control of WEDM servo for silicon processing using current pulse probability detection

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• 作者：Liu Zhidong (1)
  Chen Haoran (1)
  Pan Huijun (1)
  Qiu Mingbo (1)
  Tian Zongjun (1)
  
  1. Nanjing University of Aeronautics and Astronautics ; Nanjing ; 210016 ; China
  
• 关键词：Semiconductor ; WEDM ; Current pulse probability ; Servo method
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2015
• 出版时间：January 2015
• 年：2015
• 卷：76
• 期：1-4
• 页码：367-374
• 全文大小：2,405 KB
• 参考文献：1. Shobert EI (1983) What happens in EDM. In: Jameson EC (ed) Electrical discharge machining: tooling, methods and applications. SME, Dearbern, pp 3鈥?
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  3. Boothroyd G, Winston AK (1989) Non-conventional machining processes. Fundamentals of machining. Marcel Dekker, New York, p 491
  4. McGeough JA (1988) Electro discharge machining. Advanced methods of machining. Chapman & Hall, London, p 130
  5. Liu ZD, Wang W, Qiu MB, Tian ZJ, Huang YH (2008) Experimental research of WEDM-HS on monocrystal silicon cutting. J Nanjing Univ Aeronaut Astronaut 6:007
  6. Liu ZD (2012) Non-traditional machining. China Beijing University Press
  7. Wang J, Han F, Zhao F (2012) Improvement of EDM efficiency with a new adaptive control strategy. Int J Adv Manuf Technol 62(9鈥?2):1025鈥?040 CrossRef
  8. Yan MT, Fang GR, Liu YT (2013) An experimental study on micro wire-EDM of polycrystalline diamond using a novel pulse generator. Int J Adv Manuf Technol 66(9鈥?2):1633鈥?640 CrossRef
  9. Katz Z, Tibbles C (2005) Analysis of micro-scale EDM process. Int J Adv Manuf Technol 25(9鈥?0):923鈥?28 CrossRef
  10. Yang MY, Park JH (2002) A study on an open architecture CNC system with a NURBS interpolator for WEDM. Int J Adv Manuf Technol 19(9):664鈥?68 CrossRef
  11. Yan MT (2010) An adaptive control system with self-organizing fuzzy sliding mode control strategy for micro wire-EDM machines. Int J Adv Manuf Technol 50(1鈥?):315鈥?28 CrossRef
  12. Zhang L, Jia Z, Liu W, Li A (2012) A two-stage servo feed controller of micro-EDM based on interval type-2 fuzzy logic. Int J Adv Manuf Technol 59(5鈥?):633鈥?45 CrossRef
  13. Liu JC (2008) Non-traditional machining. China Machine Press
  14. Wei GQ (2012) Research on the discharge characteristics of WEDM for semiconductor crystal and the bent wire electrode control. Nanjing University of Aeronautics and Astronautics
  15. Qiu MB (2009) Research on electrical discharged machining of semiconductor crystal materials. Nanjing University of Aeronautics and Astronautics
  16. Wei GQ, Liu ZD, Qiu MB, Tian ZJ (2012) Research on control of the bent wire electrode in the WEDM of semiconductor. Electromachining and Mould 2:005
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Production and Logistics
  Mechanical Engineering
  Computer-Aided Engineering and Design
  
• 出版者：Springer London
• ISSN：1433-3015

文摘

This paper analyzes the limitations of wire cut electrical discharge machining (WEDM) servo system in processing semiconductors, specifically its failure to distinguish an open circuit, normal discharge from a short-circuit state. This paper proposes a new servo system based on current pulse probability detection. Given the basic linear relationship between feed speed and current pulse probability, an appropriate control of current pulse probability can guarantee a suitable servo feed speed in machining semiconductors by WEDM. Contrast experiments are performed to verify the feasibility of this system.